DE102012021222B4 - Verfahren zur Herstellung einer nanoporösen Schicht auf einem Substrat - Google Patents

Verfahren zur Herstellung einer nanoporösen Schicht auf einem Substrat Download PDF

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Publication number
DE102012021222B4
DE102012021222B4 DE102012021222.4A DE102012021222A DE102012021222B4 DE 102012021222 B4 DE102012021222 B4 DE 102012021222B4 DE 102012021222 A DE102012021222 A DE 102012021222A DE 102012021222 B4 DE102012021222 B4 DE 102012021222B4
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Germany
Prior art keywords
particles
nanoporous layer
melting point
substrate
nanoporous
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DE102012021222.4A
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German (de)
English (en)
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DE102012021222A1 (de
Inventor
Bernhard Wolfrum
Alexey Yakushenko
Andreas Offenhäusser
Dirk Mayer
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Forschungszentrum Juelich GmbH
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Forschungszentrum Juelich GmbH
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Priority to DE102012021222.4A priority Critical patent/DE102012021222B4/de
Priority to ES13789155.2T priority patent/ES2670939T3/es
Priority to US14/436,301 priority patent/US9638693B2/en
Priority to PCT/DE2013/000567 priority patent/WO2014063670A2/de
Priority to JP2015538291A priority patent/JP2016505391A/ja
Priority to EP13789155.2A priority patent/EP2911652B1/de
Publication of DE102012021222A1 publication Critical patent/DE102012021222A1/de
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/007—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/002—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of porous nature
    • B22F7/004—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of porous nature comprising at least one non-porous part
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/10—Coating starting from inorganic powder by application of heat or pressure and heat with intermediate formation of a liquid phase in the layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/5436—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals with ligand physically entrapped within the solid phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/054—Nanosized particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Immunology (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Biomedical Technology (AREA)
  • Hematology (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Microbiology (AREA)
  • General Health & Medical Sciences (AREA)
  • Cell Biology (AREA)
  • Biotechnology (AREA)
  • Pathology (AREA)
  • Plasma & Fusion (AREA)
  • Powder Metallurgy (AREA)
  • Medicinal Preparation (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Physical Vapour Deposition (AREA)
DE102012021222.4A 2012-10-27 2012-10-27 Verfahren zur Herstellung einer nanoporösen Schicht auf einem Substrat Withdrawn - After Issue DE102012021222B4 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102012021222.4A DE102012021222B4 (de) 2012-10-27 2012-10-27 Verfahren zur Herstellung einer nanoporösen Schicht auf einem Substrat
ES13789155.2T ES2670939T3 (es) 2012-10-27 2013-10-04 Procedimiento para la producción de una capa nanoporosa sobre un sustrato
US14/436,301 US9638693B2 (en) 2012-10-27 2013-10-04 Method for producing a nanoporous layer on a substrate
PCT/DE2013/000567 WO2014063670A2 (de) 2012-10-27 2013-10-04 Verfahren zur herstellung einer nanoporösen schicht auf einem substrat
JP2015538291A JP2016505391A (ja) 2012-10-27 2013-10-04 基板上にナノ多孔性層を製造する方法
EP13789155.2A EP2911652B1 (de) 2012-10-27 2013-10-04 Verfahren zur herstellung einer nanoporösen schicht auf einem substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012021222.4A DE102012021222B4 (de) 2012-10-27 2012-10-27 Verfahren zur Herstellung einer nanoporösen Schicht auf einem Substrat

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DE102012021222A1 DE102012021222A1 (de) 2014-04-30
DE102012021222B4 true DE102012021222B4 (de) 2015-02-05

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Country Link
US (1) US9638693B2 (enExample)
EP (1) EP2911652B1 (enExample)
JP (1) JP2016505391A (enExample)
DE (1) DE102012021222B4 (enExample)
ES (1) ES2670939T3 (enExample)
WO (1) WO2014063670A2 (enExample)

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DE102017219435A1 (de) * 2017-10-30 2019-05-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Beschichtung einer metallischen Oberfläche mit einem metallischen Material
US10557051B2 (en) 2016-03-09 2020-02-11 Forschungszentrum Juelich Gmbh Method for producing an ink, ink, and use of same
US10694872B2 (en) 2018-09-19 2020-06-30 Sensormatic Electronics, LLC Point of sale artificial intelligence quality determination system

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US9881895B2 (en) * 2015-08-18 2018-01-30 Lockheed Martin Corporation Wire bonding methods and systems incorporating metal nanoparticles
DE102015012446A1 (de) 2015-09-28 2017-03-30 Forschungszentrum Jülich GmbH Verfahren zur Herstellung einer Anordnung aus elektrisch leitfähiger Schicht auf einem Substrat aus einer Suspension, sowie Anordnung aus elektrisch leitfähiger Schicht auf einem Substrat und deren Verwendung
JP6994295B2 (ja) * 2015-12-17 2022-01-14 セイコーエプソン株式会社 三次元造形物の製造方法および三次元造形物製造装置
KR101977457B1 (ko) * 2017-02-28 2019-05-10 고려대학교 산학협력단 나노포어 형성방법
US10330628B2 (en) 2017-11-21 2019-06-25 Uxn Co., Ltd. Glucose-sensing electrode and device with nanoporous layer
CN108060436B (zh) * 2017-12-07 2019-08-23 天津大学 一种以低熔点金属作为连接剂制备纳米线阵列的方法
KR102190711B1 (ko) * 2018-12-26 2020-12-15 (주)광림정공 복수의 나노구조 형성용 소스를 이용하는 나노포러스 구조 표면증강 라만 분광기판의 구조 및 상기 분광기판의 제조방법

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10557051B2 (en) 2016-03-09 2020-02-11 Forschungszentrum Juelich Gmbh Method for producing an ink, ink, and use of same
DE102017219435A1 (de) * 2017-10-30 2019-05-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Beschichtung einer metallischen Oberfläche mit einem metallischen Material
US10694872B2 (en) 2018-09-19 2020-06-30 Sensormatic Electronics, LLC Point of sale artificial intelligence quality determination system

Also Published As

Publication number Publication date
JP2016505391A (ja) 2016-02-25
EP2911652A2 (de) 2015-09-02
US9638693B2 (en) 2017-05-02
WO2014063670A3 (de) 2014-11-06
ES2670939T3 (es) 2018-06-04
EP2911652B1 (de) 2018-03-21
DE102012021222A1 (de) 2014-04-30
US20150241418A1 (en) 2015-08-27
WO2014063670A2 (de) 2014-05-01

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