DE102011082708A1 - Beschleunigungssensor - Google Patents

Beschleunigungssensor Download PDF

Info

Publication number
DE102011082708A1
DE102011082708A1 DE102011082708A DE102011082708A DE102011082708A1 DE 102011082708 A1 DE102011082708 A1 DE 102011082708A1 DE 102011082708 A DE102011082708 A DE 102011082708A DE 102011082708 A DE102011082708 A DE 102011082708A DE 102011082708 A1 DE102011082708 A1 DE 102011082708A1
Authority
DE
Germany
Prior art keywords
mass body
acceleration sensor
acceleration
mass
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102011082708A
Other languages
German (de)
English (en)
Inventor
Yasuo Yamaguchi
Mika Okumura
Takeshi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE102011082708A1 publication Critical patent/DE102011082708A1/de
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0851—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a plurality of spring-mass systems, each system having a different range of sensitivity to acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0874—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using means for preventing stiction of the seismic mass to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
DE102011082708A 2010-12-27 2011-09-14 Beschleunigungssensor Withdrawn DE102011082708A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-289508 2010-12-27
JP2010289508A JP2012137368A (ja) 2010-12-27 2010-12-27 加速度センサ

Publications (1)

Publication Number Publication Date
DE102011082708A1 true DE102011082708A1 (de) 2012-06-28

Family

ID=46315111

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102011082708A Withdrawn DE102011082708A1 (de) 2010-12-27 2011-09-14 Beschleunigungssensor

Country Status (6)

Country Link
US (1) US20120160029A1 (https=)
JP (1) JP2012137368A (https=)
KR (1) KR20120074209A (https=)
CN (1) CN102539829A (https=)
DE (1) DE102011082708A1 (https=)
TW (1) TW201234012A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2720021A3 (de) * 2012-10-10 2017-08-30 GTM Testing and Metrology GmbH Kraftmesseinrichtung
DE102022200338A1 (de) 2022-01-13 2023-07-13 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Sensoreinrichtung

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI461692B (zh) * 2011-12-01 2014-11-21 Nat Univ Tsing Hua 具有應力隔絕結構之慣性感測器
US10663357B2 (en) * 2014-12-10 2020-05-26 Paul D OKULOV Micro electro-mechanical strain displacement sensor and usage monitoring system
CN104502193B (zh) * 2014-12-12 2017-01-25 东南大学 一种基于纵向梳齿式电容的微梁断裂强度的测试结构
JP6657626B2 (ja) * 2015-07-10 2020-03-04 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
CN105891545A (zh) * 2016-06-13 2016-08-24 中国工程物理研究院电子工程研究所 一种高精度低g值SOI微加速度计
JP6922552B2 (ja) * 2017-08-25 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器、携帯型電子機器および移動体
CN109459068A (zh) * 2018-10-09 2019-03-12 佛山市卓膜科技有限公司 一种高精度压电传感器
IT201900024475A1 (it) * 2019-12-18 2021-06-18 St Microelectronics Srl Dispositivo micromeccanico con gruppo elastico a costante elastica variabile
US11768220B2 (en) * 2021-09-09 2023-09-26 Nxp Usa, Inc. Accelerometer having an over travel stop with a stop gap less than a minimum etch size
IT202200003506A1 (it) 2022-02-24 2023-08-24 St Microelectronics Srl Dispositivo micromeccanico per la misura migliorata di accelerazioni

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008190892A (ja) 2007-02-01 2008-08-21 Hitachi Metals Ltd 加速度センサおよびそれを用いた電子機器
JP2009014598A (ja) 2007-07-06 2009-01-22 Mitsubishi Electric Corp 静電容量式加速度センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4410478B2 (ja) * 2003-03-20 2010-02-03 株式会社デンソー 半導体力学量センサ
JP2004286615A (ja) * 2003-03-24 2004-10-14 Denso Corp 半導体加速度センサ
FR2862761B1 (fr) * 2003-11-25 2006-02-03 Thales Sa Accelerometre differentiel micro-usine multiaxes
JP2008008820A (ja) * 2006-06-30 2008-01-17 Hitachi Ltd 慣性センサおよびその製造方法
JP2010203859A (ja) * 2009-03-02 2010-09-16 Toyota Motor Corp 力学量検出センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008190892A (ja) 2007-02-01 2008-08-21 Hitachi Metals Ltd 加速度センサおよびそれを用いた電子機器
JP2009014598A (ja) 2007-07-06 2009-01-22 Mitsubishi Electric Corp 静電容量式加速度センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2720021A3 (de) * 2012-10-10 2017-08-30 GTM Testing and Metrology GmbH Kraftmesseinrichtung
DE102022200338A1 (de) 2022-01-13 2023-07-13 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Sensoreinrichtung

Also Published As

Publication number Publication date
KR20120074209A (ko) 2012-07-05
TW201234012A (en) 2012-08-16
CN102539829A (zh) 2012-07-04
US20120160029A1 (en) 2012-06-28
JP2012137368A (ja) 2012-07-19

Similar Documents

Publication Publication Date Title
DE102011082708A1 (de) Beschleunigungssensor
DE102008040855B4 (de) Dreiachsiger Beschleunigungssensor
DE4000903C1 (https=)
DE69306687T2 (de) Seitwärts empfindlicher Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
EP2389561B1 (de) Drehratensensor
DE102018009247B4 (de) Sechsachsiger Kraftsensor mit Wegerfassung
DE102008041327A1 (de) Dreiachsiger Beschleunigungssensor
DE3625411A1 (de) Kapazitiver beschleunigungssensor
DE10311076A1 (de) Kapazitive Vorrichtung
DE112013002514T5 (de) Sensorvorrichtung
DE102008002606A1 (de) Mikromechanischer Beschleunigungssensor mit offener seismischer Masse
DE102004042761B4 (de) Sensoranordnung eines Kapazitätstyps für eine dynamische Grösse
CH700569B1 (de) Kapazitiver Wegaufnehmer.
DE102016107059A1 (de) Integriertes Halbleiterbauelement und Herstellungsverfahren
DE102008054553B4 (de) Beschleunigungssensor
WO2004019048A1 (de) Mikromechanisches bauelement
EP2425208B1 (de) Messelement
DE102010012701B4 (de) Mikrokraftsensor
WO2017194376A1 (de) Mikromechanischer sensor und verfahren zum herstellen eines mikromechanischen sensors
DE4226430C2 (de) Kapazitiver Beschleunigungssensor
DE102007046017A1 (de) Sensorelement
DE102010063471B4 (de) Mikroelektromechanisches Element
WO2000026608A2 (de) Verformungsmesser
DE3605315A1 (de) Kraftmesszelle mit kapazitiver wegmessung
DE19832905C2 (de) Kapazitiver Beschleunigungssensor

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20150401