DE102009037133B4 - Haltevorrichtung für ein optisches Element - Google Patents

Haltevorrichtung für ein optisches Element Download PDF

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Publication number
DE102009037133B4
DE102009037133B4 DE102009037133A DE102009037133A DE102009037133B4 DE 102009037133 B4 DE102009037133 B4 DE 102009037133B4 DE 102009037133 A DE102009037133 A DE 102009037133A DE 102009037133 A DE102009037133 A DE 102009037133A DE 102009037133 B4 DE102009037133 B4 DE 102009037133B4
Authority
DE
Germany
Prior art keywords
parallel
axis
holding device
optical element
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
DE102009037133A
Other languages
German (de)
English (en)
Other versions
DE102009037133A1 (de
Inventor
Ulrich Weber
Hubert Holderer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss Laser Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss Laser Optics GmbH filed Critical Carl Zeiss SMT GmbH
Priority to DE102009037133A priority Critical patent/DE102009037133B4/de
Priority to JP2012522009A priority patent/JP5710613B2/ja
Priority to KR1020127005286A priority patent/KR20120052364A/ko
Priority to CN201080044073.0A priority patent/CN102549468B/zh
Priority to PCT/EP2010/004514 priority patent/WO2011012263A1/en
Publication of DE102009037133A1 publication Critical patent/DE102009037133A1/de
Priority to US13/359,368 priority patent/US8456771B2/en
Application granted granted Critical
Publication of DE102009037133B4 publication Critical patent/DE102009037133B4/de
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/035—Aligning the laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
DE102009037133A 2009-07-31 2009-07-31 Haltevorrichtung für ein optisches Element Withdrawn - After Issue DE102009037133B4 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102009037133A DE102009037133B4 (de) 2009-07-31 2009-07-31 Haltevorrichtung für ein optisches Element
JP2012522009A JP5710613B2 (ja) 2009-07-31 2010-07-23 光学要素のための保持装置
KR1020127005286A KR20120052364A (ko) 2009-07-31 2010-07-23 광학 소자용 홀딩 장치
CN201080044073.0A CN102549468B (zh) 2009-07-31 2010-07-23 光学元件的保持布置
PCT/EP2010/004514 WO2011012263A1 (en) 2009-07-31 2010-07-23 Holding arrangement for an optical element
US13/359,368 US8456771B2 (en) 2009-07-31 2012-01-26 Holding arrangement for an optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009037133A DE102009037133B4 (de) 2009-07-31 2009-07-31 Haltevorrichtung für ein optisches Element

Publications (2)

Publication Number Publication Date
DE102009037133A1 DE102009037133A1 (de) 2011-02-03
DE102009037133B4 true DE102009037133B4 (de) 2013-01-31

Family

ID=42668816

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009037133A Withdrawn - After Issue DE102009037133B4 (de) 2009-07-31 2009-07-31 Haltevorrichtung für ein optisches Element

Country Status (6)

Country Link
US (1) US8456771B2 (https=)
JP (1) JP5710613B2 (https=)
KR (1) KR20120052364A (https=)
CN (1) CN102549468B (https=)
DE (1) DE102009037133B4 (https=)
WO (1) WO2011012263A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012100784A1 (de) * 2012-01-31 2013-08-01 Jenoptik Optical Systems Gmbh Entkoppelt justierbare Fassungsbaugruppe für zwei optische Bauteile
US9108656B1 (en) * 2013-09-12 2015-08-18 Dragonfly Gear, LLC Collapsible wagon
US10077062B2 (en) 2014-07-29 2018-09-18 Veer Gear, Llc Wagon with adapter for installing child seat
US10081380B2 (en) 2015-07-16 2018-09-25 Radio Flyer Inc. Foldable wagon
CN120863722A (zh) 2016-03-08 2025-10-31 维尔用品有限公司 带有可收缩脚坑和位置锁定手柄的货车
US10678018B2 (en) * 2017-10-23 2020-06-09 Magna Electronics Inc. Camera for vehicle vision system with replaceable lens
DE102018106013B3 (de) 2018-03-15 2018-09-20 Jenoptik Optical Systems Gmbh Linsenfassung mit Manipulatormodul
DE102018131889B4 (de) * 2018-09-27 2021-08-12 Scansonic Mi Gmbh Laserstrahljustiervorrichtung
US12552438B2 (en) 2019-03-08 2026-02-17 Veer Gear Llc Seat assembly and systems
CN112389567B (zh) 2019-08-15 2023-05-02 雷德福来尔有限公司 可折叠沙滩拖车
CN121224815A (zh) 2019-08-30 2025-12-30 雷德福来尔有限公司 推拉式推车
WO2021072157A1 (en) 2019-10-09 2021-04-15 Radio Flyer Inc. Wagon with recline seatback
WO2021081182A1 (en) 2019-10-23 2021-04-29 Radio Flyer Inc. Handle release and locking mechanism
CN119289209A (zh) * 2024-11-28 2025-01-10 哈尔滨工业大学 一种用于传热管检修的爬行机器人

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220460A (en) * 1991-09-24 1993-06-15 Eastman Kodak Company Adjustable mount for cylindrical lens with torque applied directly to lens
DE20012046U1 (de) * 2000-07-12 2000-09-14 Fa. Carl Zeiss, 89518 Heidenheim Vorrichtung zum Justieren einer Fläche eines Justierteiles
WO2006066706A2 (en) * 2004-12-22 2006-06-29 Carl Zeiss Laser Optics Gmbh Optical illumination system for creating a line beam
WO2006119970A2 (en) * 2005-05-09 2006-11-16 Carl Zeiss Smt Ag Assembly for adjusting an optical element
WO2007017013A2 (de) * 2005-07-01 2007-02-15 Carl Zeiss Smt Ag Anordnung zur lagerung eines optischen bauelements

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3291431A (en) * 1965-07-02 1966-12-13 Jr James A Daniel Straight line carrier device
ATE47218T1 (de) * 1985-05-13 1989-10-15 Contraves Ag Tragvorrichtung fuer ein optisches beobachtungsgeraet.
US20030051331A1 (en) * 1999-06-21 2003-03-20 The 14Th And Constitution, National Institute Of Standards And Technology Positioning stage actuation
CN100576003C (zh) * 2003-06-06 2009-12-30 株式会社尼康 光学元件保持装置、镜筒、曝光装置及设备的制造方法
US7697222B2 (en) * 2003-12-25 2010-04-13 Nikon Corporation Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
CN1249478C (zh) * 2004-02-16 2006-04-05 中国科学院上海光学精密机械研究所 大口径标准平板精密调整架
EP1577693B1 (de) * 2004-02-26 2011-07-13 Carl Zeiss SMT GmbH Objektiv mit wenigstens einem optischen Element
JP4532545B2 (ja) * 2004-06-29 2010-08-25 カール・ツァイス・エスエムティー・アーゲー 光学素子のための位置決めユニット及び調節デバイス
JP4467598B2 (ja) * 2007-04-12 2010-05-26 三菱電機株式会社 投写型画像表示装置
FR2925963B1 (fr) * 2008-01-02 2010-08-13 Briot Int Appareil de palpage d'une monture de verres optiques et procede associe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220460A (en) * 1991-09-24 1993-06-15 Eastman Kodak Company Adjustable mount for cylindrical lens with torque applied directly to lens
DE20012046U1 (de) * 2000-07-12 2000-09-14 Fa. Carl Zeiss, 89518 Heidenheim Vorrichtung zum Justieren einer Fläche eines Justierteiles
WO2006066706A2 (en) * 2004-12-22 2006-06-29 Carl Zeiss Laser Optics Gmbh Optical illumination system for creating a line beam
WO2006119970A2 (en) * 2005-05-09 2006-11-16 Carl Zeiss Smt Ag Assembly for adjusting an optical element
WO2007017013A2 (de) * 2005-07-01 2007-02-15 Carl Zeiss Smt Ag Anordnung zur lagerung eines optischen bauelements

Also Published As

Publication number Publication date
US20120140341A1 (en) 2012-06-07
DE102009037133A1 (de) 2011-02-03
CN102549468B (zh) 2014-06-11
JP2013501249A (ja) 2013-01-10
JP5710613B2 (ja) 2015-04-30
KR20120052364A (ko) 2012-05-23
WO2011012263A1 (en) 2011-02-03
CN102549468A (zh) 2012-07-04
US8456771B2 (en) 2013-06-04

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: CARL ZEISS LASER OPTICS GMBH, 73447 OBERKOCHEN, DE

Owner name: CARL ZEISS SMT GMBH, 73447 OBERKOCHEN, DE

R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final

Effective date: 20130501

R081 Change of applicant/patentee

Owner name: CARL ZEISS SMT GMBH, DE

Free format text: FORMER OWNERS: CARL ZEISS LASER OPTICS GMBH, 73447 OBERKOCHEN, DE; CARL ZEISS SMT GMBH, 73447 OBERKOCHEN, DE

R082 Change of representative

Representative=s name: PATENTANWAELTE RUFF, WILHELM, BEIER, DAUSTER &, DE

R120 Application withdrawn or ip right abandoned