DE102009002320B4 - Verfahren zur Reduzierung des elektrischen Kontaktwiderstands einer Oberfläche eines metallischen Körpers und Vorrichtung zur Durchführung des Verfahrens - Google Patents

Verfahren zur Reduzierung des elektrischen Kontaktwiderstands einer Oberfläche eines metallischen Körpers und Vorrichtung zur Durchführung des Verfahrens Download PDF

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Publication number
DE102009002320B4
DE102009002320B4 DE102009002320A DE102009002320A DE102009002320B4 DE 102009002320 B4 DE102009002320 B4 DE 102009002320B4 DE 102009002320 A DE102009002320 A DE 102009002320A DE 102009002320 A DE102009002320 A DE 102009002320A DE 102009002320 B4 DE102009002320 B4 DE 102009002320B4
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Germany
Prior art keywords
plasma
particles
gas
generated
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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DE102009002320A
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German (de)
English (en)
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DE102009002320A1 (de
Inventor
Dennis Hoffmeister
Nils Mainusch
Prof. Dr. Viöl Wolfgang
Florian Voigts
Wolfgang Maus-Friedrichs
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HOCHSCHULE fur ANGEWANDTE WISSENSCHAFT und KUNST FACHHOCHSCHULE HILDESHEIM HOLZMINDEN GOETTINGEN
Hochschule fur Angewandte Wissenschaft und Kunst Fachhochschule Hildesheim/holzminden/gottingen
Technische Universitaet Clausthal
Original Assignee
HOCHSCHULE fur ANGEWANDTE WISSENSCHAFT und KUNST FACHHOCHSCHULE HILDESHEIM HOLZMINDEN GOETTINGEN
Hochschule fur Angewandte Wissenschaft und Kunst Fachhochschule Hildesheim/holzminden/gottingen
Technische Universitaet Clausthal
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Application filed by HOCHSCHULE fur ANGEWANDTE WISSENSCHAFT und KUNST FACHHOCHSCHULE HILDESHEIM HOLZMINDEN GOETTINGEN, Hochschule fur Angewandte Wissenschaft und Kunst Fachhochschule Hildesheim/holzminden/gottingen, Technische Universitaet Clausthal filed Critical HOCHSCHULE fur ANGEWANDTE WISSENSCHAFT und KUNST FACHHOCHSCHULE HILDESHEIM HOLZMINDEN GOETTINGEN
Priority to DE102009002320A priority Critical patent/DE102009002320B4/de
Priority to KR1020117026715A priority patent/KR20120016090A/ko
Priority to CN201080025424.3A priority patent/CN102460788B/zh
Priority to PCT/EP2010/054292 priority patent/WO2010115799A1/de
Publication of DE102009002320A1 publication Critical patent/DE102009002320A1/de
Application granted granted Critical
Publication of DE102009002320B4 publication Critical patent/DE102009002320B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H01M4/661—Metal or alloys, e.g. alloy coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004—Details
    • H01G9/04—Electrodes or formation of dielectric layers thereon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0404—Methods of deposition of the material by coating on electrode collectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/133—Electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134—Electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/66—Selection of materials
    • H01M4/663—Selection of materials containing carbon or carbonaceous materials as conductive part, e.g. graphite, carbon fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
DE102009002320A 2009-04-09 2009-04-09 Verfahren zur Reduzierung des elektrischen Kontaktwiderstands einer Oberfläche eines metallischen Körpers und Vorrichtung zur Durchführung des Verfahrens Expired - Fee Related DE102009002320B4 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102009002320A DE102009002320B4 (de) 2009-04-09 2009-04-09 Verfahren zur Reduzierung des elektrischen Kontaktwiderstands einer Oberfläche eines metallischen Körpers und Vorrichtung zur Durchführung des Verfahrens
KR1020117026715A KR20120016090A (ko) 2009-04-09 2010-03-31 금속 몸체의 표면의 전기적 접촉 저항 감소 방법
CN201080025424.3A CN102460788B (zh) 2009-04-09 2010-03-31 金属体表面的接触电阻的降低
PCT/EP2010/054292 WO2010115799A1 (de) 2009-04-09 2010-03-31 Reduzierung des elektrischen kontaktwiderstands einer oberfläche eines metallischen körpers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009002320A DE102009002320B4 (de) 2009-04-09 2009-04-09 Verfahren zur Reduzierung des elektrischen Kontaktwiderstands einer Oberfläche eines metallischen Körpers und Vorrichtung zur Durchführung des Verfahrens

Publications (2)

Publication Number Publication Date
DE102009002320A1 DE102009002320A1 (de) 2010-10-14
DE102009002320B4 true DE102009002320B4 (de) 2013-11-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009002320A Expired - Fee Related DE102009002320B4 (de) 2009-04-09 2009-04-09 Verfahren zur Reduzierung des elektrischen Kontaktwiderstands einer Oberfläche eines metallischen Körpers und Vorrichtung zur Durchführung des Verfahrens

Country Status (4)

Country Link
KR (1) KR20120016090A (zh)
CN (1) CN102460788B (zh)
DE (1) DE102009002320B4 (zh)
WO (1) WO2010115799A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104165922B (zh) * 2013-05-17 2016-09-28 无锡华润上华半导体有限公司 硅片表面金属元素的测量方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994012680A1 (en) * 1992-11-25 1994-06-09 Gehan Anil Joseph Amaratunga Doping of highly tetrahedral diamond-like amorphous carbon
US5786068A (en) * 1991-05-03 1998-07-28 Advanced Refractory Technologies, Inc. Electrically tunable coatings
DE60015725T2 (de) * 1999-01-15 2005-11-03 Imperial College Of Science, Technology & Medicine Erzeugung von Werkstoffen

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4640744A (en) * 1984-01-23 1987-02-03 Standard Oil Company (Indiana) Amorphous carbon electrodes and their use in electrochemical cells
JPH03274269A (ja) * 1990-03-22 1991-12-05 Matsushita Electric Ind Co Ltd ダイヤモンド状薄膜の合成方法及びダイヤモンド状薄膜
US5478676A (en) 1994-08-02 1995-12-26 Rexam Graphics Current collector having a conductive primer layer
US5588971A (en) 1994-10-19 1996-12-31 Arthur D. Little, Inc. Current collector device and method of manufacturing same
US6787266B1 (en) 1998-05-28 2004-09-07 Matsushita Electric Industrial Co., Ltd. Battery plate and battery
US6403263B1 (en) 2000-09-20 2002-06-11 Moltech Corporation Cathode current collector for electrochemical cells
US7105252B2 (en) * 2002-05-22 2006-09-12 Firefly Energy, Inc. Carbon coated battery electrodes
US7388740B2 (en) * 2003-03-31 2008-06-17 Toyo Aluminium Kabushiki Kaisha Foil for negative electrode of capacitor and process for producing the same
DE10320860B4 (de) * 2003-05-09 2010-04-29 Dilo Trading Ag Verfahren zur Herstellung einer Elektrode für Lithium-Polymer-Batterien und deren Verwendung
DE10353309A1 (de) 2003-11-10 2005-06-09 Varta Microbattery Gmbh Verfahren zur Herstellung eines Elektrode-Kollektor-Verbunds für Lithium-Zellen
GB2417490A (en) * 2004-08-27 2006-03-01 Nanofilm Technologies Int Tetrahedral amorphous carbon coating with pre-determined resistivity
EP1856751A2 (de) * 2005-02-20 2007-11-21 Hahn-Meitner-Institut Berlin GmbH Herstellung eines platinfreien chelat-katalysatormaterials als zwischenprodukt und dessen weiterverarbeitung zu einer elektrokatalytischen beschichtung als endprodukt
JP4963586B2 (ja) * 2005-10-17 2012-06-27 株式会社日清製粉グループ本社 超微粒子の製造方法
CN1958518B (zh) * 2005-10-17 2012-07-04 日清制粉集团本社股份有限公司 超微颗粒的制造方法
US20070154807A1 (en) * 2005-12-30 2007-07-05 Yevgen Kalynushkin Nanostructural Electrode and Method of Forming the Same
DE102006015591B3 (de) * 2006-03-31 2007-11-29 Technische Universität Clausthal Organischer Werkstoff mit katalytisch beschichteter Oberfläche und Verfahren zu dessen Herstellung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5786068A (en) * 1991-05-03 1998-07-28 Advanced Refractory Technologies, Inc. Electrically tunable coatings
WO1994012680A1 (en) * 1992-11-25 1994-06-09 Gehan Anil Joseph Amaratunga Doping of highly tetrahedral diamond-like amorphous carbon
DE60015725T2 (de) * 1999-01-15 2005-11-03 Imperial College Of Science, Technology & Medicine Erzeugung von Werkstoffen

Also Published As

Publication number Publication date
DE102009002320A1 (de) 2010-10-14
CN102460788A (zh) 2012-05-16
KR20120016090A (ko) 2012-02-22
CN102460788B (zh) 2014-10-15
WO2010115799A1 (de) 2010-10-14

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