WO2010115799A1 - Reduzierung des elektrischen kontaktwiderstands einer oberfläche eines metallischen körpers - Google Patents
Reduzierung des elektrischen kontaktwiderstands einer oberfläche eines metallischen körpers Download PDFInfo
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- WO2010115799A1 WO2010115799A1 PCT/EP2010/054292 EP2010054292W WO2010115799A1 WO 2010115799 A1 WO2010115799 A1 WO 2010115799A1 EP 2010054292 W EP2010054292 W EP 2010054292W WO 2010115799 A1 WO2010115799 A1 WO 2010115799A1
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- 229910052751 metal Inorganic materials 0.000 title abstract description 10
- 239000002184 metal Substances 0.000 title abstract description 10
- 230000009467 reduction Effects 0.000 title abstract description 8
- 239000002245 particle Substances 0.000 claims abstract description 64
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 59
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 58
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 43
- 239000007789 gas Substances 0.000 claims description 37
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 21
- 239000001301 oxygen Substances 0.000 claims description 21
- 229910052760 oxygen Inorganic materials 0.000 claims description 21
- 239000002131 composite material Substances 0.000 claims description 12
- 239000000443 aerosol Substances 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 8
- 239000004071 soot Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 230000005495 cold plasma Effects 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000011164 primary particle Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 230000002829 reductive effect Effects 0.000 abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 description 21
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 21
- 239000011888 foil Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- CAVCGVPGBKGDTG-UHFFFAOYSA-N alumanylidynemethyl(alumanylidynemethylalumanylidenemethylidene)alumane Chemical compound [Al]#C[Al]=C=[Al]C#[Al] CAVCGVPGBKGDTG-UHFFFAOYSA-N 0.000 description 1
- 238000000089 atomic force micrograph Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910021386 carbon form Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
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- 239000011133 lead Substances 0.000 description 1
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- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
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- 230000008929 regeneration Effects 0.000 description 1
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- 230000002269 spontaneous effect Effects 0.000 description 1
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- 239000013589 supplement Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/04—Electrodes or formation of dielectric layers thereon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0404—Methods of deposition of the material by coating on electrode collectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/133—Electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/134—Electrodes based on metals, Si or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/661—Metal or alloys, e.g. alloy coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/66—Selection of materials
- H01M4/663—Selection of materials containing carbon or carbonaceous materials as conductive part, e.g. graphite, carbon fibres
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Definitions
- the present invention relates to a method for reducing the contact resistance of a surface of a metallic body having the features of the preamble of independent claim 1. Furthermore, the present invention relates to an apparatus for carrying out a specific embodiment of such a method having the features of the preamble of independent claim 16 and to a metallic body having the features of the preamble of independent claim 18, which can be produced by such a method.
- reducing the contact resistance not only lowering is lower than a previous value increased by oxygen-containing compounds formed on the surface, but also its preserving at a present value, which is oxygen-containing without treatment of the surface, for example Compounds on the surface would increase.
- the metallic body may in particular be an electrode of a battery, a fuel cell, a capacitor or the like.
- the metallic body consists of aluminum or an aluminum alloy.
- the present invention is expressly not limited to application to metallic bodies of aluminum and its alloys. Rather, the metallic body can also consist, for example, of copper, lead, zinc, nickel, titanium and their alloys.
- oxygen-containing compounds spontaneously form on atmospheric oxygen and / or atmospheric moisture, which increase the contact resistance on the surface. These compounds are, in particular, oxide and / or hydroxide compounds and, in the case of a metallic body of aluminum, specifically aluminum oxide (Al 2 O 3 ). The spontaneous formation of these oxygen-containing compounds presents a significant problem in the use of various metals as electrode material, since they are high-impedance and significantly increase the contact resistance of a surface coated with them.
- a method having the features of the preamble of independent claim 1 and a metallic body having the features of the preamble of independent claim 16 are known from EP 1 609 878 A1.
- a body made of aluminum is coated with carbon by first applying a carbonaceous substance to the surface of the body and then the body in a hydrocarbon-containing atmosphere to a temperature in the range between 100 0 C and 660 0 C, preferably in the range of 450 0 C and 660 0 C, is heated.
- the particles of elemental carbon may be (technical) soot (carbon black), which is applied with the aid of a binder as a layer on the surface before the metallic body under an acetylene or methane gas atmosphere for several hours at a temperature above 400 0 C is exposed.
- a carbonaceous layer is formed on the surface of the metallic body.
- This carbonaceous layer has fibers or filaments extending from particles of aluminum carbide embedded in the surface of the metallic body.
- the fibers or filaments should also consist of a compound of aluminum and carbon. Particles of carbon adhere to the fibers.
- the size of these carbon particles corresponds to the size of the particles of the technical carbon black used.
- the length of the fibers or filaments is about 1 micron.
- the Aluminiumcarbidteilchen in the surface of the metallic body have a size not specified in more detail size, which can be estimated from the drawings to about the same small 1 micron.
- the known process is very lengthy and requires that the metallic body, including any attachments, for a long time to the treatment temperature of about 400 0 C can be brought.
- DLC diamond-like carbon
- CVD chemical vapor deposition
- plasma enhanced CVD plasma enhanced CVD
- the energy needed to convert the carbon from the gas into DLC is gained by accelerating ions out of the plasma.
- Sufficient energy absorption of the ions requires longer acceleration distances, for which a pressure which is considerably reduced in the region of the plasma relative to the atmospheric pressure is a prerequisite.
- DLC is an electrical conductor or semiconductor.
- the invention has for its object to provide a method having the features of independent claim 1, a device having the features of the preamble of independent claim 16 and a metallic body with the features of the preamble of independent claim 18, which within a short time with little effort lead to the desired reduction in the contact resistance, which is increased by oxygen-containing compounds formed on the surface, or have a permanently reduced contact resistance and are associated with a much lower risk of the entry of foreign substances.
- the object is achieved by a method having the features of independent patent claim 1, by a device having the features of the preamble of independent claim 16 and by a metallic body having the features of independent claim 18.
- Preferred embodiments of the new method are described in the dependent claims 2 to 15.
- the dependent claim 17 relates to a preferred embodiment of the new device, the dependent claims 19 and 20 relate to preferred embodiments of the new metallic body.
- a physical plasma is generated over the surface by electrical discharge, in which reducing conditions prevail, and during the generation of the plasma, elemental carbon is provided in the form of particles on the surface, each comprising a plurality of carbon atoms.
- the physical treatment by means of the plasma already leads within a very short time to the desired result of the permanent reduction of the contact resistance. A treatment time of far less than one hour, usually less than a minute, is sufficient for this.
- particles of elemental carbon embedded in the surface of the metallic body are formed from the particles of elemental carbon which pass through the high-ohmic layer of oxygen-containing compounds as conduction channels. It is believed that these particles of elemental carbon form where, under the action of the physical plasma, discharge filaments form through the layer of high-ohmic compound which extend to the conductive metallic body and locally remove the layer. This is to be expected in places where this layer was already very thin from the outset or was further reduced in thickness by the plasma and its reactive constituents. The thus locally forming pure, ie non-oxidized surface of the metallic body is sealed by the particles of elemental carbon, so that they later the atmospheric oxygen is no longer exposed.
- carbides may form, which chemically support the adhesion of the carbon to the metal.
- the success of the method according to the invention requires that reducing conditions prevail in the generated plasma, so that an immediate regeneration of the layer of the oxygen-containing compounds on the surface of the metallic body is prevented; and the carbon must be provided in elemental form in contiguous particles in the plasma. It can be assumed that the plasma not only acts on the surface of the metallic body and activates it, but also that activation of the particles of carbon takes place, which is a prerequisite for the success of the method according to the invention, ie the permanent reduction of the contact resistance of the treated Surface of the metallic body is.
- the particles of elemental carbon may be soot particles.
- Technical carbon black has primary particles in a typical range of 10 nm to 300 nm in diameter. Primary particles in a range from 10 nm to 100 nm in diameter are preferred for the method according to the invention.
- the particles of carbon may also have a supplement of elemental silicon or be mixed with particles of elemental silicon in the new method.
- the particles of carbon can be provided dispersed in the method according to the invention in a gas, in which the plasma is generated.
- carbon rods can be burned off electrically in a gas flow with exclusion of oxygen.
- the soot particles may also be provided by another combustion process.
- the aerosol may be produced with a solid dosing device in which the particles of carbon are present as a powder which is dispersed in the gas.
- the device according to the invention is provided for carrying out such an embodiment of the new method, in which the particles of carbon in the form of an aerosol be provided, in which the plasma is generated, and has for this purpose in a gas supply for a gas in which the plasma is generated, an aerosol generator.
- an electrode connected to an AC high voltage generator, with which the plasma is ignited and maintained is disposed about a tail pipe of gas supply dielectric material.
- the particles of carbon can also be provided directly on the surface of the metallic body, for example in the form of a composite material.
- this composite may only have a limited thickness or it must be porous so that the surface of the metallic body to be treated is not completely shielded from the plasma generated above the surface.
- a porosity of the composite which corresponds to that of a lithiated metal oxide layer with added Leitruß, as used to form a collector of a lithium-ion cell. That is, even if a plasma is generated over such a layer in a method according to the invention, the surface of the underlying metallic body, for example of aluminum, is still so far from the plasma that the desired permanent reduction of the contact resistance of the surface is achieved.
- the plasma can be generated in a gas comprising a mixture of a noble gas or other inert gas and hydrogen.
- argon is used as noble gas
- nitrogen is considered as another inert gas.
- a reductive plasma can also be produced on the basis of hydrocarbon compounds.
- the plasma should be generated in as far as possible oxygen-free gas, which is highly preferred in the new process anyway.
- the plasma is preferably generated at a pressure above the surface in the range of 900 to 1200 hPa (absolute), d. H. at atmospheric pressure.
- the plasma is preferably generated as a cold plasma.
- the plasma has a gas temperature, ie a temperature of the heavy particles without the electrons, of significantly less than 400 ° C.
- the equilibrium temperature of the plasma is less than 100 0 C. More preferably, it does not differ significantly from the room temperature, that is, it is not higher than 50 0 C.
- a cold plasma by a dielectrically impeded discharge which is also referred to as silent discharge to ignite and maintain.
- the metallic body When generating the plasma, the metallic body can be used as an electrode or counter electrode to which or against which a voltage is applied, which discharges under the plasma generation. However, this is not mandatory.
- the discharge path for the generation of the plasma can also be defined between other electrodes. Nevertheless, the existence of the metallic body adjacent to the plasma will always affect the discharge and direct it towards the metallic body.
- the plasma is generated by applying a voltage to an electrode arranged opposite the surface, in front of which a dielectric is then arranged to impede the dielectric discharge.
- the metallic body can act as a capacitive electrode. Preferably, however, it is grounded. By grounding the metallic body, any net currents flowing through the plasma are also dissipated, so that they do not lead to a static charge of the metallic body.
- the metallic body according to the invention which can be produced by the process according to the invention, are coated in the high-resistance oxygen-containing compound Surface particles embedded in elemental carbon. These particles are on the outer surface of the metallic body. This may be followed by a further coating of the metallic body, which is then electrically contacted by the particles of elemental carbon with the volume of the metallic body.
- the size of the particles of carbon is in a typical range of 500 nm to 5000 nm in diameter. In particular, the diameter of the particles of elemental carbon is 1000 nm to 3000 nm. Accordingly, the number of carbon atoms in each of the particles is above 10 9 .
- the particles of elemental carbon are not diamond-like carbon (DLC).
- DLC diamond-like carbon
- the particles of elemental carbon embedded in the surface may comprise a proportion of silicon.
- An aluminum metallic body according to the invention has on its surface treated according to the invention a permanently reduced contact resistance, which remains stable over long periods of time.
- the carbon particles embedded in its surface can neither be wiped off nor washed out of it, for example with water or acetone, or they can be dissolved out.
- Fig. 1 shows the schematic structure of a device according to the invention for
- FIG. 2 shows a concrete embodiment of a detail of the device according to FIG. 1.
- FIG. 3 shows the detail of FIG. 2 in the implementation of another
- FIG. 4 shows the detail of FIG. 2 in the implementation of another
- FIG. 5 shows a photomicrograph of the surface of an aluminum foil before treatment with the method according to the invention.
- Fig. 6 is a photomicrograph of another portion of the surface of the aluminum foil of Fig. 5 after treatment with the method of the present invention.
- FIG. 7 shows an AFM image of a surface of the aluminum foil according to FIG.
- the device 1 sketched in FIG. 1 serves for the treatment of a surface 9 of a body 2 made of a metal 3, which is arranged and grounded on a track 4 with respect to the device 1.
- the device 1 comprises a gas source 5 which provides a mixture of argon and hydrogen which ultimately exits the body 2 from a tailpipe 6 of dielectric material.
- a gas source 5 which provides a mixture of argon and hydrogen which ultimately exits the body 2 from a tailpipe 6 of dielectric material.
- an annular electrode 7 Arranged around the tailpipe 6 is an annular electrode 7 which is connected to an AC high-voltage generator 8 with which a pulsed alternating high voltage can be applied to the electrode 7 in order to generate a cold physical plasma by means of a dielectrically impeded discharge in the gas coming from the gas source 5 over the surface 9 of the body 2 to generate, d. H . to ignite and maintain.
- the discharge path 10 is shown diagrammatically, around which the plasma is generated in this way.
- an aerosol generator 12 is arranged in a gas supply 11, which disperses 15 particles of carbon in the gas coming from the gas source 5.
- the aerosol generator 12 here has a soot generator 25, in which two carbon rods 13 are connected to a high voltage generator 14 to emit soot particles into the coming from the gas source 5 oxygen-free gas 15 by an arc discharge between the carbon rods 13.
- the gas supply 1 1 is grounded between the aerosol generator 12 and the tailpipe 6.
- the particles of elemental carbon are provided in the gas 15, in which the plasma is generated along the discharge path 10 above the surface 9 of the body 2.
- Fig. 2 shows the tailpipe 6, the electrode 7 and an interposed additional dielectric with high dielectric strength (PET film) as an insulating layer 16 against a section of the body 2 with the surface 9.
- oxygen-containing compounds 17 are formed, which increase the electrical contact resistance of the surface 9, because they themselves are not electrically conductive.
- the metal 3 may be aluminum, on the surface of which an aluminum oxide layer forms virtually instantaneously in the normal oxygen-containing atmosphere.
- the electrical contact resistance of the surface 9 is permanently reduced.
- the plasma 18 activates the Surface 9 and on the other hand, the particles 19, so that particles of elemental carbon in the surface 9 can embed so that they are available as electrically conductive channels through the layer of high-resistance oxygen-containing compounds 17.
- FIG. 3 outlines that particles 19 of carbon for the treatment of the surface 9 can also be provided in another way in the plasma 18, which is generated above the surface 9.
- a layer of the particles 19 is applied to the surface 9, for example with the aid of a binder additive. Also among these
- the plasma 18 activates both the surface 9 of the metal body 2 and the particles 19 of elemental carbon and provides for the formation of the particles of elemental carbon embedded in the surface 9 as conduits through the layer of the oxygen-containing compounds 17 serve.
- FIG. 4 also outlines a variant of the treatment of the surface 9 of the body 2.
- a substance composite 20 is applied which consists of a lithiated metal oxide with added conductive black.
- this conductive carbon black provides the particles of carbon in the plasma 18, which is generated above the surface 9.
- the plasma 18 can act on the surface 9 and there on the layer of the oxygen-containing compounds 17, because the composite material 20 is sufficiently porous, even if present SEM images, the pores maximum diameter of 5 ⁇ m.
- Fig. 5 shows a light micrograph of an aluminum foil, ie a potential to be treated body 2 made of aluminum as metal 3. At the surface 9 of the body 2 while disturbances 21 can be seen, which like the distributed over the entire surface 9 parallel grooves 26 on go back the rolling process.
- the fact that the entire surface 9 is coated here with oxygen-containing compounds in the form of Al 2 O 3 (aluminum oxide) is not visible in the figure, which has a magnification of approximately 1000 times.
- the layer thickness of the oxygen-containing compounds is typically a few to a few tens of nm.
- FIG. 6 of the aluminum foil 22 according to FIG. 5 shows a multiplicity of (dark) particles 23 of elemental carbon embedded in the surface 9, which produce the result one Treatment according to one of Figs. 1 to 3 are.
- These carbon particles 23 permanently increase the electrical contact conductivity of the surface 9.
- the elementary carbon element 24 23 embedded in the surface 9 has dimensions in the plane of the surface 9 of approximately 2 ⁇ m ,
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims
Priority Applications (1)
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CN201080025424.3A CN102460788B (zh) | 2009-04-09 | 2010-03-31 | 金属体表面的接触电阻的降低 |
Applications Claiming Priority (2)
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DE102009002320.8 | 2009-04-09 | ||
DE102009002320A DE102009002320B4 (de) | 2009-04-09 | 2009-04-09 | Verfahren zur Reduzierung des elektrischen Kontaktwiderstands einer Oberfläche eines metallischen Körpers und Vorrichtung zur Durchführung des Verfahrens |
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WO2010115799A1 true WO2010115799A1 (de) | 2010-10-14 |
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Family Applications (1)
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PCT/EP2010/054292 WO2010115799A1 (de) | 2009-04-09 | 2010-03-31 | Reduzierung des elektrischen kontaktwiderstands einer oberfläche eines metallischen körpers |
Country Status (4)
Country | Link |
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KR (1) | KR20120016090A (de) |
CN (1) | CN102460788B (de) |
DE (1) | DE102009002320B4 (de) |
WO (1) | WO2010115799A1 (de) |
Families Citing this family (1)
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CN104165922B (zh) * | 2013-05-17 | 2016-09-28 | 无锡华润上华半导体有限公司 | 硅片表面金属元素的测量方法 |
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GB2417490A (en) * | 2004-08-27 | 2006-03-01 | Nanofilm Technologies Int | Tetrahedral amorphous carbon coating with pre-determined resistivity |
DE102006015591B3 (de) * | 2006-03-31 | 2007-11-29 | Technische Universität Clausthal | Organischer Werkstoff mit katalytisch beschichteter Oberfläche und Verfahren zu dessen Herstellung |
-
2009
- 2009-04-09 DE DE102009002320A patent/DE102009002320B4/de not_active Expired - Fee Related
-
2010
- 2010-03-31 WO PCT/EP2010/054292 patent/WO2010115799A1/de active Application Filing
- 2010-03-31 KR KR1020117026715A patent/KR20120016090A/ko not_active Application Discontinuation
- 2010-03-31 CN CN201080025424.3A patent/CN102460788B/zh not_active Expired - Fee Related
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US5478676A (en) | 1994-08-02 | 1995-12-26 | Rexam Graphics | Current collector having a conductive primer layer |
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Also Published As
Publication number | Publication date |
---|---|
DE102009002320A1 (de) | 2010-10-14 |
CN102460788A (zh) | 2012-05-16 |
DE102009002320B4 (de) | 2013-11-07 |
KR20120016090A (ko) | 2012-02-22 |
CN102460788B (zh) | 2014-10-15 |
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