DE102006060362B4 - Verfahren zum Vermindern von Schlieren in einem Siliciumoxid-Titanoxid-Glas - Google Patents

Verfahren zum Vermindern von Schlieren in einem Siliciumoxid-Titanoxid-Glas Download PDF

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Publication number
DE102006060362B4
DE102006060362B4 DE102006060362.1A DE102006060362A DE102006060362B4 DE 102006060362 B4 DE102006060362 B4 DE 102006060362B4 DE 102006060362 A DE102006060362 A DE 102006060362A DE 102006060362 B4 DE102006060362 B4 DE 102006060362B4
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DE
Germany
Prior art keywords
glass
silica
boule
range
titania
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102006060362.1A
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German (de)
English (en)
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DE102006060362A1 (de
Inventor
Lorrie F. Beall
John E. Maxon
William R. Rosch
Robert Sabia
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Corning Inc
Original Assignee
Corning Inc
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Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of DE102006060362A1 publication Critical patent/DE102006060362A1/de
Application granted granted Critical
Publication of DE102006060362B4 publication Critical patent/DE102006060362B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Compositions (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE102006060362.1A 2005-12-21 2006-12-20 Verfahren zum Vermindern von Schlieren in einem Siliciumoxid-Titanoxid-Glas Expired - Fee Related DE102006060362B4 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US75305805P 2005-12-21 2005-12-21
US60/753,058 2005-12-21
US11/445,071 2006-05-31
US11/445,071 US20070137253A1 (en) 2005-12-21 2006-05-31 Reduced striae low expansion glass and elements, and a method for making same

Publications (2)

Publication Number Publication Date
DE102006060362A1 DE102006060362A1 (de) 2007-08-09
DE102006060362B4 true DE102006060362B4 (de) 2015-12-17

Family

ID=38171829

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102006060362.1A Expired - Fee Related DE102006060362B4 (de) 2005-12-21 2006-12-20 Verfahren zum Vermindern von Schlieren in einem Siliciumoxid-Titanoxid-Glas

Country Status (3)

Country Link
US (1) US20070137253A1 (https=)
JP (1) JP5412027B2 (https=)
DE (1) DE102006060362B4 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070263281A1 (en) * 2005-12-21 2007-11-15 Maxon John E Reduced striae low expansion glass and elements, and a method for making same
EP2217539A4 (en) * 2007-11-30 2015-07-01 Corning Inc LOW DILATION GLASS MATERIAL HAVING A LOW GRADIENT OF EXPANSION POWER
US20100101387A1 (en) * 2008-10-24 2010-04-29 Kedar Prasad Gupta Crystal growing system and method thereof
DE102009047460A1 (de) 2009-02-11 2010-08-12 Carl Zeiss Smt Ag Verfahren zum Ausschneiden eines Rohlings aus einer Boule
US8713969B2 (en) * 2009-08-31 2014-05-06 Corning Incorporated Tuning Tzc by the annealing of ultra low expansion glass
US10483101B2 (en) 2016-06-30 2019-11-19 Corning Incorporated Glass-based article with engineered stress distribution and method of making same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696038A (en) * 1995-09-12 1997-12-09 Corning Incorporated Boule oscillation patterns in methods of producing fused silica glass
US5698484A (en) * 1995-09-12 1997-12-16 Corning Incorporated Method and containment vessel for producing fused silica glass and the fused silica blank produced
US5951730A (en) * 1995-09-12 1999-09-14 Corning Incorporated Furnace for producing fused silica glass
US5970751A (en) * 1998-09-22 1999-10-26 Corning Incorporated Fused SiO2 -TiO2 glass method
US20040027555A1 (en) * 2002-03-05 2004-02-12 Hrdina Kenneth E. Reduced striae extreme ultraviolet elements

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1129998B1 (en) * 1999-07-05 2012-03-21 Nikon Corporation Method for producing quartz glass member
US6997015B2 (en) * 2001-11-27 2006-02-14 Corning Incorporated EUV lithography glass structures formed by extrusion consolidation process
JP2004131373A (ja) * 2002-09-09 2004-04-30 Corning Inc シリカ・チタニア極端紫外線光学素子の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5696038A (en) * 1995-09-12 1997-12-09 Corning Incorporated Boule oscillation patterns in methods of producing fused silica glass
US5698484A (en) * 1995-09-12 1997-12-16 Corning Incorporated Method and containment vessel for producing fused silica glass and the fused silica blank produced
US5951730A (en) * 1995-09-12 1999-09-14 Corning Incorporated Furnace for producing fused silica glass
US5970751A (en) * 1998-09-22 1999-10-26 Corning Incorporated Fused SiO2 -TiO2 glass method
US20040027555A1 (en) * 2002-03-05 2004-02-12 Hrdina Kenneth E. Reduced striae extreme ultraviolet elements

Also Published As

Publication number Publication date
JP5412027B2 (ja) 2014-02-12
JP2007186412A (ja) 2007-07-26
US20070137253A1 (en) 2007-06-21
DE102006060362A1 (de) 2007-08-09

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Effective date: 20130830

R018 Grant decision by examination section/examining division
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R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee