DE102006017253A1 - Verschiebungsmessinterferometer mit niedrigem nichtlinearen Fehler - Google Patents
Verschiebungsmessinterferometer mit niedrigem nichtlinearen Fehler Download PDFInfo
- Publication number
- DE102006017253A1 DE102006017253A1 DE102006017253A DE102006017253A DE102006017253A1 DE 102006017253 A1 DE102006017253 A1 DE 102006017253A1 DE 102006017253 A DE102006017253 A DE 102006017253A DE 102006017253 A DE102006017253 A DE 102006017253A DE 102006017253 A1 DE102006017253 A1 DE 102006017253A1
- Authority
- DE
- Germany
- Prior art keywords
- interferometer
- input
- subassembly
- beam splitter
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 31
- 238000005259 measurement Methods 0.000 claims description 26
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 claims description 15
- 230000010287 polarization Effects 0.000 claims description 13
- 239000000835 fiber Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 claims description 5
- 238000005305 interferometry Methods 0.000 claims description 5
- 238000003491 array Methods 0.000 claims 2
- 238000012423 maintenance Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 239000012212 insulator Substances 0.000 description 5
- 239000000523 sample Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 241000183024 Populus tremula Species 0.000 description 1
- 201000000761 achromatopsia Diseases 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- -1 mechanical Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 101150101567 pat-2 gene Proteins 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/118,949 US7251039B1 (en) | 2005-04-29 | 2005-04-29 | Low non-linear error displacement measuring interferometer |
| US11/118,949 | 2005-04-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102006017253A1 true DE102006017253A1 (de) | 2006-11-09 |
Family
ID=37111644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102006017253A Ceased DE102006017253A1 (de) | 2005-04-29 | 2006-04-12 | Verschiebungsmessinterferometer mit niedrigem nichtlinearen Fehler |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7251039B1 (https=) |
| JP (1) | JP2006308594A (https=) |
| CN (1) | CN1854678A (https=) |
| DE (1) | DE102006017253A1 (https=) |
| NL (1) | NL1031618C2 (https=) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090135430A1 (en) * | 2007-11-26 | 2009-05-28 | Miao Zhu | Systems and Methods for Reducing Nonlinearity in an Interferometer |
| KR100898327B1 (ko) | 2008-03-26 | 2009-05-20 | 한국과학기술원 | 파장판의 각도 정렬을 통한 간섭계의 비선형 오차 보상방법 |
| NL2003134C (en) * | 2008-09-11 | 2010-03-16 | Univ Delft Tech | LASER INTERFEROMETER. |
| CN102147505B (zh) * | 2010-02-08 | 2015-06-03 | 菲尼萨公司 | 增强型多体式光学设备 |
| CN101782368A (zh) * | 2010-03-03 | 2010-07-21 | 福州高意通讯有限公司 | 一种干涉仪装置 |
| JP5588769B2 (ja) * | 2010-07-01 | 2014-09-10 | 株式会社 光コム | 光学式計測装置 |
| TW201219746A (en) * | 2010-11-01 | 2012-05-16 | Prec Machinery Res & Amp Dev Ct | used in gantry type processing machine for measuring errors in linear displacement of lead screws |
| JP6271493B2 (ja) * | 2015-05-25 | 2018-01-31 | Ckd株式会社 | 三次元計測装置 |
| TWI619927B (zh) * | 2015-05-25 | 2018-04-01 | Ckd Corp | Three-dimensional measuring device |
| US11156449B2 (en) | 2016-01-31 | 2021-10-26 | Keysight Technologies, Inc. | Separated beams displacement measurement with a grating |
| US20190113329A1 (en) | 2017-10-12 | 2019-04-18 | Keysight Technologies, Inc. | Systems and methods for cyclic error correction in a heterodyne interferometer |
| JP7123333B2 (ja) * | 2018-03-06 | 2022-08-23 | 中央精機株式会社 | 変位計測装置 |
| CN115729059B (zh) * | 2021-08-31 | 2025-10-10 | 上海微电子装备（集团）股份有限公司 | 对准装置及对准方法 |
| WO2025176431A1 (en) * | 2024-02-23 | 2025-08-28 | Asml Netherlands B.V. | Interferometer system and lithographic apparatus |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3806608A1 (de) * | 1987-03-18 | 1988-09-29 | Deutsches Textilforschzentrum | Verfahren zur geschwindigkeits- und/oder laengenmessung von endlosen textilen warenbahnen sowie vorrichtung zur durchfuehrung des verfahrens |
| US5064289A (en) * | 1989-02-23 | 1991-11-12 | Hewlett-Packard Company | Linear-and-angular measuring plane mirror interferometer |
| US5677768A (en) * | 1996-07-03 | 1997-10-14 | Hewlett-Packard Company | Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame |
| US6313918B1 (en) * | 1998-09-18 | 2001-11-06 | Zygo Corporation | Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion |
| US6542247B2 (en) * | 2001-06-06 | 2003-04-01 | Agilent Technologies, Inc. | Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies |
| US7009710B2 (en) * | 2001-08-20 | 2006-03-07 | Agilent Technologies, Inc. | Direct combination of fiber optic light beams |
| EP1419361A1 (en) * | 2001-08-23 | 2004-05-19 | Zygo Corporation | Dynamic interferometric controlling direction of input beam |
-
2005
- 2005-04-29 US US11/118,949 patent/US7251039B1/en not_active Expired - Fee Related
-
2006
- 2006-03-29 CN CN200610066827.8A patent/CN1854678A/zh active Pending
- 2006-04-12 DE DE102006017253A patent/DE102006017253A1/de not_active Ceased
- 2006-04-19 NL NL1031618A patent/NL1031618C2/nl not_active IP Right Cessation
- 2006-04-27 JP JP2006123291A patent/JP2006308594A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL1031618C2 (nl) | 2007-09-25 |
| US7251039B1 (en) | 2007-07-31 |
| US20070171426A1 (en) | 2007-07-26 |
| CN1854678A (zh) | 2006-11-01 |
| JP2006308594A (ja) | 2006-11-09 |
| NL1031618A1 (nl) | 2006-11-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8127 | New person/name/address of the applicant |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US |
|
| 8131 | Rejection |