DE3888831T2 - Optischer apparat zur anwendung mit interferometrischen messgeräten. - Google Patents

Optischer apparat zur anwendung mit interferometrischen messgeräten.

Info

Publication number
DE3888831T2
DE3888831T2 DE3888831T DE3888831T DE3888831T2 DE 3888831 T2 DE3888831 T2 DE 3888831T2 DE 3888831 T DE3888831 T DE 3888831T DE 3888831 T DE3888831 T DE 3888831T DE 3888831 T2 DE3888831 T2 DE 3888831T2
Authority
DE
Germany
Prior art keywords
measuring devices
optical apparatus
interferometric measuring
interferometric
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3888831T
Other languages
English (en)
Other versions
DE3888831D1 (de
Inventor
Raymond John Chaney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of DE3888831D1 publication Critical patent/DE3888831D1/de
Application granted granted Critical
Publication of DE3888831T2 publication Critical patent/DE3888831T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
DE3888831T 1987-12-24 1988-12-20 Optischer apparat zur anwendung mit interferometrischen messgeräten. Expired - Fee Related DE3888831T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB878730169A GB8730169D0 (en) 1987-12-24 1987-12-24 Optical apparatus for use with interferometric measuring devices
PCT/GB1988/001137 WO1989005955A1 (en) 1987-12-24 1988-12-20 Optical apparatus for use with interferometric measuring devices

Publications (2)

Publication Number Publication Date
DE3888831D1 DE3888831D1 (de) 1994-05-05
DE3888831T2 true DE3888831T2 (de) 1994-07-14

Family

ID=10629072

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3888831T Expired - Fee Related DE3888831T2 (de) 1987-12-24 1988-12-20 Optischer apparat zur anwendung mit interferometrischen messgeräten.

Country Status (6)

Country Link
US (1) US5056921A (de)
EP (1) EP0357695B1 (de)
JP (1) JP2579226B2 (de)
DE (1) DE3888831T2 (de)
GB (1) GB8730169D0 (de)
WO (1) WO1989005955A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014006151A1 (de) * 2014-04-25 2015-10-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Messung des Rundlaufs einer Werkzeugmaschine sowie für die Durchführung des Verfahrens ausgebildete Werkzeugmaschine

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DE3922411A1 (de) * 1989-07-07 1991-01-10 Hoesch Ag Vorrichtung zum hochgenauen messen grosser laengen
GB9403206D0 (en) * 1994-02-19 1994-04-13 Renishaw Plc Laser interferometer
US6317196B1 (en) 1996-06-25 2001-11-13 Nikon Corporation Projection exposure apparatus
JP2001503133A (ja) * 1996-08-16 2001-03-06 カム シー ラウ ５−軸／６−軸レーザ測定システム
US6057921A (en) * 1997-07-08 2000-05-02 Etec Systems, Inc. Two piece mirror arrangement for interferometrically controlled stage
EP1031868B1 (de) * 1999-02-26 2003-05-14 Dr. Johannes Heidenhain GmbH Kompensierter Parallel-Strahlteiler mit zwei Platten sowie Interferometer
US7800758B1 (en) 1999-07-23 2010-09-21 Faro Laser Trackers, Llc Laser-based coordinate measuring device and laser-based method for measuring coordinates
WO2001013079A1 (en) * 1999-08-18 2001-02-22 Swinburne University Method and apparatus for the resolution of beams of electromagnetic radiation
KR100755335B1 (ko) 2000-01-11 2007-09-05 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 아베 에러 정정 시스템 및 방법
GB0013833D0 (en) 2000-06-08 2000-07-26 Renishaw Plc Gas laser and optical system
US6876451B1 (en) * 2000-08-25 2005-04-05 Zygo Corporation Monolithic multiaxis interferometer
US6734971B2 (en) * 2000-12-08 2004-05-11 Lael Instruments Method and apparatus for self-referenced wafer stage positional error mapping
US7871002B2 (en) * 2000-12-08 2011-01-18 Litel Instruments Method and apparatus for self-referenced wafer stage positional error mapping
US7030993B2 (en) * 2002-04-24 2006-04-18 Zygo Corporation Athermal zero-shear interferometer
GB0215557D0 (en) * 2002-07-05 2002-08-14 Renishaw Plc Laser calibration apparatus
US7317539B2 (en) * 2004-08-23 2008-01-08 Asml Netherlands B.V. Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method
FR2918169B1 (fr) * 2007-06-28 2009-10-30 Jean Philippe Roux Procede et dispositif pour determiner l'orientation spatiale d'un objet mobile, et application d'un tel dispositif pour un systeme telescopique a double segment destine a equiper un appareil de manipulation.
CN101650166B (zh) * 2008-08-15 2012-04-11 上海理工大学 用于测量微滚转角的激光干涉系统
GB0920520D0 (en) * 2009-11-23 2010-01-06 Univ Birmingham Innovative laser interferometric angular read-out device
TWI614481B (zh) * 2016-11-22 2018-02-11 峰安車業股份有限公司 轉動角度量測裝置及加工系統
CN108444411B (zh) * 2018-04-28 2019-11-01 广州塞维拉电梯轨道系统有限公司 一种直线度检测系统及方法
WO2020139096A1 (ru) * 2018-12-24 2020-07-02 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Образования Балтийский Государственный Технический Университет "Военмех" Им. Д.Ф.Устинова (Бгту "Военмех") Интерференционная система измерения абсолютной длины
CN112050044A (zh) * 2020-08-03 2020-12-08 重庆工商大学 一种视觉检测用具有升降调节结构的图像收录装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1945487B2 (de) * 1969-09-09 1973-05-24 Fa Carl Zeiss, 7920 Heidenheim Einrichtung zum inkrementalen fuehrungsfehlerausgleich
FR2069876A1 (de) * 1969-11-25 1971-09-10 Thomson Csf
US3622244A (en) * 1970-01-29 1971-11-23 Optomechanisms Inc Dual axes interferometer
US3654446A (en) * 1970-04-03 1972-04-04 Hewlett Packard Co Method and apparatus for the measurement and display of error values of precision machine tools, electronic instruments, etc.
FR2088675A5 (de) * 1970-04-21 1972-01-07 Thomson Csf
US3790028A (en) * 1971-09-03 1974-02-05 J Gardner Hot liquid dispenser
US3790284A (en) * 1972-05-08 1974-02-05 Hewlett Packard Co Interferometer system for measuring straightness and roll
US4261107A (en) * 1980-03-06 1981-04-14 Caterpillar Tractor Co. Coordinate locating device
US4365301A (en) * 1980-09-12 1982-12-21 The United States Of America As Represented By The United States Department Of Energy Positional reference system for ultraprecision machining
US4483618A (en) * 1982-05-24 1984-11-20 Hamar M R Laser measurement system, virtual detector probe and carriage yaw compensator
US4498773A (en) * 1983-05-04 1985-02-12 Rockwell International Corporation Pencil beam interferometer
GB8420096D0 (en) * 1984-08-07 1984-09-12 Putra Siregar N I Measurement of errors
JPS62223604A (ja) * 1986-03-26 1987-10-01 Agency Of Ind Science & Technol ２重光路干渉測長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014006151A1 (de) * 2014-04-25 2015-10-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Messung des Rundlaufs einer Werkzeugmaschine sowie für die Durchführung des Verfahrens ausgebildete Werkzeugmaschine
DE102014006151B4 (de) 2014-04-25 2021-08-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Messung des Rundlaufs einer Werkzeugmaschine sowie für die Durchführung des Verfahrens ausgebildete Werkzeugmaschine

Also Published As

Publication number Publication date
EP0357695A1 (de) 1990-03-14
JP2579226B2 (ja) 1997-02-05
DE3888831D1 (de) 1994-05-05
EP0357695B1 (de) 1994-03-30
JPH02502755A (ja) 1990-08-30
WO1989005955A1 (en) 1989-06-29
GB8730169D0 (en) 1988-02-03
US5056921A (en) 1991-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee