DE102005059636A1 - Vakuumpumpe - Google Patents

Vakuumpumpe Download PDF

Info

Publication number
DE102005059636A1
DE102005059636A1 DE102005059636A DE102005059636A DE102005059636A1 DE 102005059636 A1 DE102005059636 A1 DE 102005059636A1 DE 102005059636 A DE102005059636 A DE 102005059636A DE 102005059636 A DE102005059636 A DE 102005059636A DE 102005059636 A1 DE102005059636 A1 DE 102005059636A1
Authority
DE
Germany
Prior art keywords
vacuum pump
components
housing
housing component
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102005059636A
Other languages
German (de)
English (en)
Inventor
Bernhard Tatzber
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE102005059636A priority Critical patent/DE102005059636A1/de
Priority to EP06023139A priority patent/EP1798417B1/fr
Priority to AT06023139T priority patent/ATE523693T1/de
Publication of DE102005059636A1 publication Critical patent/DE102005059636A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
DE102005059636A 2005-12-14 2005-12-14 Vakuumpumpe Withdrawn DE102005059636A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102005059636A DE102005059636A1 (de) 2005-12-14 2005-12-14 Vakuumpumpe
EP06023139A EP1798417B1 (fr) 2005-12-14 2006-11-07 Pompe à vide
AT06023139T ATE523693T1 (de) 2005-12-14 2006-11-07 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005059636A DE102005059636A1 (de) 2005-12-14 2005-12-14 Vakuumpumpe

Publications (1)

Publication Number Publication Date
DE102005059636A1 true DE102005059636A1 (de) 2007-06-21

Family

ID=37814035

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005059636A Withdrawn DE102005059636A1 (de) 2005-12-14 2005-12-14 Vakuumpumpe

Country Status (3)

Country Link
EP (1) EP1798417B1 (fr)
AT (1) ATE523693T1 (fr)
DE (1) DE102005059636A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800009500A1 (it) * 2018-10-16 2020-04-16 Eurosets Srl Pompa centrifuga a trascinamento magnetico
GB2607605B (en) * 2021-06-08 2023-07-05 Leybold Gmbh Apparatus and vacuum system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9214308U1 (de) * 1992-10-23 1993-01-07 Siegenia-Frank Kg, 5900 Siegen Spiralgehäuse für Radialgebläse
DE4122487C2 (de) * 1991-07-06 1997-09-18 Grundfos Int Förderaggregat aus einer Strömungsarbeitsmaschine und aus einem Antriebsmotor
DE19909371A1 (de) * 1999-03-03 2000-09-07 Wilo Gmbh Kreiselpumpe mit Serviceschnittstelle
DE19953911A1 (de) * 1999-04-20 2000-11-02 Brinkmann Pumpen K H Brinkmann Mehrstufige Kreiselpumpe

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4484470B2 (ja) * 2002-10-23 2010-06-16 エドワーズ株式会社 分子ポンプ、及びフランジ
DE10342907A1 (de) * 2003-09-17 2005-04-21 Pfeiffer Vacuum Gmbh Vakuumpumpe mit schnelldrehendem Rotor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4122487C2 (de) * 1991-07-06 1997-09-18 Grundfos Int Förderaggregat aus einer Strömungsarbeitsmaschine und aus einem Antriebsmotor
DE9214308U1 (de) * 1992-10-23 1993-01-07 Siegenia-Frank Kg, 5900 Siegen Spiralgehäuse für Radialgebläse
DE19909371A1 (de) * 1999-03-03 2000-09-07 Wilo Gmbh Kreiselpumpe mit Serviceschnittstelle
DE19953911A1 (de) * 1999-04-20 2000-11-02 Brinkmann Pumpen K H Brinkmann Mehrstufige Kreiselpumpe

Also Published As

Publication number Publication date
EP1798417A3 (fr) 2010-05-19
EP1798417A2 (fr) 2007-06-20
EP1798417B1 (fr) 2011-09-07
ATE523693T1 (de) 2011-09-15

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R005 Application deemed withdrawn due to failure to request examination

Effective date: 20121215