EP1798417A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP1798417A2
EP1798417A2 EP06023139A EP06023139A EP1798417A2 EP 1798417 A2 EP1798417 A2 EP 1798417A2 EP 06023139 A EP06023139 A EP 06023139A EP 06023139 A EP06023139 A EP 06023139A EP 1798417 A2 EP1798417 A2 EP 1798417A2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
components
housing
pump according
housing component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06023139A
Other languages
German (de)
English (en)
Other versions
EP1798417A3 (fr
EP1798417B1 (fr
Inventor
Bernhard Tatzber
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1798417A2 publication Critical patent/EP1798417A2/fr
Publication of EP1798417A3 publication Critical patent/EP1798417A3/fr
Application granted granted Critical
Publication of EP1798417B1 publication Critical patent/EP1798417B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump with a high-speed rotor, with mounted on this pump-active components, with a stator and mounted on this pump-active components and with a first and a second housing component.
  • Vacuum pumps in general and those with fast-rotating components in particular are made up of several housing components. These are housing components sit together and must be connected together.
  • the prior art teaches for this purpose the use of screws which are pushed through holes in a first housing part and engage in threads which are provided in a second housing part.
  • the number of screws is determined by the size and weights of the housing components. Furthermore, the number is determined by safety considerations, because just by the use of high-speed components, a high kinetic energy in the operation of the pump is available, which is released in case of malfunction. This release of energy must under no circumstances lead to a loosening of the connection between the housing components.
  • a disadvantage of this prior art is that especially with vacuum pumps with fast-rotating components and large dimensions, a large number of screws is necessary to ensure the secure connection. This increases the cost of manufacturing, both on the material side and in the assembly time. This assembly time is disadvantageous even when servicing the vacuum pump. Long service times lead to long downtimes and thus cause high costs for the customer.
  • the object is therefore to provide a connection between housing components, which is simpler and less expensive and thereby has a higher security in case of malfunction.
  • the design of the housing components in such a way that overlapping structures are present, represents a positive connection of the housing components.
  • This provides a high degree of safety with freeing of the kinetic energy in case of failure.
  • the safety is increased in particular compared to the non-positive connection of the prior art.
  • the assembly and disassembly is greatly facilitated because no variety of holes and threads is provided and no variety of screw must be solved.
  • Another advantage results from influencing the size of the housing surfaces, which touch each other at the connection point. As a result, the heat transfer between the housing components can be adjusted specifically.
  • the overlapping structures have the shape of a multi-thread.
  • the advantage is the ease of manufacture, which can be miterwickigt in the context of the already necessary processing of the housing component.
  • the assembly is very simple, since the housing components are detachably connected by a short rotation. This variant has Many touching surfaces on both housing components, so that the heat transfer is particularly good.
  • Another advantage is that in case of a crash, in which the kinetic energy of the rotor is delivered to the stator, it can be used to a twist in the closing direction of the thread. By forming the threads so kinetic energy can be selectively reduced, which increases the overall safety.
  • closed annular or closed cylindrical housing components facilitates the production, since such housing components are rotationally symmetrical. In addition, no gaps to be sealed occur in the longitudinal direction of the vacuum pump.
  • claim 5 proposes to provide an elastomeric seal at the junction between the housing components.
  • connection of the housing components is done by a combination of rotation and axial movement, the fuse is sufficient against rotation to prevent inadvertent release of the connection.
  • securing means for securing against the rotating movement.
  • the advantage is that a backup against rotation is easier to accomplish, since there are less forces in this direction.
  • These securing means may be, for example, screws or pins.
  • the first figure shows a first example of a vacuum pump 1 designed according to the invention.
  • This vacuum pump has a rotor 2, which consists of a shaft 3 and pump-active components 4.
  • the pumping effect is due to the rapid rotation of the rotor in cooperation with a stator 9, which also has pump-active components 5.
  • These components 5 rest and are held by spacers 6 at a distance from each other.
  • the pump-active components on the rotor and stator are often designed as blade disks.
  • the shaft 3 is rotatably supported by bearings 7 and rotated by a drive 8 in rotation.
  • the storage and drive means are arranged in a housing part 11.
  • the housing of the vacuum pump has two further parts, wherein all parts are connected to one another at a connection point 13.
  • FIG. 2a is a perspective view of the housing parts 11 and the two other parts 10 and 12. Also shown are the structures 16, here realized as elevations on the parts 11 and 12.
  • Figure 2b shows a partial section in the radial direction through the connection point 13.
  • a securing means provides a plurality of screws 18, which are designed for example as a pressure screws, ensure that the housing components can not rotate against each other. It may be useful, instead of pressure screws to perform a pinning, for example by the screws dive for a portion of their axial length in holes. As a result, a security against rotation is achieved even with high force on the securing point.
  • 18 positive locking means can be used instead of the screws.
  • the housing components 10 and 11 are provided at the junction with such overlapping structures 14 and 16 that a locking of the components is given against movement in the axial direction only.
  • the first housing member 10 is formed in this first example so as to surround a larger diameter portion of the housing part 12.
  • a seal 17 is provided, for example, a sealing ring made of an elastomer.
  • the third figure shows the connection point of the housing components in a second embodiment.
  • the joint is in perspective, in part b) shown in radial section.
  • the first housing component 10 is cylindrically shaped here.
  • This variant is advantageous in terms of dimensions and component manufacture over the first.
  • screws 18 prevent the rotation of the housing components to each other.
  • the screws 18 protrude into bores of the housing component 12.
  • This has the advantageous effect that a positive-locking arrangement is achieved, whereby the security against rotation of the housing components is increased against each other.
  • the screw has to be disassembled, which dissipates energy. It is also conceivable to use instead of screws pins.
  • FIG 4 An even more favorable example is shown in Figure 4, again shown in perspective in part a) and in the radial section in part b).
  • the housing member 10 can accommodate the stator of the vacuum pump, while in the housing member 11, the bearing and drive means are arranged. Between the components 10 and 11, in turn, a seal 17 is provided.
  • Elevations 16 are arranged on the first housing part 10. These are elongated and inclined relative to the axial direction. Recesses 14 are provided on the second hull part 11, which also have tapered sections 15, ie the width of the depression in the circumferential direction starts at a value A and decreases to a smaller value B. This is beneficial for the above described safety function.
  • the elevations 16 are inserted by a combined movement of rotation and pushing only in the first portion of the wells.
  • This structure largely corresponds to a multi-start thread. In the case of a crash of stator and rotor rotational energy is transferred to the component 11. In the figure, this rotational energy would cause the component 11 to move to the right.
  • the elevations 16 are further inserted and reach the tapered sections 15, so that rotational energy is dissipated.
  • coatings and other surface treatments may be provided which affect the sliding of the protrusions in the recesses. For example, the coefficient of friction can be increased.
  • FIG. 6 Another variant of the overlapping structures is shown in FIG. 6.
  • the elevations 16 are formed here as a radially inwardly projecting cylinder.
  • recesses 14 which are designed as angled channels, which in turn have tapered sections 15 at the end, i. the width of the recess in the circumferential direction starts at a value A and decreases to a smaller value B.
  • the housing parts are first inserted into each other in the axial direction and then rotated against each other. This structure corresponds to a bayonet closure.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
EP06023139A 2005-12-14 2006-11-07 Pompe à vide Active EP1798417B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005059636A DE102005059636A1 (de) 2005-12-14 2005-12-14 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP1798417A2 true EP1798417A2 (fr) 2007-06-20
EP1798417A3 EP1798417A3 (fr) 2010-05-19
EP1798417B1 EP1798417B1 (fr) 2011-09-07

Family

ID=37814035

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06023139A Active EP1798417B1 (fr) 2005-12-14 2006-11-07 Pompe à vide

Country Status (3)

Country Link
EP (1) EP1798417B1 (fr)
AT (1) ATE523693T1 (fr)
DE (1) DE102005059636A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113167281A (zh) * 2018-10-16 2021-07-23 欧赛特有限公司 磁驱动离心泵
WO2022258410A1 (fr) * 2021-06-08 2022-12-15 Leybold Gmbh Appareil et système sous vide

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
EP1413761A2 (fr) * 2002-10-23 2004-04-28 BOC Edwards Technologies, Limited Pompe turbomoléculaire et bride
EP1517045A2 (fr) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Elément de liaison

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4122487C2 (de) * 1991-07-06 1997-09-18 Grundfos Int Förderaggregat aus einer Strömungsarbeitsmaschine und aus einem Antriebsmotor
DE9214308U1 (de) * 1992-10-23 1993-01-07 Siegenia-Frank Kg, 5900 Siegen Spiralgehäuse für Radialgebläse
DE19909371A1 (de) * 1999-03-03 2000-09-07 Wilo Gmbh Kreiselpumpe mit Serviceschnittstelle
DE29906811U1 (de) * 1999-04-20 2000-08-31 Brinkmann Pumpen K H Brinkmann Mehrstufige Kreiselpumpe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073986A (ja) * 1998-08-28 2000-03-07 Jeol Ltd ターボ分子ポンプの振動抑制器
US20030175113A1 (en) * 2002-03-12 2003-09-18 Tooru Miwata Turbo-molecular pump
EP1413761A2 (fr) * 2002-10-23 2004-04-28 BOC Edwards Technologies, Limited Pompe turbomoléculaire et bride
EP1517045A2 (fr) * 2003-09-17 2005-03-23 Pfeiffer Vacuum GmbH Elément de liaison

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113167281A (zh) * 2018-10-16 2021-07-23 欧赛特有限公司 磁驱动离心泵
CN113167281B (zh) * 2018-10-16 2023-07-25 欧赛特有限公司 磁驱动离心泵
WO2022258410A1 (fr) * 2021-06-08 2022-12-15 Leybold Gmbh Appareil et système sous vide

Also Published As

Publication number Publication date
EP1798417A3 (fr) 2010-05-19
DE102005059636A1 (de) 2007-06-21
EP1798417B1 (fr) 2011-09-07
ATE523693T1 (de) 2011-09-15

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