EP2205874A1 - Pompe turbomoléculaire - Google Patents

Pompe turbomoléculaire

Info

Publication number
EP2205874A1
EP2205874A1 EP08845937A EP08845937A EP2205874A1 EP 2205874 A1 EP2205874 A1 EP 2205874A1 EP 08845937 A EP08845937 A EP 08845937A EP 08845937 A EP08845937 A EP 08845937A EP 2205874 A1 EP2205874 A1 EP 2205874A1
Authority
EP
European Patent Office
Prior art keywords
pump housing
pump
annular disc
annular
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08845937A
Other languages
German (de)
English (en)
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2205874A1 publication Critical patent/EP2205874A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a turbomobular pump having a pump housing and a plurality of separate stator vane annular discs which together form an annular disc package.
  • Turbomolecular pumps are typically operated at operating speeds of several 10,000 rpm.
  • the rotor therefore has a high kinetic energy at operating speed, which represents considerable destructive forces in the case of a rotor crash or burst. These destructive forces are so great in practice that the pump housing can be destroyed, so that high Property damage can arise as well as there is danger to life and limb.
  • the object of the invention is in contrast to provide a simple design Turbomoiekularpumpe with structures for receiving crash and burst energies.
  • the annular disc package is thus no longer fixed axially in the pump housing or is braced in a separate annular disc housing, but is directly axially biased in the pump housing by an elastic axial clamping element such that the stator vane ring discs do not rotate during pump operation.
  • the immediate strain of the annular disc package in the pump housing including the arrangement of the cylindrical friction bushing in the Ringspait between the pump housing and the annular disc package is a very simple structure that can be realized inexpensively and a considerable potential for receiving the kinetic rotor energy in crash or burst Fali provides.
  • a sliding ring disc is axially provided between the annular disc package and the stator housing, which is axially tensioned by the clamping element.
  • the Gieitringusion improves the rotation or the adjustability of the static friction of the annular disc package with respect to the pump housing.
  • the static friction can be set so low that the ring disc package at rated speed! is fixed in the rotor, but is already set at relatively small rotor-stator Koliisionen in rotation and in this way the energy degradation is made possible by the friction bushing.
  • the Spannefement is formed by an elastic clamping ring.
  • the clamping ring may for example consist of an elastomer, but may for example also consist of a coiled spring wire ring.
  • the tensioning element acts axially either directly on the annular disk package or acts on the sliding ring disk when a sliding ring disk is provided.
  • the pump rotor body has a cavity for receiving the drive motor.
  • the friction bushing is in any case partially not provided axially outside the rotor cavity.
  • the greatest danger in a rotor crash or a (subsequent) rotor burst is the breaking up of the rotor in the region of its cavity, which is also called the rotor bell.
  • the rotor In this area, the rotor is relatively weak dimensioned and not radially supported. In the field of rotor bell, therefore, the risk of a breakup of the rotor is particularly large.
  • the friction sleeve is axially provided only in the region of the rotor bell or of the rotor cavity.
  • a lubricant is provided between the friction sleeve and the pump housing and / or the washer package.
  • FIG. 1 shows a first embodiment of a turbomolecular pump with an axially biased by a clamping element annular disc package, which is surrounded by a friction bush,
  • FIG. 2 shows a second exemplary embodiment of a turbomolecular pump with a structure according to the turbomolecular pump of FIG. 1 and additional sliding ring disks and
  • Figure 3 is a turbomolecular pump, as in Figure 2, wherein the
  • a turbomolecular pump 10, 50, 50 is shown in longitudinal section, which has a rotor 12 with a pump rotor 13, which is rotatably mounted in a pump housing 14.
  • the pump rotor 13 has a plurality of rotor blades 15, wherein in the axial spaces in each case a corresponding Statorhoffl- annular disc 16 projects between two leaf discs.
  • six rotor blade disks 15 and six stator rotor disks 16 are provided.
  • the axially stacked Stator pursuel annular disks 16 together form a ring disk package 18.
  • the annular disk package 18 is the pressure side supported on a corresponding lying in a transverse plane paragraph Ringfikiee 19.
  • the other axial end of the annular disc package is not axially adjacent to the Purnpen housing.
  • an axial gap 22 is provided, so that the annular disk package 18 is basically axially displaceable within the pump housing 14th
  • a clamping element 26 in the form of an elastic O-ring.
  • the tensioning element 26 biases the annular disk pack 18 axially and holds it together axially. Due to the static friction between the Statorfiügel ring disks 16 and between the annular disk package 18 and the axial annular surface 19 and the clamping element 26, the Statorfiügel- annular disks 16 are sufficiently fixed in the circumferential direction, so that they do not rotate during normal operation at rated speed.
  • the annular disk package 18 has on the outside an approximately cylindrical peripheral surface. Between this peripheral surface of the annular disc packet 18 and the corresponding inner peripheral surface of the pump housing 14, a cylindrical radial gap 32 is present.
  • the radial gap 32 is filled by a friction bushing 20, which is pushed onto the annular disk package 18 and sits with gap to the pump housing 14.
  • the friction sleeve 20 thus fills the radial gap 32 almost but not completely.
  • a small gap to the ring disk package is realized in order to be able to push the friction bushing loosely over the ring disk package.
  • a (larger) gap realized between friction bushing and housing, so that the friction bushing not wedged at the slightest deformation in the annular gap and no longer rotates.
  • the friction bushing is made of steel or titanium.
  • the pump housing 14 is made of aluminum.
  • a Gleitmitte! be provided between the friction bushing 20 and the pump housing 14 and / or the annular disk package 18.
  • a lubricant for example, vacuum grease or Molykote can be used.
  • a material for the friction sleeve 20 and Kevlar can be used.
  • the friction sleeve 20 may consist of a one-piece casting, but may for example consist of a wound bent.
  • the rotor 12 has a cavity 28 in the region of the pump rotor 13, in which a storage and drive cartridge 30 is inserted.
  • the pump rotor 13 in the region of the cavity 28 is also called rotor bell.
  • the turbomolecular pump 40 has, in an axial gap 42 axially enlarged relative to the turbomolecular pump 10 of FIG. 1, two adjacent sliding ring disks 44, 45. Also at the other axial end of the annular disc package 18 two superimposed sliding rings 46,47 are provided. By the sliding ring disks 44-47, the static friction and the sliding friction between the ring disk package 18 and the pump housing 14 at both axial longitudinal ends of the ring disk package 18 is significantly reduced.
  • the friction bush 52 is shortened so that it does not extend over the entire axial length of the annular disk packet 18.
  • the friction sleeve 52 is in the region of the annular disc package 18th omitted, in which the annular disc package 18 axially not covered with the cavity 28 in the pump rotor thirteenth

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

La présente invention a pour objet une pompe turbomoléculaire (10) équipée d'un carter de pompe (14) et de plusieurs disques annulaires-aubes de stator (16), qui forment ensemble un groupe de disques annulaires (18). Directement entre le groupe de disques annulaires (18) et le carter de pompe (14), une bague de frottement cylindrique (20) est agencée. Une fente axiale (22) est prévue axialement entre le groupe de disques annulaires (18) et le carter de pompe (14), de manière à ce que le groupe de disques annulaires (18) puisse tourner.
EP08845937A 2007-10-31 2008-10-30 Pompe turbomoléculaire Withdrawn EP2205874A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710051988 DE102007051988A1 (de) 2007-10-31 2007-10-31 Turbomolekularpumpe
PCT/EP2008/064747 WO2009056606A1 (fr) 2007-10-31 2008-10-30 Pompe turbomoléculaire

Publications (1)

Publication Number Publication Date
EP2205874A1 true EP2205874A1 (fr) 2010-07-14

Family

ID=40199138

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08845937A Withdrawn EP2205874A1 (fr) 2007-10-31 2008-10-30 Pompe turbomoléculaire

Country Status (6)

Country Link
EP (1) EP2205874A1 (fr)
JP (1) JP2011501037A (fr)
CN (1) CN101842597A (fr)
DE (1) DE102007051988A1 (fr)
TW (1) TW200925429A (fr)
WO (1) WO2009056606A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008058151A1 (de) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
CN103398013B (zh) * 2013-08-12 2016-08-24 北京中科科仪股份有限公司 涡轮分子泵
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
TWI696754B (zh) * 2019-03-15 2020-06-21 承輝先進股份有限公司 具有改良型蓋子之轉子裝置
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
CN114526864B (zh) * 2021-12-27 2023-04-11 苏州中科科仪技术发展有限公司 一种动平衡调试泵壳及具有其的调试装置与方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
KR100724048B1 (ko) 1999-02-19 2007-06-04 가부시키가이샤 에바라 세이사꾸쇼 터보 분자 펌프
JP4197819B2 (ja) * 1999-02-19 2008-12-17 株式会社荏原製作所 ターボ分子ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009056606A1 *

Also Published As

Publication number Publication date
WO2009056606A1 (fr) 2009-05-07
JP2011501037A (ja) 2011-01-06
DE102007051988A1 (de) 2009-05-07
CN101842597A (zh) 2010-09-22
TW200925429A (en) 2009-06-16

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