CS245264B1 - Method of freely carried distance mask making for diminishing projection systems - Google Patents

Method of freely carried distance mask making for diminishing projection systems Download PDF

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Publication number
CS245264B1
CS245264B1 CS827076A CS707682A CS245264B1 CS 245264 B1 CS245264 B1 CS 245264B1 CS 827076 A CS827076 A CS 827076A CS 707682 A CS707682 A CS 707682A CS 245264 B1 CS245264 B1 CS 245264B1
Authority
CS
Czechoslovakia
Prior art keywords
layer
substrate
nickel
photoresist
applying
Prior art date
Application number
CS827076A
Other languages
Czech (cs)
English (en)
Other versions
CS707682A1 (en
Inventor
Frank Schmidt
Horst Tyrroff
Original Assignee
Frank Schmidt
Horst Tyrroff
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Frank Schmidt, Horst Tyrroff filed Critical Frank Schmidt
Publication of CS707682A1 publication Critical patent/CS707682A1/cs
Publication of CS245264B1 publication Critical patent/CS245264B1/cs

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CS827076A 1981-10-01 1982-10-05 Method of freely carried distance mask making for diminishing projection systems CS245264B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD81233773A DD206924A3 (de) 1981-10-01 1981-10-01 Verfahren zum herstellen einer freitragenden abstandsmaske

Publications (2)

Publication Number Publication Date
CS707682A1 CS707682A1 (en) 1985-06-13
CS245264B1 true CS245264B1 (en) 1986-09-18

Family

ID=5533888

Family Applications (1)

Application Number Title Priority Date Filing Date
CS827076A CS245264B1 (en) 1981-10-01 1982-10-05 Method of freely carried distance mask making for diminishing projection systems

Country Status (8)

Country Link
US (1) US4497884A (zh)
JP (1) JPS5875837A (zh)
CS (1) CS245264B1 (zh)
DD (1) DD206924A3 (zh)
DE (1) DE3232174A1 (zh)
FR (1) FR2515373A1 (zh)
GB (1) GB2107618B (zh)
SU (1) SU1352445A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5310674A (en) * 1982-05-10 1994-05-10 Bar-Ilan University Apertured cell carrier
US5272081A (en) * 1982-05-10 1993-12-21 Bar-Ilan University System and methods for cell selection
US4772540A (en) * 1985-08-30 1988-09-20 Bar Ilan University Manufacture of microsieves and the resulting microsieves
ATA331285A (de) * 1985-11-13 1988-11-15 Ims Ionen Mikrofab Syst Verfahren zur herstellung einer transmissionsmaske
DE10137493A1 (de) * 2001-07-31 2003-04-10 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung einer selbsttragenden elektronenoptisch durchstrahlbaren Struktur und nach dem Verfahren hergestellte Struktur
FR2936361B1 (fr) * 2008-09-25 2011-04-01 Saint Gobain Procede de fabrication d'une grille submillimetrique electroconductrice, grille submillimetrique electroconductrice

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2047340A5 (zh) * 1969-05-05 1971-03-12 Gen Electric
DE2512086C3 (de) * 1975-03-19 1978-11-30 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung freitragender, dünner Metallstrukturen

Also Published As

Publication number Publication date
US4497884A (en) 1985-02-05
CS707682A1 (en) 1985-06-13
DE3232174A1 (de) 1983-04-21
GB2107618A (en) 1983-05-05
GB2107618B (en) 1985-07-10
SU1352445A1 (ru) 1987-11-15
JPS5875837A (ja) 1983-05-07
DD206924A3 (de) 1984-02-08
FR2515373B1 (zh) 1985-04-12
FR2515373A1 (fr) 1983-04-29

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