CN220731472U - Quartz boat structure with long service life - Google Patents
Quartz boat structure with long service life Download PDFInfo
- Publication number
- CN220731472U CN220731472U CN202322104377.9U CN202322104377U CN220731472U CN 220731472 U CN220731472 U CN 220731472U CN 202322104377 U CN202322104377 U CN 202322104377U CN 220731472 U CN220731472 U CN 220731472U
- Authority
- CN
- China
- Prior art keywords
- quartz boat
- ring
- extrusion
- placing
- fixedly connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 84
- 239000010453 quartz Substances 0.000 title claims abstract description 83
- 238000001125 extrusion Methods 0.000 claims description 56
- 238000005096 rolling process Methods 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 29
- 229910052710 silicon Inorganic materials 0.000 abstract description 29
- 239000010703 silicon Substances 0.000 abstract description 29
- 230000000694 effects Effects 0.000 abstract description 5
- 238000002360 preparation method Methods 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 230000000452 restraining effect Effects 0.000 description 17
- 235000012431 wafers Nutrition 0.000 description 17
- 230000000712 assembly Effects 0.000 description 12
- 238000000429 assembly Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a quartz boat structure with long service life, which relates to the technical field of solar cell preparation and comprises a quartz boat body, wherein the quartz boat body comprises a quartz boat assembly, a fixing assembly, an adjusting assembly and a placing plate, and the quartz boat assembly and the fixing assembly are distributed above the placing plate from top to bottom. The utility model has the advantages that: through the silicon chip quantity of heating as required, place the one side between the restriction pole with multiunit quartz boat subassembly, then utilize the connecting block grafting in the inside of spread groove, be convenient for stack multiunit quartz boat subassembly, the manual work is placed the silicon chip on placing the ring, and the quartz boat subassembly is placed according to the silicon chip quantity to the workman of being convenient for, and the quartz boat subassembly is adjusted to the silicon chip quantity that the workman needs to heat of being convenient for receive the effect of being convenient for change damage position after damaging to the quartz boat.
Description
Technical Field
The utility model relates to the technical field of solar cell preparation, in particular to a quartz boat structure with long service life.
Background
Quartz glass articles are widely used in the microelectronics industry in integrated circuit chip manufacturing with their excellent physicochemical properties, with the more widely used tools including quartz boats. In the preparation process of the silicon wafer solar cell, the quartz boat is a tool for loading and transferring silicon wafers, specifically, the silicon wafers are vertically and densely arranged in a clamping groove of the quartz boat, so that the silicon wafers are subjected to process operation in a reaction chamber; the main application is as follows: loading silicon wafers in the diffusion and annealing processes of the solar cell so as to ensure that the silicon wafers are not contacted with each other, and reducing the cracking rate; in addition, quartz boats are also needed for transferring among the working procedures;
however, when the silicon wafer is heated, the number of clamping grooves of the quartz boat cannot be adjusted according to the number of the silicon wafer, so that the whole quartz boat needs to be replaced due to the fact that the positions of the quartz boat are damaged, the service lives of other parts of the quartz boat are greatly reduced, and the situation that part of resources are wasted is caused.
Disclosure of Invention
The utility model aims to provide a quartz boat structure with long service life.
In order to solve the problems set forth in the background art, the utility model provides the following technical scheme: the utility model provides a long service life's quartz boat structure, includes the quartz boat body, the quartz boat body is including quartz boat subassembly, fixed subassembly, adjusting component and place the board, quartz boat subassembly and fixed subassembly are from last to distributing in the top of placing the board down, fixed subassembly is including restriction pole, holding ring and threaded rod, place the board and be L type, the equal fixedly connected with restriction pole in board top both sides of placing, holding ring sliding connection is in the inner wall of placing the board, the outside roll connection of threaded rod is in the inside of placing the board, the quartz boat subassembly is including restriction ring, placing ring, connecting block and spread groove, two one side inner wall sliding connection between the restriction pole has the restriction ring, multiunit the equal fixedly connected with of inner wall of restriction ring places the ring, multiunit equal fixedly connected with a plurality of connecting blocks all around the opposite side of restriction ring, and a plurality of connecting blocks all peg graft in the inner wall of spread groove, the holding ring fixedly connected with support frame, the top surface of placing the board is all offered in the inner wall of placing the board, the first spout has been seted up in the top surface of first, the connecting rod is in the bottom surface of the base is fixed to the first spout, the top of the base is stretched out and the top of the base is connected with the top of the base is stretched out and stretched out, the top end of the telescopic rod is connected to the bottom surface of the placing plate in a sliding manner.
Preferably, the top back of support frame all fixedly connected with first extrusion ring, a plurality of first extrusion groove has all been seted up to positive bottom both sides of restriction ring, and mutually support between first extrusion ring and the first extrusion groove.
Preferably, the limiting ring back fixedly connected with second extrusion ring, the positive both sides of placing the board have all seted up the second extrusion groove, and mutually support between second extrusion ring and the second extrusion groove, second extrusion ring and first extrusion ring are the same with the size in first extrusion ring and second extrusion groove respectively.
The technical scheme is adopted: compared with the prior art, the utility model has the beneficial effects that
1. Through the silicon chip quantity of heating as required, place the one side between the restriction pole with multiunit quartz boat subassembly, then utilize the connecting block grafting in the inside of spread groove, be convenient for stack multiunit quartz boat subassembly, the manual work is placed the silicon chip on placing the ring, be convenient for the workman places the quartz boat subassembly according to the silicon chip quantity, the removal through the support frame is convenient for extrude first extrusion ring in the inside of first extrusion groove, extrude the quartz boat subassembly that the multiunit was placed together fixedly, the silicon chip quantity that the workman needs to heat of being convenient for is convenient for adjust the quartz boat subassembly after the quartz boat receives the damage, the effect of being convenient for change damage position has been improved the quartz boat and appears in the circumstances that life reduces under the collision condition.
2. Through assemble between the multiunit quartz boat subassembly and place the side at the restriction pole, be convenient for the workman drive the threaded rod through rotating the regulating disk and rotate, then the support frame removes along the threaded rod, then the support frame extrudees fixedly to multiunit quartz boat subassembly with the side of placing the board, the workman is through adjusting the height of telescopic link, the top of being convenient for the telescopic link slides along the bottom surface of placing the board, then make to place board and base junction and rotate for the centre of a circle, the workman of being convenient for adjusts the angle of quartz boat subassembly, the be convenient for toast better to the silicon chip.
Drawings
FIG. 1 is a schematic view of a quartz boat body according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of connection relationship of a placement board according to an embodiment of the present utility model;
FIG. 3 is a schematic view of a first quartz boat assembly according to an embodiment of the utility model;
FIG. 4 is a schematic view of a second quartz boat assembly according to an embodiment of the utility model;
FIG. 5 is a schematic diagram of an adjusting assembly according to an embodiment of the present utility model.
In the figure: 1. a quartz boat body; 2. a quartz boat assembly; 21. a confinement ring; 211. a second extrusion ring; 212. a second pressing groove; 22. placing a ring; 23. a connecting block; 24. a connecting groove; 3. a fixing assembly; 31. a restraining bar; 32. a positioning ring; 33. a threaded rod; 34. a support frame; 341. a first extrusion ring; 342. a first pressing groove; 35. a first chute; 36. a second chute; 37. an adjusting plate; 4. an adjustment assembly; 41. a base; 42. a telescopic rod; 5. the plate is placed.
Detailed Description
The following describes the embodiments of the present utility model further with reference to the drawings. The description of these embodiments is provided to assist understanding of the present utility model, but is not intended to limit the present utility model. In addition, the technical features of the embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.
Example 1
Referring to fig. 1-5, the present utility model provides a technical solution: including quartz boat body 1, quartz boat body 1 is including quartz boat subassembly 2, fixed subassembly 3, adjusting part 4 and place board 5, quartz boat subassembly 2 and fixed subassembly 3 are from last to distributing in the top of placing board 5 down, fixed subassembly 3 is including restraining bar 31, holding ring 32 and threaded rod 33, place board 5 and be L type, place the equal fixedly connected with restraining bar 31 in board 5 top both sides, holding ring 32 sliding connection is in the inner wall of placing board 5, the inner wall roll connection of threaded rod 33 is in the inside of placing board 5, quartz boat subassembly 2 is including restraining ring 21, place ring 22, connecting block 23 and spread groove 24, one side inner wall sliding connection between two restraining bars 31 has restraining ring 21, the equal fixedly connected with of inner wall of multiunit restraining ring 21 places ring 22, equal fixedly connected with a plurality of connecting blocks 23 all around one side of multiunit restraining ring 21, equal fixedly connected with spread groove 24 all around the opposite side of multiunit restraining ring 21, and a plurality of connecting blocks 23 all peg graft in the inner wall of spread groove 24.
Referring to fig. 1-4, a supporting frame 34 is fixedly connected to the positioning ring 32, first sliding grooves 35 are formed on two sides of the top surface of the placement plate 5, the first sliding grooves 35 do not penetrate through the interior of the placement plate 5, two sides of the bottom end of the supporting frame 34 extend to the inner wall of the first sliding grooves 35, a first extrusion ring 341 is fixedly connected to the back surface of the top of the supporting frame 34, first extrusion grooves 342 are formed on two sides of the bottom of the front surface of the plurality of limiting rings 21, the first extrusion ring 341 and the first extrusion grooves 342 are matched with each other, a second extrusion ring 211 is fixedly connected to the back surface of the limiting rings 21, second extrusion grooves 212 are formed on two sides of the front surface of the placement plate 5, the second extrusion ring 211 and the second extrusion grooves 212 are matched with each other, and the second extrusion ring 211 and the first extrusion ring 341 are respectively the same as the first extrusion ring 341 and the second extrusion grooves 212 in size;
in this embodiment, through the side of restriction ring 21 having seted up interactive hole, the silicon chip of being convenient for is when toasting, and the heat is convenient for flow to the inside of restriction ring 21 from interactive hole, and the effect of toasting the silicon chip of being convenient for change utilizes first spout 35 to be convenient for carry out stable removal to support frame 34.
When the quartz boat assembly is used, the plurality of groups of quartz boat assemblies 2 are placed on one side between the limiting rods 31 according to the number of silicon wafers to be heated, then the connecting blocks 23 are used for being inserted into the connecting grooves 24, the plurality of groups of quartz boat assemblies 2 are convenient to stack, the silicon wafers are manually placed on the placing ring 22, workers can conveniently place the quartz boat assemblies 2 according to the number of the silicon wafers, the first extrusion ring 341 is conveniently extruded in the first extrusion groove 342 through the movement of the supporting frame 34, the plurality of groups of quartz boat assemblies 2 to be placed together are fixedly extruded, the number of the silicon wafers to be heated by the workers is convenient to adjust the quartz boat assemblies 2, the effect that damaged parts are convenient to replace after the quartz boat is damaged is improved, and the service life of the quartz boat under the collision condition is reduced.
Example 2
Referring to fig. 1-5, the present utility model provides a technical solution: including quartz boat body 1, quartz boat body 1 is including quartz boat subassembly 2, fixed subassembly 3, adjusting part 4 and place board 5, quartz boat subassembly 2 and fixed subassembly 3 are from last to distributing in the top of placing board 5 down, fixed subassembly 3 is including restraining bar 31, holding ring 32 and threaded rod 33, place board 5 and be L type, place the equal fixedly connected with restraining bar 31 in board 5 top both sides, holding ring 32 sliding connection is in the inner wall of placing board 5, the inner wall roll connection of threaded rod 33 is in the inside of placing board 5, quartz boat subassembly 2 is including restraining ring 21, place ring 22, connecting block 23 and spread groove 24, one side inner wall sliding connection between two restraining bars 31 has restraining ring 21, the equal fixedly connected with of inner wall of multiunit restraining ring 21 places ring 22, equal fixedly connected with a plurality of connecting blocks 23 all around one side of multiunit restraining ring 21, equal fixedly connected with spread groove 24 all around the opposite side of multiunit restraining ring 21, and a plurality of connecting blocks 23 all peg graft in the inner wall of spread groove 24.
Referring to fig. 1-5, the back of the top of the supporting frame 34 is fixedly connected with a first extrusion ring 341, two sides of the bottom of the front of the plurality of limiting rings 21 are respectively provided with a first extrusion groove 342, the first extrusion ring 341 and the first extrusion grooves 342 are mutually matched, the back of the limiting rings 21 is fixedly connected with a second extrusion ring 211, two sides of the front of the placing plate 5 are respectively provided with a second extrusion groove 212, the second extrusion ring 211 and the second extrusion grooves 212 are mutually matched, the second extrusion ring 211 and the first extrusion ring 341 are respectively the same as the first extrusion ring 341 and the second extrusion grooves 212 in size, the middle of the top of the placing plate 5 is provided with a second sliding groove 36, the inner walls of the second sliding grooves 36 are in rolling connection with threaded rods 33, 33 are in rolling connection with the inner walls of the supporting frame 34, the front ends of the threaded rods 33 extend to the outer sides of the placing plate 5, the outer sides of the threaded rods 33 are not provided with threaded structures, the front ends of the threaded rods 33 are fixedly connected with an adjusting disc 37, the adjusting component 4 comprises a base 41 and a telescopic rod 42, one side of the base 41 is in rolling connection with the bottom of the placing plate 5, the top of the base 41 is in rolling connection with the bottom of the placing plate 5, the telescopic rod 42 is in rolling connection with the top of the telescopic rod 42;
in this embodiment, the central bottom surface of the supporting frame 34 extends to the inner wall of the second sliding groove 36, so that the threaded rod 33 is convenient to penetrate inside, and when the worker rotates the adjusting disc 37, the threaded rod 33 drives the supporting frame 34 to move in the second sliding groove 36.
When the quartz boat assembly is used, the plurality of groups of quartz boat assemblies 2 are assembled and placed on the side face of the limiting rod 31, workers are facilitated to drive the threaded rod 33 to rotate through the rotating adjusting disc 37, then the supporting frame 34 moves along the threaded rod 33, then the supporting frame 34 is fixedly extruded towards the plurality of groups of quartz boat assemblies 2 by the side face of the placing plate 5, the workers slide along the bottom face of the placing plate 5 by adjusting the height of the telescopic rod 42, then the connecting part of the placing plate 5 and the base 41 is enabled to rotate as the center of a circle, the angles of the quartz boat assemblies 2 are facilitated to be adjusted by the workers, and the silicon wafers are baked better.
Working principle: by placing the plurality of groups of quartz boat assemblies 2 on one side between the limiting rods 31 according to the number of silicon wafers to be heated, and then plugging the connecting blocks 23 into the connecting grooves 24, the plurality of groups of quartz boat assemblies 2 are convenient to stack, the silicon wafers are manually placed on the placing ring 22, workers can conveniently place the quartz boat assemblies 2 according to the number of the silicon wafers, the first extrusion ring 341 is conveniently extruded in the first extrusion groove 342 through the movement of the supporting frame 34, the plurality of groups of quartz boat assemblies 2 placed together are fixedly extruded, the number of the silicon wafers to be heated by the workers can be conveniently adjusted, the effect that the damaged parts of the quartz boat can be conveniently replaced after the quartz boat is damaged is facilitated, the situation that the service life of the quartz boat is reduced under the collision condition is improved, assemble and place the side at the restriction pole 31 between the multiunit quartz boat subassembly 2, be convenient for the workman drives threaded rod 33 through rotating the regulating disk 37 and rotates, then support frame 34 moves along threaded rod 33, then support frame 34 extrudees fixedly to multiunit quartz boat subassembly 2 with the side of placing board 5, the workman is through adjusting the height of telescopic link 42, the top of telescopic link 42 of being convenient for slides along the bottom surface of placing board 5, then make place board 5 and base 41 junction and rotate for the centre of a circle, the workman of being convenient for adjusts the angle of quartz boat subassembly 2, be convenient for toast the silicon chip better.
The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings, but the present utility model is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the utility model, and yet fall within the scope of the utility model.
Claims (3)
1. The utility model provides a long service life's quartz boat structure, includes quartz boat body (1), its characterized in that: the quartz boat body (1) comprises a quartz boat component (2), a fixing component (3), an adjusting component (4) and a placing plate (5), the quartz boat component (2) and the fixing component (3) are distributed above the placing plate (5) from top to bottom, the fixing component (3) comprises a limiting rod (31), a positioning ring (32) and a threaded rod (33), the placing plate (5) is L-shaped, both sides of the top of the placing plate (5) are fixedly connected with the limiting rod (31), the positioning ring (32) is slidably connected to the inner wall of the placing plate (5), the outer side of the threaded rod (33) is in rolling connection with the inside of the placing plate (5), the quartz boat component (2) comprises a limiting ring (21), a placing ring (22), a connecting block (23) and a connecting groove (24), one side inner wall between the two limiting rods (31) is slidably connected with the limiting ring (21), the inner walls of a plurality of groups of limiting rings (21) are fixedly connected with the placing ring (22), one side of the limiting ring (21) is fixedly connected with the other side of the limiting ring (24), and the other side of the limiting ring (21) is fixedly connected with the connecting block (24), the utility model provides a locating ring (32) fixedly connected with support frame (34), first spout (35) have all been seted up to the top surface both sides of placing board (5), and first spout (35) do not run through in the inside of placing board (5), second spout (36) have been seted up at the middle part of placing board (5) top surface, the inner wall roll connection of second spout (36) has threaded rod (33), the outside roll connection of threaded rod (33) is in the inner wall of support frame (34), the front end of threaded rod (33) extends to the outside of placing board (5), the front end fixedly connected with regulating disk (37) of threaded rod (33), the bottom both sides of support frame (34) all extend to the inner wall of first spout (35), adjusting part (4) are including base (41) and telescopic link (42), the top one side rotation of base (41) is connected to the bottom surface of placing board (5), the top fixedly connected with telescopic link (42), the top sliding connection of telescopic link (42) is on the bottom surface of placing board (5).
2. A long life quartz boat structure according to claim 1, wherein: the top back of support frame (34) all fixedly connected with first extrusion ring (341), a plurality of first extrusion groove (342) have all been seted up to positive bottom both sides of restriction ring (21), and mutually support between first extrusion ring (341) and first extrusion groove (342).
3. A long life quartz boat structure according to claim 2, wherein: the limiting ring (21) back fixedly connected with second extrusion ring (211), second extrusion groove (212) have all been seted up to the positive both sides of placing board (5), and mutually support between second extrusion ring (211) and second extrusion groove (212), second extrusion ring (211) and first extrusion ring (341) are the same with the size of first extrusion ring (341) and second extrusion groove (212) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322104377.9U CN220731472U (en) | 2023-08-04 | 2023-08-04 | Quartz boat structure with long service life |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322104377.9U CN220731472U (en) | 2023-08-04 | 2023-08-04 | Quartz boat structure with long service life |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220731472U true CN220731472U (en) | 2024-04-05 |
Family
ID=90489056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322104377.9U Active CN220731472U (en) | 2023-08-04 | 2023-08-04 | Quartz boat structure with long service life |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220731472U (en) |
-
2023
- 2023-08-04 CN CN202322104377.9U patent/CN220731472U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN220731472U (en) | Quartz boat structure with long service life | |
| CN113579536B (en) | Automatic bridging positioning assembly for oblique beam of intelligent manufacturing of photovoltaic heliostat | |
| CN112935126A (en) | Method for machining pipe fitting of cold-heat exchanger | |
| CN210038048U (en) | Semiconductor wafer test equipment | |
| CN211125610U (en) | Automatic wafer loading and unloading device for quartz boat | |
| CN212095989U (en) | Silicon rod automatic centering presss from both sides tight circulation frock | |
| CN208938993U (en) | A kind of vertical plated film system of bf body of achievable fast cooling | |
| CN112563188A (en) | Quartz clamp for wafer and using method thereof | |
| CN220439589U (en) | Clamp for reducing wafer annealing warping | |
| CN210349793U (en) | Novel semiconductor wafer bearing table | |
| CN220672532U (en) | Solar silicon wafer cleaning basket | |
| CN116673710B (en) | Jet pump assembling equipment and assembling method | |
| CN219534477U (en) | Soft baking oven for wafer production | |
| CN215967562U (en) | Clamping and positioning device for repairing threads | |
| CN217493499U (en) | Double-station machining device | |
| CN115540549B (en) | Drying device is used in crystal silicon wafer processing | |
| CN218170963U (en) | Mirror surface disc for wafer cutting machine | |
| CN219303621U (en) | Frock is used in silicon chip quality detection | |
| CN213366565U (en) | Wafer ejection device based on H-shaped top plate with limited degree of freedom | |
| CN216925046U (en) | Wafer drying device | |
| CN216644931U (en) | High-temperature calcining device | |
| CN220132402U (en) | Guiding positioning device | |
| CN218918811U (en) | Quick adjustable compatible basket of flowers | |
| CN218034473U (en) | Gas high-temperature gas kiln for producing aluminum oxide ceramic discs | |
| CN221089575U (en) | Automatic feeding and discharging mechanism for wafer cutting machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |