CN216644931U - High-temperature calcining device - Google Patents

High-temperature calcining device Download PDF

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Publication number
CN216644931U
CN216644931U CN202123244506.1U CN202123244506U CN216644931U CN 216644931 U CN216644931 U CN 216644931U CN 202123244506 U CN202123244506 U CN 202123244506U CN 216644931 U CN216644931 U CN 216644931U
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CN
China
Prior art keywords
side wall
calcining
frame
sliding
calcining furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN202123244506.1U
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Chinese (zh)
Inventor
罗冷
胡伟
韦家谋
杨亮
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Wuxi Yunling Semiconductor Technology Co ltd
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Wuxi Yunling Semiconductor Technology Co ltd
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Priority to CN202123244506.1U priority Critical patent/CN216644931U/en
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Publication of CN216644931U publication Critical patent/CN216644931U/en
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Abstract

The utility model discloses a high-temperature calcining device which comprises a calcining furnace and a base arranged at the bottom of the calcining furnace, wherein a calcining table is arranged in the calcining furnace, an installation groove is formed in the side wall of the base, a plurality of symmetrically-arranged locking universal wheels are connected in the installation groove through a plurality of groups of lifting mechanisms, and a placing frame group is arranged on the upper side wall of the calcining table. This kind of high temperature calcining device, can make calcining furnace be in the horizontality after placing, place more steadily reliably, avoid it to rock and lead to inside polished section to collide with the damage, and simultaneously, can be when high temperature is calcined, carry out self-holding to the polished section, guarantee the high temperature calcination in-process, it is more reliable and more stable, lead to inside polished section to collide with the damage when avoiding colliding with, after the temperature reduces, loosen the polished section, it is more convenient when making place and take out the polished section, and, be convenient for place the polished section of equidimension specification not, it is more convenient to use, the practicality is stronger, and, make space utilization in the calcining furnace higher.

Description

High-temperature calcining device
Technical Field
The utility model belongs to the technical field of calcining devices, and particularly relates to a high-temperature calcining device.
Background
The silicon carbide single crystal is subjected to subsequent processes of machining, cutting, grinding, polishing and the like to form a silicon carbide polished wafer, and after the silicon carbide polished wafer is processed, a high-temperature calcining device is required to be used for carrying out high-temperature calcining treatment on the silicon carbide polished wafer.
However, current carborundum polishing piece production is with high temperature calcining device is when using, is not convenient for place the polishing piece of not equidimension specification for calcining device's space utilization is lower, and simultaneously, calcining device often leads to placing unstably because the ground is uneven in the use, perhaps when the collision, owing to press from both sides tight fixedly to polishing piece not, can lead to inside polishing piece to collide with the damage, influences its product quality.
The present invention has been made in view of this situation.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problems, the utility model adopts the technical scheme that:
a high-temperature calcining device comprises a calcining furnace and a base arranged at the bottom of the calcining furnace, wherein a calcining table is arranged in the calcining furnace, a mounting groove is formed in the side wall of the base, a plurality of symmetrically-arranged locking universal wheels are connected in the mounting groove through a plurality of groups of lifting mechanisms, and a placing frame assembly is arranged on the upper side wall of the calcining table.
Each group elevating system includes fixed pipe and the screwed pipe of fixed connection in the mounting groove bottom, screwed pipe female connection has the threaded rod, and the upper end of threaded rod rotates with the last lateral wall of mounting groove to be connected, the lateral wall threaded connection of threaded rod has the movable plate, and the lower lateral wall of locking universal wheel and movable plate is fixed, the lateral wall of movable plate is inserted and is equipped with the slide bar, the slide bar is inserted and is established in the fixed tube, and the upper end of slide bar is fixed with the last lateral wall of mounting groove.
And an adjusting nut is fixedly sleeved on the side wall of each threaded rod.
The rack subassembly includes the mount that a plurality of arrays of fixed connection lateral wall set up on calcining the platform, and the last lateral wall of mount is connected with the multilayer through slide mechanism and removes the frame, each layer remove the frame and include the limit frame and a plurality of well frame that two symmetries set up, each the first limiting plate that two symmetries of lateral wall fixedly connected with of limit frame set up, and the second limiting plate that four symmetries of two relative lateral wall fixedly connected with of each well frame set up, each layer the lateral wall of removing the frame is provided with a plurality of clamping components.
Slide mechanism is including seting up the sliding tray at removal frame and mount upper side wall, the lower lateral wall fixedly connected with slide bar of removal frame, and the slide bar slides in the sliding tray.
Each clamping component comprises a sleeve fixedly connected to the side wall of the movable frame, gas is filled in the sleeve, a sleeve rod is inserted into the sleeve, and a round corner is formed in the end portion of the sleeve rod.
Compared with the prior art, the utility model has the following beneficial effects:
according to the utility model, the lifting mechanism and the like are arranged, each adjusting nut is rotated, the rotation of the adjusting nut drives the threaded rod to rotate, and further the movable plate is driven to move along the sliding rod, so that each locking universal wheel is lifted and adjusted, the calcining furnace can be placed in a horizontal state, the placing is more stable and reliable, and the damage caused by collision of the polishing sheets in the calcining furnace due to shaking is avoided.
According to the utility model, the placing frame assembly and the like are arranged, the moving frame assembly is inserted into the fixed frame through the sliding mechanism, then the polishing sheets are inserted between the moving frames, the number of layers of the moving frames can be adjusted according to the use requirement, the use is more convenient, the practicability is stronger, and when the polishing sheets with larger size are required to be placed, only the number of the middle frames in the moving frame is required to be reduced, so that the polishing sheets with different sizes and specifications can be placed conveniently, the use is more convenient, the practicability is stronger, and the space utilization rate in the calcining furnace is higher.
According to the utility model, through arranging the clamping assembly and the like, when high-temperature calcination is carried out, gas in the sleeve is rapidly expanded under high temperature, so that the sleeve rod is pushed to move outwards and then abuts against the side wall of the polishing sheet, automatic clamping of the sleeve rod is realized, the high-temperature calcination process is ensured to be more stable and reliable, collision and damage of the polishing sheet inside the sleeve rod caused by collision are avoided, the product quality of the polishing sheet is ensured, after the temperature is reduced, air in the sleeve is contracted, the sleeve rod is automatically retracted, the polishing sheet is loosened, and the polishing sheet is more convenient to place and take out.
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Drawings
In the drawings:
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the internal structure of a calciner according to the utility model;
FIG. 3 is an enlarged schematic view of the structure at A in FIG. 2;
fig. 4 is an enlarged schematic view of a portion B in fig. 3.
In the figure: 1-a calciner; 101-a calcination table; 2-a base; 3-mounting grooves; 4, moving the plate; 5-locking the universal wheel; 601-a sliding groove; 602-a slider; 701-fixing a tube; 702-a slide bar; 703-a threaded pipe; 704-a threaded rod; 801-fixing frame; 802-side frame; 803-first limiting plate; 804-a second limiting plate; 805-middle frame; 901-casing; 902-a loop bar; 10-adjusting the nut; 11-polishing pad.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and the following embodiments are used to illustrate the present invention.
As shown in figures 1 to 4, a high-temperature calcining device comprises a calcining furnace 1 and a base 2 arranged at the bottom of the calcining furnace 1, wherein a calcining table 101 is arranged in the calcining furnace 1, a mounting groove 3 is formed in the side wall of the base 2, a plurality of symmetrically arranged locking universal wheels 5 are connected in the mounting groove 3 through a plurality of groups of lifting mechanisms, a placing frame assembly is arranged on the upper side wall of the calcining table 101, the calcining furnace 1 can be in a horizontal state after being placed, the placing is more stable and reliable, the damage caused by collision of an internal polished section 11 due to shaking of the calcining furnace can be avoided, meanwhile, the polished section 11 can be automatically clamped during high-temperature calcining of a silicon carbide single crystal, the high-temperature calcining process is ensured to be more stable and reliable, the damage caused by collision of the internal polished section 11 can be avoided, after the temperature is reduced, the polished section 11 is loosened, and the placing and taking out of the polished section 11 are more convenient, in addition, the polishing sheets 11 with different sizes and specifications can be conveniently placed, the use is more convenient, the practicability is higher, and the space utilization rate in the calcining furnace 1 is higher.
Each set of lifting mechanism comprises a fixed pipe 701 and a threaded pipe 703 which are fixedly connected with the bottom of the installation groove 3, a threaded rod 704 is connected with the threaded pipe 703 in a threaded way, and the upper end of the threaded rod 704 is rotatably connected with the upper side wall of the mounting groove 3, the side wall of the threaded rod 704 is connected with the moving plate 4 in a threaded manner, the locking universal wheel 5 is fixed with the lower side wall of the moving plate 4, the sliding rod 702 is inserted in the fixed pipe 701, and the upper end of the sliding rod 702 is fixed with the upper side wall of the mounting groove 3, each adjusting nut 10 is rotated, the rotation of the adjusting nut 10 drives the rotation of the threaded rod 704, thereby driving the moving plate 4 to move along the sliding rod 702, and thus lifting and lowering of each locking universal wheel 5 is adjusted, therefore, the calcining furnace 1 can be in a horizontal state after being placed, the placing is more stable and reliable, and the polishing sheet 11 in the calcining furnace is prevented from being collided and damaged due to shaking.
The side wall of each threaded rod 704 is fixedly sleeved with an adjusting nut 10 for facilitating rotation of the threaded rod 704.
The placing rack assembly comprises a plurality of fixed racks 801 fixedly connected to the upper side wall of the calcining table 101 and arranged in an array, the upper side wall of each fixed rack 801 is connected with a plurality of movable racks through a sliding mechanism, each movable rack comprises two symmetrically arranged side racks 802 and a plurality of middle racks 805, the side wall of each side rack 802 is fixedly connected with two symmetrically arranged first limiting plates 803, two opposite side walls of each middle rack 805 are fixedly connected with four symmetrically arranged second limiting plates 804, the side wall of each movable rack is provided with a plurality of clamping assemblies, the movable rack group is inserted into the fixed rack 801 through the sliding mechanism, then, the polishing sheets 11 are inserted between the movable racks of each layer, the number of layers of the movable racks can be adjusted according to use requirements, the use is more convenient, the practicability is stronger, and when the polishing sheets 11 with larger size need to be placed, only the number of the middle racks 805 in the movable racks of the layer is required to be reduced, therefore, the polishing sheets 11 with different sizes and specifications can be conveniently placed, the use is more convenient, the practicability is higher, and the space utilization rate in the calcining furnace 1 is higher.
The sliding mechanism comprises a sliding groove 601 formed in the upper side wall of the moving frame and the upper side wall of the fixing frame 801, a sliding strip 602 is fixedly connected to the lower side wall of the moving frame, and the sliding strip 602 slides in the sliding groove 601, so that the moving frame can be mounted and dismounted conveniently.
Each clamping assembly includes sleeve 901 on the fixed connection removal frame lateral wall, and the gas is filled in sleeve 901, sleeve 901 interpolation is equipped with loop bar 902, and the tip of loop bar 902 is provided with the fillet, when carrying out the high temperature calcination, gas in the sleeve 901 receives high temperature rapid expansion, thereby promote loop bar 902 outside to remove the back and offset with polished section 11's lateral wall, the realization carries out self-holding to it, guarantee the high temperature calcination in-process, it is more reliable and more stable, lead to inside polished section 11 to collide with the damage when avoiding colliding with, guarantee its product quality, after the temperature reduces, air shrinkage in the sleeve 901, make loop bar 902 carry out the automatic withdrawal, loosen polished section 11, it is more convenient when making place and take out polished section 11.
When the calcining furnace is used, firstly, each adjusting nut 10 is rotated, the rotation of each adjusting nut 10 drives the threaded rod 704 to rotate, and further the movable plate 4 is driven to move along the sliding rod 702, so that each locking universal wheel 5 is adjusted in a lifting mode, the calcining furnace 1 can be placed in a horizontal state, the placing is more stable and reliable, and the polishing sheets 11 in the calcining furnace are prevented from being collided and damaged due to shaking;
then, the movable frame group is inserted into the fixed frame 801 through the sliding mechanism, then, the polishing sheets 11 are inserted between each layer of movable frame, the number of layers of the movable frame can be adjusted according to the use requirement, the use is more convenient, the practicability is stronger, and when the polishing sheets 11 with larger size are required to be placed, the number of the middle frames 805 in the movable frame is only required to be reduced, so that the polishing sheets 11 with different sizes and specifications can be conveniently placed, the use is more convenient, the practicability is stronger, and the space utilization rate in the calcining furnace 1 is higher;
and, when carrying out the high temperature calcination, the gas in the sleeve pipe 901 receives high temperature rapid expansion, thereby promote loop bar 902 outside to remove the back and offset with polishing piece 11's lateral wall, the realization carries out self-holding to it, guarantee the high temperature calcination in-process, it is more reliable and more stable, lead to inside polishing piece 11 to collide with the damage when avoiding colliding with, guarantee its product quality, after the temperature reduces, the air shrinkage in the sleeve pipe 901, make loop bar 902 carry out automatic withdrawal, loosen polishing piece 11, it is more convenient when making place and take out polishing piece 11.

Claims (6)

1. The high-temperature calcining device comprises a calcining furnace (1) and a base (2) arranged at the bottom of the calcining furnace, wherein a calcining table (101) is arranged in the calcining furnace (1), and the high-temperature calcining device is characterized in that a mounting groove (3) is formed in the side wall of the base (2), a plurality of locking universal wheels (5) which are symmetrically arranged are connected in the mounting groove (3) through a plurality of groups of lifting mechanisms, and a placing frame assembly is arranged on the upper side wall of the calcining table (101).
2. A high-temperature calcining device as claimed in claim 1, wherein each group of the lifting mechanism comprises a fixed pipe (701) and a threaded pipe (703) which are fixedly connected with the bottom of the mounting groove (3), the threaded pipe (703) is internally threaded with a threaded rod (704), the upper end of the threaded rod (704) is rotatably connected with the upper side wall of the mounting groove (3), the side wall of the threaded rod (704) is threaded with the moving plate (4), the locking universal wheel (5) is fixed with the lower side wall of the moving plate (4), the side wall of the moving plate (4) is inserted with a sliding rod (702), the sliding rod (702) is inserted in the fixed pipe (701), and the upper end of the sliding rod (702) is fixed with the upper side wall of the mounting groove (3).
3. A high-temperature calcination device as claimed in claim 2, wherein the side wall of each threaded rod (704) is fixedly sleeved with an adjusting nut (10).
4. A high temperature calcination device as claimed in claim 1, wherein the rack assembly comprises a plurality of fixed frames (801) fixedly connected to the upper side wall of the calcination table (101) and arranged in an array, and the upper side wall of the fixed frame (801) is connected with a plurality of movable frames through a sliding mechanism, each movable frame comprises two symmetrically arranged side frames (802) and a plurality of middle frames (805), each side wall of the side frame (802) is fixedly connected with two symmetrically arranged first limiting plates (803), and each middle frame (805) is fixedly connected with four symmetrically arranged second limiting plates (804) at two opposite side walls, and each side wall of the movable frame is provided with a plurality of clamping assemblies.
5. A high-temperature calcination device according to claim 4, wherein the sliding mechanism comprises a sliding groove (601) formed on the upper side wall of the movable frame and the fixed frame (801), the lower side wall of the movable frame is fixedly connected with a sliding bar (602), and the sliding bar (602) slides in the sliding groove (601).
6. A high-temperature calcination device according to claim 4, wherein each of the clamping assemblies comprises a sleeve (901) fixedly connected to a side wall of the movable frame, the sleeve (901) is filled with gas, a loop bar (902) is inserted into the sleeve (901), and the end of the loop bar (902) is provided with a round corner.
CN202123244506.1U 2021-12-22 2021-12-22 High-temperature calcining device Withdrawn - After Issue CN216644931U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202123244506.1U CN216644931U (en) 2021-12-22 2021-12-22 High-temperature calcining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202123244506.1U CN216644931U (en) 2021-12-22 2021-12-22 High-temperature calcining device

Publications (1)

Publication Number Publication Date
CN216644931U true CN216644931U (en) 2022-05-31

Family

ID=81744521

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202123244506.1U Withdrawn - After Issue CN216644931U (en) 2021-12-22 2021-12-22 High-temperature calcining device

Country Status (1)

Country Link
CN (1) CN216644931U (en)

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