CN208938993U - A kind of vertical plated film system of bf body of achievable fast cooling - Google Patents
A kind of vertical plated film system of bf body of achievable fast cooling Download PDFInfo
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- CN208938993U CN208938993U CN201821879851.8U CN201821879851U CN208938993U CN 208938993 U CN208938993 U CN 208938993U CN 201821879851 U CN201821879851 U CN 201821879851U CN 208938993 U CN208938993 U CN 208938993U
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- boat
- transfer device
- clamping mechanism
- fire door
- screw rod
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of vertical plated film system of bf body of achievable fast cooling, the corresponding lifting boat device of each furnace body, one first transfer device arrangement；Furnace body includes boiler tube, boat, fire door；The boat and boiler tube separate design, boat are connect with fire door；It goes up and down boat device and is set to boiler tube side, for driving fire door that boat is driven to exit or enter boiler tube；Several first transfer devices arrange that one end of the first transfer device is connect with lifting boat device, and the other end is connect with the second transfer device along the length direction of the second transfer device；First transfer device is for driving fire door that boat is driven to transfer between lifting boat device and the second transfer device；Second transfer device is for driving fire door that boat is driven to transfer between the first transfer device and loading and unloading station.The utility model uses separate type vertical tubular furnace, and the extensible boiler tube loading and unloading silicon wafer of boat eliminates inserted sheet and the boat cooling boiler tube time occupied in boiler tube in boiler tube, improves the utilization rate of boiler tube, improve production capacity.
Description
Technical field
The utility model relates to semiconductors and technical field of solar cell manufacturing more particularly to one kind, and fast prompt drop can be achieved
The vertical plated film system of bf body of temperature.
Background technique
Vertical tubular furnace is used for diffusion, the coating process of semicon industry and photovoltaic industry.Horizontal pipe furnace is upper at present
Material mode have developed rapidly, is high-efficient, production capacity is high.And vertical tubular furnace, since loading and unloading mode develops relatively slowly, and fall relatively
Afterwards.Relative to bedroom tube furnace, the production capacity of vertical tubular furnace is smaller at present, and there are two main causes:
1) working efficiency of loading and unloading system is not high；
2) existing vertical furnace tube is mainly an integral structure, i.e. boiler tube and boat is fixed together, and leads to loading and unloading
The time of boiler tube work is all occupied with cooling, limits the efficiency of vertical heater.
But vertical tubular furnace has lesser plant area to occupy relative to horizontal pipe furnace, fragment rate is extremely low, around the small, nothing of plating
The advantages that card slot prints.More and more thinner in silicon wafer, battery efficiency requires under higher and higher trend, and the market of vertical tubular furnace is more next
It is bigger.
Utility model content
The purpose of the utility model is to provide a kind of vertical plated film system of bf body of achievable fast cooling, using separate type
Vertical tubular furnace, the i.e. boat of vertical heater and fire door form separate structure with boiler tube as a whole；The extensible boiler tube dress of boat
Silicon wafer is unloaded, inserted sheet and the boat cooling boiler tube time occupied in boiler tube in boiler tube is eliminated, improves the utilization rate of boiler tube, mention
High production capacity.
To achieve the above object, using following technical scheme:
A kind of vertical plated film system of bf body of achievable fast cooling, including it is several furnace bodies, several lifting boat devices, several
First transfer device, one second transfer device；The corresponding lifting boat device of each furnace body, one first transfer device arrangement；It is described
Furnace body includes boiler tube, boat, fire door；The boat and boiler tube separate design, boat are connect with fire door；The lifting boat device is set to boiler tube
Side, for driving fire door that boat is driven to exit or enter boiler tube；Length of several first transfer devices along the second transfer device
Direction arrangement is spent, one end of the first transfer device is connect with lifting boat device, and the other end is connect with the second transfer device；Described
One transfer device is for driving fire door that boat is driven to transfer between lifting boat device and the second transfer device；The second transfer dress
It sets for driving fire door that boat is driven to transfer between the first transfer device and loading and unloading station.
Preferably, the inside of the fire door is fixedly connected with boat, the outside of fire door is equipped with fire door fixing seat.
Preferably, the lifting boat device includes lifting driving motor, lifting carriage mechanism, the first clamping mechanism；It is described
First clamping mechanism is for being clamped on fire door fixing seat, and lifting driving motor is for driving the first clamping mechanism along lifting carriage machine
Structure sliding lifting.
Preferably, first transfer device includes the first screw rod mould group, two first ball slide rails, the second clamping mechanism；
Two first ball slide rail is arranged in the two sides of the first screw rod mould group along the length direction for being parallel to the first screw rod mould group；It is described
Second clamping mechanism is for being clamped on fire door fixing seat, and the first screw rod mould group is for driving the second clamping mechanism to support to draw fire door
It connects and is slided on the first ball slide rail.
Preferably, second transfer device includes the second screw rod mould group, two second ball slide rails, at least a third clamping
Mechanism；Two second ball slide rail is arranged in the two of the second screw rod mould group along the length direction for being parallel to the second screw rod mould group
Side；The third clamping mechanism is for being clamped on fire door fixing seat, and the second screw rod mould group is for driving third clamping mechanism to lead
Draw fire door and be connected on the second ball slide rail and slides.
Preferably, the first screw rod mould group of several first transfer devices is arranged in parallel in the same of the second transfer device
Middle side part, and every one first screw rod mould group is each perpendicular to the second screw rod mould group arrangement.
Preferably, the system of bf body further includes third transfer device；The third transfer device is parallel to the first transfer
Device arrangement, one end are connect with the second transfer device；The third transfer device includes third screw rod mould group, two third balls
Sliding rail, the 4th clamping mechanism；The two thirds ball slide rail is arranged in third along the length direction for being parallel to third screw rod mould group
The two sides of screw rod mould group；4th clamping mechanism is for being clamped on fire door fixing seat, and third screw rod mould group is for driving the 4th
Clamping mechanism is connected on third ball slide rail with to draw fire door and is slided.
Preferably, first clamping mechanism, the second clamping mechanism, third clamping mechanism, the 4th clamping mechanism include
Sliding shoe, several slotting roller die groups, several latch mode groups；The slotting roller die group includes inserting roller driving cylinder, inserting roller, inserts roller and drives gas
Cylinder is for driving slotting roller stretching motion；One end of the slotting roller is fixedly connected with sliding shoe, and the other end is equipped with latch mode group；It is described
Latch mode group includes bolt driving cylinder, bolt, and bolt driving cylinder is for driving bolt stretching motion.
Preferably, the several first slotting roller aperture are equipped with along first direction in the fire door fixing seat, along perpendicular to first direction
Equipped with the several second slotting roller aperture；The bottom of every one first slotting roller aperture and intersection to the fire door fixing seat of the second slotting roller aperture is equal
Equipped with pin hole；The slotting roller driving cylinder of first clamping mechanism is for driving slotting roller to pass in and out the first slotting roller aperture, the second clamping
Mechanism, third clamping mechanism, the 4th clamping mechanism slotting roller driving cylinder for driving slotting roller to pass in and out the second slotting roller aperture；It is described to insert
Pin driving cylinder is for driving bolt to pass in and out pin hole.
Preferably, the slotting roller direction of motion of first clamping mechanism is parallel to the length direction of the first screw rod mould group；Institute
State the second clamping mechanism, third clamping mechanism, the 4th clamping mechanism the slotting roller direction of motion be parallel to the length of the second screw rod mould group
Spend direction；The direction of motion of the bolt is vertical with the direction of motion of slotting roller.
Using the above scheme, the beneficial effects of the utility model are:
Compared to the equipment that conventional multiple single ovens are combined into, the utility model integrally combines fire door and boat conduct
Changeable type directly removes loading and unloading silicon wafer after coming out of the stove, the new boat for having loaded silicon wafer is transported through to enter boiler tube production.Deng
It is not necessarily to occupy the time of boiler tube with loading and unloading silicon wafer wait cool down, saves the plenty of time of boiler tube, substantially increase the benefit of boiler tube
With rate, production capacity is improved；Series-mode frame selectively operating boiler tube or shielding boiler tube, flexibly, placement rule is convenient for management for production
And maintenance.
Detailed description of the invention
Fig. 1 is the perspective view of the utility model；
Fig. 2 is the depression angle structural schematic diagram that the utility model saves furnace body；
Fig. 3 is the structural schematic diagram for going up and down boat device, furnace body, the first transfer device of the utility model；
Fig. 4 is the structural schematic diagram of the first/second clamping mechanism of the utility model, fire door fixing seat；
Fig. 5 is the structural schematic diagram of the lifting boat device of the utility model, the first transfer device；
Fig. 6 is the structural schematic diagram of second transfer device of the utility model；
Wherein, description of drawing identification:
1-furnace body, 2-lifting boat devices,
3-the first transfer device, the 4-the second transfer device,
5-fire door fixing seats, 6-third transfer devices,
11-boiler tubes, 12-boats,
13-fire doors, 21-lifting carriage mechanisms,
22-the first clamping mechanism, the 31-the first screw rod mould group,
32-the first ball slide rail, the 33-the second clamping mechanism,
41-the second screw rod mould group, the 42-the second ball slide rail,
43-third clamping mechanisms, the 51-the first slotting roller aperture,
52-the second slotting roller aperture, 53-pin holes,
61-third screw rod mould groups, 62-third ball slide rails,
63-the four clamping mechanism, 221/331/431/631-sliding shoe,
222/332/432/632-inserts roller die group, 223/333/433/633-latch mode group.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Shown in 6, the utility model provides a kind of vertical plated film system of bf body of achievable fast cooling, packet
Include several furnace bodies 1, several lifting boat devices 2, several first transfer devices 3, one second transfer device 4；Each furnace body 1 corresponding one
Go up and down boat device 2, one first transfer device 3 arrangement；The furnace body 1 includes boiler tube 11, boat 12, fire door 13；The boat 12 and furnace
11 separate design of pipe, boat 12 are connect with fire door 13；The lifting boat device 2 is set to 11 side of boiler tube, for driving 13 band of fire door
Dynamic boat 12 exits or enters boiler tube 11；Several first transfer devices 3 arrange along the length direction of the second transfer device 4, the
One end of one transfer device 3 is connect with lifting boat device 2, and the other end is connect with the second transfer device 4；First transfer device
3 for driving fire door 13 that boat 12 is driven to transfer between lifting boat device 2 and the second transfer device 4；Second transfer device 4
For driving fire door 13 to drive boat 12 in the first transfer device 3, (one end of the second transfer device 4 is equipped with up and down with loading and unloading station
Material station) between transfer.
Wherein, the inside of the fire door 13 is fixedly connected with boat 12, and the outside of fire door 13 is equipped with fire door fixing seat 5.It is described
Going up and down boat device 2 includes lifting driving motor (not shown), lifting carriage mechanism 21, the first clamping mechanism 22；Described
One clamping mechanism 22 is for being clamped on fire door fixing seat 5, and lifting driving motor is for driving the first clamping mechanism 22 to slide along lifting
The sliding lifting of motivation structure 21.
First transfer device 3 includes the first screw rod mould group 31, two first ball slide rails 32, the second clamping mechanism 33；
Two first ball slide rail 32 is arranged in the two of the first screw rod mould group 31 along the length direction for being parallel to the first screw rod mould group 31
Side；Second clamping mechanism 33 is for being clamped on fire door fixing seat 5, and the first screw rod mould group 31 is for driving the second clamping mechanism
33 are connected on the first ball slide rail 32 with to draw fire door 13 and slide.Second transfer device 4 include the second screw rod mould group 41,
Two second ball slide rails 42, at least a third clamping mechanism 43；Two second ball slide rail 42 is along being parallel to the second screw rod mould
The length direction of group 41 is arranged in the two sides of the second screw rod mould group 41；The third clamping mechanism 43 is fixed for being clamped on fire door
Seat 5, the second screw rod mould group 41 draw fire door 13 for driving third clamping mechanism 43 and are connected to cunning on the second ball slide rail 42
It is dynamic.First screw rod mould group 31 of several first transfer devices 3 is arranged in parallel in the middle part of the same side of the second transfer device 4,
And every one first screw rod mould group 31 is each perpendicular to the second screw rod mould group 41 arrangement.
The system of bf body further includes third transfer device 6；Third transfer, which fills 6, sets and is parallel to the first transfer device 3
Arrangement, one end are connect with the second transfer device 4；The third transfer device 6 includes third screw rod mould group 61, two third balls
Sliding rail 62, the 4th clamping mechanism 63；The two thirds ball slide rail 62 is along the length direction cloth for being parallel to third screw rod mould group 61
It is placed in the two sides of third screw rod mould group 61；4th clamping mechanism 63 is for being clamped on fire door fixing seat 5, third screw rod mould group
61 slide for driving the 4th clamping mechanism 63 to be connected on third ball slide rail 62 to draw fire door 13.
First clamping mechanism 22, the second clamping mechanism 33, third clamping mechanism 43, the 4th clamping mechanism 63 include
Sliding shoe 221/331/431/631, several slotting roller die groups 222/332/432/632, several latch mode groups 223/333/433/
633；The slotting roller die group 222/332/432/632 includes inserting roller driving cylinder, inserting roller, inserts roller driving cylinder for driving slotting roller
Stretching motion；One end of the slotting roller is fixedly connected with sliding shoe 221/331/431/631, and the other end is equipped with latch mode group 223/
333/433/633；The latch mode group 223/333/433/633 includes bolt driving cylinder, bolt, and bolt driving cylinder is used for
Drive bolt stretching motion.
The several first slotting roller aperture 51 are equipped with along first direction in the fire door fixing seat 5, edge is equipped with perpendicular to first direction
Several second slotting roller aperture 52；Intersection to the bottom of fire door fixing seat 5 of the every one first slotting roller aperture 51 and the second slotting roller aperture 52
Portion is equipped with pin hole 53；The slotting roller driving cylinder of first clamping mechanism 22 is for driving slotting roller to pass in and out the first slotting roller aperture
51, the second clamping mechanism 33, third clamping mechanism 43, the 4th clamping mechanism 63 slotting roller driving cylinder for driving slotting roller to pass in and out
Second slotting roller aperture 52；The bolt driving cylinder is for driving bolt to pass in and out pin hole 53.First clamping mechanism 22 is inserted
The roller direction of motion is parallel to the length direction of the first screw rod mould group 31；Second clamping mechanism 33, third clamping mechanism 43,
The slotting roller direction of motion of four clamping mechanisms 63 is parallel to the length direction of the second screw rod mould group 41；The direction of motion of the bolt with
The direction of motion for inserting roller is vertical.
Utility model works principle:
The utility model boat 12 and fire door 13 are transported after being connected and fixed as one, and drop-down can be used in boat 12 and fire door 13
Formula can also be used pull-up, use pull-down in the present embodiment, boiler tube 11 is erected at the top of the first transfer device 3, boiler tube 11
It is opening down.
First transfer device 3, the second transfer device 4, in third transfer device 6 in addition to screw rod and ball slide rail group can be used
The mode of conjunction, can also be using belt or suspention means of transportation.First clamping mechanism 22, the second clamping mechanism 33, third clamping
Mechanism 43, the 4th clamping mechanism 63 can also use clamping type or other fixed forms in addition to flexible jack type can be used.This reality
It is 4 furnace bodies 1 in the present embodiment with every one second transfer device 4 in novel for 2~20 1 loading and unloading of furnace body.Sliding shoe
The cavity that can accommodate the flexible disengaging of slotting roller is equipped in 221/331/431/631, the flexible disengaging of bolt can be accommodated by inserting to be equipped in roller
Cavity.
One end of the second transfer device 4 in the present embodiment is as loading and unloading station (loading and unloading station), other end conduct
Blanking station (is mainly used as blanking caching), and wherein third transfer device 6 is arranged in loading and unloading station one end；Second transfer
It include two third clamping mechanisms 43 on device 4.Third transfer device 6 is used as feeding station, be mainly used for caching it is fully loaded to
The boat 12 of technique silicon wafer.
The course of work of the utility model is as follows:
1) first group of boat 12 and fire door 13 rest on loading and unloading station and load silicon wafer, after the completion of loading, third clamping
Second slotting roller aperture 52 of the slotting roller insertion fire door fixing seat 5 of mechanism 43, bolt is inserted into 53 detent of pin hole, by fire door fixing seat
5 clampings；
2) the second transfer device 4 send first group of boat 12 and fire door 13 to wherein one first transfer device 3 and the second transfer
The junction of device 4, third clamping mechanism 43 resets so that fire door 13 is detached from third clamping mechanism 43；
3) corresponding second clamping mechanism 33 (similar with the movement of the detent of third clamping mechanism 43) blocks fire door fixing seat 5
Tightly, and under the driving of the first screw rod mould group 31 by first group of boat 12 and fire door 13 it is transferred to below boiler tube 11, the second clamping machine
Structure 33 resets so that fire door 13 is detached from the second clamping mechanism 33；
4) the first slotting roller aperture 51 of the slotting roller insertion fire door fixing seat 5 of the first clamping mechanism 22, bolt are inserted into pin hole 53
Detent, by 5 clamping of fire door fixing seat, and under the driving of lifting driving motor along lifting carriage mechanism 21 by first group of boat 12
It is sent into boiler tube 11, fire door 13 is stuck in the opening of boiler tube 11, and the first clamping mechanism 22 resets so that fire door 13 is detached from the first clamping mechanism
22；
5) 1~4 is repeated the above steps, successively by second group of boat 12 and fire door 13, third group boat 12 and fire door 13, the 4th group
Boat 12 and fire door 13 are successively sent to remaining boiler tube 11；
6) step 1 is repeated, the second transfer device 4 send the 5th group of boat 12 and fire door 13 to third transfer device 6 and second
The junction of transfer device 4, third clamping mechanism 43 resets so that fire door is detached from third clamping mechanism 43；
7) the 4th clamping mechanism 63 is by 5 clamping of fire door fixing seat, and by the 5th group under the driving of third screw rod mould group 61
Boat 12 and fire door 13 send to station and cache (junction far from third transfer device 6 and the second transfer device 4), before waiting
The silicon wafer technique that four groups of boats 12 and fire door 13 carry is completed；
8) it after the completion of the silicon wafer technique that each group of boat 12 and fire door 13 carry, is successively moved respectively through lifting boat device 2, first
Send device 3, the second transfer device 4 be transferred to loading and unloading station (when the boat 12 and fire door 13 transferred on the second transfer device 4 compared with
When more, one or more groups of boats 12 and fire door 13 can be moved to blanking station caching)；
9) then by feeding station (third transfer device 6) the 5th group of boat 12 and fire door 13 send to boiler tube 11,
It circuits sequentially and works in an orderly manner.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (10)
1. a kind of vertical plated film system of bf body of achievable fast cooling, which is characterized in that including several furnace bodies, several lifting boats
Device, several first transfer devices, one second transfer device；Each furnace body corresponding a lifting boat device, one first transfer device
Arrangement；The furnace body includes boiler tube, boat, fire door；The boat and boiler tube separate design, boat are connect with fire door；The lifting boat dress
It is arranged in boiler tube side, for driving fire door that boat is driven to exit or enter boiler tube；Several first transfer devices are moved along second
The length direction of device is sent to arrange, one end of the first transfer device is connect with lifting boat device, the other end and the second transfer device
Connection；First transfer device is for driving fire door that boat is driven to transfer between lifting boat device and the second transfer device；Institute
The second transfer device is stated for driving fire door that boat is driven to transfer between the first transfer device and loading and unloading station.
2. the vertical plated film system of bf body of achievable fast cooling according to claim 1, which is characterized in that the fire door
Inside be fixedly connected with boat, the outside of fire door is equipped with fire door fixing seat.
3. the vertical plated film system of bf body of achievable fast cooling according to claim 2, which is characterized in that the lifting
Boat device includes lifting driving motor, lifting carriage mechanism, the first clamping mechanism；First clamping mechanism is for being clamped on furnace
Door fixing seat, lifting driving motor is for driving the first clamping mechanism to go up and down along lifting carriage mechanism slips.
4. the vertical plated film system of bf body of achievable fast cooling according to claim 3, which is characterized in that described first
Transfer device includes the first screw rod mould group, two first ball slide rails, the second clamping mechanism；Two first ball slide rail is along parallel
The two sides of the first screw rod mould group are arranged in the length direction of the first screw rod mould group；Second clamping mechanism is for being clamped on furnace
Door fixing seat, the first screw rod mould group are slided for driving the second clamping mechanism to be connected on the first ball slide rail to draw fire door.
5. the vertical plated film system of bf body of achievable fast cooling according to claim 4, which is characterized in that described second
Transfer device includes the second screw rod mould group, two second ball slide rails, at least a third clamping mechanism；Two second ball slide rail
The two sides of the second screw rod mould group are arranged in along the length direction for being parallel to the second screw rod mould group；The third clamping mechanism is for blocking
Tightly in fire door fixing seat, the second screw rod mould group is for driving third clamping mechanism to be connected to the second ball slide rail to draw fire door
Sliding.
6. the vertical plated film system of bf body of achievable fast cooling according to claim 5, which is characterized in that described several
The first screw rod mould group parallel arrangement of first transfer device is in the middle part of the same side of the second transfer device, and every one first screw rod mould
Group is each perpendicular to the second screw rod mould group arrangement.
7. the vertical plated film system of bf body of achievable fast cooling according to claim 6, which is characterized in that the furnace body
System further includes third transfer device；The third transfer device is parallel to the first transfer device arrangement, and one end is moved with second
Device is sent to connect；The third transfer device includes third screw rod mould group, two third ball slide rails, the 4th clamping mechanism；It is described
Two third ball slide rails are arranged in the two sides of third screw rod mould group along the length direction for being parallel to third screw rod mould group；Described 4th
Clamping mechanism is for being clamped on fire door fixing seat, and third screw rod mould group is for driving the 4th clamping mechanism to be connected to draw fire door
It is slided on third ball slide rail.
8. the vertical plated film system of bf body of achievable fast cooling according to claim 7, which is characterized in that described first
Clamping mechanism, the second clamping mechanism, third clamping mechanism, the 4th clamping mechanism include sliding shoe, several slotting roller die groups, several
Latch mode group；The slotting roller die group includes inserting roller driving cylinder, inserting roller, inserts roller driving cylinder for driving slotting roller stretching motion；
One end of the slotting roller is fixedly connected with sliding shoe, and the other end is equipped with latch mode group；The latch mode group includes bolt driving gas
Cylinder, bolt, bolt driving cylinder is for driving bolt stretching motion.
9. the vertical plated film system of bf body of achievable fast cooling according to claim 8, which is characterized in that the fire door
The several first slotting roller aperture are equipped with along first direction in fixing seat, are equipped with the several second slotting roller aperture along perpendicular to first direction；It is described
The bottom of intersection to the fire door fixing seat of every one first slotting roller aperture and the second slotting roller aperture is equipped with pin hole；First clamping
The slotting roller driving cylinder of mechanism is for driving slotting roller to pass in and out the first slotting roller aperture, the second clamping mechanism, third clamping mechanism, the 4th card
The slotting roller driving cylinder of tight mechanism is for driving slotting roller to pass in and out the second slotting roller aperture；The bolt driving cylinder for drive bolt into
Pin hole out.
10. the vertical plated film system of bf body of achievable fast cooling according to claim 9, which is characterized in that described
The slotting roller direction of motion of one clamping mechanism is parallel to the length direction of the first screw rod mould group；Second clamping mechanism, third card
Tight mechanism, the slotting roller direction of motion of the 4th clamping mechanism are parallel to the length direction of the second screw rod mould group；The movement of the bolt
Direction is vertical with the direction of motion of slotting roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821879851.8U CN208938993U (en) | 2018-11-14 | 2018-11-14 | A kind of vertical plated film system of bf body of achievable fast cooling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821879851.8U CN208938993U (en) | 2018-11-14 | 2018-11-14 | A kind of vertical plated film system of bf body of achievable fast cooling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208938993U true CN208938993U (en) | 2019-06-04 |
Family
ID=66727626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821879851.8U Active CN208938993U (en) | 2018-11-14 | 2018-11-14 | A kind of vertical plated film system of bf body of achievable fast cooling |
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| CN (1) | CN208938993U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116469802A (en) * | 2023-04-12 | 2023-07-21 | 江苏微导纳米科技股份有限公司 | Vertical processing apparatus and control method of vertical processing apparatus |
-
2018
- 2018-11-14 CN CN201821879851.8U patent/CN208938993U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116469802A (en) * | 2023-04-12 | 2023-07-21 | 江苏微导纳米科技股份有限公司 | Vertical processing apparatus and control method of vertical processing apparatus |
| CN116469802B (en) * | 2023-04-12 | 2024-03-29 | 江苏微导纳米科技股份有限公司 | Vertical processing apparatus and control method of vertical processing apparatus |
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Address after: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |