CN219303621U

CN219303621U - Frock is used in silicon chip quality detection

Info

Publication number: CN219303621U
Application number: CN202223391922.9U
Authority: CN
Inventors: 白炎; 苏鹏
Original assignee: Ningxia Shenhe New Material Technology Co ltd
Current assignee: Ningxia Shenhe New Material Technology Co ltd
Priority date: 2022-12-15
Filing date: 2022-12-15
Publication date: 2023-07-04
Anticipated expiration: 2032-12-15

Abstract

The utility model provides a tool for detecting the quality of a silicon wafer, which belongs to the field of silicon wafer bearing tools and comprises a support frame and an adjustable assembly, wherein the support frame comprises a plurality of support plates, at least two support plates are symmetrically provided with through grooves, the through grooves on the two support plates are positioned on the same horizontal plane, the adjustable assembly comprises an adjusting piece, a plurality of first clamping grooves are arranged on the adjusting piece, the support plates are identical in shape and parallel to each other, two adjusting pieces are arranged between the two support plates, two ends of one adjusting piece are respectively connected with the through grooves on the same side of the two support plates in a sliding manner, two ends of the other adjusting piece are respectively connected with the through grooves on the other side of the two support plates in a sliding manner, when the silicon wafer is required to be placed, the two adjusting pieces slide along the through grooves on the two adjacent support plates, and then the silicon wafer is placed in the first clamping grooves, so that all the silicon wafers can be suitable for the silicon wafers with different sizes by adjusting the distance between the two adjusting pieces, and the application range is wide.

Description

Frock is used in silicon chip quality detection

Technical Field

The utility model relates to the technical field of silicon wafer bearing tools, in particular to a tool for detecting the quality of a silicon wafer.

Background

The silicon wafer is usually obtained by cutting a silicon ingot, the silicon wafer needs to be subjected to quality detection before further processing (the quality detection refers to detection of performance or parameters of the silicon wafer), in the prior art, the silicon wafer is carried by using a chinese utility model as in application number CN201710265950.0, which discloses a silicon wafer detection method and a silicon wafer carrying device used by the same, specifically discloses a carrying frame 1, and the number of supporting rods 12 and inserting rods 13 arranged in the carrying frame 1 may be further preferred, for example, three supporting rods 12 and four inserting rods 13 are arranged between two end plates 11 of the carrying frame 1, wherein one supporting rod 12 is connected to the center of a base 112 of the two end plates 11, the other two supporting rods 12 are uniformly distributed on two sides of the supporting rod 12 located at the center of the base 112, and two inserting rods 13 are uniformly connected to side portions 111 of the two end plates 11. So set up, this patent is the demand of holding of whole piece of silicon chip on carrier 1 has increased carrier 1's fastness again, nevertheless because the inserted sheet pole can't remove, can't satisfy the holding of not unidimensional silicon chip.

Disclosure of Invention

In view of the above, the utility model provides a tool for detecting the quality of silicon wafers suitable for accommodating silicon wafers of different sizes.

The technical scheme adopted for solving the technical problems is as follows:

the utility model provides a frock is used in silicon chip quality detection, includes support frame, adjustable subassembly, the support frame includes the several backup pad, the backup pad is two at least, the bilateral symmetry of backup pad sets up logical groove, and logical groove in two backup pads is located same horizontal plane, adjustable subassembly includes the regulating part, set up the first draw-in groove of several on the regulating part, the backup pad shape is the same and is parallel to each other, has two between two backup pads regulating part, one of them regulating part's both ends respectively with two the logical groove sliding connection of homonymy of backup pad, another the both ends of regulating part respectively with two the logical groove sliding connection of the opposite side of backup pad.

Preferably, the support frame further comprises a connecting piece, and two ends of the connecting piece are respectively connected with two adjacent support plates.

Preferably, the through grooves are multiple, and the through grooves are sequentially arranged along the height direction of the supporting plate.

Preferably, the lengths of the through grooves increase from top to bottom.

Preferably, the number of the supporting plates is three, two adjusting pieces are arranged between every two adjacent supporting plates, and two ends of each adjusting piece are respectively connected with the same side through grooves on the same horizontal plane in the adjacent supporting plates in a sliding mode.

Preferably, the adjusting member is a rectangular parallelepiped.

Preferably, the adjustable assembly further comprises a fixing piece, a second clamping groove is formed in the fixing piece, two fixing pieces are arranged between adjacent supporting plates of the fixing piece, two ends of the fixing piece are connected with the two adjacent supporting plates, the two second clamping grooves of the fixing piece are oppositely arranged, the fixing piece is located below the adjusting piece, and the distance between the two fixing pieces between the adjacent supporting plates is smaller than the distance between the two adjusting pieces.

Preferably, the fixing piece is cuboid, and the included angle between the second clamping groove and the horizontal plane is 30-40 degrees.

Preferably, the adjustable component further comprises a fastening part, the fastening part comprises a connecting rod and a fastening nut, one end of the connecting rod is provided with threads, two ends of the adjusting piece are respectively connected with one end of the connecting rod, which is not provided with threads, and one end of the connecting rod, which is provided with threads, passes through the through groove and is connected with the fastening nut.

Preferably, the tool for detecting the quality of the silicon wafer further comprises a connecting handle, wherein the connecting handle comprises two vertical rods and a cross rod, one of the connecting handles is connected with the supporting plate at one end of the vertical rod, the other end of the vertical rod is connected with one end of the cross rod, the other end of the cross rod is connected with one end of another vertical rod, and the other end of the other vertical rod is connected with the other supporting plate.

Compared with the prior art, the utility model has the beneficial effects that:

the utility model provides a tool for detecting the quality of silicon wafers, which is characterized in that when the silicon wafers are required to be placed, two adjusting pieces slide along through grooves on two adjacent supporting plates, so that the distance between the two adjusting pieces is smaller than the diameter of the silicon wafers, then the silicon wafers are placed in first clamping grooves, and all the silicon wafers can be applicable by adjusting the distance between the two adjusting pieces for the silicon wafers with different sizes, the application range is wide, and a plurality of first clamping grooves are formed in the first adjusting plate and the second adjusting plate, so that the capacity is increased, and a plurality of silicon wafers can be placed.

Drawings

Fig. 1 is a schematic structural diagram of a tool for detecting the quality of a silicon wafer.

FIG. 2 is a schematic view of another angular structure of the tool for detecting the quality of a silicon wafer with a connecting handle removed.

Fig. 3 is a schematic view of the adjusting member and the fastening portion.

Fig. 4 is a schematic illustration of the attachment of the conditioning element to the circular silicon wafer.

Fig. 5 is a second schematic illustration of the attachment of the conditioning element to the circular silicon wafer.

Fig. 6 is a schematic illustration of attachment of the conditioning element to a fan-shaped silicon wafer.

Fig. 7 is a second schematic illustration of attachment of the conditioning element to the fan-shaped silicon wafer.

In the figure: the silicon wafer quality detection tool 10, a support frame 100, a support plate 110, a through groove 111, a connecting piece 120, an adjustable assembly 200, an adjusting piece 210, a first clamping groove 211, a fixing piece 220, a second clamping groove 221, a fastening part 230, a connecting rod 231, a fastening nut 232, a connecting handle 300, a vertical rod 310 and a cross rod 320.

Detailed Description

The technical scheme and technical effects of the embodiments of the present utility model are further described in detail below with reference to the accompanying drawings.

Referring to fig. 1 to 3, a tool 10 for detecting quality of silicon wafer includes a support frame 100 and an adjustable assembly 200, the support frame 100 includes a plurality of support plates 110, at least two support plates 110 are provided, two sides of each support plate 110 are symmetrically provided with through grooves 111, the through grooves 111 on the two support plates 110 are located on the same horizontal plane, the adjustable assembly 200 includes an adjusting member 210, a plurality of first clamping grooves 211 are provided on the adjusting member 210, the support plates 110 are identical in shape and parallel to each other, two adjusting members 210 are provided between the two support plates 110, two ends of one adjusting member 210 are respectively in sliding connection with the through grooves 111 on the same side of the two support plates 110, and two ends of the other adjusting member 210 are respectively in sliding connection with the through grooves 111 on the other side of the two support plates 110.

Compared with the prior art, the utility model has the beneficial effects that:

in the tool 10 for detecting the quality of the silicon wafer, when the silicon wafer needs to be placed, the two adjusting pieces 210 slide along the through grooves 111 on the two adjacent supporting plates 110, so that the distance between the two adjusting pieces 210 is smaller than the diameter of the silicon wafer, then the silicon wafer is placed in the first clamping groove 211, and for the silicon wafers with different sizes, all the silicon wafers can be applicable by adjusting the distance between the two adjusting pieces 210, the application range is wide, and the first adjusting plates and the second adjusting plates are provided with the plurality of first clamping grooves 211, so that the capacity is increased, and a plurality of silicon wafers can be placed.

Further, the support 100 further includes a connecting member 120, and two ends of the connecting member 120 are respectively connected to two adjacent support plates 110.

Further, the number of through grooves 111 is plural, the through grooves 111 are sequentially arranged along the height direction of the supporting plate 110, and the silicon wafer is circular and fan-shaped, so that the adjusting member 210 is placed in the through groove 111 with the corresponding height to slide according to different shapes and sizes of the silicon wafer.

Further, the length of the through groove 111 increases from top to bottom.

Further, the number of the supporting plates 110 is three, two adjusting members 210 are disposed between two adjacent supporting plates 110, two ends of each adjusting member 210 are respectively slidably connected with the same-side through grooves 111 on the same horizontal plane on the adjacent supporting plates 110, and a placement space is formed between two adjacent supporting plates 110, so that two placement spaces are formed, and two silicon wafers with different specifications can be conveniently placed simultaneously.

Further, the adjustable assembly 200 further includes the fixing member 220, a second clamping groove 221 is provided on the fixing member 220, two fixing members 220 are provided between adjacent support plates 110 of the fixing member 220, two ends of the fixing member 220 are connected to the adjacent two support plates 110, the second clamping grooves 221 of the two fixing members 220 are oppositely provided, the fixing member 220 is located below the adjusting member 210, and a distance between the two fixing members 220 between the adjacent support plates 110 is smaller than a distance between the two adjusting members 210; when the silicon wafer is placed, the silicon wafer is placed in the second clamping groove 221 on the fixing piece 220, and the adjusting piece 210 is adjusted to enable the adjusting piece 210 between two adjacent supporting plates 110 to move close to the silicon wafer, so that the silicon wafer is fixed firmly, and shaking is prevented in the moving process.

Further, the fixing member 220 is a cuboid, the included angle between the second clamping groove 221 and the horizontal plane is 30 ° -40 °, so that the contact area between the silicon wafer and the second clamping groove 221 is increased, and the silicon wafer is clamped conveniently.

Further, the adjusting member 210 is a cuboid.

Further, the adjustable assembly 200 further includes a fastening portion 230, the fastening portion 230 includes a connecting rod 231 and a fastening nut 232, one end of the connecting rod 231 is provided with threads, two ends of the adjusting member 210 are respectively connected with one end of the connecting rod 231, which is not provided with threads, and one end of the connecting rod 231, which is provided with threads, is connected with the fastening nut 232 through the through groove 111.

Specifically, referring to fig. 4 to 7, for a fan-shaped silicon wafer, when a sharp point of the silicon wafer contacts with the first clamping groove 211 of the adjusting member 210 to cause damage to the edge of the silicon wafer, the adjusting member 210 is rotated, and since the adjusting member 210 is a cuboid, the position and angle of the first clamping groove 211 can be clearly seen by the rotating adjusting member 210, so that the first clamping groove 211 of the adjusting member 210 is attached to the smooth portion of the fan-shaped silicon wafer, and then the silicon wafer is fixed by the fastening nut 232 to prevent damage to the silicon wafer.

Further, the tool 10 for detecting silicon wafer quality further comprises a connecting handle 300, wherein the connecting handle 300 comprises two vertical rods 310 and a cross rod 320, one end of one vertical rod 310 is connected with the supporting plate 110, the other end of one vertical rod 310 is connected with one end of the cross rod 320, the other end of the cross rod 320 is connected with one end of the other vertical rod 310, and the other end of the other vertical rod 310 is connected with the other supporting plate 110.

The use of the utility model will now be described by way of the following examples.

When the silicon wafer is placed, the adjusting piece 210 is adjusted to be in the through groove 111 with the height corresponding to the size of the silicon wafer, the silicon wafer is placed in the second clamping groove 221 of the fixing piece 220, then the adjusting piece 210 slides along the through groove 111, when the adjusting piece 210 between the adjacent supporting plates 110 is close to the silicon wafer, the adjusting plate is rotated, the first clamping groove 211 of the adjusting plate is attached to the edge of the silicon wafer, and then the silicon wafer is fixed through the fastening nut 232, so that the silicon wafer is fixed.

The foregoing disclosure is illustrative of the preferred embodiments of the present utility model, and is not to be construed as limiting the scope of the utility model, as it is understood by those skilled in the art that all or part of the above-described embodiments may be practiced with equivalents thereof, which fall within the scope of the utility model as defined by the appended claims.

Claims

1. The utility model provides a frock is used in silicon chip quality detection, its characterized in that includes support frame, adjustable subassembly, the support frame includes the several backup pad, the backup pad is two at least, the bilateral symmetry of backup pad sets up logical groove, and logical groove in two backup pads is located same horizontal plane, adjustable subassembly includes the regulating part, set up the first draw-in groove of several on the regulating part, the backup pad shape is the same and be parallel to each other, has two between two backup pads regulating part, one of them regulating part's both ends respectively with two logical groove sliding connection of the homonymy of backup pad, another regulating part's both ends respectively with two logical groove sliding connection of the opposite side of backup pad.

2. The tool for detecting the quality of a silicon wafer according to claim 1, wherein the supporting frame further comprises a connecting piece, and two ends of the connecting piece are respectively connected with two adjacent supporting plates.

3. The tool for detecting the quality of a silicon wafer according to claim 1, wherein the number of through grooves is plural, and the through grooves are sequentially arranged along the height direction of the support plate.

4. The tool for detecting the quality of a silicon wafer according to claim 3, wherein the length of the through groove increases from top to bottom.

5. The tooling for detecting the quality of the silicon wafer according to claim 1, wherein three support plates are provided, two adjusting pieces are arranged between two adjacent support plates, and two ends of each adjusting piece are respectively connected with the same-side through grooves on the same horizontal plane on the adjacent support plates in a sliding manner.

6. The tool for detecting the quality of a silicon wafer according to claim 1, wherein the regulating member is a rectangular parallelepiped.

7. The tool for detecting the quality of a silicon wafer according to claim 5, wherein the adjustable assembly further comprises a fixing piece, a second clamping groove is formed in the fixing piece, two fixing pieces are arranged between adjacent supporting plates of the fixing piece, two ends of the fixing piece are connected with the two adjacent supporting plates, the second clamping grooves of the two fixing pieces are oppositely arranged, the fixing piece is located below the adjusting piece, and the distance between the two fixing pieces between the adjacent supporting plates is smaller than the distance between the two adjusting pieces.

8. The tool for detecting the quality of a silicon wafer according to claim 7, wherein the fixing member is a cuboid, and the included angle between the second clamping groove and the horizontal plane is 30 ° -40 °.

9. The tool for detecting the quality of the silicon wafer according to claim 1, wherein the adjustable assembly further comprises a fastening portion, the fastening portion comprises a connecting rod and a fastening nut, threads are arranged at one end of the connecting rod, two ends of the adjusting piece are respectively connected with one end of the connecting rod, which is not provided with threads, and one end of the connecting rod, which is provided with threads, passes through the through groove and is connected with the fastening nut.

10. The tool for detecting the quality of a silicon wafer according to claim 1, further comprising a connecting handle, wherein the connecting handle comprises two vertical rods and a cross rod, one end of one vertical rod is connected with the supporting plate, the other end of one vertical rod is connected with one end of the cross rod, the other end of the cross rod is connected with one end of the other vertical rod, and the other end of the other vertical rod is connected with the other supporting plate.