CN209822607U - Crystal boat - Google Patents

Abstract

The utility model relates to the technical field of semiconductors, in particular to a wafer boat with adjustable space between adjacent wafer bearing units, which comprises a baffle plate, a plurality of telescopic slide bars, a plurality of telescopic hinges and a plurality of wafer bearing units, wherein the baffle plate is oppositely arranged, and the plurality of slide bars are oppositely arranged on the baffle plate in pairs to form a box-shaped structure; the wafer bearing units are sequentially arranged in the box-shaped structure along the arrangement direction of the baffles and are fixed in the box-shaped structure through the sliding rods, and adjacent wafer bearing units are connected through hinges. The utility model discloses can adapt to the requirement of crystal boat at the different intervals of actual process, reduce the wafer breakage rate, promote work efficiency.

Description

Crystal boat

Technical Field

The utility model belongs to the technical field of the semiconductor manufacturing, especially, relate to a wafer boat with adjustable interval.

Background

Currently, during the processing of wafers, the wafers are transferred or processed by placing the wafers in a wafer boat.

Fig. 1 is a schematic structural diagram of a conventional boat, and as shown in fig. 1, a plurality of parallel slots 10 are disposed in the boat, wherein the width of each slot 10 and the distance between adjacent slots 10 are the same.

However, in the actual use process of the wafer boat, the requirements of different processes on the distance between the adjacent clamping grooves are different. For example, during wafer transportation, it is desirable that the spacing between adjacent pockets be small to prevent the wafer from being tilted significantly in the pocket to cause frictional damage, as is the case in fig. 1. In the transfer process of the wafer, a larger distance is needed so as to transfer the wafers in batches, and the problem of low efficiency when the suction pens are used for transferring one by one in the prior art is solved.

Therefore, designing a wafer boat capable of adjusting the distance between adjacent slots is an urgent problem to be solved in the technical field of semiconductor manufacturing.

Disclosure of Invention

In order to solve the above problems, the present invention provides a wafer boat, which comprises a baffle plate, a plurality of telescopic slide bars, a plurality of telescopic hinges and a plurality of wafer carrying units, wherein the baffle plate, the telescopic hinges and the wafer carrying units are oppositely arranged, and the plurality of slide bars are oppositely arranged on the baffle plate in pairs to form a box-shaped structure; the wafer bearing units are sequentially arranged in the box-shaped structure along the arrangement direction of the baffles and are fixed in the box-shaped structure through the sliding rods, and adjacent wafer bearing units are connected through hinges.

Preferably, the wafer bearing unit is of a U-shaped structure, each wafer bearing unit comprises a plurality of fixing blocks, and each fixing block comprises a body and a clamping groove for accommodating wafers.

Preferably, the wafer bearing unit is of a U-shaped structure, each wafer bearing unit comprises a plurality of fixing blocks and fixing plates connected with the fixing blocks, and each fixing block comprises a body and a clamping groove used for containing a wafer.

Preferably, the sliding rod and the hinge are extended or shortened by external force, so as to adjust the distance between adjacent wafer carrying units.

Preferably, the hinge is an "X-type" hinge.

Preferably, each wafer carrying unit is provided with one X-shaped hinge, and the hinges are connected with each other.

Preferably, the wafer bearing unit can move left and right on the slide rod.

Preferably, the fixing block body is provided with at least one through hole, and the sliding rod penetrates through the through hole.

Preferably, the number of the fixed blocks in each wafer bearing unit is more than or equal to 3.

Preferably, the number of the sliding rods is more than or equal to 3.

The utility model provides a wafer boat with adjustable adjacent wafer bears device interval to adapt to the requirement of wafer boat at different intervals in the actual process, reduce the wafer breakage rate, promote work efficiency.

Drawings

Fig. 1 is a schematic structural diagram of a conventional wafer boat.

Fig. 2 is a schematic view of a wafer boat according to an embodiment of the present invention.

Fig. 3 is a schematic top view of a wafer boat according to an embodiment of the present invention.

FIG. 4 is a schematic structural diagram of a wafer carrying unit according to an embodiment of the present invention.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The scope of the present invention is not limited to the embodiments described below, and the embodiments of the present invention may be modified into various other embodiments.

Fig. 2 is a schematic view of a wafer boat according to the present invention, fig. 3 is a schematic view of a wafer boat, as can be seen from fig. 2 and fig. 3, the wafer boat includes a baffle 100, a plurality of retractable slide bars 400, a plurality of retractable hinges 300, and a plurality of wafer carrying units 200, the plurality of slide bars 400 are oppositely disposed on the baffle 100 in pairs to form a box-shaped structure; the wafer bearing units 200 are orderly arranged in the box-shaped structure along the arrangement direction of the baffles 100, and are fixed in the box-shaped structure by the sliding rods 400, and the adjacent wafer bearing units 200 are connected by the hinge 300.

The number of the sliding bars 400 is greater than or equal to 3, in the embodiment, taking 4 sliding bars 400 as an example, one pair of the sliding bars 400 is disposed on the upper portion of the baffle 100, and the other pair of the sliding bars 400 is disposed at the lower portion of the sliding bars 400, so as to form a rectangular box-shaped structure. The sliding end is fixedly disposed on the baffle 100.

Fig. 4 is a schematic structural diagram of a conventional carrying unit, the wafer carrying unit 200 is a "U" structure, each wafer carrying unit 200 includes a plurality of fixing blocks 210, and each fixing block 210 includes a body and a slot 211 for receiving a wafer 500. The wafer carrying unit 200 may be a "U-shaped" structure formed by only the fixing blocks 210, or a "U-shaped" structure formed by connecting the fixing blocks 210 through the fixing plates 220. Each wafer carrying unit 200 is used for carrying a wafer 500. The number of the fixing blocks 210 in each wafer carrying unit 200 is not less than 3. Each fixing block 210 is provided with at least one through hole 212, the slide rod 400 sequentially passes through the through hole 212 of each fixing block 210 to sequentially fix the wafer carrying unit 200, the through hole 212 is movably connected with the slide rod 400, and the slide rod 400 can freely extend and retract in the through hole 212.

Each wafer carrying unit 200 is provided with a hinge 300, further, the hinge 300 is an "X-shaped" hinge 300, the "X-shaped" hinges 300 on adjacent wafer carrying units 200 are connected end to end, and the connection position can move relatively on a horizontal plane. The front and rear baffles 100 are also provided with "X-shaped" hinges 300, and the hinges 300 of the baffles 100 are connected to the hinges 300 of the adjacent wafer carrier units 200 to form a hinge 300 strip that can be elongated or shortened by an external force. The hinge 300 and the slide bar 400 are both extended or shortened by an external force, thereby adjusting the distance between the adjacent wafer carrying units 200.

The utility model provides a pair of adjacent wafer 500 bears boat with adjustable device interval to adapt to the requirement of boat at the different intervals of actual process, reduce wafer 500 breakage rate, promote work efficiency.

The above embodiments are only used for illustrating the present invention, and are not used for limiting the present invention, and those skilled in the art can make various modifications and changes to the present invention without departing from the spirit and scope of the present invention, so that all equivalent technical solutions also belong to the scope of the present invention, and the patent protection scope of the present invention should be determined by the scope of the claims.

Claims (10)

1. A wafer boat, characterized in that: the device comprises a baffle plate, a plurality of telescopic slide bars, a plurality of telescopic hinges and a plurality of wafer bearing units, wherein the baffle plate, the telescopic slide bars, the telescopic hinges and the wafer bearing units are oppositely arranged, and the slide bars are oppositely arranged on the baffle plate in pairs to form a box-shaped structure; the wafer bearing units are sequentially arranged in the box-shaped structure along the arrangement direction of the baffles and are fixed in the box-shaped structure through the sliding rods, and adjacent wafer bearing units are connected through hinges.

2. The wafer boat of claim 1, wherein: the wafer bearing units are of U-shaped structures, each wafer bearing unit comprises a plurality of fixing blocks, and each fixing block comprises a body and a clamping groove used for containing wafers.

3. The wafer boat of claim 1, wherein: the wafer bearing units are of U-shaped structures, each wafer bearing unit comprises a plurality of fixing blocks and fixing plates connected with the fixing blocks, and each fixing block comprises a body and a clamping groove used for containing wafers.

4. The wafer boat of claim 1, wherein: the sliding rod and the hinge are lengthened or shortened under the external force, and then the distance between the adjacent wafer bearing units is adjusted.

5. The wafer boat of claim 1, wherein: the hinge is an X-shaped hinge.

6. The wafer boat of claim 5, wherein: and each wafer bearing unit is provided with one X-shaped hinge, and the hinges are connected with each other.

7. The wafer boat of claim 1, wherein: the wafer bearing unit can move left and right on the sliding rod.

8. The wafer boat according to claim 2 or 3, wherein: the fixing block body is provided with at least one through hole, and the sliding rod penetrates through the through hole.

9. The wafer boat according to claim 2 or 3, wherein: the number of the fixed blocks in each wafer bearing unit is more than or equal to 3.

10. The wafer boat of claim 1, wherein: the number of the slide bars is more than or equal to 3.