CN209418476U - A kind of film frequency device automating loading and unloading - Google Patents
A kind of film frequency device automating loading and unloading Download PDFInfo
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- CN209418476U CN209418476U CN201920147945.4U CN201920147945U CN209418476U CN 209418476 U CN209418476 U CN 209418476U CN 201920147945 U CN201920147945 U CN 201920147945U CN 209418476 U CN209418476 U CN 209418476U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a kind of film frequency device for automating loading and unloading, including top flat mechanism, epicyclical mechanism；The top flat arrangement of mechanism is in the lower section of epicyclical mechanism；The top flat mechanism includes several apical tooth mould groups, several jackings driving mould group, several first driven in translation mould groups；Each apical tooth mould group corresponding a jacking driving mould group, one first driven in translation mould group；Each jacking driving mould group is for driving apical tooth mould group lifting so that silicon wafer to be connected in boat by silicon wafer from jacking in boat to epicyclical mechanism or from epicyclical mechanism；Several first driven in translation mould groups are for driving several apical tooth mould groups close to each other or separate；The epicyclical mechanism includes two shield tooth mould groups, two second driven in translation mould groups；The two second driven in translation Mo Zu is used to drive two shield tooth mould groups close to each other or separate respectively.The utility model is cached using epicyclical mechanism as transfer, and does not limit the corresponding relationship of boat Yu loading and unloading gaily decorated basket card slot number, and high degree of automation is versatile.
Description
Technical field
The utility model relates to solar energy or technical field of semiconductors more particularly to a kind of guide card dresses for automating loading and unloading
It sets.
Background technique
With the fast development of photovoltaic industry, producer more payes attention to the production efficiency of silicon wafer, and then certainly to equipment
The demand of dynamicization is higher and higher.Either in semiconductor or photovoltaic art, improving loading and unloading efficiency is that promotion production capacity is most effective
One of approach.
The current loading and unloading gaily decorated basket mostly uses greatly the standard gaily decorated basket, and away from for 4.76mm, card slot number is for the card slot of the standard gaily decorated basket
100；And since boat is limited in the intracorporal space of furnace, for the card slot of the boat of furnace body away from 2.38mm is generally set to, the card slot number of boat is general
For whole hundred number.Due to boat card slot away from be gaily decorated basket card slot away from half, existing fluctuating plate manipulator is the flower from 100 silicon wafers
In basket every time 50 take piece, be inserted into the odd number or even number card slot of boat, inverse process be silicon wafer inserted sheet blanking.But one
In a little special applications, for example, efficiently, the techniques such as LPCVD, diffusion, annealing, the oxidation of high production capacity, high performance horizontal positioned silicon wafer
Boat card slot number due to the diameter issue of boiler tube, the card slot number of boat is generally not 50 integral multiple.For such boat,
General settling mode is by the loading and unloading gaily decorated basket by guide card one by one to the transfer gaily decorated basket, the card slot number of transfer gaily decorated basket card slot number and boat
Unanimously, then by fluctuating plate manipulator by silicon wafer take piece into the card slot of boat from the transfer gaily decorated basket.In existing equipment, loading and unloading flower
Guide card between basket and the transfer gaily decorated basket needs to carry out guide card loading and unloading piecewise, and efficiency is lower, is unfavorable for improving production capacity.
Utility model content
The purpose of the utility model is to provide a kind of film frequency devices for automating loading and unloading, using epicyclical mechanism as transfer
Caching, and the corresponding relationship of boat Yu loading and unloading gaily decorated basket card slot number is not limited, high degree of automation is versatile.
To achieve the above object, using following technical scheme:
A kind of film frequency device automating loading and unloading, including top flat mechanism, epicyclical mechanism；The top flat arrangement of mechanism is in week
The lower section of rotation mechanism；The top flat mechanism includes several apical tooth mould groups, several jackings driving mould group, several first driven in translation moulds
Group；Each apical tooth mould group corresponding a jacking driving mould group, one first driven in translation mould group；Each jacking driving mould group is for driving
Silicon wafer to be connected in boat by the lifting of one apical tooth mould group by silicon wafer from jacking in boat to epicyclical mechanism or from epicyclical mechanism；If described
Dry first driven in translation mould group is for driving several apical tooth mould groups close to each other or separate；The epicyclical mechanism includes two shield tooth moulds
Group, two second driven in translation mould groups；The two second driven in translation Mo Zu be used to drive two shield tooth mould groups close to each other respectively or
It is separate.
Preferably, the apical tooth mould group includes that an at least apical tooth plate, transfer bar, transfer bar is vertical at the bottom of apical tooth plate
Portion；The top of the apical tooth plate is equipped with several first tooth sockets.
Preferably, the transfer bar is set to the bottom side of apical tooth plate.
Preferably, the jacking driving mould group includes jacking motor, the first sliding module；First sliding module is along shifting
The length direction arrangement of bar is carried, jacking motor is for driving transfer bar that apical tooth plate is driven to go up and down along the first sliding module.
Preferably, the first driven in translation mould group includes translation motor, the second sliding module；Second sliding module
Arrange that the first sliding module is slidably mounted on the side of the second sliding module along the length direction perpendicular to the first sliding module；
The translation motor is for driving transfer bar that apical tooth plate is driven to translate along the second sliding module.
Preferably, the two shields tooth mould group parallel arrangement, length direction distribution of several apical tooth mould groups along shield tooth mould group.
Preferably, the shield tooth mould group includes shield toothholder；The L-shaped construction in cross section of the shield toothholder, L-type inside are set
There are several second tooth sockets, length direction distribution of several second tooth sockets along shield toothholder；The shield toothholder of the two shields tooth mould group is opposite
Arrangement.
Preferably, the second driven in translation mould group includes flat-removing air cyclinder, third sliding module；The third sliding module
It is arranged respectively along the length direction perpendicular to the first sliding module, the second sliding module, flat-removing air cyclinder is for driving shield tooth mould group
It is translated along third sliding module.
Preferably, the apical tooth plate is set as two, two apical tooth plates parallel arrangement.
Preferably, several first tooth sockets, several second tooth sockets are equally spaced, the two tooth socket away from the card slot of boat
Away from identical.
Using the above scheme, the beneficial effects of the utility model are:
1) it is cached using epicyclical mechanism as transfer, guide card, nothing directly is carried out to the silicon wafer between the loading and unloading gaily decorated basket and boat
Boat pass corresponding with loading and unloading gaily decorated basket card slot number need to not be limited to the transfer gaily decorated basket progress transfer of suitable card slot number for guide card one by one
System, it is versatile；
2) the shield tooth protected in tooth mould group is short, and inserted sheet difficulty reduces, and improves efficiency；
3) several apical tooth mould groups can merge and separate, and can carry out simultaneously up and down to multiple boats or the loading and unloading gaily decorated basket simultaneously
Material.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the apical tooth mould group of the utility model, the perspective view for protecting tooth mould group；
Fig. 3 is partial enlarged view at the A in Fig. 2；
Fig. 4 is the perspective view of the apical tooth mould group of the utility model；
Fig. 5 is partial enlarged view at the B in Fig. 4；
Fig. 6 is structural schematic diagram when apical tooth mould group just jacks up silicon wafer；
Fig. 7 is that apical tooth mould group pushes up silicon wafer bottom to the structural schematic diagram beyond shield toothholder bottom；
Wherein, description of drawing identification:
1-top flat mechanism, 2-epicyclical mechanisms,
3-boats, 4-silicon wafers,
11-apical tooth mould groups, 12-jacking driving mould groups,
13-the first driven in translation mould group, 21-shield tooth mould groups,
22-the second driven in translation mould group, 111-apical tooth plates,
112-transfer bars, the 211-the second tooth socket,
1111-the first tooth socket.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Shown in 7, the utility model provides a kind of film frequency device for automating loading and unloading, including top flat mechanism
1, epicyclical mechanism 2；The top flat mechanism 1 is arranged in the lower section of epicyclical mechanism 2；The top flat mechanism 1 includes several apical tooth mould groups
11, several jackings drive mould group 12, several first driven in translation mould groups 13；The corresponding jacking driving mould group of each apical tooth mould group 11
12, one first driven in translation mould group 13；Each jacking driving mould group 12 for drive an apical tooth mould group 11 lifting with by silicon wafer 4 from
Silicon wafer 4 is connected in boat 3 by jacking to epicyclical mechanism 2 or from epicyclical mechanism 2 in boat 3；Several first driven in translation mould groups
13 for driving several apical tooth mould groups 11 close to each other or separate；The epicyclical mechanism 2 includes that two shield tooth mould groups 21, two second are flat
Move driving mould group 22；It is close to each other or separate that the two second driven in translation moulds group 22 is respectively used to two shield tooth mould group 21 of driving.
Wherein, the apical tooth mould group 11 includes that an at least apical tooth plate 111, transfer bar 112, transfer bar 112 is vertical at top
The bottom of tooth plate 111；The top of the apical tooth plate 111 is equipped with several first tooth sockets 1111.The transfer bar 112 is set to apical tooth plate
111 bottom side.
The jacking driving mould group 12 includes jacking motor, the first sliding module；First sliding module is along transfer bar
112 length direction arrangement, jacking motor is for driving transfer bar 112 that apical tooth plate 111 is driven to go up and down along the first sliding module.Institute
Stating the first driven in translation mould group 13 includes translation motor, the second sliding module；Second sliding module is along sliding perpendicular to first
The length direction of dynamic model group arranges that the first sliding module is slidably mounted on the side of the second sliding module；The translation motor is used
Apical tooth plate 111 is driven to translate along the second sliding module in driving transfer bar 112.
The two shields tooth mould group 21 is arranged in parallel, length direction distribution of several apical tooth mould groups 11 along shield tooth mould group 21.Institute
Stating shield tooth mould group 21 includes shield toothholder；The L-shaped construction in cross section of the shield toothholder, L-type inside are equipped with several second tooth sockets
2111, length direction distribution of several second tooth sockets 211 along shield toothholder；The shield toothholder of the two shields tooth mould group 21 is arranged in opposite directions.
The second driven in translation mould group 22 includes flat-removing air cyclinder, third sliding module；The third sliding module respectively along perpendicular to
First sliding module, the length direction arrangement of the second sliding module, flat-removing air cyclinder is for driving shield tooth mould group 21 to slide along third
The translation of mould group.The apical tooth plate 111 is set as two, two apical tooth plates 111 parallel arrangement.If several first tooth sockets 1111,
Dry second tooth socket 211 is equally spaced, and the two tooth socket is away from the card slot of boat 3 away from identical.
Utility model works principle:
When loading and unloading, boat 3 is laid flat from boat 3 for the utility model, and silicon wafer 4 is placed in boat 3 in vertical.
As shown in Figure 1, corresponding to the loading and unloading of multiple boats 3 due to every corresponding multiple apical tooth mould groups 11 of two shields tooth mould group 21；
And have certain spacing between every two boat 3, therefore in several apical tooth mould 11 loading and unloading of group, the driving of the first driven in translation mould group 13
Several apical tooth mould groups 11 are close to each other or separate, shifted silicon wafer 4 between boat 3 and shield tooth mould group 21 with realizing.
When mobile due to the first driven in translation mould group 13 driving apical tooth mould group 11, transfer bar 112 passes through to be moved in the middle part of boat 3,
The stroke of transfer bar 112 limits (i.e. by the length limitation of boat 3) by the both ends of boat 3；Transfer bar 112 is set to apical tooth plate 111
Bottom side is conducive to the merging and separation of several apical tooth mould groups 11.As shown in Figure 1, the transfer of the two apical tooth mould groups 11 in the left side
Bar 112 is set to the left bottom of apical tooth plate 111, and the transfer bar 112 of the two apical tooth mould groups 11 in the right is set to the right of apical tooth plate 111
Bottom；After five apical tooth mould groups 11 jack up the silicon wafer 4 in corresponding boat 3, on the basis of an intermediate apical tooth mould group 11, both sides
Apical tooth mould group 11 drawn close to centre.
The blanking process of the utility model is following (feeding is opposite with blanking process step):
1) jacking driving mould group 12 drives corresponding apical tooth mould group 11 to rise, so that the silicon wafer 4 in corresponding boat 3 is inserted into one by one
In several first tooth sockets 1111 of apical tooth plate 111；
2) jacking driving mould group 12 continues that apical tooth mould group 11 is driven to rise, until the bottom of silicon wafer 4 is more than the L-type of shield toothholder
At the top of horizontal end；
3) every one first driven in translation mould group 13 drives corresponding apical tooth mould group 11 to translate, so that several 11 phases of apical tooth mould group
It is mutually close；
4) two second driven in translation mould groups 22 driving, two shield tooth mould group 21 is close to each other, so that two shield tooth mould groups 21 are located at silicon
The lower section at 4 both ends of piece；
4) jacking driving mould group 12 drives apical tooth mould group 11 that silicon wafer 4 is driven to decline, so that silicon wafer 4 is inserted into shield tooth mould group one by one
In 21 several second tooth sockets 211；
5) external manipulator transfers load to the silicon wafer 4 protected in tooth mould group 21 in the blanking gaily decorated basket；
6) the first driven in translation mould group 13 drives corresponding apical tooth mould group 11 to reset, so that several apical tooth mould groups 11 separate.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (10)
1. a kind of film frequency device for automating loading and unloading, which is characterized in that including top flat mechanism, epicyclical mechanism；The top flat machine
Structure is arranged in the lower section of epicyclical mechanism；The top flat mechanism includes several apical tooth mould groups, several jackings driving mould group, several first
Driven in translation mould group；Each apical tooth mould group corresponding a jacking driving mould group, one first driven in translation mould group；Each jacking drives mould
Group is for driving apical tooth mould group lifting so that silicon wafer to be connected to epicyclical mechanism or from epicyclical mechanism by silicon wafer from jacking in boat
In boat；Several first driven in translation mould groups are for driving several apical tooth mould groups close to each other or separate；The epicyclical mechanism
Including two shield tooth mould groups, two second driven in translation mould groups；The two second driven in translation Mo Zu is used to drive two shield tooth moulds respectively
Group is close to each other or separate.
2. the film frequency device of automation loading and unloading according to claim 1, which is characterized in that the apical tooth mould group includes extremely
Few an apical tooth plate, transfer bar, transfer bar are vertical at the bottom of apical tooth plate；The top of the apical tooth plate is equipped with several first teeth
Slot.
3. the film frequency device of automation loading and unloading according to claim 2, which is characterized in that the transfer bar is set to apical tooth
The bottom side of plate.
4. the film frequency device of automation loading and unloading according to claim 2, which is characterized in that the jacking drives mould group packet
Include jacking motor, the first sliding module；First sliding module arranges that jacking motor is for driving along the length direction of transfer bar
Dynamic transfer bar drives apical tooth plate to go up and down along the first sliding module.
5. the film frequency device of automation loading and unloading according to claim 4, which is characterized in that the first driven in translation mould
Group includes translation motor, the second sliding module；Second sliding module is along the length direction cloth perpendicular to the first sliding module
It sets, the first sliding module is slidably mounted on the side of the second sliding module；The translation motor is for driving transfer bar to drive top
Tooth plate is translated along the second sliding module.
6. the film frequency device of automation loading and unloading according to claim 2, which is characterized in that the two shields tooth mould group is parallel
Arrangement, length direction distribution of several apical tooth mould groups along shield tooth mould group.
7. the film frequency device of automation loading and unloading according to claim 6, which is characterized in that the shield tooth mould group includes shield
Toothholder；The L-shaped construction in cross section of the shield toothholder, L-type inside are equipped with several second tooth sockets, and several second tooth sockets are along shield teeth
The length direction distribution of seat；The shield toothholder of the two shields tooth mould group is arranged in opposite directions.
8. the film frequency device of automation loading and unloading according to claim 1, which is characterized in that the second driven in translation mould
Group includes flat-removing air cyclinder, third sliding module；The third sliding module is respectively along perpendicular to the first sliding module, the second sliding
The length direction of mould group arranges that flat-removing air cyclinder is for driving shield tooth mould group to translate along third sliding module.
9. the film frequency device of automation loading and unloading according to claim 2, which is characterized in that the apical tooth plate is set as two
It is a, two apical tooth plates parallel arrangement.
10. the film frequency device of automation loading and unloading according to claim 7, which is characterized in that several first tooth sockets,
Several second tooth sockets are equally spaced, and the two tooth socket is away from the card slot of boat away from identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920147945.4U CN209418476U (en) | 2019-01-28 | 2019-01-28 | A kind of film frequency device automating loading and unloading |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920147945.4U CN209418476U (en) | 2019-01-28 | 2019-01-28 | A kind of film frequency device automating loading and unloading |
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| Publication Number | Publication Date |
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| CN209418476U true CN209418476U (en) | 2019-09-20 |
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| CN201920147945.4U Active CN209418476U (en) | 2019-01-28 | 2019-01-28 | A kind of film frequency device automating loading and unloading |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111312638A (en) * | 2019-10-25 | 2020-06-19 | 深圳市拉普拉斯能源技术有限公司 | Automatic feeding and discharging device capable of temporarily storing raw materials |
-
2019
- 2019-01-28 CN CN201920147945.4U patent/CN209418476U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111312638A (en) * | 2019-10-25 | 2020-06-19 | 深圳市拉普拉斯能源技术有限公司 | Automatic feeding and discharging device capable of temporarily storing raw materials |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee after: Laplace New Energy Technology Co.,Ltd. Address before: 518000 No.1, Jikang Road, Kengzi street, Pingshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN LAPLACE ENERGY TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |