CN104555409A - Multi-directional transplanting mechanism - Google Patents
Multi-directional transplanting mechanism Download PDFInfo
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- CN104555409A CN104555409A CN201510009547.2A CN201510009547A CN104555409A CN 104555409 A CN104555409 A CN 104555409A CN 201510009547 A CN201510009547 A CN 201510009547A CN 104555409 A CN104555409 A CN 104555409A
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Abstract
The invention relates to the technical field of automatic crystalline-silicon solar battery transportation systems, in particular to a multi-directional transplanting mechanism capable of safely, stably and precisely transporting material racks in tri-axial direction. The multi-directional transplanting mechanism comprises a body support framework system, an X-axis linear move system, a Z-axis lifting system, a Y-axis feeding system and a front end capturing system; a capturing device is capable of precisely and stably finishing capturing, transplanting and placing to finish tri-axial linear reciprocation; the performance is stable, the use is safe and reliable, and the loading and unloading are easy to perform; the production efficiency and final product quality can be improved; the silicon wafer damage ratio is lowered at the utmost.
Description
Technical field
The present invention relates to crystal silicon solar automatic system logistics transmission technical field, particularly relate to a kind of can in three direction of principal axis safety, steadily, the multidirectional transplanting mechanism of accurate carrying bin.
Background technology
Along with global greenhouse effect is day by day serious, the exhaustion day by day of oil, natural gas, coal, environmental protection and energy saving have become the theme of world development.The regenerative resource that solar energy is unlimited as a kind of reserves, clean, safe is the developing direction of global new forms of energy.Under the guidance of national novel energy and regenerative resource industrial policy and under the drive of American-European solar energy market solid demand, domestic solar photovoltaic industry develop rapidly in recent years.At present, China has become solar cell and has manufactured big country, has the maximum manufacture of solar cells producer in the whole world and production capacity over half.
The fast development of solar photovoltaic industry also promotes the flourish of domestic photovoltaic manufacturing equipment industry.It is early stage that solar cell industry develops, and solar battery sheet manufacturing enterprise does not cause the demand to automatic production line, and production line is slapped together by semi-automatic, the automation equipment that isolate substantially.Along with the explosive growth of global solar photovoltaic industry, suitable in order to make field of solar energy unit cost of electricity-generating be reduced to conventional power generation usage cost, solar battery sheet manufacturer more and more an urgent demand can use high integrated, supermatic production line.In future, the height of automaticity will determine that in certain aspect who is only the minimum manufacturer of production cost, and can simply copy in factory subsequently through well-designed and automatic factory's system of high-efficiency operation, and gets out of the red rapidly.Comply with the growth requirement of photovoltaic industry, external solar battery sheet production equipment just by semi-automation to full-automatic, intelligent transition so that improve production efficiency and product quality, reduce production cost.
At present, the chip transmission between each technique unit of crystal silicon solar batteries slice assembly line loads silicon chip with stacking type or card slot type two kinds of modes, then adopts dolly a dead lift.This mode efficiency is low, is unfavorable for large-scale production.But, because the initial stage of crystal silicon solar batteries production line development does not consider full-automatic production, thus various automation interface is not possessed, do not exist and each technique unit can be coupled together self-propagating material transmission system, there is not the automated handling method adapting to this production process yet.
In order to realize full-automatic large-scale production, the chip transmission between each technique unit must adopt automatic transmission system to realize.For this reason, must develop adapt to crystal silicon solar battery sheet automatic production line bin magazine logistic transmission system.Under this industry background, develop a series of logistics transmission module, logistic transmission system can be built according to customer demand, provide rapidly different production-scale crystal silicon solar batteries sheet to manufacture whole line automation solution.
At present, in already present automation equipment, when needs realize multidirectional crawl, transfer, placement object, robot is usually adopted to come, robot can realize the displacement of multiple degrees of freedom optional position by computer and servo control technique, but it is expensive, technical support is complicated.Refer to Fig. 1, Fig. 1 is a kind of structural representation of bin, and bin 100 is for placing solar cell silicon wafer.Solar battery sheet Automatic production line often need the bin 100 loading silicon chip in three between centers straight reciprocating motions, and the solar cell silicon wafer be placed in bin 100 belongs to valuable and very easily cracked, silicon chip carrying needs safety, steadily, accurately carries out, realize shock-free automatic transporting simultaneously, therefore, how to research and develop a kind of can in three direction of principal axis safety, steadily, the multidirectional transplanting mechanism of accurate carrying bin, become the technical barrier that those skilled in the art are urgently to be resolved hurrily.
Summary of the invention
The object of the invention be to provide a kind of can in three direction of principal axis safety, steadily, the multidirectional transplanting mechanism of accurate carrying bin.
To achieve these goals, the invention provides a kind of multidirectional transplanting mechanism, comprising:
Main body frame support system, for supporting X-axis rectilinear movement system, Z axis jacking system, Y-axis feed system, front end grasping system;
X-axis rectilinear movement system, moves linearly in horizontal cross for driving described Z axis jacking system, Y-axis feed system, front end grasping system; X-axis rectilinear movement system is located on the general frame of described main body frame support system, and Z axis jacking system described in the fixed-link of this X-axis rectilinear movement system mobile terminal;
Z axis jacking system, for driving described Y-axis feed system in the elevating movement of vertical direction straight line, and Y-axis feed system described in the mobile terminal fixed-link of this Z axis jacking system;
Y-axis feed system, for driving front end grasping system along the longitudinal reciprocating motion of level, and the mobile terminal of this Y-axis feed system is fixedly connected with front end grasping system;
Front end grasping system, for capturing the bin needing to transplant.
Preferably, described X-axis rectilinear movement system comprises profile of tooth belt band rolling guide linear moving apparatus, X-axis driven by servomotor assembly, X-axis wiring drag chain, X-axis slide attachment plate; Described profile of tooth belt band rolling guide linear moving apparatus is fixed on described general frame by framework connecting piece, described in described X-axis driven by servomotor Component driver, the slide block of profile of tooth belt band rolling guide linear moving apparatus linearly moves, described slide block is fixed with described X-axis slide attachment plate, described X-axis wiring drag chain connects described slide block by X-axis slide attachment plate.
Preferably, described profile of tooth belt band rolling guide linear moving apparatus is also provided with X-axis sensing positioning system.
Preferably, described X-axis wiring drag chain is fixed in the supporting bracket of described main body frame support system.
Preferably, Z axis jacking system comprises Ball screw type linear moving apparatus, Z axis driven by servomotor assembly; Described Ball screw type linear moving apparatus is fixed on described X-axis slide attachment plate, and the fixed platform of described Ball screw type linear moving apparatus is provided with connecting plate unit, and described fixed platform is fixed on the slide block of Ball screw type linear moving apparatus; Described Z axis driven by servomotor assembly is for driving Ball screw type linear moving apparatus in vertical direction straight reciprocating motion.
Preferably, also comprise Z axis sensor localization system, described Z axis sensor localization system, described Z axis driven by servomotor assembly are arranged on described Ball screw type linear moving apparatus.
Preferably, described connecting plate unit is provided with one end connection cabling terminal board of gas circuit control element, Z axis cabling drag chain, the other end of described Z axis cabling drag chain connects described X-axis slide attachment plate.
Preferably, described Y-axis feed system comprises cylinder and cylinder connecting plate; The slide unit of described cylinder front end connects described front end grasping system, and upper end is fixed on described connecting plate unit by cylinder connecting plate.
Preferably, described cylinder is small-sized sliding desk type cylinder.
Preferably, whether two ends of described cylinder side box drain groove set up pair of magnetic switch separately, put in place in order to the stretching motion sensing described cylinder.
Preferably, described front end grasping system comprises crawl clamping device and captures clamping device connecting plate, and described crawl clamping device comprises crawl finger, points contiguous block and parallel air gripper; Described crawl finger is fixed on described finger contiguous block, is driven carry out action by described parallel air gripper; Described parallel air gripper is connected with described cylinder by capturing clamping device connecting plate.
Preferably, the quantity of described parallel air gripper is two, and two parallel air grippers are by an electromagnetically operated valve Synchronization Control.
Preferably, whether two ends of described each parallel air gripper side groove set up pair of magnetic switch separately, put in place in order to the stretching motion sensing described each parallel air gripper.
Preferably, the described material capturing finger is polyurethane.
Multidirectional transplanting mechanism provided by the invention comprises body supports frame system, X-axis rectilinear movement system, Z axis jacking system, Y-axis feed system and front end grasping system, enable grabbing device accurately, steadily complete crawl, transfer, placement action, complete three axial straight reciprocating motions; Stable performance, safe and reliable, handling are easily; Can enhance productivity and end product quality; Maximum possible reduces silicon chip spoilage simultaneously.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of bin;
Fig. 2 is that the master of a kind of embodiment of multidirectional transplanting mechanism provided by the invention looks perspective view;
Fig. 3 is the side perspective structural representation of multidirectional transplanting mechanism in Fig. 2;
Fig. 4 is the schematic diagram that bin puts in place;
Fig. 5 is the schematic diagram of X-axis rectilinear movement system to the direction movement of bin;
Fig. 6 is the schematic diagram that front end grasping system captures bin;
Fig. 7 is the schematic diagram that Z axis jacking system rises;
Fig. 8 is the schematic diagram that bin is transported to bin pallet;
Fig. 9 is the schematic diagram that Z axis jacking system declines;
Figure 10 is that front end grasping system shrinks the schematic diagram of material rest device at bin pallet;
Figure 11 is the schematic diagram that Y-axis feed system is shunk;
Figure 12 is the schematic diagram that Z axis jacking system rises.
Wherein, in Fig. 1 ~ Figure 12:
Bin 100; Bin pallet 101; Conveyer 102; Body supports frame system 1; X-axis rectilinear movement system 2; Z axis jacking system 3; Y-axis feed system 4; Front end grasping system 5; General frame 6; Supporting bracket 7; Source of the gas control piece 8; X-axis wiring drag chain 9; Gear belt band rolling guide linear moving apparatus 10; X-axis driven by servomotor assembly 11; X-axis sensing positioning system 12; Framework connecting piece 13; X-axis wiring drag chain connector 14; X-axis slide attachment plate 15; Z axis driven by servomotor assembly 16; Z axis cabling drag chain 17; Ball screw type linear moving apparatus 18; Z axis sensing positioning system 19; Cabling terminal board 20; Connecting plate unit 21; Gas circuit control assembly 22; Connecting plate reinforcement 23; Cylinder connecting plate 24; Small-sized sliding desk type cylinder 25; Reinforcement 26; Capture clamping device connecting plate 27; Capture clamping device 28.
Embodiment
For making content of the present invention clearly understandable, below in conjunction with Figure of description, content of the present invention is described further.Certain the present invention is not limited to this specific embodiment, and the general replacement known by those skilled in the art is also encompassed in protection scope of the present invention.Secondly, the present invention's detailed statement that utilized schematic diagram to carry out, when describing example of the present invention in detail, for convenience of explanation, schematic diagram, should in this, as limitation of the invention not according to general ratio partial enlargement.
It should be noted that, in following embodiment, utilize the structural representation of Fig. 1 ~ 12 to carry out detailed statement to by multidirectional transplanting mechanism provided by the invention.Describe in detail embodiments of the present invention time, for convenience of explanation, each schematic diagram not according to general scale and carried out partial enlargement and omit process, therefore, should avoid in this, as limitation of the invention.
Please refer to Fig. 2 ~ Fig. 3, Fig. 2 is that the master of a kind of embodiment of multidirectional transplanting mechanism provided by the invention looks perspective view; Fig. 3 is the side perspective structural representation of multidirectional transplanting mechanism in Fig. 2.
As shown in Figure 2 to 3, the invention provides and the invention provides a kind of multidirectional transplanting mechanism, comprising: the rectilinear movement of main body frame support system 1, X-axis system 2, Z axis jacking system 3, Y-axis feed system 4, front end grasping system 5; X-axis rectilinear movement system 2, moves linearly in horizontal cross for driving described Z axis jacking system 3, Y-axis feed system 4, front end grasping system 5; X-axis rectilinear movement system 2 is located on the general frame 6 of described main body frame support system 1, and Z axis jacking system 3 described in the fixed-link of this X-axis rectilinear movement system 2 mobile terminal; Z axis jacking system 3, for driving described Y-axis feed system 4 in the elevating movement of vertical direction straight line, and Y-axis feed system 4 described in the mobile terminal fixed-link of this Z axis jacking system 3; Y-axis feed system 4, for driving front end grasping system 5 along the longitudinal reciprocating motion of level, and the mobile terminal of this Y-axis feed system 4 is fixedly connected with front end grasping system 5; Front end grasping system 5, for capturing the bin 100 needing to transplant.
Multidirectional transplanting mechanism provided by the invention comprises body supports frame system 1, X-axis rectilinear movement system 2, Z axis jacking system 3, Y-axis feed system 4 and front end grasping system 5, enable grabbing device accurately, steadily complete crawl, transfer, placement action, complete three axial straight reciprocating motions; Stable performance, safe and reliable, handling are easily; Can enhance productivity and end product quality; Maximum possible reduces silicon chip spoilage simultaneously.
Concrete, in the present embodiment, body supports frame system 1 can comprise general frame 6, supporting bracket 7, source of the gas control piece 8, and general frame 6 can be formed by connecting by extruding aluminum corner brace by heavy aluminium section bar, and can be fastenedly connected with external equipment; Supporting bracket 7, source of the gas control piece 8 are fixed on general frame 6.
Concrete, in the present embodiment, X-axis rectilinear movement system 2 comprises profile of tooth belt band rolling guide linear moving apparatus 10, X-axis driven by servomotor assembly 11, X-axis wiring drag chain 9, X-axis slide attachment plate 15; Profile of tooth belt band rolling guide linear moving apparatus 10 is fixed on described general frame 6 by framework connecting piece 13, X-axis driven by servomotor assembly 11 drives the slide block of described profile of tooth belt band rolling guide linear moving apparatus 10 linearly to move, described slide block is fixed with described X-axis slide attachment plate 15, described X-axis wiring drag chain 9 connects described slide block by X-axis slide attachment plate 14.
In preferred scheme, profile of tooth belt band rolling guide linear moving apparatus 10 is also provided with X-axis sensing positioning system 12.In addition, X-axis wiring drag chain 9 is fixed in the supporting bracket 7 of main body frame support system.
Concrete, in the present embodiment, Z axis jacking system 3 comprises Ball screw type linear moving apparatus 18, Z axis driven by servomotor assembly 16; Described Ball screw type linear moving apparatus 18 is fixed on described X-axis slide attachment plate 15, and the fixed platform (fixed platform is fixed on the slide block of Ball screw type linear moving apparatus) of described Ball screw type linear moving apparatus 18 is fixedly connected with Slab element 21; Described Z axis driven by servomotor assembly 16 is for driving Ball screw type linear moving apparatus 18 in vertical direction straight reciprocating motion.
In addition, also comprise Z axis sensor localization system 19, Z axis sensor localization system 19 and Z axis driven by servomotor assembly 16 are arranged on described Ball screw type linear moving apparatus 18.
In preferred scheme, connecting plate unit 21 is provided with gas circuit control element 22, one end of Z axis cabling drag chain and cabling terminal board 20, the other end of described Z axis cabling drag chain connects described X-axis slide attachment plate 15.
Concrete, in the present embodiment, Y-axis feed system 4 comprises cylinder 25 and cylinder connecting plate 24; The slide unit of described cylinder 25 front end connects described front end grasping system 5, and upper end is fixed on described connecting plate unit 21 by cylinder connecting plate 24.Preferably, cylinder is small-sized sliding desk type cylinder 25.As a preferred embodiment, pair of magnetic switch (not shown) can also be set up separately at two ends of described cylinder 25 side groove, whether put in place in order to the stretching motion sensing described cylinder 25.
Concrete, in the present embodiment, front end grasping system 5 comprises crawl clamping device 28 and captures clamping device connecting plate 27, and described crawl clamping device 28 comprises crawl finger, points contiguous block and parallel air gripper; Described crawl finger is fixed on described finger contiguous block, is driven carry out action by described parallel air gripper; Described parallel air gripper is connected with described cylinder by capturing clamping device connecting plate 27.
Clamp bin about 100 two ends to realize synchronous crawl, the quantity of described parallel air gripper is two, and two parallel air grippers are by an electromagnetically operated valve Synchronization Control.As a preferred embodiment, pair of magnetic switch can also be set up separately at two ends of described each parallel air gripper side groove, whether put in place in order to the stretching motion sensing described each parallel air gripper.
In addition, in order to reduce to capture the collision between finger and bin 100, the material of described crawl finger is polyurethane.
Below in conjunction with accompanying drawing, the bin 100 on transport tape to be transported to the process of bin pallet 101, the operation principle of multidirectional transplanting mechanism provided by the invention is simply introduced.
Please refer to Fig. 4-Figure 12, the workflow of multidirectional transplanting mechanism provided by the invention is as follows:
Bin 100 puts in place, as shown in Figure 4, direction A is bin 100 direct of travel, and bin 100 marches to conveyer 102 left end until stopped by stopper by transport tape, simultaneously conveyer 102 bin 100 signal detected to level sensor, then transport tape is out of service.
Capture bin 100, as shown in Fig. 5-Fig. 6, direction B is X-axis rectilinear movement system 2 moving direction, direction C is Z axis jacking system 3 moving direction, direction D is Y-axis feed system 4 moving direction, direction E is that front end grasping system 5 opens direction, direction F is front end grasping system 5 shrinkage direction, the X-axis rectilinear movement system 2 of multidirectional transplanting mechanism starts to move to the direction of bin 100 until the position that detected by X-axis sensing positioning system right-hand member transducer, then Z axis jacking system 3 drops to the position detected by end sensor under Z axis sensing positioning system, then the cylinder slide unit of Y-axis feed system 4 stretches out, promote front end grasping system 5 close to bin 100, the parallel air gripper of front end grasping system 5 opens thus clamps bin 100 afterwards again.
Carrying bin 100, as shown in Figs. 7-8, the Z axis jacking system 3 of multidirectional transplanting mechanism rises to the position detected by end sensor on Z axis sensing positioning system, then contraction state is got back in the cylinder slide unit counter motion of Y-axis feed system 4, then X-axis rectilinear movement is moved to the left until the position that detected by X-axis sensing positioning system left end transducer, thus is carried to above bin 100 pallet 101 by bin 100.
Place bin 100, as shown in Fig. 9-Figure 10, the cylinder slide unit of the Y-axis feed system 4 of multidirectional transplanting mechanism extends, then Z axis jacking system 3 drops to the position detected by end sensor under Z axis sensing positioning system, and then the parallel air gripper of front end grasping system 5 shrinks thus is placed on bin pallet 101 by bin 100.
Mechanism resets, as shown in Figure 11-Figure 12, the cylinder slide unit of the Y-axis feed system 4 of multidirectional transplanting mechanism shrinks, then Z axis jacking system 3 rises to the position detected by end sensor on Z axis sensing positioning system, namely transplanter mechanism completes reset, prepare to carry out the crawl of next bin 100, carrying and placement, bin 100 is carried to next technique by bin pallet 101 simultaneously.
The above is only the description of the preferred implementation of invention; should be understood that; due to the finiteness of literal expression; and objectively there is unlimited concrete structure; for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.Any simple modification, equivalent variations and modification, all still belong in the scope of technical solution of the present invention protection.
Claims (14)
1. a multidirectional transplanting mechanism, is characterized in that, comprising:
Main body frame support system, for supporting X-axis rectilinear movement system, Z axis jacking system, Y-axis feed system, front end grasping system;
X-axis rectilinear movement system, moves linearly in horizontal cross for driving described Z axis jacking system, Y-axis feed system, front end grasping system; X-axis rectilinear movement system is located on the general frame of described main body frame support system, and Z axis jacking system described in the fixed-link of this X-axis rectilinear movement system mobile terminal;
Z axis jacking system, for driving described Y-axis feed system in the elevating movement of vertical direction straight line, and Y-axis feed system described in the mobile terminal fixed-link of this Z axis jacking system;
Y-axis feed system, for driving front end grasping system along the longitudinal reciprocating motion of level, and the mobile terminal of this Y-axis feed system is fixedly connected with front end grasping system;
Front end grasping system, for capturing the bin needing to transplant.
2. multidirectional transplanting mechanism according to claim 1, is characterized in that, described X-axis rectilinear movement system comprises profile of tooth belt band rolling guide linear moving apparatus, X-axis driven by servomotor assembly, X-axis wiring drag chain, X-axis slide attachment plate; Described profile of tooth belt band rolling guide linear moving apparatus is fixed on described general frame by framework connecting piece, described in described X-axis driven by servomotor Component driver, the slide block of profile of tooth belt band rolling guide linear moving apparatus linearly moves, described slide block is fixed with described X-axis slide attachment plate, described X-axis wiring drag chain connects described slide block by X-axis slide attachment plate.
3. multidirectional transplanting mechanism according to claim 2, is characterized in that, described profile of tooth belt band rolling guide linear moving apparatus is also provided with X-axis sensing positioning system.
4. multidirectional transplanting mechanism according to claim 2, it is characterized in that, described X-axis wiring drag chain is fixed in the supporting bracket of described main body frame support system.
5. multidirectional transplanting mechanism according to claim 2, it is characterized in that, Z axis jacking system comprises Ball screw type linear moving apparatus, Z axis driven by servomotor assembly; Described Ball screw type linear moving apparatus is fixed on described X-axis slide attachment plate, and the fixed platform of described Ball screw type linear moving apparatus is provided with connecting plate unit, and described fixed platform is fixed on the slide block of Ball screw type linear moving apparatus; Described Z axis driven by servomotor assembly is for driving Ball screw type linear moving apparatus in vertical direction straight reciprocating motion.
6. multidirectional transplanting mechanism according to claim 5, it is characterized in that, also comprise Z axis sensor localization system, described Z axis sensor localization system, described Z axis driven by servomotor assembly are arranged on described Ball screw type linear moving apparatus.
7. multidirectional transplanting mechanism according to claim 5, is characterized in that, described connecting plate unit is provided with gas circuit control element, one end of Z axis cabling drag chain connects cabling terminal board, the other end of described Z axis cabling drag chain connects described X-axis slide attachment plate.
8. multidirectional transplanting mechanism according to claim 5, it is characterized in that, described Y-axis feed system comprises cylinder and cylinder connecting plate; The slide unit of described cylinder front end connects described front end grasping system, and upper end is fixed on described connecting plate unit by cylinder connecting plate.
9. multidirectional transplanting mechanism according to claim 8, it is characterized in that, described cylinder is small-sized sliding desk type cylinder.
10. multidirectional transplanting mechanism according to claim 8, it is characterized in that, whether two ends of described cylinder side box drain groove set up pair of magnetic switch separately, put in place in order to the stretching motion sensing described cylinder.
11. multidirectional transplanting mechanisms according to claim 8, is characterized in that, described front end grasping system comprises and captures clamping device and capture clamping device connecting plate, and described crawl clamping device comprises and captures finger, finger contiguous block and parallel air gripper; Described crawl finger is fixed on described finger contiguous block, is driven carry out action by described parallel air gripper; Described parallel air gripper is connected with described cylinder by capturing clamping device connecting plate.
12., according to transplanting mechanism multidirectional described in claim 11, is characterized in that, the quantity of described parallel air gripper is two, and two parallel air grippers are by an electromagnetically operated valve Synchronization Control.
13., according to transplanting mechanism multidirectional described in claim 11, is characterized in that, whether two ends of described each parallel air gripper side groove set up pair of magnetic switch separately, put in place in order to the stretching motion sensing described each parallel air gripper.
14., according to transplanting mechanism multidirectional described in claim 11, is characterized in that, the described material capturing finger is polyurethane.
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| CN201510009547.2A CN104555409B (en) | 2015-01-08 | 2015-01-08 | A kind of multidirectional transplanting mechanism |
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| CN201510009547.2A CN104555409B (en) | 2015-01-08 | 2015-01-08 | A kind of multidirectional transplanting mechanism |
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| CN106044211A (en) * | 2016-07-21 | 2016-10-26 | 湖南三兴精密工业股份有限公司 | Automatic feeding-discharging equipment for cover plate material |
| CN106424420A (en) * | 2016-11-16 | 2017-02-22 | 广东志高空调有限公司 | Three-working-position punching machine sheet metal part transplanting equipment |
| CN107758257A (en) * | 2017-12-06 | 2018-03-06 | 常州市科沛达超声工程设备有限公司 | Automatic gaily decorated basket transplanter |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: Qixinghuachuang Electronic Co., Ltd., Beijing |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180207 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd |