CN219610375U - Cleaning basket - Google Patents

Abstract

The utility model provides a cleaning basket, which comprises: the wafer carrying device comprises a carrying seat, a fixing plate and carrying spaces between the carrying seat and the fixing plate, wherein the carrying spaces are used for carrying wafers, the fixing plate is provided with a plurality of mounting holes which are longitudinally and transversely arranged at intervals, the carrying seat is fixed in the mounting holes of the fixing plate along the two axial sides of the carrying seat, and the carrying seat is longitudinally and transversely adjusted to be mounted in the mounting holes at different positions so as to form carrying spaces with different sizes, and the wafer carrying device is suitable for wafer products with different specifications and sizes.

Description

Cleaning basket

Technical Field

The utility model relates to the field of semiconductor wafer cleaning, in particular to a cleaning basket for cleaning a wafer.

Background

The existing wafer cleaning adopts plastic cleaning baskets, which are required to be manufactured by mold opening, and have high cost; most of the existing cleaning baskets are used for cleaning in a single size, and in the practical operation process, the cleaning baskets with corresponding sizes are required to be prepared for wafers with each size, so that the cost is increased.

In view of this, there is a need for an improvement over existing cleaning baskets to address the above-described problems.

Disclosure of Invention

The utility model aims to provide a cleaning basket with an adjusting function.

To achieve the above object, the present utility model provides a cleaning basket comprising: the wafer carrying device comprises a carrying seat, a fixing plate and carrying spaces between the carrying seat and the fixing plate, wherein the carrying spaces are used for carrying wafers, the fixing plate is provided with a plurality of mounting holes which are longitudinally and transversely arranged at intervals, the carrying seat is fixed in the mounting holes of the fixing plate along the two axial sides of the carrying seat, and the carrying seat is longitudinally and transversely adjusted to be mounted in the mounting holes at different positions so as to form carrying spaces with different sizes.

As a further improvement of the utility model, the fixing plate comprises a plurality of groups of mounting holes arranged on virtual circles with different sizes, the bearing seat comprises a plurality of fixing clamping seats, and the fixing clamping seats are selectively arranged on one group of mounting holes.

As a further improvement of the utility model, the bearing seat comprises three fixing clamping seats, wherein one fixing clamping seat is positioned at the bottom of any virtual circle along the longitudinal direction, and the other two fixing clamping seats are positioned at two sides of the virtual circle along the transverse direction.

As a further improvement of the utility model, each fixed clamping seat is provided with a clamping groove which is used for clamping the edge of the wafer, and a plurality of clamping grooves which come from different fixed clamping seats and are positioned on the same virtual wafer are the same group of clamping grooves, and the same group of clamping grooves are used for clamping the same wafer.

As a further improvement of the utility model, each fixing clamping seat comprises a plurality of clamping grooves which are axially parallel and are arranged at intervals, and the bearing seat comprises a plurality of groups of parallel and spaced clamping grooves.

As a further improvement of the utility model, the fixing clamping seat is a cylinder and is perpendicular to the fixing plate, two axial sides of the cylinder are fixed on the mounting hole, and the clamping groove is an annular groove concavely formed on the annular surface of the cylinder.

As a further improvement of the utility model, the two sides of the fixed clamping seat are locked in the mounting hole through the matching of the screw rod and the nut.

As a further improvement of the utility model, the cleaning basket comprises two fixing plates arranged on two sides of the bearing seat, the bearing seat is horizontally arranged between the two fixing plates along the axial direction, and the fixing plates are vertically arranged along the longitudinal direction.

As a further improvement of the utility model, each fixing plate comprises a plurality of rows of mounting holes aligned along the transverse direction, two adjacent mounting holes are staggered along the longitudinal direction, and the mounting holes on the two fixing plates are aligned along the axial direction one by one.

As a further improvement of the utility model, the cleaning basket comprises handles which are positioned at two sides along the transverse direction, wherein the handles are fixed on the fixing plate along two sides along the axial direction and are positioned between the fixing clamping seats along the longitudinal direction.

The utility model has the beneficial effects that: the size of the bearing space of the cleaning basket can be adjusted, the cleaning basket is suitable for wafer products with different sizes, and the manufacturing cost is reduced.

Drawings

FIG. 1 is a perspective view of a cleaning basket of the present utility model carrying wafers.

Fig. 2 is a front view of the device shown in fig. 1.

Fig. 3 is a side view of fig. 1.

FIG. 4 is a schematic view of the cleaning basket of FIG. 1 with one side of the fixing plate removed.

Detailed Description

The present utility model will be described in detail below with reference to embodiments shown in the drawings. The embodiment is not intended to limit the present utility model, and structural, methodological, or functional modifications of the utility model according to the embodiment are included in the scope of the utility model.

Terms such as "upper," "above," "lower," "below," and the like, as used herein, refer to a spatial relative position, and are used for ease of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. The term spatially relative position may be intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or other orientations) and the spatially relative descriptors used herein interpreted accordingly.

Referring to fig. 1-4, a preferred embodiment of a cleaning basket 100 for supporting wafer 200 products of different sizes is shown. The cleaning basket 100 comprises a bearing seat 10, a fixing plate 20 and a bearing space 101 between the bearing seat 10 and the fixing plate 20 for bearing the wafer 200, wherein the fixing plate 20 is provided with a plurality of mounting holes 21 arranged at intervals longitudinally and transversely, the bearing seat 10 is fixed on the mounting holes 21 of the fixing plate 20 along two axial sides of the bearing seat, and the bearing seat 10 can be longitudinally and transversely arranged in the mounting holes 21 at different positions in an adjustable manner so as to form bearing spaces 101 with different sizes and adapt to wafers 200 with different sizes.

The cleaning basket 100 includes two fixing plates 20 disposed on two sides of the carrying seat 10, the carrying seat 10 is disposed between the two fixing plates 20 and is vertically connected with the two fixing plates 20, more specifically, the carrying seat 10 is disposed horizontally along an axial direction, the fixing plates 20 are vertically disposed along a longitudinal direction, the two fixing plates are enclosed together to form a carrying space 101, the wafer 200 is disposed in the carrying space 101 in a vertical posture, and the wafer 200 is perpendicular to the carrying seat 10 and parallel to the two fixing plates 20.

Each fixing plate 20 is provided with a plurality of mounting holes 21, each fixing plate 20 is formed into a square mesh plate, specifically, each fixing plate 20 comprises a plurality of rows of mounting holes 21 aligned along the transverse direction, two adjacent mounting holes 21 are staggered with each other along the longitudinal direction, every other mounting hole 21 is aligned with each other along the longitudinal direction, and the mounting holes 21 on two fixing plates 20 are aligned with each other along the axial direction so as to be used for horizontally mounting the bearing seat 10 along the axial direction. The fixing plate 20 includes a plurality of groups of mounting holes 21 arranged on virtual circles with different sizes, that is, the arrangement and combination of the mounting holes 21 at different positions can enclose virtual circles with different diameters for the optional mounting of the carrier 10, the carrier 10 includes a plurality of fixing holders 11, and a plurality of fixing holders 11 are optionally mounted on a group of the mounting holes 21 to adapt to the size of the wafer 200. That is, according to the diameter size of the wafer 200, the mounting holes 21 of each fixing clip 11 mounted at different positions are respectively adjusted in the lateral direction and the longitudinal direction, so that a plurality of fixing clip 11 are commonly mounted at the mounting holes 21 located at the same virtual circle.

In the preferred embodiment, the carrying seat 10 comprises three fixing seats 11, wherein one fixing seat 11 is located at the bottom of a virtual circle along the longitudinal direction, the other two fixing seats 11 are located at two sides of the virtual circle along the transverse direction and are basically located at two ends of the virtual circle along the transverse direction, and the three fixing seats 11 basically form an isosceles right triangle positional relationship, so that the clamping is more stable, as shown in fig. 2. In other embodiments, the three fixing holders 11 can move longitudinally and/or transversely, and can be adjusted to be installed in different mounting holes 21, so that the three fixing holders 11 can support wafer products with different sizes, and the size of the wafer 200 is consistent with that of a virtual wafer formed by arranging the mounting holes 21.

Each fixing clamping seat 11 is a cylinder and is perpendicular to the fixing plates 20 on two sides, two axial sides of the cylinder are locked to the mounting holes 21 through the matching of screws and nuts (not numbered), and the fixing clamping seats 11 and the mounting holes 21 can be unlocked through screwing out the screws and the nuts, so that the fixing clamping seats 11 can be conveniently mounted in different mounting holes 21. Each fixing clamping seat 11 is provided with a clamping groove 110, the clamping grooves 110 are used for clamping the edges of the wafers 200, a plurality of clamping grooves which come from different fixing clamping seats 11 and are positioned on the same virtual wafer are 110 and are in the same group of clamping grooves, the same group of clamping grooves 110 clamp the same wafer, and the wafers 200 are clamped in one group of clamping grooves 110 in a vertical posture. Each of the fixing holders includes a plurality of clamping grooves 110 arranged in parallel and at intervals along the axial direction, and the carrier 10 includes a plurality of groups of parallel and spaced clamping grooves 110 for simultaneously clamping a plurality of wafers 200 in a vertical posture. In this embodiment, the carrier 10 includes 8 sets of holding slots 110 for holding and cleaning 8 wafer products, and in other embodiments, more sets of holding slots 110 may be disposed along the axial direction. The retaining groove 110 is an annular groove concavely formed on the annular surface of the cylinder 11.

The cleaning basket 100 includes handles 30 fixed on two sides of the fixing plate 20, which are symmetrical in the lateral direction, and an operator holds the handles 30 on two sides to take and place the cleaning basket 100 carrying the wafer 200. The handle 30 is parallel to the fixing clamping bases 11, and is fixed on the fixing plate 21 along two axial sides, and the handle 30 is longitudinally positioned between the two fixing clamping bases 11 and transversely extends beyond the fixing plate 20, so that the handle is convenient to hold and apply force. The lower surface of the handle 30 is provided with a recessed operating surface 31. The washing basket 100 includes a horizontal plate 40 below the handle 30, and the washing basket 100 is placed on an external washing machine (not shown) through the horizontal plate 40. The horizontal plate 40 is fixed to the bottom of the fixing plate 20 at both sides in the axial direction.

The above embodiments are only for illustrating the technical solution of the present utility model and not for limiting the same, and although the present utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made thereto without departing from the spirit and scope of the technical solution of the present utility model.

Claims (10)

1. A cleaning basket, comprising: the wafer carrying device comprises a carrying seat, a fixing plate and carrying spaces between the carrying seat and the fixing plate, wherein the carrying spaces are used for carrying wafers, the fixing plate is provided with a plurality of mounting holes which are longitudinally and transversely arranged at intervals, the carrying seat is fixed in the mounting holes of the fixing plate along the two axial sides of the carrying seat, and the carrying seat is longitudinally and transversely adjustable and mounted in the mounting holes at different positions so as to form carrying spaces with different sizes.

2. The cleaning basket of claim 1, wherein: the fixed plate comprises a plurality of groups of mounting holes which are arranged on virtual circles with different sizes, the bearing seat comprises a plurality of fixed clamping seats, and the fixed clamping seats are selectively arranged in one group of mounting holes.

3. The cleaning basket of claim 2, wherein: the bearing seat comprises three fixing clamping seats, wherein one fixing clamping seat is positioned at the bottom of any virtual circle along the longitudinal direction, and the other two fixing clamping seats are positioned at two sides of the virtual circle along the transverse direction.

4. The cleaning basket of claim 2, wherein: each fixing clamping seat is provided with a clamping groove, the clamping grooves are used for clamping the edges of wafers, a plurality of clamping grooves which come from different fixing clamping seats and are positioned on the same virtual circle are the same group of clamping grooves, and the same group of clamping grooves clamp the same wafer.

5. The cleaning basket of claim 4, wherein: each fixing clamping seat comprises a plurality of clamping grooves which are axially parallel and are arranged at intervals, and the bearing seat comprises a plurality of groups of parallel and spaced clamping grooves.

6. The cleaning basket of claim 5, wherein: the fixing clamping seat is a cylinder and is perpendicular to the fixing plate, two axial sides of the cylinder are fixed to the mounting hole, and the clamping groove is an annular groove formed by concavely arranging the annular surface of the cylinder.

7. The cleaning basket of claim 5, wherein: the two sides of the fixing clamping seat are locked in the mounting hole through the matching of the screw and the nut.

8. The cleaning basket of claim 2, wherein: the cleaning basket comprises two fixing plates arranged on two sides of the bearing seat, the bearing seat is horizontally arranged between the two fixing plates along the axial direction, and the fixing plates are vertically arranged along the longitudinal direction.

9. The cleaning basket of claim 8, wherein: each fixing plate comprises a plurality of rows of mounting holes aligned along the transverse direction, two adjacent mounting holes are staggered along the longitudinal direction, and the mounting holes on two fixing plates are aligned along the axial direction one by one.

10. The cleaning basket of claim 9, wherein: the cleaning basket comprises handles which are transversely positioned at two sides, the handles are fixed on the fixing plates at two sides along the axial direction, and the handles are longitudinally positioned between the fixing clamping seats.