CN215299205U - Wafer basket of flowers - Google Patents

Abstract

The application provides a wafer basket of flowers, includes: the two side plates are arranged in parallel and connected through a support body, and the side plates and the support body enclose a wafer placing area; meanwhile, the two side plates are respectively provided with a bracket penetrating hole, a bracket sliding groove and a bracket clamping groove, and the bracket clamping grooves are communicated with the bracket penetrating hole through the bracket sliding groove; the positions of the bracket clamping grooves on the side plates are arranged according to different wafer diameters; the two ends of the wafer support are respectively provided with a sunken clamping part, and the distance between the two clamping parts is equal to the distance between the two side plates; and the wafer bracket is also provided with a clamping groove for clamping the wafer. When the wafer support is used, the wafer support is selectively arranged in the corresponding support clamping groove according to the size of the wafer. Therefore, the wafer support can be used for loading wafers with different specifications and sizes by selecting the fixed position of the wafer support, so that the diversity of the loading sizes of the wafers is realized, the production cost can be saved, and the storage and occupation space of the flower basket can be reduced.

Description

Wafer basket of flowers

Technical Field

The application relates to the technical field of wafer processing, in particular to a wafer basket of flowers.

Background

With the development of semiconductor technology, the performance of products is continuously improved, and the surface quality of semiconductors is more and more strict, which forces the cleaning device in the industry to be gradually improved. In the conventional semiconductor cleaning basket, a semiconductor wafer is placed in the cleaning basket to be cleaned so as to remove impurities, particles and the like on the wafer.

For manufacturing efficiency, many manufacturers produce manufacturing or custom fabrication processes that are generally compatible with multiple size wafers, which results in a variety of semiconductor wafer sizes. The conventional wafer-loading baskets on the market currently generally load single-size wafers, so that baskets with various sizes are purchased, wafers with different sizes are loaded, and then the wafers are stored or cleaned and etched.

However, purchasing flower baskets with various sizes not only increases the production cost and occupies a large space, but also increases the production cost greatly considering the later updating of the wafer size.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects in the prior art, the embodiment of the application provides a wafer basket which can be used for loading wafers with different sizes.

The embodiment of the application provides a wafer basket of flowers mainly include curb plate, supporter, with curb plate swing joint's a plurality of wafer supports, wherein:

the two side plates are arranged in parallel and connected through the supporting body; the side plates and the supporting bodies enclose a wafer placing area;

the two side plates are respectively provided with a bracket penetrating hole, a bracket sliding groove and a bracket clamping groove, and the bracket clamping groove is communicated with the bracket penetrating hole through the bracket sliding groove; the positions of the bracket clamping grooves on the side plates are arranged according to different wafer diameters;

two ends of the wafer support are respectively provided with a sunken clamping part, and the distance between the two clamping parts is equal to the distance between the two side plates; the wafer bracket is positioned in the area between the two clamping parts, and is also provided with a wafer clamping groove;

the hole diameter of the support penetrating hole is larger than the outer diameter of the wafer support, the size of the support sliding groove is larger than the outer diameter of the clamping portion, and the support clamping groove is in interference fit with the clamping portion.

Optionally, a size identification line is further disposed on the side plate, wherein:

and each size identification line is respectively connected with a bracket clamping groove for fixing wafers with the same size.

Optionally, the support draw-in groove is the inscribed circle and arranges for fixed not unidimensional wafer the support draw-in groove is bilateral symmetry for circle inscribed point and arranges, wherein for fixed same size wafer:

at the point of the circle inscribed point, a main support clamping groove is also formed in the side plate, and the main support clamping groove is in interference fit with a clamping part of the wafer support penetrating through the main support clamping groove;

and a main support penetrating hole is also formed in the side plate at the top of the main support clamping groove and communicated with the main support clamping groove.

Optionally, the connecting line track of the bracket clamping grooves for fixing the wafers with the same size is semicircular.

Optionally, two support penetrating holes are formed in the side plate, and the two support penetrating holes and the support clamping grooves are symmetrically distributed relative to the central axis of the side plate, wherein:

the support penetrating hole is located in the top area of the side plate, the support sliding groove is composed of a vertical sliding groove and a plurality of transverse sliding grooves which are parallel to each other, the vertical sliding groove is communicated with the support penetrating hole, and the support clamping groove is formed in the transverse sliding groove.

Optionally, the wafer support is a cylindrical structure.

Optionally, the wafer card slot is of a V-shaped structure.

Optionally, the support body consists of 4 cylinders.

According to the technical scheme, the wafer flower basket comprises two side plates which are arranged in parallel, wherein the two side plates are connected through a support body, and a wafer placing area is defined by the side plates and the support body; meanwhile, the two side plates are respectively provided with a bracket penetrating hole, a bracket sliding groove and a bracket clamping groove, and the bracket clamping grooves are communicated with the bracket penetrating hole through the bracket sliding groove; the positions of the bracket clamping grooves on the side plates are arranged according to different wafer diameters; the two ends of the wafer support are respectively provided with a sunken clamping part, and the distance between the two clamping parts is equal to the distance between the two side plates; and the wafer bracket is also provided with a clamping groove for clamping the wafer. When the wafer clamping device is used, the corresponding support clamping grooves are selected to be installed into the corresponding support according to the size of a wafer, firstly, the wafer support penetrates into the support penetrating hole, then the wafer support is moved to the clamping groove of the target support along the support sliding groove, finally, the clamping part of the wafer support is fixed to the clamping groove of the support, and after the wafer support is completely fixed, the wafer can be installed. Therefore, the wafer basket of flowers that this embodiment provided can be used to carry the wafer of different specification and dimension through the fixed position of selecting the wafer support to realize the variety of wafer loadable size, can help saving manufacturing cost, reduce basket of flowers storage occupation space.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive labor.

FIG. 1 is a schematic diagram of a basic structure of a wafer basket according to an embodiment of the present disclosure;

fig. 2 is a schematic diagram of a basic structure of a side panel according to an embodiment of the present disclosure;

FIG. 3 is a schematic diagram of a basic architecture of a wafer carrier according to an embodiment of the present application;

fig. 4 is a schematic view illustrating a process of mounting a wafer carrier into a carrier slot according to an embodiment of the present application.

Detailed Description

Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.

Fig. 1 is a schematic diagram of a basic structure of a wafer basket according to an embodiment of the present disclosure. As shown in fig. 1, the wafer basket according to the embodiment of the present application includes a side plate 1, a support body 2, and a plurality of wafer holders 3 movably connected to the side plate.

Wherein, two curb plate 1 parallel arrangement to connect through supporter 2, curb plate 1 can be swing joint, also can be fixed connection with supporter 2, still can be integrated into one piece structure. The side plate 1 and the support body 2 enclose a wafer placement area, the side plate 1 in this embodiment is designed as a square structure, the support body 2 is composed of four columns, and the four column-shaped support bodies 2 are respectively fixed at four top corners of the side plate 1, of course, the side plate 1 and the support body 2 may be designed as other structural forms. The wafer holder 3 is used to support a wafer 4.

Fig. 2 is a schematic diagram of a basic architecture of a side panel according to an embodiment of the present application. As shown in fig. 2, the side plate 1 of the present embodiment is provided with a bracket insertion hole 11, a bracket sliding groove 12 and a bracket locking groove 13, and the bracket locking groove 13 is communicated with the bracket insertion hole 11 through the bracket sliding groove 12. The sizes of the stent penetration holes 11, the stent sliding grooves 12 and the stent clamping grooves 13 are designed to be gradually reduced, and the diameters of the stent penetration holes 11 and the stent sliding grooves 12 can be designed to be the same.

The positions of the rack clamping grooves 13 on the side plates are set according to different wafer diameters, generally, two or more rack clamping grooves 13 are required to be arranged on a wafer with one diameter, that is, at least two wafer racks 3 are required to fix the wafer.

As shown in fig. 2, in this embodiment, the track connecting lines of the rack slots 13 for fixing wafers of different sizes are arranged in an inscribed circle, and the rack slots 13 for fixing wafers of the same size are symmetrically arranged on both sides of the inscribed point of the circle. In order to conveniently penetrate into the wafer support, two support penetrating holes 11 are formed in the side plate 1, the two support penetrating holes 11 and the support clamping grooves 13 are symmetrically distributed relative to the central axis of the side plate 1, the support penetrating holes 11 are located in the top area of the side plate 1, the support sliding grooves 12 are composed of a vertical sliding groove and a plurality of transverse sliding grooves which are parallel to each other, the vertical sliding grooves are communicated with the support penetrating holes 11, the support clamping grooves 13 are formed in the transverse sliding grooves, and when the support penetrating holes 11 are wafers with different sizes, the common holes of the wafer support 3 are inserted. Of course, the arrangement of the rack insertion holes 11 and the rack slots 13 is not limited to the arrangement provided in this embodiment, and one rack slot 13 may correspond to one rack insertion hole 11 and one rack sliding groove 12, but the rack slots 13 for wafers with more sizes may be arranged in this embodiment, that is, the rack slots are suitable for loading wafers with more sizes.

Further, in order to fix the wafer more firmly, in this embodiment, at the point of the circle inscribed point, the side plate 1 is further provided with a main support clamping groove 15, and meanwhile, the main support clamping groove 15 and the wafer support 3 clamped therein are also in an interference fit manner. Since the main support catching groove 15 is at the bottommost portion of the flower basket, a main support insertion hole 15 is formed at the top portion of the main support catching groove 14, and the main support insertion hole 15 communicates with the main support catching groove 14.

In addition, in order to quickly position the required rack slots 13 when loading wafers, in this embodiment, the side plate 1 is further provided with dimension identification lines 16, and each dimension identification line 16 is respectively connected to the rack slots 13 for fixing wafers of the same dimension, as shown in fig. 2, the rack slots 13 of 5 dimensions are provided in this embodiment, and wafers of 2, 3, 4, 5, 6 inches, and 5 dimensions can be sequentially placed from inside to outside. When the wafer support is used, the size identification lines 16 are identified, and the wafer support 3 is inserted into the support clamping grooves 13 on the size identification lines 16.

Fig. 3 is a schematic diagram of a basic architecture of a wafer holder according to an embodiment of the present disclosure. As shown in fig. 3, the wafer holder 3 in this embodiment is designed to be a cylindrical structure, but may also be in other shapes, two ends of the wafer holder 3 are respectively provided with a recessed clamping portion 32, the distance between the two clamping portions 32 is equal to the distance between the two side plates 1, and the clamping portions 32 can be clamped into the holder slots 13; a wafer clamping groove 31 is further formed in the wafer support in the area between the two clamping portions 32, preferably, the wafer clamping groove 31 is designed as a V-shaped groove, and when the wafer support is used, the edge area of the wafer is clamped into the wafer clamping groove 31.

The size of the bracket penetrating hole 11 on the side plate 1 is larger than the outer diameter of the wafer bracket 3; the aperture of the support sliding groove 12 is larger than the outer diameter of the clamping part 32, so that the wafer support 3 can move in the support sliding groove 12; the holder engaging grooves 13 and the engaging portions 32 are in interference fit to fix the wafer holder 3.

Further, in order to better fix the wafer, the connecting line locus of the rack clamping grooves 13 for fixing the wafer of the same size is semicircular, and in addition, the arc degree of the adjacent rack clamping grooves 13 is between 30 ° and 60 °.

Fig. 4 is a schematic view illustrating a process of mounting a wafer carrier into a carrier slot according to an embodiment of the present application. As shown in fig. 4, when wafers are loaded, the corresponding rack pockets 13 are selected to be loaded with the corresponding wafer racks 3 according to the sizes of the wafers. Specifically, the wafer holder 3 is first inserted into the holder insertion holes 11 of the two side plates, the wafer holder 3 is then moved to the target holder locking groove 13 along the holder sliding groove 12, and finally, the locking portion 32 of the wafer holder 3 is fixed to the holder locking groove 13, and after all the wafer holders 3 are fixed, the wafer can be loaded. In the present embodiment, the material of each component of the wafer basket may be polytetrafluoroethylene, quartz, etc., and the present embodiment is not particularly limited.

The wafer basket of flowers that this embodiment provided can be used to carry the wafer of different specification and dimension through the fixed position of selecting wafer support to realize the wafer and can carry the variety of size, can help saving manufacturing cost, reduce basket of flowers storage occupation space.

The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.

It will be understood that the present application is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.

Claims (8)

1. The wafer basket for flowers is characterized by comprising a side plate, a supporting body and a plurality of wafer supports movably connected with the side plate, wherein:

the two side plates are arranged in parallel and connected through the supporting body; the side plates and the supporting bodies enclose a wafer placing area;

the two side plates are respectively provided with a bracket penetrating hole, a bracket sliding groove and a bracket clamping groove, and the bracket clamping groove is communicated with the bracket penetrating hole through the bracket sliding groove; the positions of the bracket clamping grooves on the side plates are arranged according to different wafer diameters;

two ends of the wafer support are respectively provided with a sunken clamping part, and the distance between the two clamping parts is equal to the distance between the two side plates; the wafer bracket is positioned in the area between the two clamping parts, and is also provided with a wafer clamping groove;

the hole diameter of the support penetrating hole is larger than the outer diameter of the wafer support, the support sliding groove is larger than the outer diameter of the clamping portion, and the support clamping groove is in interference fit with the clamping portion.

2. The wafer basket according to claim 1, wherein said side panels further comprise dimension marking lines, wherein:

and each size identification line is respectively connected with a bracket clamping groove for fixing wafers with the same size.

3. The wafer basket according to claim 1 or 2, wherein the rack slots for holding wafers of different sizes are arranged in an inscribed circle, and the rack slots for holding wafers of the same size are arranged bilaterally symmetrically with respect to the circle inscribed point, wherein:

a main support clamping groove is formed in the side plate at the inner tangent point of the circle, and is in interference fit with a clamping part of the wafer support penetrating through the main support clamping groove;

and a main support penetrating hole is also formed in the side plate at the top of the main support clamping groove and communicated with the main support clamping groove.

4. The wafer basket according to claim 1, wherein the trace of the connection line of the rack slots for holding wafers of the same size is semicircular.

5. The wafer basket according to claim 1, wherein said side plate has two bracket insertion holes, and said two bracket insertion holes and said bracket slots are symmetrically distributed with respect to a central axis of said side plate, wherein:

the support penetrating hole is located in the top area of the side plate, the support sliding groove is composed of a vertical sliding groove and a plurality of transverse sliding grooves which are parallel to each other, the vertical sliding groove is communicated with the support penetrating hole, and the support clamping groove is formed in the transverse sliding groove.

6. The wafer basket according to claim 1, wherein said wafer support is a cylindrical structure.

7. The wafer basket according to claim 1 or 6, wherein said wafer pockets are V-shaped.

8. The wafer basket according to claim 1, wherein said support body is comprised of 4 columns.

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