CN219393360U

CN219393360U - Bearing jig

Info

Publication number: CN219393360U
Application number: CN202320856258.6U
Authority: CN
Inventors: 段良飞; 刘剑荣; 董国庆; 文国昇; 金从龙
Original assignee: Jiangxi Zhao Chi Semiconductor Co Ltd
Current assignee: Jiangxi Zhao Chi Semiconductor Co Ltd
Priority date: 2023-04-17
Filing date: 2023-04-17
Publication date: 2023-07-21
Anticipated expiration: 2033-04-17

Abstract

The utility model discloses a bearing jig, which relates to the technical field of LED processing equipment and is used for supporting a clamping plug for bearing a wafer, a plurality of slots for inserting the wafer are formed in the clamping plug, the bearing jig comprises a bracket and a supporting component arranged on the bracket, the supporting component comprises at least two opposite supporting rods and at least one group of limiting pieces arranged on each supporting rod, a clamping groove opposite to the bottom of the clamping plug is formed between any two adjacent limiting pieces in each group of limiting pieces, the clamping groove is used for clamping the clamping plug, wherein the height of one of the opposite supporting rods relative to the bracket is higher than the height of the other supporting rod relative to the bracket, and the clamping plug is inclined relative to the bracket by clamping the bottom of the clamping plug in the clamping groove, so that an interval is formed between an effective area of the wafer and the inner wall of the slot when the wafer is placed in the slot. Through the arrangement, the effective area of the wafer can be comprehensively cleaned when the wafer is cleaned in the later stage.

Description

Bearing jig

Technical Field

The utility model relates to the technical field of LED processing equipment, in particular to a bearing jig.

Background

In the LED industry, wet cleaning refers to a process of using various chemical reagents to chemically react or dissolve impurities and oil stains adsorbed on the surface of an object to be cleaned, or using physical measures such as ultrasound, heating, vacuumizing, etc. to desorb (desorb) impurities from the surface of the object to be cleaned, and then flushing with a large amount of high-purity deionized water, thereby obtaining a clean surface.

In the process of cleaning the wafers, the Cassette is required to be used for accommodating the plurality of wafers, and the mechanical arm is utilized to move the Cassette to the cleaning equipment so as to clean the effective areas of the plurality of wafers.

However, each wafer has an effective area and an ineffective area which are symmetrical with each other, and the effective areas and the ineffective areas are respectively two symmetrical surfaces of the wafer, when the wafer is cleaned, the edges of the effective areas of part of the wafer in the clamping plugs are easily attached to the inner walls of the slots due to the influence of the movement of the clamping plugs, so that the effective areas of part of the wafer cannot be thoroughly cleaned, the product is abnormal, the yield is reduced, and the rework rate is increased.

Disclosure of Invention

Based on the above, the utility model aims to provide a bearing jig, which is used for solving the problems that in the prior art, the edge of an effective area of a wafer is easy to be attached to the inner wall of a slot, so that the effective area of part of the wafer cannot be thoroughly cleaned, the product is abnormal, the yield is reduced, and the rework rate is increased.

The utility model provides a bearing jig which is used for supporting a clamping plug for bearing a wafer, wherein a plurality of slots for inserting the wafer are formed in the clamping plug, and the bearing jig comprises a bracket and a supporting component arranged on the bracket;

the supporting component comprises at least two oppositely arranged supporting rods and at least one group of limiting pieces arranged on each supporting rod, a clamping groove opposite to the bottom of the clamping plug is formed between any two adjacent limiting pieces in each group of limiting pieces, and the clamping groove is used for clamping the clamping plug;

the height of one of the two opposite supporting rods relative to the support is higher than that of the other supporting rod relative to the support, and the bottom of the clamping plug is clamped in the clamping groove, so that the clamping plug is inclined relative to the support, and an effective area of the wafer is spaced from the inner wall of the slot when the wafer is placed in the slot.

Further, the bracket comprises a first frame and second frames arranged at two ends of the first frame;

wherein, the supporting component is arranged on the first frame.

Further, the support assemblies are provided with a plurality of groups, and the plurality of groups of support assemblies are arranged at intervals along the radial direction of the first frame.

Further, a limiting beam is arranged between the support component close to the second frame and the first frame and between any two adjacent support components;

the two ends of the limiting cross beam are fixedly connected with two opposite inner walls of the first frame respectively, and the limiting cross beam is used for limiting the blocking plug to be arranged at intervals along the axial direction or the length direction of the first frame.

Further, the support assembly comprises a first support rod and a second support rod, and the first support rod and the second support rod are oppositely arranged;

wherein the first strut is higher relative to the stent than the second strut is relative to the stent.

Further, both ends of the first supporting rod and both ends of the second supporting rod are fixedly connected with the two opposite inner walls of the first frame.

Further, each supporting rod is provided with more than two groups of limiting pieces, and each group of limiting pieces are arranged at intervals along the axial direction of the supporting rod.

Further, a separating piece is arranged between two adjacent groups of limiting pieces, and the separating piece is used for enabling each two adjacent groups of limiting pieces to be arranged on the supporting rod in a separated mode.

Further, hollowed-out areas are formed in the first frame and the second frame.

Further, the first frame and the second frame are fixedly connected in a zigzag manner.

Compared with the prior art, the utility model has the beneficial effects that:

in the bearing jig provided by the utility model, at least two opposite supporting rods are arranged on the support, the height of one supporting rod in the two supporting rods relative to the support is higher than that of the other supporting rod relative to the support, at least one group of limiting pieces are arranged on each supporting rod, a clamping groove opposite to the bottom of the clamping plug is formed between any two adjacent limiting pieces in each group of limiting pieces, the clamping groove is used for clamping the clamping plug, that is, the clamping plug is placed on the bearing jig by utilizing the height difference between the two supporting rods, the whole clamping plug is inclined, when a wafer is inserted into a slot, the effective areas of a plurality of wafers can be placed in the same direction, that is, when the wafer is inclined due to the inclination of the clamping plug, the ineffective areas of the plurality of wafers can be attached to the inner wall of the slot, and a gap is formed between the effective areas of the plurality of wafers and the inner wall of the slot.

Drawings

FIG. 1 is a perspective view of a carrier tool according to an embodiment of the utility model;

FIG. 2 is a left side cross-sectional view of a carrier tool according to an embodiment of the utility model;

FIG. 3 is a schematic diagram illustrating an assembly of a carrier tool and a chuck according to an embodiment of the utility model;

FIG. 4 is a left side view of an assembly schematic of a carrier fixture and a chuck according to an embodiment of the utility model;

FIG. 5 is a schematic cross-sectional view of a wafer and a socket according to an embodiment of the utility model.

In the figure: 100. a blocking plug; 110. a slot; 200. carrying a jig; 210. a bracket; 211. a first frame; 212. a second frame; 220. a support assembly; 221. a support rod; 2211. a first strut; 2212. a second strut; 222. a limiting piece; 223. a clamping groove; 224. a separating member; 300. a wafer; 310. an effective area; 320. an inactive area; 400. and a limiting beam.

Detailed Description

In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Several embodiments of the utility model are presented in the figures. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 to 5, a carrier tool according to an embodiment of the present utility model is shown for supporting a chuck 100 for carrying a wafer 300, and a plurality of slots 110 for plugging the wafer 300 are provided on the chuck 100, and it should be noted that in this embodiment, the outer shape of the chuck 100 may be a rectangular frame in the prior art, a plurality of slots 110 are arranged on the rectangular frame at intervals, the wafer 300 is accommodated by using the slots 110, and a protrusion portion capable of being plugged is provided at the bottom of the chuck 100.

In this embodiment, the carrying jig 200 includes a bracket 210 and a supporting component 220 disposed on the bracket 210, the supporting component 220 includes at least two oppositely disposed struts 221, and at least one set of limiting members 222 disposed on each strut 221, a clamping groove 223 opposite to the bottom of the clamping plug 100 is formed between any two adjacent limiting members 222 in each set of limiting members 222, and the clamping groove 223 is used for clamping the clamping plug 100;

wherein, the height of one support bar 221 relative to the bracket 210 is higher than the height of the other support bar 221 relative to the bracket 210, and the bottom of the clamping plug 100 is clamped in the clamping groove 223, so that the clamping plug 100 is inclined relative to the bracket 210, and a space is formed between the effective area 310 and the inner wall of the slot 110 when the wafer 300 is placed in the slot 110.

Specifically, the support 210 includes a first frame 211 and a second frame 212 disposed at two ends of the first frame 211, where the support assembly 220 is disposed on the first frame 211, in some preferred embodiments, the first frame 211 and the second frame 212 are fixedly connected in a meandering manner, and hollow areas are disposed on the first frame 211 and the second frame 212, by which the support 210 is designed to be lightweight without affecting the overall rigidity, so as to facilitate the taking and placing of the personnel.

By way of example and not limitation, in the present embodiment, two struts 221 are included in the support assembly 220, which are a first strut 2211 and a second strut 2212, respectively, the first strut 2211 being disposed opposite the second strut 2212, and the height of the first strut 2211 relative to the stent 210 being greater than the height of the second strut 2212 relative to the stent 210. In practical situations, after the protruding portion at the bottom of the card plug 100 is abutted with the card slot 223, due to the height difference between the first support rod 2211 and the second support rod 2212, after the card plug 100 is placed on the carrier jig 200, the whole body of the card plug is inclined, that is, the wafer 300 is affected by the state of the card plug 100, the wafer 300 is inclined, one surface of the wafer 300 is attached to one inner wall of the slot 110, the other surface of the wafer 300 is formed with a gap between the other surface of the wafer 300 and the other inner wall of the slot 110, and it is required to explain that when the wafer 300 is inserted into the slot 110, the effective areas 310 of the plurality of wafers 300 are placed in the same direction, that is, after the wafer 300 is inclined, the ineffective areas 320 of the plurality of wafers 300 are attached to the inner wall of the slot 110, and the effective areas 310 of the plurality of wafers 300 are all formed with gaps with the inner wall of the slot 110, as shown in fig. 5, so that when the wafer 300 is cleaned, the effective areas 310 of the wafer 300 are cleaned at the later stage, the effective areas of the wafer 300 can be cleaned, and the problem that the effective areas of the wafer 300 cannot be cleaned completely can be completely solved, and the problem of the prior art can not be solved, and the problem of the problem that the effective areas of the wafer 300 is completely is solved.

In some preferred embodiments, both ends of the first and second struts 2211 and 2212 are fixedly connected to opposite inner walls of the first frame 211, and it should be noted that the first and second struts 2211 and 2212 may be connected to the first frame 211 by welding.

In addition, in order to provide support for the plurality of stoppers 100, in the present embodiment, the plurality of groups of support assemblies 220 are disposed, and the plurality of groups of support assemblies 220 are disposed at intervals along the axial direction or the length direction of the first frame 211, and a spacing beam 400 is disposed between one support assembly 220 adjacent to the second frame 212 and the first frame 211, and between every two adjacent support assemblies 220, wherein two ends of the spacing beam 400 are respectively fixedly connected with two opposite inner walls of the first frame 211, the spacing beam 400 is used for limiting the movement of the stoppers 100 along the axial direction of the first frame 211, the plurality of stoppers 100 are supported by the plurality of support assemblies 220, and the stability of the plurality of stoppers 100 placed on the support 210 can be ensured by using the spacing beam 400.

Further, each supporting rod 221 is provided with more than two sets of limiting members 222, each set of limiting members 222 is disposed along the axial direction of the supporting rod 221 at intervals, a separating member 224 is disposed between two adjacent sets of limiting members 222, and the separating member 224 is used for separating each two adjacent sets of limiting members 222 from the supporting rod 221, that is, one set of limiting members 222 can provide support for one clip 100, and by way of example and not limitation, two sets of limiting members 222 are included in one supporting component 220, so that one supporting component 220 can provide support for two clips 100, thereby further improving the placement quantity of the clips 100.

In some preferred embodiments, the whole bearing jig 200 may be made of SUS316 material, so that the whole bearing jig has good rigidity, and can bear the weight of a plurality of stoppers 100 and wafers 300, and in addition, electroplating treatment may be performed on the surface of the bearing jig 200, so that the surface is smoother and denser, and no impurity is released by chemical corrosion in long-term soaking.

To sum up, the carrying jig in an embodiment of the present utility model, compared with the placing manner of the wafer in the prior art, has at least the following beneficial effects:

in the carrying jig 200 provided by the utility model, at least two opposite supporting rods 221 are arranged on the bracket 210, the height of one supporting rod 221 of the two supporting rods 221 relative to the bracket 210 is higher than that of the other supporting rod 221 relative to the bracket 210, each supporting rod 221 is provided with at least one group of limiting pieces 222, a clamping groove 223 opposite to the bottom of the clamping plug 100 is formed between any two adjacent limiting pieces 222 in each group of limiting pieces 222, the clamping groove 223 is used for clamping the clamping plug 100, that is, the height difference between the two supporting rods 221 is utilized, so that after the clamping plug 100 is placed on the carrying jig 200, the whole supporting rod is inclined, when the wafer 300 is inserted into the slot 110, the effective areas 310 of the plurality of wafers 300 can be placed in the same direction, that is, when the wafer 300 is inclined due to the inclination of the clamping plug 100, the ineffective areas 320 of the plurality of wafers 300 are attached to the inner walls of the slot 110, gaps are formed between the effective areas 310 of the plurality of the wafers 300 and the inner walls of the slot 110, by utilizing the arrangement, the effective areas 310 of the plurality of wafers 300 can be attached to the inner walls of the slot 110, the effective areas 300 can be cleaned with the effective areas of the wafer 300, and the problem that the effective areas of the wafer 300 can not be completely cleaned by the effective areas can be completely reduced, and the problem of the effective areas 310 can not be completely cleaned, and the problem of the prior art can be solved, and the problem can be solved, and the completely is solved, and the problem that the problem can be solved, or the problem or the prior art.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. The bearing jig is used for supporting a clamping plug for bearing a wafer, and a plurality of slots for inserting the wafer are formed in the clamping plug;

2. The load-bearing jig of claim 1, wherein: the bracket comprises a first frame and second frames arranged at two ends of the first frame;

wherein, the supporting component is arranged on the first frame.

3. The load-bearing jig of claim 2, wherein: the support assemblies are provided with a plurality of groups, and the plurality of groups of support assemblies are arranged at intervals along the axial direction or the length direction of the first frame.

4. The load-bearing jig of claim 3, wherein: a limiting beam is arranged between one supporting component close to the second frame and the first frame and between any two adjacent supporting components;

the two ends of the limiting cross beam are fixedly connected with the two opposite inner walls of the first frame respectively, and the limiting cross beam is used for limiting the clamping plug to move along the axial direction of the first frame.

5. The load-bearing jig of claim 2, wherein: the support assembly comprises a first supporting rod and a second supporting rod, and the first supporting rod and the second supporting rod are oppositely arranged;

6. The load-bearing jig of claim 5, wherein: both ends of the first supporting rod and both ends of the second supporting rod are fixedly connected with two opposite inner walls of the first frame.

7. The load-bearing jig of claim 1, wherein: more than two groups of limiting pieces are arranged on each supporting rod, and each group of limiting pieces are arranged along the axial direction of each supporting rod at intervals.

8. The load-bearing jig of claim 7, wherein: and a separating piece is arranged between two adjacent groups of limiting pieces, and the separating piece is used for enabling the two adjacent groups of limiting pieces to be arranged on the supporting rod in a separated mode.

9. The load-bearing jig of claim 2, wherein: and hollow areas are arranged on the first frame and the second frame.

10. The load-bearing jig of claim 9, wherein: the first frame and the second frame are fixedly connected in a zigzag manner.