CN216064758U - Substrate cleaning clamp and substrate cleaning system - Google Patents

Abstract

The utility model discloses a substrate cleaning clamp and a substrate cleaning system. The substrate cleaning clamp comprises a substrate bearing frame and a mounting frame, wherein the substrate bearing frame comprises a first supporting piece, a second supporting piece and a first connecting assembly, the first supporting piece is provided with a plurality of first protruding parts, the first supporting piece is also provided with a first bending part, the second supporting piece is provided with a plurality of second protruding parts which are uniformly distributed, and the second supporting piece is also provided with a second bending part which is bent from the bottom of the second supporting piece to one side close to the first supporting piece; the mounting bracket comprises a first fixing piece, a second fixing piece, at least one partition plate and a second connecting assembly. When the substrate bending device is used, the substrate is limited through a first concave part formed by the adjacent first convex parts and a second concave part formed by the adjacent second convex parts, and the substrate is supported through the first bending part and the second bending part; the exposed area of the edge of the substrate is increased, so that the edge of the substrate is fully contacted with the cleaning solution, and the cleaning effect of the substrate is improved.

Description

Substrate cleaning clamp and substrate cleaning system

This application claims priority from the following chinese patent application, the entire contents of which are incorporated by reference in this application. Application No.: 202122223932.0, filing date: 14 days 09 and 14 in 2021, the name of the utility model: a substrate cleaning jig and a substrate cleaning system.

Technical Field

The utility model relates to the technical field of substrate cleaning, in particular to a substrate cleaning clamp and a substrate cleaning system.

Background

The substrate cleaning is an important process in the processing process of the hybrid integrated circuit, and the purpose of the substrate cleaning is mainly to remove various impurities such as particles, organic matters, metal ions and the like adsorbed on the surface of the substrate, so that the cleanliness of the surface of the substrate meets the process requirements. In the production and manufacturing process of the hybrid integrated circuit, the quality of cleaning even plays a decisive role in the product performance.

Currently, a cleaning system for a hybrid integrated circuit generally includes a cleaning tank, a tool holder capable of supporting a substrate is disposed in the cleaning tank, and a cleaning solution is disposed in the cleaning tank to clean the substrate. As shown in fig. 1, in the conventional tool clamp, a substrate is placed by forming a clamping groove, because the width of the clamping groove needs to be adapted to the thickness of the substrate, and the thickness of the substrate is generally small, the width of the clamping groove is correspondingly small, and the amount of cleaning liquid entering the clamping groove is small, so that the cleaning liquid contacting the edge portion of the substrate in the clamping groove is small, and finally, residual impurities exist after the edge portion of the substrate is cleaned, and the cleaning effect of the substrate is reduced.

Therefore, how to improve the cleaning effect of the substrate is a technical problem that needs to be solved by those skilled in the art.

SUMMERY OF THE UTILITY MODEL

In view of the above, the present invention is directed to a substrate cleaning jig to improve the cleaning effect of a substrate.

In order to achieve the purpose, the utility model provides the following technical scheme:

a substrate cleaning fixture comprising a substrate carrier and a mounting frame for mounting the substrate carrier, wherein:

the substrate carrier comprises a first support and a second support which are oppositely arranged, and a first connecting component for connecting the first support and the second support; the first supporting piece is provided with a plurality of first protruding parts along the length direction of the first supporting piece, and first sunken parts are formed between the adjacent first protruding parts; the first support part is also provided with a first bending part which is bent from the bottom to one side close to the second support part; the second supporting piece is provided with a plurality of second protruding parts along the length direction, second sunken parts are formed between every two adjacent second protruding parts, each second sunken part corresponds to one first sunken part, the first sunken parts and the second sunken parts can be matched with the edge of the substrate, and the second supporting piece is also provided with a second bending part which is bent from the bottom of the second supporting piece to one side close to the first supporting piece;

the mounting frame comprises a first fixing piece, a second fixing piece and a second connecting assembly, wherein the first fixing piece and the second fixing piece are arranged oppositely, and the second connecting assembly is used for connecting the first fixing piece and the second fixing piece; at least one partition plate is arranged between the first fixing piece and the second fixing piece so as to divide the area between the first fixing piece and the second fixing piece into a plurality of mounting areas, and the substrate bearing frame can be mounted in the mounting areas.

Preferably, in the substrate cleaning jig, the first connecting assembly includes a first connecting rod, a second connecting rod, a third connecting rod and a fourth connecting rod, the first connecting rod and the second connecting rod are disposed on the first side of the first support and are sequentially arranged along the height direction of the substrate carrier, and the third connecting rod and the fourth connecting rod are disposed on the second side of the first support and are sequentially arranged along the height direction of the substrate carrier.

Preferably, in the above substrate cleaning jig, the first projecting portion and the second projecting portion each have an arcuate shape in cross section on a plane perpendicular to the direction in which they extend, and the directions in which the first projecting portion and the second projecting portion extend are each arranged obliquely.

Preferably, in the substrate cleaning jig, the first support member and the second support member are respectively a first support plate and a second support plate, and the first support plate and the second support plate are both provided with liquid passing holes through which a cleaning liquid can pass.

Preferably, in the above substrate cleaning jig, the second connecting assembly includes a first side bar, a second side bar, a third side bar and a fourth side bar, the first side bar and the second side bar are both disposed on the first side of the first fixing plate and are sequentially arranged in the height direction of the mounting bracket, and the third side bar and the fourth side bar are both disposed on the second side of the first fixing plate and are sequentially arranged in the height direction of the mounting bracket.

Preferably, in the above substrate cleaning jig, the first side bar is disposed opposite to the third side bar, the second side bar is disposed opposite to the fourth side bar, and a distance between the first side bar and the third side bar is larger than a distance between the second side bar and the fourth side bar.

Preferably, in the substrate cleaning jig, the mounting frame further includes a stopper for restricting the substrate from shaking in a height direction of the mounting frame.

Preferably, in the substrate cleaning jig, the limiting member is a limiting rod, a first mounting portion capable of being fitted with an outer circumference of the limiting rod is provided at a top of the first fixing member, and a second mounting portion capable of being fitted with an outer circumference of the limiting rod is provided at a top of the second fixing member.

Preferably, in the substrate cleaning jig, the first fixing member and the second fixing member are a first fixing plate and a second fixing plate, respectively;

all be equipped with the liquid hole of crossing that can make the washing liquid pass through on first fixed plate and the second fixed plate, the bottom of first fixed plate and second fixed plate is bent to keeping away from one side each other and is formed first connecting portion and second connecting portion respectively.

The utility model also provides a substrate cleaning system, which comprises a cleaning tank, a grid fixing frame arranged on the cleaning tank and any one of the substrate cleaning fixtures, wherein the substrate cleaning fixture is arranged on the grid fixing frame.

When the substrate cleaning clamp provided by the utility model is used, because the first support piece is provided with a plurality of first concave parts along the length direction, the second support piece is provided with a plurality of second concave parts along the length direction, the second concave parts are arranged corresponding to the first concave parts, and the first concave parts and the second concave parts can be matched with the edges of the substrate, the substrate can be placed between the correspondingly arranged first concave parts and the correspondingly arranged second concave parts, and the two opposite edges of the substrate are limited through the first concave parts and the second concave parts; moreover, the bottom parts of the first support part and the second support part are respectively provided with a first bending part and a second bending part which are bent towards each other, so that the substrate is abutted against the first bending part and the second bending part under the action of self weight, namely the substrate is supported by the first bending part and the second bending part, and the substrate can be supported by the substrate bearing frame; because at least one partition board is arranged between the first fixing piece and the second fixing piece of the mounting frame, the partition board divides the area between the first fixing piece and the second fixing piece into a plurality of mounting areas, and the substrate bearing frames can be mounted in the mounting areas, a plurality of substrate bearing frames can be placed on the mounting frame at one time, namely the substrate cleaning fixture can clean substrates in batches, and the cleaning efficiency is improved; meanwhile, the substrate is placed in the mode of the first concave part and the second concave part, so that the edge of the substrate can be fully contacted with the cleaning liquid, and the cleaning effect of the substrate is improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a prior art tool fixture for substrate cleaning;

FIG. 2 is a schematic diagram of a substrate cleaning fixture according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a substrate carrier in a substrate cleaning fixture in accordance with one embodiment of the present invention;

FIG. 4 is a schematic diagram of a substrate carrier in a substrate cleaning fixture in accordance with another embodiment of the present invention;

FIG. 5 is a schematic diagram of a mounting frame of a substrate cleaning fixture according to an embodiment of the utility model;

fig. 6 is a partially enlarged view of a portion a of the mounting bracket shown in fig. 5.

Wherein 100 is a substrate carrier, 101 is a first support, 1011 is a first protrusion, 1012 is a first bending portion, 1013 is a liquid passing hole, 102 is a second support, 1021 is a second protrusion, 1022 is a second bending portion, 103 is a first connecting component, 1031 is a first connecting rod, 1032 is a second connecting rod, 1033 is a third connecting rod, 1034 is a fourth connecting rod, 200 is a mounting bracket, 201 is a first fixing member, 2011 is a first mounting portion, 2012 is a first connecting portion, 202 is a second fixing member, 203 is a spacer, 204 is a second connecting component, 2041 is a first side rod, 2042 is a second side rod, 2043 is a third side rod, 2044 is a fourth side rod, and 205 is a limiting member.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 2 to 6, an embodiment of the present invention discloses a substrate cleaning jig including a substrate carrier 100 and a mounting bracket 200.

Wherein the substrate carrier 100 comprises a first support 101, a second support 102 disposed opposite to the first support 101, and a first connecting component 103 connecting the first support 101 and the second support 102, wherein the first support 101 is provided with a plurality of first convex portions 1011 along the length direction thereof, a first concave portion is formed between the adjacent first convex portions 1011, the first support 101 is further provided with a first bending portion 1012 bending from the bottom thereof to the side close to the second support 102, the second support 102 is provided with a plurality of second convex portions 1021 along the length direction thereof, a second concave portion is formed between the adjacent second convex portions 1021, each second concave portion corresponds to one first concave portion, and the first and second concave portions can be matched with the edge of the substrate, the second support 102 is further provided with a second bending portion 1022 bending from the bottom thereof to the side close to the first support 101.

The mounting block 200 is used for mounting the substrate carrier 100, and the mounting block 200 includes a first fixing member 201, a second fixing member 202 disposed opposite to the first fixing member 201, and a second connecting assembly 204 connecting the first fixing member 201 and the second fixing member 202, wherein at least one partition 203 is disposed between the first fixing member 201 and the second fixing member 202, and mounting regions capable of being engaged with the substrate carrier 100 are formed between the first fixing member 201 and the partition 203, between the second fixing member 202 and the partition 203, and between adjacent partitions 203.

When the substrate cleaning fixture provided by the utility model is used, because the first support 101 in the substrate bearing frame 100 is provided with the plurality of first convex parts 1011 along the length direction thereof, the first concave parts are formed between the adjacent first convex parts 1011, the second support 102 is provided with the plurality of second convex parts 1021 along the length direction thereof, the second concave parts are formed between the adjacent second convex parts 1021, each second concave part corresponds to one first concave part, and the first concave parts and the second concave parts can be matched with the edges of the substrate, two opposite edges of the substrate can be placed between the correspondingly arranged first concave parts and second concave parts, and the two edges of the substrate are limited by the first concave parts and the second concave parts; furthermore, since the first and second bent portions 1012 and 1022 bent toward each other are respectively provided at the bottom portions of the first and second supports 101 and 102, the substrate can be abutted against the first and second bent portions 1012 and 1022 by its own weight after being placed in the first and second recessed portions, that is, the first and second bent portions 1012 and 1022 are supported at both sides of the other edge of the substrate, and thus, the substrate can be supported by the substrate support frame 100.

On this basis, at least one partition plate 203 is arranged between the first fixing part 201 and the second fixing part 202 of the mounting rack 200, and the partition plate 203 divides the region between the first fixing part 201 and the second fixing part 202 into a plurality of mounting areas, so that a plurality of substrate carriers 100 can be placed on the mounting rack 200 at the last time, and adjacent substrate carriers 100 are divided by the partition plate 203, that is, the substrate cleaning fixture can clean substrates in batch, and the cleaning efficiency is improved; and, different from the fixed mode that the edge of the substrate is limited in the clamping groove in the prior art, the edge of the substrate is limited in the concave area formed between the two convex parts, so that the exposed area of the edge of the substrate can be increased, the edge of the substrate is fully contacted with the cleaning solution, and the cleaning effect of the substrate is improved.

It should be understood that the first connecting assembly 103 may be a connecting plate, a connecting rod, or a connecting bracket, and any type of parts that can meet the use requirement is within the scope of the present invention; optionally, the embodiment of the utility model adopts the connecting rod, so that the cleaning dead angle is reduced, and the cleaning effect of the substrate is improved.

The first convex portion 1011 and the second convex portion 1021 may be arranged in a uniform distribution manner, an arithmetic progression distribution manner, a random distribution manner, or the like, and any distribution manner that can satisfy the use requirement is within the scope of the present invention.

Specifically, referring to fig. 3 and 4 in combination with fig. 2, the first connection assembly 103 includes a first connection bar 1031, a second connection bar 1032, a third connection bar 1033 and a fourth connection bar 1034, the first connection bar 1031 and the second connection bar 1032 are disposed on the first side of the first support 101 and are sequentially arranged along the height direction of the substrate carrier 100, the third connection bar 1033 and the fourth connection bar 1034 are disposed on the second side of the first support 101 and are sequentially arranged along the height direction of the substrate carrier 100, so that a cavity for accommodating a substrate is defined by the first connection bar 1031, the second connection bar 1032, the third connection bar 1033, the fourth connection bar 1034, the first support 101 and the second support 102, the cavity is substantially rectangular parallelepiped, and has openings at the top, the bottom and both sides thereof; the opening at the top is a taking and placing opening for putting in and taking out the substrate; openings at both sides (i.e., the opening defined by the first connecting rod 1031 and the second connecting rod 1032 and the opening defined by the third connecting rod 1033 and the fourth connecting rod 1034) can be used as liquid passing holes; the opening at the bottom supports the substrate by being provided with the first bending part 1012 and the second bending part 1022, and prevents the substrate from falling off.

The cross-sectional shapes of the first convex portion 1011 and the second convex portion 1021 in the plane perpendicular to the extending direction of the first convex portion and the second convex portion are both arcuate, and have smooth outer surfaces, so as to avoid scratching the substrate and ensure that the edge of the substrate can be fully contacted with the cleaning liquid.

Specifically, the first protruding portion 1011 and the second protruding portion 1021 may be in the shape of a strip or a bump array composed of a plurality of continuous bumps, and any shape that can meet the use requirement is within the scope of the present invention; preferably, the first convex portion 1011 and the second convex portion 1021 provided by the embodiment of the present invention are both strip-shaped, and the cross-sectional shape on a plane perpendicular to the extending direction thereof is arcuate.

It should be understood that the above-mentioned arc shape may be a major arc shape, a minor arc shape or a semicircular arc shape, and preferably, the cross-sectional shape of the first convex portion 1011 and the second convex portion 1021 in the plane perpendicular to the extending direction of the first convex portion and the second convex portion 1021 provided by the embodiment of the present invention is a semicircular arc shape, that is, the first convex portion 1011 and the second convex portion 1021 are semicircular column shapes, so as to enable the edge of the substrate to be fully contacted with the cleaning solution, and improve the cleaning effect of the substrate.

In addition, the first protrusion portion 1011 and the second protrusion portion 1021 are both disposed obliquely to form an oblique first recess portion and an oblique second recess portion, so that a substrate can be obliquely placed on the substrate carrier 100, and the substrate can be conveniently taken and placed.

The inclination degree of the first protrusion 1011 and the second protrusion 1021 is not particularly limited, and any inclination degree that can meet the use requirement is within the protection scope of the present invention; preferably, an included angle between the extending direction of the first protruding portion 1011 and the second protruding portion 1021 and a plane (a horizontal plane in this embodiment) formed by the axis of the first connecting rod 1031 and the axis of the second connecting rod 1032 is 70 degrees to 85 degrees, that is, the extending direction of the first protruding portion 1011 and the second protruding portion 1021 is inclined from the vertical direction to the side close to the first connecting rod 1031 or the side close to the second connecting rod 1032 by 5 degrees to 20 degrees.

In addition, the partition plate 203 may be fixedly connected to the first connecting rod 1031, the second connecting rod 1032, the third connecting rod 1033, and the fourth connecting rod 1034 by welding, riveting, or expanding, so as to ensure that the relative positions of the mounting regions are fixed; a through hole may be formed in the partition plate 203, and the first connecting rod 1031, the second connecting rod 1032, the third connecting rod 1033, and the fourth connecting rod 1034 are slidably inserted into the through hole, and any arrangement mode that can meet the use requirement is within the protection scope of the present invention; preferably, the partition plate 203 provided by the embodiment of the present invention may be relatively fixed to the first connecting rod 1031, the second connecting rod 1032, the third connecting rod 1033, and the fourth connecting rod 1034 by welding.

Moreover, the position of the partition plate 203 should preferably be set to not obstruct the openings on both sides of the first connection assembly 103 as much as possible, for example, the top of the partition plate 203 should not be higher than the height of the first connection bar 1031 and the third connection bar 1033, so that sufficient cleaning solution can flow through the substrate cleaning fixture.

It should be noted that the first support 101 and the second support 102 in the substrate carrier 100 may be plate-shaped parts, bracket parts, or rod-shaped parts, and the like, and the substrate carrier is within the scope of the present invention as long as the substrate carrier can meet the usage requirements; the structures of the first supporting member 101 and the second supporting member 102 may be the same or different, as long as the use requirements can be met; preferably, the first supporting member 101 and the second supporting member 102 provided by the embodiment of the present invention have the same structure, and are plate-shaped parts, which are respectively the first supporting plate and the second supporting plate, so as to improve the universality of the parts, reduce the design and manufacturing cost of the parts, and reduce the cost.

In addition, the first support plate and the second support plate are respectively provided with a liquid passing hole 1013 through which the cleaning liquid can pass so as to facilitate the cleaning liquid to flow through the liquid passing hole 1013. As shown in fig. 3 and 4, the first bent portion 1012 and the second bent portion 1022 may also be provided with liquid passing holes to increase the flow rate of the cleaning liquid and improve the cleaning efficiency.

During manufacturing, the first connecting rod 1031, the second connecting rod 1032, the third connecting rod 1033 and the fourth connecting rod 1034 are respectively machined by a lathe, the first protruding portion 1011 on the first supporting plate and the second protruding portion 1021 on the second supporting plate are formed into inward protruding whirls by stamping, and the first connecting rod 1031, the second connecting rod 1032, the third connecting rod 1033 and the fourth connecting rod 1034 are respectively connected with the first supporting plate and the second supporting plate by riveting or welding.

It should be noted that, for the first concave portion, the term "concave" is relative, and in one implementation, since the first convex portions 1011 are convex inward (i.e. convex toward the second support 102), the area between two adjacent first convex portions 1011 is naturally lower than the first convex portions 1011, so as to form a relative concave area, i.e. the first concave portion is naturally formed due to the processing of the first convex portions 1011. For example, for the first concave portions formed on the first support plate, the first convex portions 1011 protrude inward to be higher than the surface of the first support plate, and the regions of the surface of the first support plate between the adjacent first convex portions 1011 form the bottom surfaces of the first concave portions; the corresponding regions between adjacent first protrusions 1011 (i.e., the sides of the first protrusions 1011) constitute the sides of the first recesses.

Of course, in other implementations, the area between adjacent first protrusions 1011 may also be processed to make the partial area protrude outward, or protrude inward but the protruding degree is less than that of the first protrusions 1011, and the first concave portion can also be formed. Similarly, the second recess portion is also the same, and the description is omitted.

It should be understood that, taking the first support plate as an example, as shown in fig. 3 and 4, the liquid passing holes 1013 may be disposed at the top area of the first support plate, and the first protrusions 1011 may be disposed at the bottom area of the first support plate (as shown in fig. 3); alternatively, the liquid passing holes 1013 may be formed in the middle region of the first support plate, and the first protrusions 1011 are formed in the top and bottom regions of the first support plate (as shown in fig. 4). The arrangement of the liquid passing holes 1013 on the second support plate is the same as that described above, and will not be described in detail.

When the first protrusion 1011 and the second protrusion 1021 are disposed at the top area and the bottom area of the first support plate and the second support plate, respectively, the first protrusion 1011 at the top area and the first protrusion 1011 at the bottom area should be disposed correspondingly and extend along the same direction, and the second protrusion 1021 at the top area and the second protrusion 1021 at the bottom area should be disposed correspondingly and extend along the same direction.

The present invention does not specifically limit the parameters such as the shape and size of the liquid passing holes 1013 formed in the first support plate and the second support plate, and the present invention is within the scope of the present invention as long as the type can meet the use requirements. Because the area of the liquid passing holes 1013 provided by the utility model is not limited by the substrate distance, the size of the liquid passing holes 1013 can be increased as much as possible to increase the liquid inlet amount and the liquid outlet amount, after the liquid inlet amount and the liquid outlet amount are increased, the distance between the adjacent substrates can be smaller, so that more substrates can be carried, and the substrate cleaning efficiency is improved.

For example, for a substrate with a specification of 60mm (side length) × 0.5mm (thickness), if the tool holder in the above embodiment is used, for a mounting frame 200 with a length of 49.5cm, 6 substrate carriers 100 with the same size can be mounted, and 12 substrates can be placed on each substrate carrier 100, so that 72 substrates can be cleaned at a time by each substrate cleaning holder, and 6 substrate cleaning holders with the above size can be customized according to the specification of a cleaning bath generally used in a substrate cleaning system, so that 432 substrates can be cleaned at a time by 72 × 6. However, with the existing substrate cleaning tool (see fig. 1), since the liquid passing holes and the slots are alternately arranged along the arrangement direction of the substrate, the density (number) of the slots and the total area of the liquid passing holes are generally in inverse proportion, but in order to achieve sufficient cleaning, the liquid passing holes are required to have enough area, so that the number of the slots is small, for example, for a tool having a length of about 46cm, generally 14 slots can be arranged at most. Therefore, compared with the existing substrate cleaning tool clamp, the substrate cleaning clamp provided by the embodiment can obviously improve the cleaning efficiency.

Similarly, the second connecting component 204 may be a connecting rod, a connecting bracket, or a connecting plate, and any type that can meet the use requirement is within the scope of the present invention; preferably, the second connecting assembly 204 provided by the embodiment of the present invention employs a rod-like component, so as to reduce the cleaning dead angle and improve the cleaning effect of the substrate cleaning fixture.

Specifically, as shown in fig. 2 and 5, the second connecting assembly 204 includes a first side bar 2041, a second side bar 2042, a third side bar 2043, and a fourth side bar 2044, the first side bar 2041 and the second side bar 2042 are disposed on the first side of the first fixing plate and sequentially disposed along the height direction of the mounting bracket 200, and the third side bar 2043 and the fourth side bar 2044 are disposed on the second side of the first fixing plate and sequentially disposed along the height direction of the mounting bracket 200, so that a cavity capable of accommodating the substrate carrier 100 is formed by the first side bar 2041, the second side bar 2042, the third side bar 2043, and the fourth side bar 2044.

The first side bar 2041 is disposed opposite to the third side bar 2043, and the second side bar 2042 is disposed opposite to the fourth side bar 2044. In a specific implementation, the axes of the first side bar 2041 and the third side bar 2043 are parallel to each other, and the axes of the second side bar 2042 and the fourth side bar 2044 are parallel to each other. The planes of the axes of the first side rod 2041 and the third side rod 2043 are parallel to the planes of the axes of the second side rod 2042 and the fourth side rod 2044. Preferably, the distance between the first side bar 2041 and the third side bar 2043 is greater than the distance between the second side bar 2042 and the fourth side bar 2044 to facilitate access to the substrate carrier 100. Of course, the distance between the first side bar 2041 and the third side bar 2043 should not be too large, so as to avoid the substrate carrier 100 from shaking.

In addition, the bottom second side bar 2042 and the bottom fourth side bar 2044 are also used for supporting the substrate carrier 100, i.e., the second side bar 2042 and the fourth side bar 2044 support the first bending portion 1012 and the second bending portion 1022, so that the substrate carrier 100 is mounted on the mounting frame 200.

It will be appreciated that the first side bar 2041 and the third side bar 2043 are used to fix and position the substrate carrier 100, and prevent the substrate carrier 100 from shaking significantly during substrate cleaning. In addition, the first side bar 2041 and the third side bar 2043 are disposed at a height that is sufficient to expose the liquid passing holes 1013 of the first supporting member 101 and the second supporting member 102, so as to ensure the cleaning efficiency, on the principle that the liquid passing holes 1013 are not obstructed as much as possible.

Further, the mounting block 200 further includes a limiting member 205, so as to limit the substrate from shaking in the height direction of the mounting block 200, and improve the stability of the substrate during the cleaning process.

The limiting member 205 may be a limiting rod, a limiting plate, a limiting frame, or the like, and any type of component capable of limiting the substrate from shaking along the height direction of the mounting block 200 is within the scope of the present invention; preferably, as shown in fig. 6, the limiting member provided in the embodiment of the present invention is a limiting rod, and the top of the first fixing member 201 is provided with a first mounting portion 2011 capable of being engaged with the outer circumference of the limiting rod, and the top of the second fixing member 202 is provided with a second mounting portion capable of being engaged with the outer circumference of the limiting rod, so as to mount two ends of the limiting rod on the first mounting portion 2011 and the second mounting portion respectively.

The first mounting portion 2011 and the second mounting portion may be directly provided with mounting grooves and mounting holes or may be additionally provided with limit pieces capable of mounting limit rods, and the like, and all types that can meet the use requirements are within the protection scope of the present invention; preferably, the embodiment of the utility model adopts the directly-arranged limiting groove, has simple structure and is convenient to process and manufacture.

It should be understood that the structures of the first fixing element 201 and the second fixing element 202 may be the same or different, as long as the use requirements can be met; moreover, the first fixing element 201 and the second fixing element 202 may be of plate type, rod type or bracket type, and the like, and the type of the fixing element is within the protection scope of the present invention as long as the type can meet the use requirement; preferably, in the embodiment of the present invention, the first fixing element 201 and the second fixing element 202 have the same structure, and are plate-shaped parts, which are respectively the first fixing plate and the second fixing plate, so as to improve the generalization rate of the components and reduce the cost.

The first fixing plate is provided with a liquid passing hole 1013 through which the cleaning liquid can pass so as to allow the cleaning liquid to flow; the bottom of the first fixing plate is bent to one side far away from the second fixing plate to form a first connecting part 2012, so that the substrate cleaning fixture is mounted on the grid fixing frame of the cleaning tank through the first connecting part 2012, and the substrate on the substrate cleaning fixture is cleaned through the cleaning tank.

It should be understood that the first connecting portion 2012 can be connected to the grid fixing frame of the cleaning tank by means of bolts, rivets, or fasteners, and the substrate cleaning fixture can be mounted on the grid fixing frame of the cleaning tank by any connection method; preferably, as shown in fig. 2 and 5, the first connecting part 2012 includes a first connecting plate parallel to the mesh fixing frame of the sink and a first connecting column vertically fixed to the bottom surface of the first connecting plate. When the substrate cleaning clamp is installed, the substrate cleaning clamp bearing the substrate is placed on a grid fixing frame of a cleaning groove, and the first connecting columns are inserted into meshes of the grid fixing frame.

Since the second fixing member 202 and the first fixing member 201 may have the same structure, the second fixing member 202 has all the technical effects of the first fixing member 201, and is not described herein again.

It should be understood that the present invention is not limited to any particular material for substrate carrier 100 and mounting frame 200. As for the mounting bracket 200, as long as the material thereof has certain rigidity and is not easy to deform, stainless steel, other alloys, and metals can be generally selected; the substrate carrier 100 may be made of a suitable material according to the process requirements, for example, a polymer material having good acid and alkali resistance such as ptfe (polytetrafluoroethylene), PFA (a small amount of a copolymer of perfluoropropyl, perfluorovinyl ether, and polytetrafluoroethylene), or a metal material such as stainless steel that does not substantially deform at a high temperature may be selected.

What should be additionally noted is: after a batch of substrates are cleaned by the conventional substrate cleaning tool clamp, the substrates need to be taken down and are transferred to the next procedure by a substrate transfer frame, and then the whole substrate cleaning tool clamp is thoroughly cleaned, particularly a slot gap; for the substrate cleaning fixture provided by the utility model, after a batch of substrates are cleaned, a group of substrate bearing frames 100 bearing the substrates can be integrally taken out, the substrate bearing frames are directly conveyed to the next procedure and then the mounting frame 200 is simply cleaned, so that the substrate cleaning fixture can be thoroughly cleaned, and another group of substrate bearing frames 100 can be adopted when the next batch of substrates are cleaned.

In addition, the utility model also discloses a substrate cleaning system, which comprises a cleaning tank, a grid fixing frame arranged in the cleaning tank and the substrate cleaning clamp as described in any one of the above items, wherein the substrate cleaning clamp is arranged on the grid fixing frame so as to be convenient for installing the substrate cleaning clamp in the cleaning tank; in addition, the substrate cleaning system also comprises a liquid inlet device for conveying the cleaning liquid into the cleaning tank, a liquid discharge device for discharging the cleaning liquid and other existing structures, and the details are not described herein.

Since the substrate cleaning system includes the substrate cleaning jig as described in any one of the above, all technical effects of the substrate cleaning jig are achieved, and detailed description thereof is omitted here.

It should be noted that, in the present invention, the length direction of the first support 101 is a direction in which the plurality of substrates are sequentially arranged, that is, a direction from one end of the first support 101 close to the first connecting bar 1031 to the first support 101 close to the third connecting bar 1033, and a length direction of the second support 102 is a direction from one end of the second support 101 close to the first connecting bar 1031 to the second support 101 close to the third connecting bar 1033.

The terms "first" and "second," and the like in the description and claims of the present invention and the above-described drawings are used for distinguishing between different objects and not for describing a particular order. Furthermore, the terms "comprising" and "having," as well as any variations thereof, are intended to cover non-exclusive inclusions.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A substrate cleaning fixture comprising a substrate carrier and a mounting frame for mounting the substrate carrier, wherein:

the substrate carrier comprises a first support and a second support which are oppositely arranged, and a first connecting component for connecting the first support and the second support; the first supporting piece is provided with a plurality of first protruding parts along the length direction of the first supporting piece, and first concave parts are formed between the adjacent first protruding parts; the first support part is also provided with a first bending part which is bent from the bottom to one side close to the second support part; the second supporting piece is provided with a plurality of second protruding parts along the length direction, second sunken parts are formed between every two adjacent second protruding parts, each second sunken part corresponds to one first sunken part, the first sunken parts and the second sunken parts can be matched with the edge of the substrate, and the second supporting piece is also provided with a second bending part which is bent from the bottom of the second supporting piece to one side close to the first supporting piece;

the mounting rack comprises a first fixing piece, a second fixing piece and a second connecting assembly, wherein the first fixing piece and the second fixing piece are arranged oppositely, and the second connecting assembly is used for connecting the first fixing piece and the second fixing piece; at least one partition plate is arranged between the first fixing piece and the second fixing piece so as to divide the area between the first fixing piece and the second fixing piece into a plurality of mounting areas, and the substrate bearing frame can be mounted in the mounting areas.

2. The substrate cleaning fixture of claim 1, wherein the first connection assembly comprises a first connection rod, a second connection rod, a third connection rod and a fourth connection rod, the first connection rod and the second connection rod are disposed on a first side of the first support and are arranged in sequence along a height direction of the substrate carrier, and the third connection rod and the fourth connection rod are disposed on a second side of the first support and are arranged in sequence along a height direction of the substrate carrier.

3. The substrate cleaning jig of claim 1, wherein the first convex portion and the second convex portion are each arcuate in cross-sectional shape in a plane perpendicular to the direction of extension thereof, and the directions of extension of the first convex portion and the second convex portion are each obliquely arranged.

4. The substrate cleaning fixture of claim 3, wherein the first support member and the second support member are a first support plate and a second support plate, respectively, and each of the first support plate and the second support plate is provided with a liquid passing hole for passing a cleaning liquid.

5. The substrate cleaning jig of any one of claims 1 to 4, wherein the second connection assembly includes a first side bar, a second side bar, a third side bar and a fourth side bar, the first side bar and the second side bar are disposed on a first side of the first fixing plate and are sequentially arranged in a height direction of the mounting bracket, and the third side bar and the fourth side bar are disposed on a second side of the first fixing plate and are sequentially arranged in the height direction of the mounting bracket.

6. The substrate cleaning fixture of claim 5, wherein the first side bar is disposed opposite the third side bar and the second side bar is disposed opposite the fourth side bar, and wherein a distance between the first side bar and the third side bar is greater than a distance between the second side bar and the fourth side bar.

7. The substrate cleaning jig of any one of claims 1 to 4, wherein the mounting block further comprises a stopper for restricting the substrate from being shaken in a height direction of the mounting block.

8. The substrate cleaning jig of claim 7, wherein the limiting member is a limiting rod, the first fixing member is provided at a top thereof with a first fitting portion capable of fitting with an outer circumference of the limiting rod, and the second fixing member is provided at a top thereof with a second fitting portion capable of fitting with an outer circumference of the limiting rod.

9. The substrate cleaning jig of any one of claims 1 to 4, wherein the first fixing member and the second fixing member are a first fixing plate and a second fixing plate, respectively;

the first fixing plate and the second fixing plate are respectively provided with a liquid passing hole through which cleaning liquid can pass, and the bottoms of the first fixing plate and the second fixing plate are bent towards one sides far away from each other to form a first connecting part and a second connecting part respectively.

10. A substrate cleaning system comprising a cleaning tank, a grid holding frame provided in the cleaning tank, and the substrate cleaning jig according to any one of claims 1 to 9, the substrate cleaning jig being mounted on the grid holding frame.

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