CN216510251U

CN216510251U - Anti-drop circular wafer carrier

Info

Publication number: CN216510251U
Application number: CN202123107514.1U
Authority: CN
Inventors: 白雪山; 沙峰
Original assignee: Taicang Dinghan Automation Technology Co ltd
Current assignee: Taicang Dinghan Automation Technology Co ltd
Priority date: 2021-12-13
Filing date: 2021-12-13
Publication date: 2022-05-13
Anticipated expiration: 2031-12-13

Abstract

The utility model discloses an anti-falling circular wafer carrier, which relates to the field of wafer processing and comprises a carrier bottom plate and a carrier top plate, wherein vertically arranged carrier pillars are fixedly connected between the carrier bottom plate and the carrier top plate, the rear side edges of the carrier bottom plate and the carrier top plate are symmetrically polygonal, the front side edges of the carrier bottom plate and the carrier top plate are fan-shaped, a containing space between the carrier bottom plate and the carrier top plate is a wafer bearing space, a plurality of wafer bearing plates are arranged on the outer edge of the rear side of the wafer bearing space in a bilateral symmetry manner, and wafer anti-falling retaining pillars are arranged on the front side edge of the wafer bearing space in a bilateral symmetry manner. The utility model has the advantages that: through separating the shapes of the carrier bottom plate and the carrier top plate, the rotary wafer anti-falling blocking column is arranged on the front side of the carrier, so that the circular wafer plate can be effectively prevented from falling off from the wafer carrier, the falling probability of the wafer from the wafer carrier in the transfer process is effectively reduced, and the damage rate of the wafer is reduced.

Description

Anti-drop circular wafer carrier

Technical Field

The utility model relates to the field of wafer processing, in particular to an anti-drop circular wafer carrier.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and the manufacturing cost is high, so that the wafer needs to be very careful when being transported; when transporting the wafer, the wafer is first placed on the wafer plate, and then each wafer plate with the wafer is placed in the wafer carrier.

In the process of carrying wafers, due to the inertia effect, a wafer plate is easy to fall off from a wafer carrier, and then the wafers are damaged, so that a baffle plate needs to be designed in the wafer carrier to limit the wafer plate, the circular wafer plate cannot be effectively limited by the conventional wafer carrier due to the structural particularity of the circular wafer plate to prevent the circular wafer plate from falling off, and the wafers are easy to damage during transferring, so that the anti-falling circular wafer carrier is necessary.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems, the technical scheme provides the anti-drop circular wafer carrier, and solves the problem that the wafer plate is easy to drop from the wafer carrier due to the inertia effect in the carrying process of the wafer, so that the wafer is damaged, the wafer plate is limited by the baffle plate which needs to be designed in the wafer carrier, the circular wafer plate cannot be effectively limited by the existing wafer carrier due to the structural particularity of the circular wafer plate, the wafer is easy to damage during transferring, and therefore the anti-drop circular wafer carrier is necessary.

In order to achieve the above purposes, the technical scheme adopted by the utility model is as follows:

the utility model provides a circular wafer carrier of anti-drop, includes carrier bottom plate and carrier roof, the carrier pillar of the vertical setting of fixedly connected with between carrier bottom plate and the carrier roof, carrier bottom plate and carrier roof rear side edge are the polygon of symmetry, carrier bottom plate and carrier roof front side edge are fan-shaped, accommodation space between carrier bottom plate and the carrier roof is wafer bearing space, wafer bearing space rear side outer edge bilateral symmetry be provided with a plurality of wafer loading board, both ends respectively with carrier bottom plate and carrier roof fixed connection about the wafer loading board, wafer bearing space front side edge department bilateral symmetry be provided with wafer anticreep bumping post.

Preferably, the upper end and the lower end of the wafer anti-falling retaining column are rotatably connected with the rotating connecting piece, and the ends, far away from the wafer anti-falling retaining column, of the rotating connecting piece are rotatably connected with the carrier top plate and the carrier bottom plate respectively.

Preferably, the carrier top plate and the corresponding position of the wafer anti-falling bumping post are provided with an anti-falling clamping groove, the upper end of the wafer anti-falling bumping post is fixedly connected with an elastic anti-falling clamping block, and the elastic anti-falling clamping block is matched with the anti-falling clamping groove.

Preferably, a plurality of wafer grooves are uniformly and equidistantly formed in the inner side of the wafer bearing plate.

Preferably, a plurality of positioning jigs are fixedly connected to the lower end of the carrier base plate, a V-shaped positioning groove is formed in the lower end of each positioning jig, and the plurality of positioning jigs are arranged at the lower end of the carrier base plate in a herringbone annular and uniform mode.

Preferably, the left and right sides the symmetrical fixedly connected with transportation handle in wafer loading board outside.

Compared with the prior art, the utility model has the advantages that:

the utility model designs the shapes of the carrier bottom plate and the carrier top plate separately, designs the rear sides of the carrier bottom plate and the carrier top plate into a symmetrical polygonal design, the left side and the right side of the polygon are matched with the circular wafer plate, designs the front sides of the carrier bottom plate and the carrier top plate into a fan-shaped structure, and rotationally connects wafer anti-falling blocking posts on the left side and the right side of the front sides of the carrier bottom plate and the carrier top plate, the wafer anti-falling blocking posts can rotate to the inside of the anti-falling clamping groove, the wafer anti-falling blocking posts on the two sides can be abutted against the front side of the circular wafer plate, thereby effectively limiting and fixing the circular wafer plate, simultaneously, when the wafer anti-falling blocking posts rotate to the anti-falling clamping groove, the distance between the wafer anti-falling blocking posts on the two sides is smaller than the diameter of the circular wafer plate, thereby effectively preventing the circular wafer plate from falling from the wafer carrier boat, and effectively reducing the falling probability of the wafer from the wafer carrier boat in the transferring process, the damage rate of the wafer is reduced.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic perspective view of another embodiment of the present invention;

fig. 3 is a schematic perspective view of the wafer filling process according to the present invention.

The reference numbers in the figures are:

1. a carrier floor; 2. a carrier roof; 201. an anti-drop clamping groove; 3. a carrier support; 4. a wafer carrier plate; 401. a wafer groove; 5. a transfer handle; 6. a wafer anti-drop bumping post; 7. rotating the connecting piece; 8. an elastic anti-falling clamping block; 9. and (5) positioning a jig.

Detailed Description

The following description is presented to disclose the utility model so as to enable any person skilled in the art to practice the utility model. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art.

Referring to fig. 1-3, an anti-falling circular wafer carrier comprises a carrier base plate 1 and a carrier top plate 2, a vertically arranged carrier pillar 3 is fixedly connected between the carrier base plate 1 and the carrier top plate 2, the rear side edges of the carrier base plate 1 and the carrier top plate 2 are symmetrically polygonal, the front side edges of the carrier base plate 1 and the carrier top plate 2 are fan-shaped, a containing space between the carrier base plate 1 and the carrier top plate 2 is a wafer bearing space, a plurality of wafer bearing plates 4 are symmetrically arranged on the left and right sides of the rear side outer edge of the wafer bearing space, a plurality of wafer grooves 401 are uniformly and equidistantly arranged on the inner sides of the wafer bearing plates 4, the wafer grooves 401 are used for supporting the circular wafer plates, the upper and lower ends of the wafer bearing plates 4 are respectively fixedly connected with the carrier base plate 1 and the carrier top plate 2, wafer anti-falling pillars 6 are symmetrically arranged on the left and right sides of the front side edges of the wafer bearing space, through separating the design to the appearance of carrier bottom plate 1 and carrier roof 2, the rear side design of carrier bottom plate 1 and carrier roof 2 is the polygon design of symmetry, polygonal left and right sides limit and circular wafer board looks adaptation, the front side design of carrier bottom plate 1 and carrier roof 2 is fan-shaped structure, and both sides are provided with wafer anticreep bumping post 6 about carrier bottom plate 1 and carrier roof 2 front side, wafer anticreep bumping post 6 of both sides can with circular brilliant plectane front side butt, can effectually carry out spacing fixed to circular brilliant plectane, simultaneously because the interval between the wafer anticreep bumping post 6 of both sides is less than the diameter of circular brilliant plectane, can effectually prevent that circular brilliant plectane from droing from wafer carrier boat.

The upper end and the lower end of a wafer anti-falling retaining post 6 are rotatably connected with a rotating connector 7, one end of the upper and the lower end rotating connectors 7 far away from the wafer anti-falling retaining post 6 is respectively rotatably connected with a carrier top plate 2 and a carrier bottom plate 1, the corresponding position of the carrier top plate 2 and the wafer anti-falling retaining post 6 is provided with an anti-falling clamping groove 201, the upper end of the wafer anti-falling retaining post 6 is fixedly connected with an elastic anti-falling clamping block 8, the elastic anti-falling clamping block 8 is matched with the anti-falling clamping groove 201, the size of the bayonet position of the anti-falling clamping groove 201 is smaller than the diameter of the elastic anti-falling clamping block 8, when the wafer plate is loaded, the wafer plate can enter the wafer carrier by rotating the wafer anti-falling retaining post 6 to the position shown in figure 1, after the wafer is loaded, the wafer anti-falling retaining post 6 is rotated to the position shown in figure 3, at the moment, the elastic anti-falling clamping block 8 enters the anti-falling clamping groove 201, and has certain elasticity, certain elastic deformation can take place when getting into anticreep draw-in groove 201 bayonet socket, and then accomplish the fixed of wafer anticreep bumping post 6, the wafer anticreep bumping post 6 of both sides this moment can with circular brilliant plectane front side butt, can effectually carry out spacing fixed to circular brilliant plectane, simultaneously because the interval between the wafer anticreep bumping post 6 of both sides is less than the diameter of circular brilliant plectane, can effectually prevent that circular brilliant plectane from droing from the wafer carrier.

The lower extreme fixedly connected with a plurality of positioning jig 9 of carrier bottom plate 1, the V-arrangement constant head tank has been seted up to positioning jig 9 lower extreme, and a plurality of positioning jig 9 are the chevron shape along the even setting in carrier bottom plate 1 lower extreme of annular, are the chevron shape along the even V-arrangement positioning jig who sets up of annular can be effectual to its restraint of imposing the horizontal direction in the location of carrying out the wafer carrier, and the location is quick simultaneously, accurate.

The handle 5 is transported to the fixedly connected with of the symmetry in the left and right sides wafer loading board 4 outside, transports the handle 5 and for providing the support handle when transporting the wafer carrier, is convenient for its centre gripping to transport.

In summary, the utility model has the advantages that: through separating the appearance of the carrier bottom plate and the carrier top plate, the carrier bottom plate and the carrier top plate are provided with the rotating wafer anti-falling blocking columns, so that the circular wafer plate can be effectively prevented from falling off from the wafer carrier, the falling probability of the wafer from the wafer carrier in the transfer process is effectively reduced, and the damage rate of the wafer is reduced.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are merely illustrative of the principles of the utility model, but that various changes and modifications may be made without departing from the spirit and scope of the utility model, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. An anti-drop round wafer carrier is characterized in that the carrier comprises a carrier bottom plate (1) and a carrier top plate (2), a carrier support pillar (3) which is vertically arranged is fixedly connected between the carrier bottom plate (1) and the carrier top plate (2), the rear side edges of the carrier bottom plate (1) and the carrier top plate (2) are symmetrical polygons, the front side edges of the carrier bottom plate (1) and the carrier top plate (2) are fan-shaped, the accommodating space between the carrier bottom plate (1) and the carrier top plate (2) is a wafer bearing space, a plurality of wafer bearing plates (4) are symmetrically arranged at the left and right of the outer edge of the rear side of the wafer bearing space, the upper end and the lower end of the wafer bearing plate (4) are respectively fixedly connected with the carrier bottom plate (1) and the carrier top plate (2), wafer anti-falling retaining columns (6) are symmetrically arranged at the front side edge of the wafer bearing space in the left-right direction.

2. The round wafer carrier as claimed in claim 1, wherein the wafer retaining post (6) is rotatably connected to the rotary connector (7) at both upper and lower ends, and the end of the rotary connector (7) away from the wafer retaining post (6) at both upper and lower ends is rotatably connected to the carrier top plate (2) and the carrier bottom plate (1), respectively.

3. The anti-drop circular wafer carrier as claimed in claim 2, wherein the carrier top plate (2) is provided with an anti-drop slot (201) at a position corresponding to the wafer anti-drop bumping post (6), an elastic anti-drop fixture block (8) is fixedly connected to the upper end of the wafer anti-drop bumping post (6), and the elastic anti-drop fixture block (8) is matched with the anti-drop slot (201).

4. The wafer carrier of claim 1, wherein the wafer carrier plate (4) has a plurality of wafer slots (401) formed therein at equal intervals.

5. The anti-drop circular wafer carrier as claimed in claim 1, wherein a plurality of positioning jigs (9) are fixedly connected to the lower end of the carrier base plate (1), a V-shaped positioning groove is formed at the lower end of each positioning jig (9), and the plurality of positioning jigs (9) are uniformly arranged at the lower end of the carrier base plate (1) in a herringbone shape.

6. The round wafer carrier as claimed in claim 1, wherein the wafer carrier plate (4) is symmetrically and fixedly connected with a transfer handle (5) at the outer side.