CN216487989U

CN216487989U - Wafer carrier

Info

Publication number: CN216487989U
Application number: CN202123003742.4U
Authority: CN
Inventors: 白雪山; 沙峰
Original assignee: Taicang Dinghan Automation Technology Co ltd
Current assignee: Taicang Dinghan Automation Technology Co ltd
Priority date: 2021-12-02
Filing date: 2021-12-02
Publication date: 2022-05-10
Anticipated expiration: 2031-12-02

Abstract

The utility model discloses a wafer carrier, which relates to the field of wafer carriers and comprises two support frames, wherein a top plate is fixedly connected between the tops of the two support frames, an upper supporting plate is fixedly connected in the middle of the top plate, the left end of the upper supporting plate is fixedly connected with the left support frame, the right end of the upper supporting plate is fixedly connected with the right support frame, a transverse plate is fixedly connected between the bottoms of the two support frames, the top of the transverse plate is fixedly connected with a bottom plate, two ends of the bottom plate are respectively and fixedly connected with the corresponding support frames, openings are formed in the side surfaces of the support frames, a plurality of support columns are fixedly connected in the openings in the side surfaces of the support frames, a plurality of support pieces are fixedly connected on the inner surfaces of the inner sides of the support columns, a plurality of rear support blocks are fixedly connected on the inner sides of the rear sides of the support frames, and a plurality of front support blocks are fixedly connected on the inner sides of the front ends of the support frames. The utility model is convenient for managing and transferring single wafer by arranging the supporting piece, the rear supporting block and the front supporting block, and simultaneously avoids the collision between the wafer and the supporting frame.

Description

Wafer carrier

Technical Field

The utility model relates to the field of wafer carriers, in particular to a wafer carrier.

Background

In the semiconductor transportation industry, the storage or transportation of various semiconductor devices or semiconductor semi-finished products has become a very important issue. In the case of the automated machines, it is required to transfer the required materials or semiconductor devices to the required places, and the properties of the carrier, such as the reduction of generation of minute particles, the antistatic property, and the airtightness, are examined. The wafer carrier may also be called a bonding frame, and its main function is to serve as a semiconductor device for fixing the wafer during dicing. And the wafer carrier is most likely transported by a special carrier.

After the enterprise is producing and processing the wafer, often need utilize corresponding carrier to place it, and current wafer carrier is at the in-process of in-service use, though can realize the effect of placing to the wafer, its self lacks corresponding protective structure to receive external collision easily and take place bending deformation, and then be unfavorable for operating personnel's long-term use, consequently need improve it, and current wafer carrier is not convenient for remove, removes the easy landing of in-process wafer. To solve the above problems, it is necessary to provide a wafer carrier.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems, the technical scheme provides a wafer carrier, and solves the problems that the prior wafer carrier in the background art is lack of a corresponding protection structure, so that the wafer carrier is easy to be collided from the outside and bent and deformed, and is not favorable for long-term use of operators, inconvenient to move of the conventional wafer carrier and easy to slide of a wafer in the moving process.

In order to achieve the above purposes, the technical scheme adopted by the utility model is as follows:

the utility model provides a wafer carrier, includes two support frames, two fixedly connected with roof between the support frame top, fixedly connected with top plate in the middle of the roof top, top plate left end and left side support frame fixed connection, top plate right-hand member and right side support frame fixed connection, two fixedly connected with diaphragm between the support frame bottom, diaphragm top fixedly connected with bottom plate, bottom plate both ends respectively with correspond support frame fixed connection, the opening has been seted up to the support frame side, fixedly connected with a plurality of support column in the opening of support frame side, the inboard fixed surface of support column is connected with a plurality of support piece, the inboard fixedly connected with a plurality of back tray in support frame rear, the inboard fixedly connected with a plurality of front tray in support frame front end.

Preferably, two fixed strips are fixedly connected with the middle of the top of the upper supporting plate, the two ends of each fixed strip are rotatably connected with a lifting handle, a plurality of edge blocks are fixedly connected with the two ends of the top of the upper supporting plate, and the outer sides of the edge blocks are fixedly connected to the inner sides of the tops of the supporting frames.

Preferably, the front end of the right support frame is fixedly connected with a stopper, and an included angle formed between the stopper and the support frame is forty-five degrees.

Preferably, the two supports are arranged in parallel.

Preferably, a plurality of the supporting parts are arranged on the surface of the supporting column at equal intervals.

Preferably, the front supporting blocks and the rear supporting blocks are respectively arranged at the front end and the rear end of the supporting frame at equal intervals.

Preferably, the distance between the adjacent rear supporting blocks is equal to the distance between the adjacent supporting pieces.

Compared with the prior art, the utility model provides a wafer carrier, which has the following beneficial effects:

1. the wafer can be placed on the supporting piece and the rear supporting block respectively by arranging the supporting piece and the rear supporting block, so that the wafer is placed separately, the management and the transfer of a single wafer are facilitated, the size of the device is matched with that of the wafer, and the left end and the right end of the wafer are abutted to the inner side of the supporting frame, so that when the device is impacted outside, the wafer cannot be displaced relative to the supporting frame, and cannot be impacted with the supporting frame, and the wafer is bent and deformed;

2. through setting up the fixed strip and carrying the pull handle, when will shifting the device, carry the pull handle through snatching, just can be very convenient remove the device, the cooperation keeps off the piece slope the device simultaneously, avoids the wafer to fall at the removal in-process, makes the wafer produce the unnecessary damage.

Drawings

FIG. 1 is a schematic front perspective view of the present invention;

FIG. 2 is a schematic top view of the present invention;

fig. 3 is a schematic front view of the present invention.

The reference numbers in the figures are:

101. a support frame; 102. a support pillar; 103. a support member; 104. a top plate; 105. a rear supporting block; 106. a transverse plate; 107. a base plate; 108. a stopper; 109. a front support block;

201. an upper supporting plate; 202. a fixing strip; 203. an edge block; 204. and lifting the handle.

Detailed Description

The following description is presented to disclose the utility model so as to enable any person skilled in the art to practice the utility model. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art.

Referring to fig. 1-3, a wafer carrier comprises two supporting frames 101, a top plate 104 is fixedly connected between the tops of the two supporting frames 101, an upper supporting plate 201 is fixedly connected between the tops of the top plate 104, the left end of the upper supporting plate 201 is fixedly connected with the left supporting frame 101, the right end of the upper supporting plate 201 is fixedly connected with the right supporting frame 101, a transverse plate 106 is fixedly connected between the bottoms of the two supporting frames 101, the top of the transverse plate 106 is fixedly connected with a bottom plate 107, two ends of the bottom plate 107 are respectively and fixedly connected with the corresponding supporting frames 101, an opening is formed in the side surface of the supporting frame 101, a plurality of supporting columns 102 are fixedly connected in the openings in the side surface of the supporting frame 101, the plurality of supporting columns 102 reinforce the strength of the supporting frame 101, so that the supporting frame 101 is not easy to deform under impact, a plurality of supporting pieces 103 are fixedly connected to the inner side surface of the supporting columns 102, a plurality of rear supporting blocks 105 are fixedly connected to the inner side of the supporting frame 101, the inner side of the front end of the support frame 101 is fixedly connected with a plurality of front supporting blocks 109;

referring to fig. 1, in use, a wafer is inserted into a gap between adjacent back support blocks 105 transversely, and the horizontal insertion is continued until the wafer is supported by the support member 103, so that the wafer is placed;

referring to fig. 1 and 2, when the device is transferred, the lifting handle 204 is rotated and vertically erected, since the handle end of the lifting handle 204 is an inclined rod, when the device is lifted, the inclined rod automatically keeps horizontal due to the habit of people, so that the front end of the support frame 101 is lowered, and the wafer tends to slide down towards the stopper 108, but the wafer cannot slide down due to the stopper 108, and meanwhile, the rear end of the support frame 101 slightly ascends, and the wafer cannot slide out of the back support block 105, so that the device can prevent the wafer from sliding down during the lifting transfer process.

Specifically, two fixed strips 202 of fixedly connected with in the middle of the top of the upper supporting plate 201, fixed strip 202 both ends are all rotated and are connected with and carry handle 204, a plurality of limit piece 203 of the equal fixedly connected with in the top of upper supporting plate 201 both ends, limit piece 203 outside fixed connection is inboard at support frame 101 top.

The front end of the right supporting frame 101 is fixedly connected with a stopper 108, an included angle formed by the stopper 108 and the supporting frame 101 is forty-five degrees, the two supporting frames 101 are arranged in parallel, the supporting pieces 103 are arranged on the surface of the supporting column 102 at equal intervals, the front supporting blocks 109 and the rear supporting blocks 105 are respectively arranged at the front end and the rear end of the supporting frame 101 at equal intervals, and the interval between the adjacent rear supporting blocks 105 is equal to the interval between the adjacent supporting pieces 103.

The working principle and the using process of the utility model are as follows: by arranging the supporting piece 103 and the rear support block 105, the wafer can be respectively placed on the supporting piece 103 and the rear support block 105, so that the wafer is separately placed, the size of the device is matched with that of the wafer, the left end and the right end of the wafer are abutted to the inner side of the supporting frame 101, when the device is impacted from the outside, the wafer cannot be relatively displaced with the supporting frame 101, and cannot be impacted with the supporting frame 101, so that the wafer is bent and deformed; through setting up fixed strip 202 and carrying handle 204, when will shifting the device, through snatching carrying handle 204, just can be very convenient remove the device, avoid the device to fall at the removal in-process, make the wafer produce unnecessary damage.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are merely illustrative of the principles of the utility model, but that various changes and modifications may be made without departing from the spirit and scope of the utility model, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A wafer carrier is characterized by comprising two supporting frames (101), a top plate (104) is fixedly connected between the tops of the two supporting frames (101), an upper supporting plate (201) is fixedly connected in the middle of the top plate (104), the left end of the upper supporting plate (201) is fixedly connected with the left side of the supporting frame (101), the right end of the upper supporting plate (201) is fixedly connected with the right side of the supporting frame (101), a transverse plate (106) is fixedly connected between the bottoms of the two supporting frames (101), a bottom plate (107) is fixedly connected to the top of the transverse plate (106), two ends of the bottom plate (107) are respectively fixedly connected with the corresponding supporting frames (101), an opening is formed in the side surface of each supporting frame (101), a plurality of supporting columns (102) are fixedly connected in the opening in the side surface of each supporting column (102), a plurality of supporting pieces (103) are fixedly connected to the inner side surface of the rear of each supporting frame (101), a plurality of rear supporting blocks (105) are fixedly connected with the supporting blocks (105), the inner side of the front end of the support frame (101) is fixedly connected with a plurality of front supporting blocks (109).

2. The wafer carrier of claim 1, wherein: two fixed strips (202) of fixedly connected with in the middle of upper plate (201) top, fixed strip (202) both ends all rotate and are connected with and carry handle (204), a plurality of limit piece (203) of the equal fixedly connected with in upper plate (201) top both ends, limit piece (203) outside fixed connection is inboard at support frame (101) top.

3. The wafer carrier of claim 1, wherein: the front end of the right supporting frame (101) is fixedly connected with a stopper (108), and an included angle formed between the stopper (108) and the supporting frame (101) is forty-five degrees.

4. The wafer carrier of claim 1, wherein: the two support frames (101) are arranged in parallel.

5. The wafer carrier of claim 1, wherein: a plurality of the supporting pieces (103) are arranged on the surface of the supporting column (102) at equal intervals.

6. The wafer carrier of claim 1, wherein: the front supporting blocks (109) and the rear supporting blocks (105) are respectively arranged at the front end and the rear end of the supporting frame (101) at equal intervals.

7. The wafer carrier of claim 1, wherein: the distance between the adjacent rear supporting blocks (105) is equal to the distance between the adjacent supporting pieces (103).