CN209929277U

CN209929277U - Wafer box

Info

Publication number: CN209929277U
Application number: CN201921076374.6U
Authority: CN
Inventors: 邹桂明; 常兵; 杭晓宇; 吴晓杰; 施明明
Original assignee: Jiangsu Seven Dimensional Test Technology Co Ltd
Current assignee: Jiangsu Seven Dimensional Test Technology Co Ltd
Priority date: 2019-07-10
Filing date: 2019-07-10
Publication date: 2020-01-10
Anticipated expiration: 2029-07-10

Abstract

The utility model relates to a wafer box, including placing the wafer box body on the board, the wafer box body includes the chassis, be provided with braced frame on the chassis, braced frame includes roof and two bilateral symmetry's the curb plate of erectting, the medial surface top-down interval arrangement of curb plate has a plurality of bearing strip, the bearing strip one-to-one of the left and right sides, the preceding top of roof is provided with horizontal lead screw, the one end of lead screw is provided with driving motor, the cover is equipped with the nut seat on the lead screw, the preceding side direction of nut seat is preceding to be extended and is equipped with connecting portion, wear to be equipped with downwardly extending's pin in the connecting portion, the below of pin is provided with horizontal linear guide, the last slide that is provided with of linear guide, the top surface of slide is connected with the bottom of pin. The utility model relates to a its structural design of wafer box is reasonable, can prevent that the wafer from shaking off damage, reduction rejection rate.

Description

Wafer box

Technical Field

The utility model relates to a wafer box belongs to semiconductor manufacturing technical field.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the wafer is circular in shape, and various circuit element structures can be manufactured on the silicon wafer to be an IC product with a specific electric function. In order to ensure safe storage, transportation and transportation of wafers, wafer cassettes are widely used as a carrying and transporting tool for wafers, so that the wafers can be well protected. At present, the existing wafer cassette is unreasonable in structural design, in a semiconductor processing process, a wafer cassette containing wafers to be processed is generally temporarily stored in a buffer storage area of processing equipment, wafers in the wafer cassette are sequentially grabbed and conveyed to a next process through a conveying mechanism which is arranged side by side with the wafer cassette, and in the process, the processing equipment shakes due to large movement and great movement of a driving device in a working state, the wafer cassette in the buffer storage area is also shaken, so that the wafers in the wafer cassette deviate and dislocate due to long-time shaking, some wafers even shake out of the wafer cassette, collide with the conveying mechanism beside the wafer cassette (as shown in fig. 1, wherein the wafer cassette 1, the wafer 2 and the conveying mechanism 3) and are damaged.

Disclosure of Invention

An object of the utility model is to overcome above-mentioned not enough, provide a structural design is reasonable, prevent wafer skew dislocation, reduce the wafer box of rejection rate.

The purpose of the utility model is realized like this: the utility model provides a wafer box, is including placing the wafer box body on the board, the wafer box body includes the chassis, be provided with braced frame on the chassis, braced frame includes roof and two bilateral symmetry's the curb plate of erectting, the medial surface top-down interval arrangement of curb plate has a plurality of bearing strip, the bearing strip one-to-one of the left and right sides, the preceding top of roof is provided with horizontal lead screw, the one end of lead screw is provided with driving motor, the cover is equipped with nut seat on the lead screw, the preceding side direction of nut seat is preceding to be extended and is equipped with connecting portion, wear to be equipped with downwardly extending's pin in the connecting portion, the below of pin is provided with horizontal linear guide, the last slide that is provided with of linear guide, the top surface of slide is connected with the bottom of pin.

Preferably, the left and right sides of the anterior segment of roof is provided with the extension board outwards, the front side of curb plate is outwards buckled and is had the front bezel, the both ends of lead screw set up between two extension boards through a supporting seat respectively, linear guide's both ends set up between the hypomere of two front bezels through a fixing base respectively.

Preferably, the front side surfaces of the two front plates are respectively provided with two longitudinal convex columns which are symmetrical up and down, the front end of the convex column on one front plate is forwardly provided with a positioning column, and the inner edge of the convex column on the other front plate is provided with a positioning hole.

Preferably, the middle section of the bottom surface of the chassis is provided with two first limiting strips which are bilaterally symmetrical, and the first limiting strips comprise a long longitudinal section, an inclined section and a short longitudinal section which are sequentially connected from back to front and inclined outwards.

Preferably, a second limiting strip which is transversely arranged is arranged between the two first limiting strips.

Preferably, the left side and the right side of the front section of the chassis are provided with third limiting strips.

Preferably, a limiting plate is arranged at the front lower section of the outer side surface of the side plate.

Preferably, the side plate sequentially comprises a first side plate plane section, an inwards concave side plate arc surface section and a second side plate plane section from front to back, and a plurality of bearing strips are arranged on the inner side surfaces of the first side plate plane section and the side plate arc surface section at intervals from top to bottom.

Preferably, a handle is arranged on the top surface of the top plate, and a plurality of reinforcing plates are arranged between the handle and the top plate at intervals.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model relates to a wafer box, its structural design is reasonable, is provided with the pin that can move about and can avoid the wafer to shake off outside the wafer box because of the board shake, has avoided colliding with the conveying mechanism of the side of wafer box, reduce the rejection rate;

2. the bottom surface of the chassis is provided with a plurality of limiting strips, and the limiting strips are matched with the surface of the machine table and the limiting claws for use, so that the position deviation of the wafer box caused by shaking is avoided, and the shaking amplitude is reduced.

Drawings

Fig. 1 is a schematic view illustrating collision between a wafer and a conveying mechanism in a conventional wafer cassette.

Fig. 2 is a schematic view of the connection relationship between the wafer cassette and the platform of the present invention.

Fig. 3 is a front view of the wafer cassette of the present invention.

Fig. 4 is a top view of a wafer cassette according to the present invention.

Fig. 5 is a bottom view of the wafer cassette of the present invention.

Fig. 6 is a side view of a wafer cassette according to the present invention.

Wherein:

machine table 1, limiting claw 101 and limiting piece 102

The wafer box comprises a wafer box body 2, a top plate 201, a side plate 202, a side plate first plane section 202.1, a side plate arc surface section 202.2, a side plate second plane section 202.3, a bottom plate 203, an extension plate 204 and a front plate 205

Carrying strip 3

Screw rod 4

Drive motor 5

Supporting seat 6

Nut seat 7

Connecting part 8

Stop lever 9

Fixing seat 10

Linear guide rail 11

Slide carriage 12

Handle 13

Reinforcing plate 14

Positioning post 15

Positioning hole 16

First limit strip 17

Second limit strip 18

Third limit strip 19

And a stopper plate 20.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present invention without any creative work belong to the protection scope of the present invention.

Referring to fig. 1-6, the utility model relates to a wafer cassette, including placing the wafer cassette body 2 on board 1, wafer cassette body 2 includes chassis 203, be provided with braced frame on chassis 203, braced frame includes roof 201 and two bilateral symmetry's the curb plate 202 of erectting, the left and right sides of roof 201 is connected with the top of two curb plates 202 respectively, curb plate 202 includes curb plate first plane section 202.1, the curb plate cambered surface section 202.2 and the curb plate second plane section 202.3 of indent from front to back in proper order, the medial surface top-down interval arrangement of curb plate first plane section 202.1 and curb plate cambered surface section 202.2 has a plurality of bearing strip 3, the bearing strip 3 one-to-one of left and right sides, be provided with the wafer between every two adjacent bearing strip 3 of left and right sides;

the left side and the right side of the front section of the top plate 201 are outwards provided with extension plates 204, the front side of the side plate 202 is outwards bent to form a front plate 205, the top surface of the extension plate 204 is provided with support seats 6, a transverse screw rod 4 is arranged between the two support seats 6, one end of the screw rod 4 is provided with a driving motor 5, a nut seat 7 is sleeved on the screw rod 4, the front side of the nut seat 7 extends forwards to form a connecting part 8, a stop rod 9 extending downwards penetrates through the connecting part 8, the lower section of the front side surface of the front plate 205 is provided with a fixed seat 10, a transverse linear guide rail 11 is arranged between the two fixed seats 10, a sliding seat 12 is arranged on the linear guide rail 11, and the top surface of the sliding seat 12 is connected with the bottom;

a handle 13 is arranged at the front section of the top surface of the top plate 201, and a plurality of reinforcing plates 14 are arranged between the handle 13 and the top plate 201 at intervals along the length direction of the handle;

the front side surfaces of the two front plates 205 are respectively provided with two longitudinal convex columns which are symmetrical up and down, the front end of the convex column on one front plate 205 is provided with a positioning column 15 forwards, the convex column on the other front plate 205 is internally provided with a positioning hole 16 along the length direction, the side walls of the wafer box body 2 and the conveying mechanism can be quickly positioned through the positioning columns 15 and the positioning holes 16, and the unloading efficiency is improved;

two first limiting strips 17 which are bilaterally symmetrical are arranged in the middle section of the bottom surface of the chassis 203, a second limiting strip 18 which is transversely arranged is arranged between the two first limiting strips 17, the first limiting strips 17 comprise a long longitudinal section, an outward inclined section and a short longitudinal section which are sequentially connected from back to front, third limiting strips 19 are arranged on the left and right sides of the front section of the chassis 203, and the third limiting strips are matched with the surface of the machine table 1 and the limiting claws 101 for use, so that the position deviation of the wafer box caused by shaking is avoided, and the shaking amplitude is reduced;

a limiting plate 20 is arranged at the front lower section of the outer side surface of the side plate 202, and the limiting plate 20 is matched with the limiting piece 102 on the machine table 1 for use, so that the position deviation of the wafer box caused by shaking can be avoided;

under normal state, the stop lever is positioned at the front side of the front plate, after the wafer is fully placed in the wafer box, the driving motor is controlled to rotate forwards to drive the stop lever to move to the front of the wafer, then the wafer box filled with the wafer is placed on the top surface of the machine table, the primary positioning is realized by matching the limiting plate with the limiting part on the machine table, the limiting claw on the machine table is outwards opened from the position A to the position B and is matched and connected with the limiting strips on the two sides to realize the secondary positioning of the wafer box, when the unloading is needed, the driving motor is controlled to rotate reversely to drive the stop lever to move to the front side of the front plate, the wafers in the machine table are sequentially grabbed and conveyed to the next procedure by the manipulator in the conveying mechanism, in the process, the stop lever moves to the front of the rest wafers once again after grabbing, and returns to the initial position when the unloading is carried out next time, the operation is circulated in the mode, and the wafers are effectively prevented from being shaken out, thereby reducing the rejection rate of the wafer.

The above is only a specific application example of the present invention, and does not constitute any limitation to the protection scope of the present invention. All the technical solutions formed by equivalent transformation or equivalent replacement fall within the protection scope of the present invention.

Claims

1. The utility model provides a wafer box, includes places wafer box body (2) on board (1), its characterized in that: the wafer box body (2) comprises a chassis (203), a supporting frame is arranged on the chassis (203), the supporting frame comprises a top plate (201) and two bilaterally symmetrical vertical side plates (202), a plurality of carrying strips (3) are arranged on the inner side surfaces of the side plates (202) at intervals from top to bottom, the carrying strips (3) on the left side and the right side correspond to each other one by one, a transverse screw rod (4) is arranged in the front upper portion of the top plate (201), a driving motor (5) is arranged at one end of the screw rod (4), a nut seat (7) is sleeved on the screw rod (4), a connecting portion (8) extends forwards from the front side of the nut seat (7), a stop lever (9) extending downwards penetrates through the connecting portion (8), a transverse linear guide rail (11) is arranged below the stop lever (9), and a sliding seat (12) is arranged on the linear guide rail (11), the top surface of the sliding seat (12) is connected with the bottom end of the stop lever (9).

2. The wafer cassette according to claim 1, wherein: the left and right sides of the anterior segment of roof (201) is provided with extension board (204) outwards, the front side of curb plate (202) is outwards buckled and is had front bezel (205), the both ends of lead screw (4) set up between two extension boards (204) through a supporting seat (6) respectively, the both ends of linear guide (11) set up between the hypomere of two front bezels (205) through a fixing base (10) respectively.

3. The wafer cassette according to claim 2, wherein: two longitudinal convex columns which are symmetrical up and down are arranged on the front side surfaces of the two front plates (205), a positioning column (15) is arranged forward at the front end of the convex column on one front plate (205), and a positioning hole (16) is arranged on the inner edge of the convex column on the other front plate (205).

4. The wafer cassette according to claim 1, wherein: the middle section of the bottom surface of chassis (203) is provided with two bilateral symmetry's first spacing strip (17), first spacing strip (17) from back to preceding long section of indulging, the oblique section that leans out and the short section of indulging that connect gradually.

5. The wafer cassette according to claim 4, wherein: a second limiting strip (18) which is transversely arranged is arranged between the two first limiting strips (17).

6. The wafer cassette according to claim 4, wherein: and third limiting strips (19) are arranged on the left side and the right side of the front section of the chassis (203).

7. The wafer cassette according to claim 1, wherein: and a limiting plate (20) is arranged at the front lower section of the outer side surface of the side plate (202).

8. The wafer cassette according to claim 1, wherein: the side plate (202) sequentially comprises a first side plate plane section (202.1), an inward concave side plate arc surface section (202.2) and a second side plate plane section (202.3) from front to back, and a plurality of bearing strips (3) are arranged on the inner side surfaces of the first side plate plane section (202.1) and the side plate arc surface section (202.2) at intervals from top to bottom.

9. The wafer cassette according to claim 1, wherein: the top surface of roof (201) is provided with handle (13), the interval is provided with a plurality of reinforcing plates (14) between handle (13) and roof (201).