CN209150067U - A kind of universal silicon wafer quartz boat - Google Patents
A kind of universal silicon wafer quartz boat Download PDFInfo
- Publication number
- CN209150067U CN209150067U CN201822222493.XU CN201822222493U CN209150067U CN 209150067 U CN209150067 U CN 209150067U CN 201822222493 U CN201822222493 U CN 201822222493U CN 209150067 U CN209150067 U CN 209150067U
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- CN
- China
- Prior art keywords
- silicon wafer
- sliding slot
- chassis
- supporting plate
- support frame
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model relates to a kind of universal silicon wafer quartz boats, including chassis, sliding slot disk, silicon wafer side supporting plate and silicon wafer backing board；The chassis includes middle connecting rod and side support frame, the side support frame is connect with the both ends of middle connecting rod, the sliding slot disk is located on the inside of the support frame of side, indexing sliding slot is provided on the sliding slot disk, the two sides of silicon wafer side supporting plate are located in indexing sliding slot, the silicon wafer backing board is located on chassis, and silicon wafer side supporting plate is corresponding with the position of silicon wafer backing board, is provided with silicon wafer placing groove on silicon wafer side supporting plate and silicon wafer backing board；Shadoof is additionally provided on the chassis.A kind of universal silicon wafer quartz boat of the utility model can adapt to a variety of various sizes of silicon wafers by the adjustment of own shape, so as to carry a variety of various sizes of silicon wafers, be easy to use, while reducing production cost.
Description
Technical field
The utility model relates to the quartz products of cleaning silicon chip, and in particular to a kind of universal silicon wafer quartz boat.
Background technique
In the process of manufacture of silicon wafer, need to carry out cleaning operation to silicon wafer using dedicated cleaning agent, to ensure
The cleanliness of silicon chip surface.
The existing operation cleaned to silicon wafer is mostly that silicon wafer is placed on quartz boat, then soaks entire quartz boat
Enter in the cleaning agent of liquid and is cleaned.
The structural body of formula but existing silicon wafer quartz boat is integrally formed, single silicon wafer quartz boat can only be to specific
The silicon wafer of size is carried, and cannot be carried to the silicon wafer of other sizes, therefore the silicon wafer of different dimensions needs
There is inconvenience in quartz boat, be easy to take by mistake in corresponding a variety of silicon wafer quartz boats, while configuring multiple silicon wafer quartz during taking
Boat undoubtedly will lead to higher cost.
Utility model content
The purpose of this utility model is: providing a kind of universal silicon wafer quartz boat, can be fitted by the adjustment of own shape
A variety of various sizes of silicon wafers are answered, so as to carry a variety of various sizes of silicon wafers, are easy to use, while reducing cost.
To achieve the goals above, the utility model provides the following technical solution:
A kind of universal silicon wafer quartz boat, including chassis, sliding slot disk, silicon wafer side supporting plate and silicon wafer backing board；The bottom
Frame includes middle connecting rod and side support frame, and the side support frame is connect with the both ends of middle connecting rod, and the sliding slot disk is located at side branch
On the inside of support frame, indexing sliding slot is provided on the sliding slot disk, the two sides of silicon wafer side supporting plate are located in indexing sliding slot, the silicon
Piece backing board is located on chassis, and silicon wafer side supporting plate is corresponding with the position of silicon wafer backing board, silicon wafer side supporting plate and silicon
Silicon wafer placing groove is provided on piece backing board；Shadoof is additionally provided on the chassis.
Further, the chassis is integrally formed formula structural body, and the side support frame includes bottom edge and bevel edge, it is described in
Connecting rod is connect with base vertical, and the bottom end of the bevel edge and the both ends on bottom edge connect.
Further, the sliding slot disk on the side support frame is particularly located on bevel edge, and the sliding slot disk is fan-shaped, and described point
The quantity of sliding slot is spent to be multiple and arrange along fan-shaped sliding slot disk in angularly array.
Further, in the bottom edge that the array center of the indexing sliding slot of angularly array arrangement is side support frame and tiltedly
The junction on side.
Further, it is described indexing sliding slot width matched with the thickness of silicon wafer side supporting plate, silicon wafer side supporting plate and
The linear array-like arrangement of silicon wafer placing groove on silicon wafer backing board.
Further, the shadoof on the chassis specifically with connect in the middle part of bottom edge, the top of the shadoof is towards chassis
Central axis inclination.
The utility model has the following beneficial effects: a kind of universal silicon wafer quartz boat, is held in the palm by chassis, sliding slot disk, silicon wafer side
Being used cooperatively for plate and silicon wafer backing board, can adapt to a variety of various sizes of silicon by the adjustment of quartz boat own shape
Piece is easy to use operation so as to carry a variety of various sizes of silicon wafers, does not avoid original silicon wafer and the quartz boat taken not
That matches takes phenomenon by mistake, while can reduce the quantity of silicon wafer quartz boat, to reduce production cost.
Detailed description of the invention
Fig. 1 is a kind of overall structure diagram of universal silicon wafer quartz boat of the utility model.
Fig. 2 is that a kind of universal silicon wafer quartz boat of the utility model removes the structural schematic diagram after the supporting plate of silicon wafer side.
In figure: 1, chassis；11, middle connecting rod；12, side support frame；2, sliding slot disk；21, sliding slot is indexed；3, silicon wafer side is held in the palm
Plate；4, silicon wafer backing board；5, silicon wafer placing groove；6, shadoof.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the utility model is described in further detail.It should be appreciated that specific embodiment described herein is only to explain this
Utility model is not used to limit the utility model.
With reference to Fig. 1 and Fig. 2, a kind of universal silicon wafer quartz boat, including chassis 1, sliding slot disk 2, silicon wafer side supporting plate 3 and silicon
Piece backing board 4；The chassis 1 includes middle connecting rod 11 and side support frame 12, the side support frame 12 and the two of middle connecting rod 11
End connection, the sliding slot disk 2 are located at 12 inside of side support frame, are provided with indexing sliding slot 21, the silicon wafer side on the sliding slot disk 2
The two sides of supporting plate 3 are located in indexing sliding slot 21, and the silicon wafer backing board 4 is located on chassis 1, silicon wafer side supporting plate 3 and silicon wafer
The position of backing board 4 is corresponding, is provided with silicon wafer placing groove 5 on silicon wafer side supporting plate 3 and silicon wafer backing board 4；The bottom
Shadoof 6 is additionally provided on frame 1.
The chassis 1 is integrally formed formula structural body, and material is quartz, and the side support frame 12 includes bottom edge and bevel edge,
The middle connecting rod 11 is connect with base vertical, and the bottom end of the bevel edge and the both ends on bottom edge connect.
Sliding slot disk 2 on the side support frame 12 is particularly located on bevel edge, and the sliding slot disk 2 is fan-shaped, and the indexing is slided
The quantity of slot 21 is multiple and arranges along fan-shaped sliding slot disk 2 in angularly array that silicon wafer side supporting plate 3 can be inserted into different points
It spends in sliding slot 21, so that the spacing of two silicon wafer side supporting plates 3 and angle are variable, therefore can realize and various sizes of silicon wafer is carried out
Carrying.
Array center in the indexing sliding slot 21 of angularly array arrangement is bottom edge and the bevel edge of side support frame 12
Junction, that is, when being inserted into different indexing sliding slots 21, the bottom end of silicon wafer side supporting plate 3 pushes against the middle connecting rod 11 of chassis 1.
The width of the indexing sliding slot 21 is matched with the thickness of silicon wafer side supporting plate 3, silicon wafer side supporting plate 3 and silicon wafer bottom
The linear array-like arrangement of silicon wafer placing groove 5 on supporting plate 4, the silicon wafer placing groove 5 are used to place the silicon of pending cleaning
Piece.
Shadoof 6 on the chassis 1 is specifically connect with bottom edge middle part, and shadoof 6 and chassis 1 are integrally formed, the shadoof 6
The central axis of top towards chassis 1 tilts, and the shadoof 6 is for convenient hand-held so that quartz boat moves integrally.
The working principle of the utility model are as follows: need using silicon wafer quartz boat involved in the utility model to silicon wafer into
When row carrying, first according to the size of silicon wafer, indexing sliding slot 21 corresponding to silicon wafer side supporting plate 3 is selected, then holds in the palm silicon wafer side
Plate 3 is along the direction inclination insertion indexing sliding slot 21 of indexing sliding slot 21, until the bottom end of silicon wafer side supporting plate 3 pushes against in chassis 1
Connecting rod 11, silicon wafer side supporting plate 3 realizes positioning at this time, and can carry to a variety of various sizes of silicon wafers；It then can will be to
The silicon wafer for carrying out cleaning operation is put into silicon wafer placing groove 5, i.e., hand-holdable shadoof 6 integrally enters the quartz boat for carrying silicon wafer
In the cleaning agent of beaker, the cleaning to silicon wafer is realized.
The utility model is not confined to these for being further described to the utility model by above-described embodiment
Specific embodiment.Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention etc.,
It is interpreted as being within the protection scope of the utility model.
Claims (6)
1. a kind of universal silicon wafer quartz boat, it is characterised in that: including chassis (1), sliding slot disk (2), silicon wafer side supporting plate (3) and
Silicon wafer backing board (4)；The chassis (1) includes middle connecting rod (11) and side support frame (12), and the side support frame (12) is in
The both ends of connecting rod (11) connect, and the sliding slot disk (2) is located on the inside of side support frame (12), are provided on the sliding slot disk (2)
It indexes sliding slot (21), the two sides of silicon wafer side supporting plate (3) are located in indexing sliding slot (21), and the silicon wafer backing board (4) is located at
On chassis (1), silicon wafer side supporting plate (3) is corresponding with the position of silicon wafer backing board (4), silicon wafer side supporting plate (3) and silicon
Silicon wafer placing groove (5) are provided on piece backing board (4)；Shadoof (6) are additionally provided on the chassis (1).
2. a kind of universal silicon wafer quartz boat according to claim 1, it is characterised in that: the chassis (1) is integrated into
Type structure body, the side support frame (12) include bottom edge and bevel edge, and the middle connecting rod (11) connect with base vertical, described
The bottom end of bevel edge and the both ends on bottom edge connect.
3. a kind of universal silicon wafer quartz boat according to claim 2, it is characterised in that: on the side support frame (12)
Sliding slot disk (2) is particularly located on bevel edge, and the sliding slot disk (2) is fan-shaped, it is described indexing sliding slot (21) quantity be it is multiple and
It is arranged along fan-shaped sliding slot disk (2) in angularly array.
4. a kind of universal silicon wafer quartz boat according to claim 3, it is characterised in that: the institute arranged in angularly array
The array center for stating indexing sliding slot (21) is the bottom edge of side support frame (12) and the junction of bevel edge.
5. a kind of universal silicon wafer quartz boat according to claim 4, it is characterised in that: the width of indexing sliding slot (21)
Degree is matched with the thickness of silicon wafer side supporting plate (3), the silicon wafer placing groove on silicon wafer side supporting plate (3) and silicon wafer backing board (4)
(5) linear array-like arrangement.
6. a kind of universal silicon wafer quartz boat according to claim 2, it is characterised in that: the shadoof on the chassis (1)
(6) it is specifically connect with bottom edge middle part, the central axis of top towards the chassis (1) of the shadoof (6) tilts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822222493.XU CN209150067U (en) | 2018-12-28 | 2018-12-28 | A kind of universal silicon wafer quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822222493.XU CN209150067U (en) | 2018-12-28 | 2018-12-28 | A kind of universal silicon wafer quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209150067U true CN209150067U (en) | 2019-07-23 |
Family
ID=67290771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822222493.XU Active CN209150067U (en) | 2018-12-28 | 2018-12-28 | A kind of universal silicon wafer quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209150067U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111892419A (en) * | 2020-08-03 | 2020-11-06 | 福赛特(唐山)新材料有限公司 | High-shock-resistance silicon carbide boat and preparation method thereof |
| CN115420093A (en) * | 2022-08-31 | 2022-12-02 | 上海华力微电子有限公司 | Quartz drying rack and drying device |
-
2018
- 2018-12-28 CN CN201822222493.XU patent/CN209150067U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111892419A (en) * | 2020-08-03 | 2020-11-06 | 福赛特(唐山)新材料有限公司 | High-shock-resistance silicon carbide boat and preparation method thereof |
| CN115420093A (en) * | 2022-08-31 | 2022-12-02 | 上海华力微电子有限公司 | Quartz drying rack and drying device |
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