CN205828411U - A kind of silicon wafer cleaner - Google Patents
A kind of silicon wafer cleaner Download PDFInfo
- Publication number
- CN205828411U CN205828411U CN201620768297.0U CN201620768297U CN205828411U CN 205828411 U CN205828411 U CN 205828411U CN 201620768297 U CN201620768297 U CN 201620768297U CN 205828411 U CN205828411 U CN 205828411U
- Authority
- CN
- China
- Prior art keywords
- tank body
- cleaning machine
- machine tank
- basket
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
This utility model provides a kind of silicon wafer cleaner, including cleaning machine tank body and cleaning basket；The bottom of described cleaning machine tank body is provided with multiple deep gouge；The bottom of described cleaning basket is provided with the lobe corresponding with described deep gouge；Side and the bottom of described cleaning machine tank body are provided with ultrasonic oscillator；Described cleaning basket is provided with handle hole；On described handle hole, hook is installed；Described cleaning basket is installed in described cleaning machine tank body by described hook；Described cleaning machine tank body is provided with is easy to the handle groove of hook described in taking and placing；The compact conformation of this utility model silicon wafer cleaner is reasonable, cleans basket capable of stacking one over the other in cleaning machine and be discontiguous each other, and space availability ratio is high, and cleaning performance is good.
Description
Technical field
This utility model relates to solaode and manufactures apparatus field, particularly to a kind of silicon wafer cleaner.
Background technology
Solar silicon wafers is the important component part of solaode, the manufacturing process of existing crystal silicon solar energy battery
For: surface clean, silicon chip surface texturing, diffusion, etching trimming, coated with antireflection film, silk screen printing, sintering form ohm
Contact, test.This commercialization crystal silicon cell manufacturing technology is relatively easy, cost is relatively low, is suitable for industrialization, automatic metaplasia
Produce, thus be widely applied.Wherein, surface clean technique is requisite.In prior art, surface clean technique one
As all carry out in silicon wafer cleaner, what more existing silicon wafer cleaners had can only place 2 cleaning baskets, for clean
The space availability ratio of machine is the highest, affects cleaning efficiency, and the cleaning performance of some silicon chips is not highly desirable.
Utility model content
(1) to solve the technical problem that
The technical problems to be solved in the utility model is to provide that a kind of compact conformation is rational, cleaning performance is good, clean
Basket capable of stacking one over the other in cleaning machine tank body, clean basket be discontiguous silicon wafer cleaner each other.
(2) technical scheme
For solving above-mentioned technical problem, this utility model provides a kind of silicon wafer cleaner, including cleaning machine tank body and cleaning
Basket；The bottom of described cleaning machine tank body is provided with multiple deep gouge；The bottom of described cleaning basket is provided with corresponding with described deep gouge convex
The portion of rising；Described cleaning basket can be placed in described deep gouge by described lobe；Side and the bottom of described cleaning machine tank body are equal
It is provided with ultrasonic oscillator, it is possible to increase the cleaning quality to silicon chip；Described cleaning basket is provided with handle hole, and described cleaning basket is also
Can be used as carrying the tote box of silicon chip；On described handle hole, hook is installed；Described cleaning basket is installed to institute by described hook
State in cleaning machine tank body；Described cleaning machine tank body is provided with is easy to the handle groove of hook described in taking and placing, recessed by described handle
Groove, operator can take out overall to described hook and described cleaning basket in described cleaning machine tank body easily, place
Cleaning basket bottom described cleaning machine tank body can by described handle hole by described cleaning basket in described cleaner casing
Take out, and be discontiguous between described cleaning basket, it is ensured that cleaning quality, improve the space profit of described cleaning machine tank body
By rate.
Further, described deep gouge be shaped as rectangle.
Further, the quantity of described deep gouge is 2；The quantity of described handle groove is 4；Described cleaning machine tank body can
Place described 4 cleaning baskets.
Further, one end of described hook is buckled on described handle hole, and the other end is buckled in described cleaning machine tank body.
Further, the axis of described ultrasonic oscillator is vertical with the bottom of described cleaning machine tank body.
(3) beneficial effect
The design of this utility model silicon wafer cleaner is simple, and compact conformation, the cleaning basket of lower floor is fixed on cleaning machine tank body
Deep gouge in, the cleaning basket on upper strata by hook be connected with cleaning machine tank body, cleaning basket be discontiguous each other, cleaning machine
The side of casing and bottom are equipped with ultrasonic oscillator, and the space availability ratio of cleaning machine tank body is high, and cleaning performance is good.
Accompanying drawing explanation
Fig. 1 is the exploded perspective view of this utility model silicon wafer cleaner；
Fig. 2 is the exploded perspective view of this utility model silicon wafer cleaner bottom direction；
Fig. 3 is the structural representation of this utility model silicon wafer cleaner cleaning machine tank body；
Wherein: 1 be cleaning machine tank body, 2 for clean basket, 3 be deep gouge, 4 be lobe, 5 be ultrasonic oscillator, 6 for handle
Hole, 7 be hook, 8 be handle groove.
Detailed description of the invention
Refering to Fig. 1～Fig. 3, this utility model provides a kind of silicon wafer cleaner, including cleaning machine tank body 1 and cleaning basket 2；Ginseng
Readding Fig. 1 and Fig. 2, the bottom of cleaning machine tank body 1 is provided with multiple deep gouge 3, cleans the bottom of basket 2 and is provided with corresponding with deep gouge 3 convex
Playing portion 4, cleaning basket 2 can be placed in 3 deep gouges by lobe 4；Side and the bottom of cleaning machine tank body 1 are provided with ultrasound wave
Oscillator 5；Clean basket 2 and be provided with handle hole 6；Hook 7 is installed on handle hole 6；Clean basket 2 and be installed to cleaning machine by hook 7
On casing 1；One end of hook 7 is buckled on handle hole 6, and the other end is buckled in cleaning machine tank body 1 upper end；Cleaning machine tank body 1 is provided with
It is easy to the handle groove 8 of taking and placing hook 7；By handle groove 8, operator can be easily by whole to hook 7 and cleaning basket 2
Body takes out in cleaning machine tank body 1, is placed on the cleaning basket 2 bottom cleaning machine tank body 1 and can will clean basket 2 by handle hole 6
Take out, improve the space availability ratio of cleaning machine tank body 1.
Wherein: refering to Fig. 3, deep gouge 3 be shaped as rectangle；In the present embodiment, the quantity of deep gouge 3 is 2；Handle groove 8
Quantity is 4；Cleaning machine tank body 1 can place 4 cleaning baskets 2；The axis of ultrasonic oscillator 5 hangs down with the bottom of cleaning machine tank body 1
Directly.
The design of the present embodiment silicon wafer cleaner is simple, compact conformation, and the basket that cleans of lower floor is fixed on cleaning machine tank body
In deep gouge, the cleaning basket on upper strata is connected with cleaning machine tank body by hook, and cleaning basket is discontiguous each other, cleans cabinet
The side of body and bottom are equipped with ultrasonic oscillator, and the space availability ratio of cleaning machine tank body is high, and cleaning performance is good.
The above is only preferred implementation of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of without departing from this utility model know-why, it is also possible to make some improvements and modifications, these change
Enter and retouch and also should be regarded as protection domain of the present utility model.
Claims (5)
1. a silicon wafer cleaner, it is characterised in that: include cleaning machine tank body (1) and clean basket (2)；Described cleaning machine tank body
(1) bottom is provided with multiple deep gouge (3)；The bottom of described cleaning basket (2) is provided with the lobe corresponding with described deep gouge (3)
(4)；The side of described cleaning machine tank body (1) and bottom are provided with ultrasonic oscillator (5)；Described cleaning basket (2) is provided with holds
Hole (6)；On described handle hole (6), hook (7) is installed；Described cleaning basket (2) by described hook (7) be installed to described clearly
On washing machine casing (1)；Described cleaning machine tank body (1) is provided with the handle groove (8) being easy to link up with (7) described in taking and placing.
2. silicon wafer cleaner as claimed in claim 1, it is characterised in that: described deep gouge (3) be shaped as rectangle.
3. silicon wafer cleaner as claimed in claim 1, it is characterised in that: the quantity of described deep gouge (3) is 2；Described handle
The quantity of groove (8) is 4；Described cleaning machine tank body (1) can place described 4 cleaning baskets (2).
4. silicon wafer cleaner as claimed in claim 1, it is characterised in that: one end of described hook (7) is buckled in described handle hole
(6), on, the other end is buckled in described cleaning machine tank body (1) upper end.
5. silicon wafer cleaner as claimed in claim 1, it is characterised in that: the axis of described ultrasonic oscillator (5) with described clearly
The bottom of washing machine casing (1) is vertical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620768297.0U CN205828411U (en) | 2016-07-19 | 2016-07-19 | A kind of silicon wafer cleaner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620768297.0U CN205828411U (en) | 2016-07-19 | 2016-07-19 | A kind of silicon wafer cleaner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205828411U true CN205828411U (en) | 2016-12-21 |
Family
ID=57561403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620768297.0U Expired - Fee Related CN205828411U (en) | 2016-07-19 | 2016-07-19 | A kind of silicon wafer cleaner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205828411U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108284095A (en) * | 2017-12-30 | 2018-07-17 | 铜陵日科电子有限责任公司 | A kind of quartz crystal processing unit (plant) |
-
2016
- 2016-07-19 CN CN201620768297.0U patent/CN205828411U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108284095A (en) * | 2017-12-30 | 2018-07-17 | 铜陵日科电子有限责任公司 | A kind of quartz crystal processing unit (plant) |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161221 Termination date: 20200719 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |