CN205159295U - Be used for abluent big basket of flowers of silicon chip - Google Patents
Be used for abluent big basket of flowers of silicon chip Download PDFInfo
- Publication number
- CN205159295U CN205159295U CN201521018573.3U CN201521018573U CN205159295U CN 205159295 U CN205159295 U CN 205159295U CN 201521018573 U CN201521018573 U CN 201521018573U CN 205159295 U CN205159295 U CN 205159295U
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- CN
- China
- Prior art keywords
- flowers
- basket
- gaily decorated
- cushion block
- decorated basket
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- Expired - Fee Related
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a be used for abluent big basket of flowers of silicon chip is equipped with a plurality of little baskets of flowers in the big basket of flowers, still be equipped with the cushion between the big basket of flowers and the little basket of flowers, the cushion makes the tiny flower basket to the lopsidedness. The utility model discloses setting up the cushion between the big basket of flowers and the little basket of flowers, make the silicon chip placed in the little basket of flowers because of gravity to the lopsidedness, avoided silicon chip N face contact tiny flower basket edge for the PSG layer of N face can fully contact chemical reagent, has improved the cleaning performance of getting rid of PSG, reduces dirtyly, has improved battery piece efficiency.
Description
Technical field
The utility model relates to a kind of large gaily decorated basket for Wafer Cleaning, belongs to photovoltaic module technical field.
Background technology
In the face of the global energy crisis, the environmental problem that constantly increase the weight of, solar photovoltaic technology has become the new hot-spot for development of semicon industry.
The manufacture of solar cell is divided into making herbs into wool, diffusion, plasma etching, PSG cleaning, PECVD
The operations such as plated film, silk screen printing, sintering, and after diffusing procedure, need the silicon chip after to diffusion to carry out chemical reagent cleaning, the PSG layer in silicon wafer N face after cleaning diffusion.Existing cleaning equipment is conventional groove cleaning device, and the bottom of the large gaily decorated basket of use is all levels, and it is inner that small basket of flowers then lies in the large gaily decorated basket, and silicon chip tilts at random to small basket of flowers both sides in small basket of flowers.Due to bubbling and the flow action of cleaning process, part silicon wafer N face can touch the edge of small basket of flowers, causes chemical reagent fully can not contact with N face, causes the PSG layer in N face can not remove totally, silicon chip surface is finally formed dirty, has larger negative effect to cell piece efficiency.
In view of this, develop a kind of large gaily decorated basket newly, solve the problem at contact small basket of flowers edge, silicon wafer N face, obviously there is positive realistic meaning.
Summary of the invention
Goal of the invention of the present utility model is to provide a kind of large gaily decorated basket for Wafer Cleaning.
To achieve the above object of the invention, the technical solution adopted in the utility model is: a kind of large gaily decorated basket for Wafer Cleaning, be provided with a plurality of small basket of flowers in the large gaily decorated basket, be also provided with cushion block between the described large gaily decorated basket and small basket of flowers, described cushion block makes small basket of flowers to lopsidedness.
Preferably, the angular range of described inclination is 8 ° ~ 12 °.
Preferably, described cushion block is triangle cushion block.
In further technical scheme, described triangle cushion block is right-angled triangle cushion block, and hypotenuse and the small basket of flowers of described right-angled triangle cushion block offset, and a right-angle side of described right-angled triangle cushion block is fixedly connected with the large gaily decorated basket.
Preferably, baffle plate is provided with in the side of small basket of flowers incline direction.
In further technical scheme, described baffle plate is rectangle baffle plate.
Preferably, the described large gaily decorated basket and cushion block are structure as a whole.
Because technique scheme is used, the utility model compared with prior art has following advantages:
1. the utility model arranges cushion block between the large gaily decorated basket and small basket of flowers, make to be placed on silicon chip in small basket of flowers because gravity is to lopsidedness, avoid contact small basket of flowers edge, silicon wafer N face, make the PSG layer in the N face of silicon chip fully can contact chemical reagent, improve the cleaning performance removing PSG, decrease dirty, improve cell piece efficiency;
2. the utility model structure is simple, is convenient to promote the use of.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment one.
Wherein: 1, the large gaily decorated basket; 2, small basket of flowers; 3, cushion block; 4, baffle plate.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described:
Embodiment one:
Shown in Figure 1, a kind of large gaily decorated basket for Wafer Cleaning, be provided with a plurality of small basket of flowers 2 in the large gaily decorated basket 1, be also provided with cushion block 3 between the large gaily decorated basket 1 and small basket of flowers 2, cushion block makes small basket of flowers 2 to lopsidedness, and oblique angular range is 8 ° ~ 12 °.
In the present embodiment, cushion block 3 is right-angled triangle cushion block, and hypotenuse and the small basket of flowers of described right-angled triangle cushion block offset, and a right-angle side of described right-angled triangle cushion block is fixedly connected with the large gaily decorated basket.
In the present embodiment, be provided with rectangle baffle plate 4 in the side of small basket of flowers incline direction.
In the present embodiment, the large gaily decorated basket 1 and cushion block 3 are formed in one structure.
When cleaning silicon chip, be placed on by silicon chip inside small basket of flowers of the present utility model, P face contacts with small basket of flowers, N face not with the contact of small basket of flowers.Because N face does not contact with small basket of flowers, so the PSG layer in N face fully can contact chemical reagent, improves the cleaning performance removing PSG, reduces dirty, improve efficiency.
Claims (7)
1. for a large gaily decorated basket for Wafer Cleaning, be provided with a plurality of small basket of flowers (2), it is characterized in that in the large gaily decorated basket: be also provided with cushion block (3) between the described large gaily decorated basket (1) and small basket of flowers (2), described cushion block (3) makes small basket of flowers (2) to lopsidedness.
2. the large gaily decorated basket for Wafer Cleaning according to claim 1, is characterized in that: described cushion block (3) is triangle cushion block.
3. the large gaily decorated basket for Wafer Cleaning according to claim 2, it is characterized in that: described triangle cushion block is right-angled triangle cushion block, hypotenuse and the small basket of flowers of described right-angled triangle cushion block offset, and a right-angle side of described right-angled triangle cushion block is fixedly connected with the large gaily decorated basket.
4. the large gaily decorated basket for Wafer Cleaning according to claim 1, is characterized in that: be provided with baffle plate (4) in the side of small basket of flowers incline direction.
5. the large gaily decorated basket for Wafer Cleaning according to claim 4, is characterized in that: described baffle plate (4) is rectangle baffle plate.
6. the large gaily decorated basket for Wafer Cleaning according to claim 1, is characterized in that: the described large gaily decorated basket (1) and cushion block (3) are structure as a whole.
7. the large gaily decorated basket for Wafer Cleaning according to claim 1, is characterized in that: the angular range of described inclination is 8 ° ~ 12 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521018573.3U CN205159295U (en) | 2015-12-10 | 2015-12-10 | Be used for abluent big basket of flowers of silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521018573.3U CN205159295U (en) | 2015-12-10 | 2015-12-10 | Be used for abluent big basket of flowers of silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205159295U true CN205159295U (en) | 2016-04-13 |
Family
ID=55694958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521018573.3U Expired - Fee Related CN205159295U (en) | 2015-12-10 | 2015-12-10 | Be used for abluent big basket of flowers of silicon chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205159295U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107919308A (en) * | 2017-12-19 | 2018-04-17 | 常州市杰洋精密机械有限公司 | A kind of silicon wafer cleaning basket ratch |
| CN110491815A (en) * | 2019-08-15 | 2019-11-22 | 东方环晟光伏（江苏）有限公司 | A kind of transmission device kept suitable for the transmission of the large scale gaily decorated basket and position |
-
2015
- 2015-12-10 CN CN201521018573.3U patent/CN205159295U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107919308A (en) * | 2017-12-19 | 2018-04-17 | 常州市杰洋精密机械有限公司 | A kind of silicon wafer cleaning basket ratch |
| CN110491815A (en) * | 2019-08-15 | 2019-11-22 | 东方环晟光伏（江苏）有限公司 | A kind of transmission device kept suitable for the transmission of the large scale gaily decorated basket and position |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160413 Termination date: 20171210 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |