CN215527685U - Conveniently get card stopper of piece - Google Patents

Abstract

The utility model relates to the technical field of semiconductor processing, in particular to a clamping plug convenient for taking a sheet, which comprises two clamping plug plates and a connecting rod, wherein the two clamping plug plates are symmetrically arranged, the connecting rod is used for connecting the two clamping plug plates, two sides of the two clamping plug plates are respectively provided with a first stop block and a second stop block, the first stop block, the second stop block and the clamping plug plates are enclosed to form an accommodating space, a plurality of groups of clamping plug through grooves are formed in the clamping plug plates, and a sheet taking mechanism is arranged between the two clamping plug plates at the position corresponding to each group of clamping plug through grooves. The utility model discloses a clamping plug convenient for taking a wafer, which can easily take out the wafer without touching the surrounding wafers, can conveniently take out any wafer, has high efficiency and simplicity and convenience in operation, and is not easy to generate the phenomenon of wafer fragmentation.

Description

Conveniently get card stopper of piece

Technical Field

The utility model relates to the technical field of semiconductor processing, in particular to a clamping plug convenient for taking a wafer.

Background

In the wafer production process, the whole crystal is cut into wafers and then is usually stored in a wafer chuck, and the chuck plays an extremely important role as a production tool for temporary storage and transfer transition in the wafer production process. In the processes of wafer cleaning, chamfering, grinding, polishing, etc., the wafer is inevitably taken out of the chuck plug to be subjected to various processes. When the wafer in the clamping plug needs to be taken out, the conventional clamping plug can only be manually lifted out of the clamping plug by pinching the edge of the wafer by hand, so that the problems of high extraction difficulty, extremely high requirement on operation methods, easy error, wafer breakage, falling, breakage and the like are caused.

SUMMERY OF THE UTILITY MODEL

In view of the above, an object of the present invention is to provide a card plug which is convenient for taking out wafers, can easily take out wafers without touching surrounding wafers, can conveniently take out any wafer, is efficient and simple in operation, and is not easy to cause wafer breakage.

The utility model solves the technical problems by the following technical means:

the utility model provides a conveniently get card stopper of piece, includes two blocks of card cock blocks that mutual symmetry set up and connects two the connecting rod of card cock block, two the both sides of card cock block are provided with first dog and second dog respectively, enclose between first dog, second dog and the card cock block and close and form accommodation space, it leads to the groove to have seted up a plurality of groups card stopper on the card cock block, two in every group between the card cock block the position that leads to the groove correspondence of card stopper all installs and gets piece mechanism.

Further, get piece mechanism and include carrier assembly, clamp holder and reset spring, carrier assembly includes integrated into one piece's handle, supporting part and stopper, two first quad slit and second quad slit have been seted up respectively in the position that carrier assembly corresponds on the jam board, the handle passes first quad slit, and has worn to penetrate between handle and the jam board and have fixed rotating shaft, the stopper is arranged in the second quad slit, and touches mutually with the interior bottom end face of second quad slit and leaves.

Further, clamp holder fixed mounting is on the jam board, is located the handle and corresponds under, clamp holder on the terminal surface that is close to the handle, the handle on the terminal surface that is close to clamp holder equal fixed mounting have the boss, reset spring cover establishes on the boss, and both ends respectively with clamp holder and handle fixed connection.

By adopting the clamping plug, the wafer is placed in the clamping plug through groove, the two sides of the wafer are clamped in the clamping plug through groove, the wafer is prevented from shaking in the moving process, the bottom of the wafer is contacted with the bearing part, the bearing part drags the wafer, so that the wafer is more stable, when a certain wafer needs to be taken out, the handle and the clamping handle only need to be pinched by hands, the handle is forced to rotate around the fixed rotating shaft, the bearing part is driven to move upwards, the corresponding wafer is jacked up, the wafer can be easily taken out under the condition of not touching the surrounding wafers, after the wafer is taken out, the handle and the clamping handle are released, and the bearing part automatically resets under the action of the reset spring and the self gravity, so that the wafer is convenient to use next time.

Furthermore, the bearing part is of an arc-shaped structure and is matched with the outer circumference of the wafer.

The bearing part is of an arc-shaped structure, can better contain the wafer, increases the contact area with the wafer, changes two-point bearing force into linear bearing force, and avoids edge breakage and damage caused by uneven stress of the wafer.

Furthermore, the bearing part is provided with a groove on the surface contacting with the wafer, and the width dimension of the groove is matched with the thickness dimension of the wafer.

The design of this structure, the wafer is when placing, and the lower edge of wafer just in time can be placed in the recess, fixed wafer that can be better prevents that it from rocking.

Furthermore, a plurality of air holes are formed in the bottom of the groove.

Further, the first stop block is of an 'X' structure, and the second stop block is of an 'X' -structure.

With the design that first dog and second dog adopted different structures, the convenience is distinguishing the positive and negative of card stopper in the in-process that uses, facilitates the use.

Furthermore, the clamping plug also comprises two symmetrical bases, the two bases are respectively and fixedly installed at the lower ends of the corresponding clamping plug plates, and the bases are of wedge-shaped structures.

The structural design of base, when using, make the whole slope structure that is of card stopper box, when the wafer was put into the card stopper box, under the action of gravity of wafer self, the lower surface laminating of wafer was at the inner wall that the card stopper led to the groove, the whole and ground of wafer can be certain angle, under the effect of wafer self gravity, thereby further guaranteed that the wafer can not take place to slide at the in-process that shifts, avoided the wafer as far as to cause the crackle damage scheduling problem at the transfer in-process.

The utility model has the beneficial effects that:

1. compared with the traditional clamping plug, the clamping plug provided by the utility model has the advantages that the wafers can be easily taken out under the condition of not touching the peripheral wafers through the arrangement of the wafer taking mechanism, any wafer can be conveniently taken out, the operation is efficient and simple, and the phenomenon of wafer fragmentation is not easily generated.

2. According to the clamping plug convenient for taking the wafer, the structure of the wafer taking mechanism is designed, so that the lower edge of the wafer can be effectively placed in the groove, the wafer is further fixed, the contact area with the wafer is increased, two-point bearing force is changed into linear bearing force, and edge breakage and damage caused by uneven stress of the wafer are avoided.

3. According to the clamping plug convenient for taking the wafer, the base is designed to be of the wedge-shaped structure, so that the wafer does not shake under the action of the gravity of the wafer in the transportation process, and the phenomena of possible cracks, damages and the like of the wafer are avoided.

Drawings

FIG. 1 is a schematic structural view of a card plug for facilitating the removal of a card according to the present invention;

FIG. 2 is a cross-sectional view of a single blade removal mechanism and a jam channel of a jam for facilitating blade removal in accordance with the present invention;

FIG. 3 is a schematic structural diagram of a load bearing assembly in an embodiment of the present invention;

FIG. 4 is a schematic diagram of a backside structure of a carrier assembly according to an embodiment of the utility model;

FIG. 5 is a partial structure diagram of the card plug of the present invention (a single set of card plug through slots);

the clamping and plugging plate 1, the clamping and plugging through groove 11, the first square hole 12, the second square hole 13, the connecting rod 2, the first stop block 3, the second stop block 4, the base 5, the bearing component 6, the handle 61, the bearing part 62, the groove 621, the air hole 622, the limiting block 63, the clamping handle 7, the boss 71, the reset spring 8 and the fixed rotating shaft 9.

Detailed Description

The utility model will be described in detail below with reference to the following figures and specific examples:

examples

As shown in fig. 1-5, the utility model relates to a card plug convenient for taking a wafer, which comprises two card plug plates 1 symmetrically arranged with each other and a connecting rod 2 connecting the two card plug plates 1, wherein two sides of the two card plug plates 1 are respectively provided with a first stop block 3 and a second stop block 4, the first stop block 3 is in an "X" structure, the second stop block 4 is in an "i" structure, so as to facilitate distinguishing the front and back sides of the card plug during use and facilitate the flow of cleaning liquid when the card plug is located in a cleaning tank, a containing space is defined between the first stop block 3, the second stop block 4 and the card plug plates 1 for placing a wafer, the card plug further comprises two bases 5 symmetrically arranged with each other, the two bases 5 are respectively fixedly arranged at the lower ends of the corresponding card plug plates 1, and the bases 5 are in a wedge-shaped structure, the bases 5 are designed, when in use, the card plug is integrally in an inclined structure, when a wafer is placed in the card plug, under the action of gravity of the wafer, the lower surface of the wafer is attached to the inner wall of the clamping plug, the whole wafer and the ground can form a certain angle, and under the action of gravity of the wafer, the wafer is further guaranteed not to slide in the transferring process, and the problems that the wafer is cracked and damaged in the transferring process are avoided as much as possible.

Wherein, the blocking plate 1 is provided with a plurality of groups of blocking through grooves 11, the blocking through grooves 11 are designed, when a wafer is placed in the blocking through grooves 11, the two sides of the wafer are blocked in the blocking through grooves 11 to prevent the wafer from shaking in the moving process, and the wafer penetrates through the blocking plate 1 to facilitate the flowing of cleaning liquid when the wafer is cleaned, a wafer taking mechanism is respectively arranged between the two blocking plates 1 at the position corresponding to each group of blocking through grooves 11, the wafer taking mechanism is arranged at the position close to the lower part of the blocking through grooves 11 and comprises a bearing component 6, a clamping handle 7 and a return spring 8, the bearing component 6 comprises a handle 61, a bearing part 62 and a limiting block 63 which are integrally formed, the positions corresponding to the bearing component 6 on the two blocking plates 1 are respectively provided with a first square hole 12 and a second square hole 13, the handle 61 passes through the first square hole 12, and a fixed rotating shaft 9 is penetrated between the handle 61 and the blocking plates 1, in addition, all the handles 61 can be fixedly installed on the jam plate 1 by using the same fixed rotating shaft 9, the limiting block 63 is arranged in the second square hole 13 and is contacted with and separated from the inner bottom end surface of the second square hole 13, the limiting block 63 can move up and down in the second square hole 13, the inner bottom end surface of the second square hole 13 plays a role in supporting and limiting the limiting block, the bearing part 62 is in an arc structure and is matched with the outer circumference of the wafer, the wafer can be better accommodated, the contact area with the wafer is increased, two-point bearing force is changed into linear bearing force, edge breakage and damage caused by uneven stress of the wafer are avoided, the bearing part 62 is provided with a groove 621 on the surface contacting the wafer, the width dimension of the groove 621 is matched with the thickness dimension of the wafer, when the wafer is placed, the lower edge of the wafer can be just placed in the groove 621, the wafer can be better fixed and prevented from shaking, the bottom of the groove 621 is provided with a plurality of air holes 622.

The clamp handle 7 is fixedly installed on the clamping plug plate 1 and located right below the handle 61, bosses 71 are fixedly installed on the end face of the clamp handle 7 close to the handle 61 and on the end face of the handle 61 close to the clamp handle 7, the reset spring 8 is sleeved on the bosses 71, and two ends of the reset spring are fixedly connected with the clamp handle 7 and the handle 61 respectively.

According to the clamping plug, after a crystal is cut into wafers, each wafer is independently placed in one clamping plug through groove 11, two sides of each wafer are clamped in the clamping plug through grooves 11, the bottom of each wafer is in contact with the bearing part 62, the bearing parts 62 support the wafers, the lower edges of the wafers are placed in the grooves 621, when a certain wafer needs to be taken out, the handle 61 and the clamping handle 7 only need to be pinched by hands, the handle 61 is stressed to rotate around the fixed rotating shaft 9 to drive the bearing parts 62 to move upwards to jack up the corresponding wafer, the wafers can be taken out easily without touching the peripheral wafers, after the wafers are taken out, the handle 61 and the clamping handle 7 are released, and the bearing parts 62 automatically reset under the action of the reset springs 8 and the self gravity, so that the wafer clamping plug is convenient to use next time.

Although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the spirit and scope of the utility model as defined in the appended claims. The techniques, shapes, and configurations not described in detail in the present invention are all known techniques.

Claims (8)

1. The utility model provides a conveniently get card stopper of piece, its characterized in that, including two blocks of card cock boards and the connection two of mutual symmetry setting the connecting rod of card cock board, two the both sides of card cock board are provided with first dog and second dog respectively, enclose between first dog, second dog and the card cock board and close and form accommodation space, a plurality of groups card stopper logical groove has been seted up on the card cock board, two in every group between the card cock board the piece mechanism is all installed and gets to the position that the logical groove of card stopper corresponds.

2. The card plug of claim 1, wherein: get piece mechanism and include carrier assembly, clamp handle and reset spring, carrier assembly includes integrated into one piece's handle, supporting part and stopper, two first quad slit and second quad slit have been seted up respectively in the position that carrier assembly corresponds on the jam board, the handle passes first quad slit, and has penetrated fixed rotating shaft between handle and the jam board, the stopper is arranged in the second quad slit, and touches mutually with the interior bottom end face of second quad slit and leaves.

3. The card plug of claim 2, wherein: the clamp holder is fixedly mounted on the clamping plug plate and located right below the handle, bosses are fixedly mounted on the end face close to the handle and on the end face close to the clamp holder, the reset spring is sleeved on the bosses, and the two ends of the reset spring are fixedly connected with the clamp holder and the handle respectively.

4. The card plug of claim 2, wherein: the bearing part is of an arc-shaped structure and is matched with the outer circumference of the wafer.

5. The card plug of claim 4, wherein: the bearing part is provided with a groove on the surface contacting with the wafer, and the width dimension of the groove is matched with the thickness dimension of the wafer.

6. The card plug of claim 5, wherein: a plurality of air holes are formed in the bottom of the groove.

7. The card plug of claim 1, wherein: the first stop block is of an X structure, and the second stop block is of an X structure.

8. The card plug of claim 1, wherein: the clamping plug further comprises two symmetrical bases, the two bases are fixedly mounted at the lower ends of the corresponding clamping plug plates respectively, and the bases are of wedge-shaped structures.

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