CN219534477U - Soft baking oven for wafer production - Google Patents

Abstract

The utility model relates to the technical field of wafer baking, in particular to a soft baking oven for wafer production, which comprises the following steps: a processing table is arranged in the oven main body, a left hydraulic press and a right hydraulic press are arranged in the oven main body, a guide rod is arranged at one end of the hydraulic press, a movable plate is sleeved on the surface of the guide rod, a support plate is arranged on the side surface of the movable plate, a pin roll is arranged on the side surface of the support plate, a second vertical plate is arranged on the side surface of the pin roll, and a pressing plate is arranged at the bottom of the second vertical plate; the beneficial effects are as follows: the utility model provides a soft roast oven of wafer production starts the hydraulic press when using and makes the pressing plate press in the edge of wafer body, then starts the heating device in the oven body and utilizes the heat that the cooling tube gives off to toast the wafer body, has avoided the in-process that the wafer toasted at present like this, causes the emergence of the circumstances that the wafer edge turned up in the in-process that heaies up easily, very big influence the processingquality of wafer, current wafer baking device generally causes the higher problem of addition moreover.

Description

Soft baking oven for wafer production

Technical Field

The utility model relates to the technical field of wafer baking, in particular to a soft baking oven for wafer production.

Background

The wafer is the basic material for manufacturing semiconductor chips, and the most important raw material of semiconductor integrated circuits is silicon, so that the wafer is the corresponding silicon wafer.

In the prior art, in the process of producing wafers, it is often necessary to place the wafers into a baking apparatus, and to perform physical or chemical transformation, such as thermal curing, on the photoresist on the wafers by means of a suitable temperature of the baking tray.

However, at present, in the process of baking the wafer, the rising of the edge of the wafer is easily caused in the process of heating, so that the processing quality of the wafer is greatly affected, and the existing wafer baking device generally causes higher addition, so that in order to solve the problems, a wafer production soft baking oven is needed.

Disclosure of Invention

The present utility model is directed to a soft baking oven for wafer production, which solves the above-mentioned problems.

In order to achieve the above purpose, the present utility model provides the following technical solutions: a wafer production soft bake oven, the wafer production soft bake oven comprising: the oven comprises an oven main body, wherein a processing table is arranged in the oven main body, radiating pipes are arranged on the side face of the oven main body, and a placing groove is formed in the surface of the processing table;

the hydraulic press is characterized in that one end of the hydraulic press is provided with a guide rod, the surface of the guide rod is sleeved with a movable plate, the side surface of the movable plate is provided with a support plate, the side surface of the support plate is provided with a pin shaft, the side surface of the pin shaft is provided with a second vertical plate, and the bottom of the second vertical plate is provided with a pressing plate;

the vertical plate is provided with a hole on the side surface, a movable rod is arranged in the hole, and one end of the movable rod is provided with a clamping plate.

Preferably, the surface of the movable rod is sleeved with a spring, one end of the spring is fixedly connected to the side face of the clamping plate, and the other end of the spring is fixedly connected to the side face of the vertical plate.

Preferably, the clamping plates are of arc-shaped plate structures, two groups of clamping plates are arranged, and the two groups of clamping plates are symmetrically distributed about the placing groove.

Preferably, the guide rod surface is sleeved with a second spring, one end of the second spring is fixedly connected to the surface of the hydraulic machine, and the other end of the second spring is fixedly connected to the surface of the movable plate.

Preferably, the pressing plate is of an annular plate-shaped structure, the bottom of the pressing plate is provided with a protection plate, the surface of the protection plate is provided with a groove, and screws are arranged in the groove to fix the protection plate at the bottom of the pressing plate.

Preferably, the movable plate is in a square plate-shaped structure, the surface of the movable plate is provided with a through hole, and the movable plate can slide up and down on the surface of the guide rod by utilizing the through hole.

Compared with the prior art, the utility model has the beneficial effects that:

the utility model provides a soft roast oven of wafer production, when using after placing the wafer body in the oven main part then start hydraulic press and make the pressing plate press in the edge of wafer body, then start the heating device in the oven main part and utilize the heat that the cooling tube gives off to toast the wafer body, avoided the in-process that toasts at the wafer at present like this, cause the emergence of the circumstances that upwarp of wafer edge department easily at the in-process that heaies up, very big influence the processingquality of wafer, current wafer baking device generally causes the higher problem of addition moreover.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is an enlarged schematic view of the structure of FIG. 1A;

FIG. 3 is an enlarged schematic view of the structure of FIG. 1 at B;

FIG. 4 is a schematic view of the structure of the present utility model when it is tilted;

fig. 5 is an enlarged schematic view of the structure at C in fig. 4.

In the figure: 1. an oven main body; 2. a processing table; 3. a heat radiating pipe; 4. a placement groove; 5. a hydraulic press; 6. a guide rod; 7. a moving plate; 8. a support plate; 9. a pin shaft; 10. pressing the plate; 11. a vertical plate; 12. a moving rod; 13. a clamping plate; 14. a spring; 15. a second spring; 16. a protection plate; 17. a groove; 18. a screw; 19. a through hole; 20. a wafer body; 21. and a second vertical plate.

Detailed Description

In order to make the objects, technical solutions, and advantages of the present utility model more apparent, the embodiments of the present utility model will be further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are some, but not all, embodiments of the present utility model, are intended to be illustrative only and not limiting of the embodiments of the present utility model, and that all other embodiments obtained by persons of ordinary skill in the art without making any inventive effort are within the scope of the present utility model.

In the description of the present utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "a," an, "" the first, "" the second, "" the third, "" the fourth, "" the fifth, "and the sixth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

For purposes of brevity and description, the principles of the embodiments are described primarily by reference to examples. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments. It will be apparent, however, to one of ordinary skill in the art that the embodiments may be practiced without limitation to these specific details. In some instances, well-known methods and structures have not been described in detail so as not to unnecessarily obscure the embodiments. In addition, all embodiments may be used in combination with each other.

Example 1

Referring to fig. 1 to 4, the present utility model provides a technical solution: a wafer production soft bake oven, the wafer production soft bake oven comprising: the oven comprises an oven main body 1, wherein a processing table 2 is arranged in the oven main body 1, a radiating pipe 3 is arranged on the side surface of the oven main body 1, and a placing groove 4 is formed in the surface of the processing table 2; the hydraulic machine 5, one end of the hydraulic machine 5 is provided with a guide rod 6, the surface of the guide rod 6 is sleeved with a moving plate 7, the side surface of the moving plate 7 is provided with a supporting plate 8, the side surface of the supporting plate 8 is provided with a pin shaft 9, the side surface of the pin shaft 9 is provided with a second vertical plate 21, and the bottom of the second vertical plate 21 is provided with a pressing plate 10; the vertical plate 11 is provided with a hole on the side surface of the vertical plate 11, a movable rod 12 is arranged in the hole, and one end of the movable rod 12 is provided with a clamping plate 13;

when the wafer body 20 is placed in the oven main body 1, the hydraulic press 5 is started to press the pressing plate 10 on the edge of the wafer body 20, and then the heating device in the oven main body 1 is started to bake the wafer body 20 by utilizing the heat emitted by the radiating pipe 3.

Example two

The movable rod 12 is arranged on the basis of the first embodiment, the spring 14 is sleeved on the surface of the movable rod 12, one end of the spring 14 is fixedly connected to the side surface of the clamping plate 13, the other end of the spring 14 is fixedly connected to the side surface of the vertical plate 11, the clamping plate 13 is of an arc-shaped plate structure, two groups of clamping plates 13 are arranged, and the two groups of clamping plates 13 are symmetrically distributed about the placement groove 4;

when the wafer baking device is used, the clamping plates 13 are pulled firstly, then the wafer body 20 is placed in the placing groove 4, then the clamping plates 13 are loosened, the clamping plates 13 can reset by using the elastic force of the springs 14, so that the clamping plates 13 clamp and fix the wafer body 20, and the wafer body 20 is more stable during baking.

Example III

The second embodiment is characterized in that a guide rod 6 is arranged on the basis of the second embodiment, a second spring 15 is sleeved on the surface of the guide rod 6, one end of the second spring 15 is fixedly connected to the surface of the hydraulic machine 5, the other end of the second spring 15 is fixedly connected to the surface of the moving plate 7, the pressing plate 10 is of an annular plate-shaped structure, a protection plate 16 is arranged at the bottom of the pressing plate 10, a groove 17 is formed in the surface of the protection plate 16, a screw 18 is arranged in the groove 17 to fix the protection plate 16 at the bottom of the pressing plate 10, the moving plate 7 is of a square plate-shaped structure, a through hole 19 is formed in the surface of the moving plate 7, and the moving plate 7 can slide up and down on the surface of the guide rod 6 by using the through hole 19;

when in use, after the wafer body 20 is placed in the placing groove 4, the hydraulic press 5 can be started to enable the guide rod 6 to move downwards, so that the pressing plate 10 can press the edge of the wafer body 20, the protection plate 16 can prevent the pressing plate 10 from excessively pressing when pressing to play a role in protecting, the pressing plate 10 can also be prevented from wearing the surface of the wafer body 20 when pressing, the moving plate 7 is matched with the second spring 15 to increase the extensibility of the pressing plate 10, and the protection effect on the wafer body 20 when pressing is improved.

When in actual use, after the wafer body 20 is placed in the oven main body 1, the hydraulic press 5 is started to enable the pressing plate 10 to press at the edge of the wafer body 20, then the heating device in the oven main body 1 is started to bake the wafer body 20 by utilizing the heat emitted by the radiating pipe 3, the wafer edge rising condition is easily caused in the process of heating in the process of baking the wafer, the processing quality of the wafer is greatly influenced, and the existing wafer baking device generally causes the problem of higher addition.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a soft roast oven of wafer production which characterized in that: the soft baking oven for wafer production comprises: the oven comprises an oven main body (1), wherein a processing table (2) is arranged in the oven main body (1), a radiating pipe (3) is arranged on the side surface of the oven main body (1), and a placing groove (4) is formed in the surface of the processing table (2);

the hydraulic machine (5), one end of the hydraulic machine (5) is provided with a guide rod (6), the surface of the guide rod (6) is sleeved with a movable plate (7), the side surface of the movable plate (7) is provided with a supporting plate (8), the side surface of the supporting plate (8) is provided with a pin shaft (9), the side surface of the pin shaft (9) is provided with a second vertical plate (21), and the bottom of the second vertical plate (21) is provided with a pressing plate (10);

the movable support comprises a vertical plate (11), wherein a hole is formed in the side face of the vertical plate (11), a movable rod (12) is arranged in the hole, and a clamping plate (13) is arranged at one end of the movable rod (12).

2. The wafer cushion oven of claim 1, wherein: the surface of the movable rod (12) is sleeved with a spring (14), one end of the spring (14) is fixedly connected to the side face of the clamping plate (13), and the other end of the spring (14) is fixedly connected to the side face of the vertical plate (11).

3. A wafer production soft bake oven according to claim 2, wherein: the clamping plates (13) are of arc-shaped plate structures, two groups of clamping plates (13) are arranged, and the two groups of clamping plates (13) are symmetrically distributed relative to the placing groove (4).

4. A wafer production soft bake oven according to claim 3, wherein: the surface of the guide rod (6) is sleeved with a second spring (15), one end of the second spring (15) is fixedly connected to the surface of the hydraulic machine (5), and the other end of the second spring (15) is fixedly connected to the surface of the movable plate (7).

5. The wafer cushion oven of claim 4, wherein: the pressing plate (10) is of an annular plate-shaped structure, a protection plate (16) is arranged at the bottom of the pressing plate (10), a groove (17) is formed in the surface of the protection plate (16), and screws (18) are arranged in the groove (17) to fix the protection plate (16) at the bottom of the pressing plate (10).

6. The wafer cushion oven of claim 5, wherein: the movable plate (7) is of a square plate-shaped structure, a through hole (19) is formed in the surface of the movable plate (7), and the movable plate (7) can slide up and down on the surface of the guide rod (6) through the through hole (19).