CN212182297U

CN212182297U - Wafer baking device

Info

Publication number: CN212182297U
Application number: CN202020978630.7U
Authority: CN
Inventors: 张伟; 张翔瑀
Original assignee: Wuxi Hole Electronic Technology Co ltd
Current assignee: Wuxi Hole Electronic Technology Co ltd
Priority date: 2020-06-02
Filing date: 2020-06-02
Publication date: 2020-12-18
Anticipated expiration: 2030-06-02

Abstract

The utility model discloses a wafer baking equipment, including toasting the case, be fixed with the air-blower on toasting the right side wall of case, the top of toasting the case is fixed with the bellows, the inner wall of bellows transversely is fixed with electric heating wire, be connected with the guide duct between the top of air-blower and bellows, the inside of toasting the case is provided with the position sleeve, the symmetric welding has the connecting rod on the lateral wall of position sleeve, the tip welding of connecting rod has the locating plate, the top of position sleeve is connected with the wind scooper. This wafer baking equipment, when the wafer body that shifts up upwards touched the sliding sleeve, the sliding sleeve that shifts up slided in the position sleeve to extrude the spring through the guide post when gliding on spacing retainer ring, improved the pressfitting effect that the sliding sleeve is close to the position of edge to the wafer body top, thereby avoided the wafer body to toast the emergence of the edge perk condition that the in-process caused because of being heated inhomogeneously, improved the processingquality of product.

Description

Wafer baking device

Technical Field

The utility model belongs to the technical field of wafer processing, concretely relates to wafer baking equipment.

Background

Wafers are the basic material for manufacturing semiconductor chips, and the most important raw material of semiconductor integrated circuits is silicon, so that the corresponding is silicon wafers. In the process of producing the wafer, the wafer is often required to be placed into a baking device, and the photoresist and the like on the wafer are subjected to physical or chemical transformation, such as thermal curing and the like, through the proper temperature of a baking tray; at present, in the wafer baking process, the edge of the wafer is easily warped in the heating process, the processing quality of the wafer is greatly affected, and the conventional wafer baking device generally causes high addition, so that the wafer baking device is needed to solve the problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a wafer baking equipment to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a wafer baking device, includes toasting the case, be fixed with the air-blower on toasting the case's the right side wall, toast the top of case and be fixed with album bellows, the inner wall of album bellows transversely is fixed with electric heating wire, be connected with the guide duct between the top of air-blower and album bellows, the inside of toasting the case is provided with the position sleeve, the symmetric welding has the connecting rod on the lateral wall of position sleeve, the tip welding of connecting rod has the locating plate, the top of position sleeve is connected with the wind scooper, the top fixedly connected with air feed pipe of wind scooper, and the tip of air feed pipe and the inside intercommunication of album bellows, toast the inner wall bottom fixedly connected with electric telescopic handle of case, electric telescopic handle's flexible end fixedly connected with carries the thing board, carry and be provided with.

This setting is used for through putting into the wafer body and carries the thing board, promote by electric telescopic handle and carry the thing board and shift up, it is close to the position sleeve to reach the wafer body, use by the cooperation of air-blower and guide duct again and blow in the collection bellows with the air, utilize electric heating wire to make the air in the collection bellows heat up, blow the warm braw to the wind scooper in by the air feed pipe again, reach the effect of toasting fast to the wafer body of position sleeve bottom, the structure is retrencied, the cost is with low costs, convenient operation's characteristics.

Preferably, the inner wall fixedly connected with spacing retaining ring of position sleeve, the inside bottom of position sleeve is provided with the sliding sleeve, the top welding of sliding sleeve has the guide post, the outside cover of guide post has the spring, the tip of guide post runs through spacing retaining ring, and extends to the upper end and the spacing block fixed connection of spacing retaining ring.

This setting is used for when the wafer body that shifts up upwards touches the sliding sleeve, and the sliding sleeve that shifts up slides in the position sleeve to extrude the spring through the guide post when gliding on spacing retainer ring, improved the pressfitting effect that the sliding sleeve is close to the position of edge to the wafer body top, thereby avoided the wafer body to toast the emergence of the edge perk condition that the in-process caused because of being heated inhomogeneously, improved the processingquality of product.

Preferably, the wafer body is vertically arranged at the bottom end of the sliding sleeve, and the bottom end of the sliding sleeve is horizontally contacted with the top end of the wafer body close to the edge.

The device is used for improving the wafer body and the baking effect and improving the processing quality of products.

Preferably, the surface of the positioning plate is penetrated with a screw, and the end part of the screw is in threaded connection with the inner side wall of the baking oven.

This setting is used for having made things convenient for the fixed stability between the inner wall of locating plate and the case of toasting, also makes things convenient for to overhaul the operation to the position sleeve.

Preferably, a protective window is arranged on the front side wall of the baking oven, and transparent glass is inlaid on the surface of the protective window.

This arrangement is used for conveniently putting the wafer body into the groove of the object carrying plate by opening the protection window.

Preferably, the top end of the air supply pipe penetrates through the baking box and extends to the bottom end of the air collecting box to be fixedly connected, and the electric heating wire is arranged between the air guide pipe and the port of the air supply pipe.

The utility model discloses a technological effect and advantage: the wafer baking device is provided with a wafer baking device,

1. the wafer body is placed on the carrying plate, the carrying plate is pushed to move upwards by the electric telescopic rod, the wafer body is close to the positioning sleeve, air is blown into the air collecting box by the matching use of the air blower and the air guide pipe, the temperature of the air in the air collecting box is raised by the electric heating wire, and warm air is blown into the air guide cover by the air supply pipe, so that the effect of quickly baking the wafer body at the bottom end of the positioning sleeve is achieved, and the wafer body baking device has the characteristics of simple structure, low manufacturing cost and convenience in operation;

2. when the wafer body that shifts up upwards touched the sliding sleeve, the sliding sleeve that shifts up slided in the position sleeve to extrude the spring through the guide post when gliding on spacing retainer ring, improved the pressfitting effect of sliding sleeve to the position that the wafer body top is close to the edge, thereby avoided the wafer body to be heated the emergence of the uneven marginal perk condition that causes in the baking process, improved the processingquality of product.

Drawings

Fig. 1 is a front sectional view of the present invention;

FIG. 2 is an exploded view of the positioning sleeve of the present invention;

FIG. 3 is a perspective view of the sliding sleeve of the present invention;

fig. 4 is a schematic front view of the present invention.

In the figure: 1. a baking oven; 2. a blower; 3. an air collecting box; 4. an electric heating wire; 5. an air guide pipe; 6. a positioning sleeve; 61. a limit retainer ring; 62. a sliding sleeve; 63. a guide post; 64. a spring; 65. a limiting block; 7. a connecting rod; 8. positioning a plate; 9. a wind scooper; 10. an air supply pipe; 11. an electric telescopic rod; 12. a loading plate; 13. a wafer body.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model provides a wafer baking device as shown in figures 1-4, which comprises a baking box 1, wherein a blower 2 is fixed on the right side wall of the baking box 1, in particular, a protective window is arranged on the front side wall of the baking box 1, transparent glass is embedded on the surface of the protective window, a wind collecting box 3 is fixed at the top end of the baking box 1, an electric heating wire 4 is transversely fixed on the inner wall of the wind collecting box 3, a wind guide pipe 5 is connected between the blower 2 and the top end of the wind collecting box 3, a positioning sleeve 6 is arranged inside the baking box 1, in particular, a limit retainer ring 61 is fixedly connected on the inner wall of the positioning sleeve 6, a sliding sleeve 62 is arranged at the bottom end inside the positioning sleeve 6, a guide column 63 is welded at the top end of the sliding sleeve 62, a spring 64 is sleeved outside the guide column 63, the end part of the guide column 63 penetrates through the limit retainer ring 61, the upper end of the limiting retainer ring 61 is fixedly connected with the limiting block 65, when the wafer body 13 moving upwards touches the sliding sleeve 62, the sliding sleeve 62 moving upwards slides in the positioning sleeve 6, and the spring 64 is extruded while the guide column 63 slides on the limiting retainer ring 61, so that the pressing effect of the sliding sleeve 62 on the position, close to the edge, of the top end of the wafer body 13 is improved, the edge tilting condition caused by uneven heating of the wafer body 13 in the baking process is avoided, and the processing quality of a product is improved;

the utility model discloses a baking oven, including the locating sleeve 6, locating plate 8, air guide cover 9, air supply pipe 10, electric heating wire 4, electric telescopic handle 11, object carrying plate 12, brilliant circle body 13, the symmetrical welding has connecting rod 7 on the lateral wall of locating sleeve 6, the tip welding of connecting rod 7 has locating plate 8, specifically, the screw has been run through on the surface of locating plate 8, and the tip threaded connection of screw is on baking oven 1's inside wall, the top of locating sleeve 6 is connected with air guide cover 9, the top of air guide cover 9 is fixedly connected with air supply pipe 10, and the tip of air supply pipe 10 and the inside of album bellows 3 communicate, specifically, the top of air supply pipe 10 runs through baking oven 1, and extends to the bottom fixed connection of album bellows 3, electric heating wire 4 sets up between the port department of air supply pipe 5 and air supply pipe 10, the inner wall bottom fixed connection of baking oven 1 has, specifically, the wafer body 13 sets up perpendicularly in the bottom of sliding sleeve 62, and the position level contact that the bottom of sliding sleeve 62 and the top of the wafer body 13 are close to the edge, through putting into the wafer body 13 and carrying on thing board 12, promote by electric telescopic handle 11 and carry thing board 12 and move up, it is close to position sleeve 6 to reach the wafer body 13, use by the cooperation of air-blower 2 with guide duct 5 again and blow in the air collection box 3 with the air, utilize electric heater strip 4 to make the air in the air collection box 3 heat up, blow the warm braw to the wind scooper 9 in by air feed pipe 10 again, reach the effect of toasting fast to the wafer body 13 of 6 bottoms of position sleeve, the structure is simplified, the cost is with low costs, convenient operation's characteristics.

When the wafer baking device is used, the wafer 13 is placed on the carrying plate 12, the carrying plate 12 is pushed to move upwards by the electric telescopic rod 11, the wafer 13 is close to the positioning sleeve 6, air is blown into the air collecting box 3 by the matching of the air blower 2 and the air guide pipe 5, the air in the air collecting box 3 is heated by the electric heating wire 4, and then the warm air is blown into the air guide cover 9 by the air supply pipe 10, so that the effect of quickly baking the wafer 13 at the bottom end of the positioning sleeve 6 is achieved, and the wafer baking device has the characteristics of simple structure, low manufacturing cost and convenience in operation; when the wafer body 13 that moves up upwards touches sliding sleeve 62, the sliding sleeve 62 that moves up slides in the position sleeve 6 to extrude spring 64 through guide post 63 when sliding on spacing retaining ring 61, improved the pressfitting effect of sliding sleeve 62 to the position that the wafer body 13 top is close to the edge, thereby avoided the emergence of the edge perk condition that wafer body 13 caused because of being heated inhomogeneously in the baking process, improved the processingquality of product.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a wafer baking equipment, includes toasts case (1), its characterized in that: the electric heating oven is characterized in that an air blower (2) is fixed on the right side wall of the baking oven (1), an air collecting box (3) is fixed at the top end of the baking oven (1), an electric heating wire (4) is transversely fixed on the inner wall of the air collecting box (3), an air guide pipe (5) is connected between the air blower (2) and the top end of the air collecting box (3), a positioning sleeve (6) is arranged inside the baking oven (1), connecting rods (7) are symmetrically welded on the outer side wall of the positioning sleeve (6), positioning plates (8) are welded at the end parts of the connecting rods (7), an air guide cover (9) is connected at the top end of the positioning sleeve (6), an air supply pipe (10) is fixedly connected at the top end of the air guide cover (9), the end part of the air supply pipe (10) is communicated with the inside of the air collecting box (3), and an electric telescopic rod, the telescopic end of the electric telescopic rod (11) is fixedly connected with a carrying plate (12), and a wafer body (13) is arranged in a groove in the top end of the carrying plate (12).

2. The wafer baking apparatus according to claim 1, wherein: the inner wall fixedly connected with of position sleeve (6) spacing retaining ring (61), the inside bottom of position sleeve (6) is provided with sliding sleeve (62), the top welding of sliding sleeve (62) has guide post (63), the outside cover of guide post (63) has spring (64), spacing retaining ring (61) is run through to the tip of guide post (63), and extends to the upper end and the stopper (65) fixed connection of spacing retaining ring (61).

3. The wafer baking apparatus according to claim 2, wherein: the wafer body (13) is vertically arranged at the bottom end of the sliding sleeve (62), and the bottom end of the sliding sleeve (62) is horizontally contacted with the top end of the wafer body (13) close to the edge.

4. The wafer baking apparatus according to claim 1, wherein: the surface of the positioning plate (8) is penetrated with a screw, and the end part of the screw is in threaded connection with the inner side wall of the baking box (1).

5. The wafer baking apparatus according to claim 1, wherein: a protective window is arranged on the front side wall of the baking oven (1), and transparent glass is inlaid on the surface of the protective window.

6. The wafer baking apparatus according to claim 1, wherein: the top of air feed pipe (10) runs through toasting case (1), and extends to the bottom fixed connection of album bellows (3), electric heating wire (4) set up between the port department of guide duct (5) and air feed pipe (10).