CN214152859U

CN214152859U - Wafer boat box turnover mechanism and horizontal spin dryer

Info

Publication number: CN214152859U
Application number: CN202120355055.XU
Authority: CN
Inventors: 欧阳小泉
Original assignee: Quanxin Semiconductor Technology Wuxi Co ltd
Current assignee: Quanxin Semiconductor Technology Wuxi Co ltd
Priority date: 2021-02-09
Filing date: 2021-02-09
Publication date: 2021-09-07
Anticipated expiration: 2031-02-09

Abstract

The utility model discloses a crystal boat box tilting mechanism and horizontal drier, this crystal boat box tilting mechanism include assembly frame, crystal boat box, actuating lever and upset drive arrangement, and assembly frame is along radial fixed mounting on the terminal surface of carousel, and the outer end of crystal boat box passes through the articulated shaft and can install in assembly frame's tip rotatoryly, the actuating lever with set up link assembly between the articulated shaft, upset drive arrangement drives the actuating lever and rises to the high position state from the low position state, and the actuating lever passes through link assembly and drives crystal boat box upset certain angle, and when the actuating lever is in the low position state, the opening of crystal boat box inwards, when the actuating lever is in the high position state, the opening of crystal boat box up. The crystal boat box turnover mechanism and the horizontal spin dryer are compact in structure and ingenious in design; and realized the automatic upset to the brilliant boat box, be convenient for get and put the brilliant boat, use manpower sparingly, improved the efficiency that spin-dries, can not cause the pollution to the wafer.

Description

Wafer boat box turnover mechanism and horizontal spin dryer

Technical Field

The utility model belongs to wafer auxiliary processing equipment especially relates to a wafer boat box tilting mechanism and horizontal drier.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be processed and manufactured on the silicon wafer to form electronic component products with specific electrical functions. As the size of the integrated circuit on the semiconductor wafer is developed to the micron level, the requirement for cleaning the semiconductor wafer in the manufacturing process is higher and higher, and particularly, the semiconductor wafer is polluted by dust particles and metal in the manufacturing process, which easily causes the damage of the circuit function in the wafer, the short circuit or the open circuit, and the like, thereby causing the failure of the integrated circuit and the formation of the geometric characteristics. Therefore, in the manufacturing process, in addition to the removal of external pollution sources, cleaning is also required to effectively remove impurities such as micro-dust, metal ions, and organic matters remaining on the wafer by using chemical solution or gas without damaging the surface characteristics and the electrical characteristics of the wafer.

The wet cleaning process is a commonly used cleaning process for wafers, the wafer needs to be dried after the cleaning process is completed, and the wafer drying machine is used for drying the surfaces of the wet wafers through rotation and drying. Horizontal dryers are relatively common dryers. At present, the existing horizontal spin dryer generally comprises a wafer boat for accommodating wafers, the wafer boat is placed in the wafer boat box, the wafer boat box needs to be manually turned before and after the wafer spin-drying treatment, so that the wafers are taken and placed, however, more manpower is wasted by manually turning the wafer boat box, the spin-drying efficiency is reduced, and the wafers are easily polluted.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a wafer boat box tilting mechanism to solve prior art well horizontal drier and adopt the problem that there is extravagant manpower, the inefficiency of spin-drying and easily causes the pollution to the wafer in the manual upset wafer boat box.

An object of the utility model is to provide a horizontal drier to solve among the prior art horizontal drier exist extravagant manpower, spin-dry inefficiency and easily cause the problem of pollution to the wafer.

To achieve the purpose, the utility model adopts the following technical proposal:

a turnover mechanism for a wafer carrier, which comprises,

the assembling frame is fixedly arranged on the end surface of the turntable along the radial direction,

a wafer boat box, the outer end of which is rotatably mounted at the end of the mounting frame through a hinge shaft,

a connecting rod component is arranged between the driving rod and the articulated shaft,

the turnover driving device drives the driving rod to ascend from a low position state to a high position state, the driving rod drives the wafer boat box to overturn for a certain angle through the connecting rod assembly,

when the driving rod is in a low position state, the opening of the wafer boat box faces inwards, and when the driving rod is in a high position state, the opening of the wafer boat box faces upwards.

As a further improvement of the scheme, when the driving rod is in a low position state, the bottom surface of the wafer boat box has an included angle smaller than 90 degrees with the horizontal direction.

As a further improvement of the scheme, the assembly frame is of a U-shaped structure as a whole, two hinge shafts extending outwards are fixed at the upper part of the outer end of the crystal boat box, and the crystal boat box is hinged in the assembly frame through the two hinge shafts.

As a further improvement of the scheme, a wafer boat box is rotatably arranged at both ends in the assembly frame, and the driving rod is arranged between the two wafer boat boxes.

As a further improvement of the scheme, vertical holes arranged along the height direction are correspondingly formed in the two side plates of the assembling frame, and the two ends of the driving rod penetrate through the vertical holes of the two side plates.

As a further improvement of the scheme, the overturning driving device is arranged at the bottom of the rotary table and comprises a driving cylinder and a driving ejector rod, and the driving ejector rod is matched with the rotary table and provided with a through hole.

As a further improvement of the scheme, connecting rod assemblies are arranged between the two ends of the driving rod and the two hinged shafts and are located in the assembly frame.

As a further improvement of the present solution, the connecting rod assembly includes a first connecting rod and a second connecting rod, one end of the first connecting rod is fixed on the hinge shaft, the other end of the first connecting rod is hinged to one end of the second connecting rod through a rotating pin, and the other end of the second connecting rod is hinged to the driving rod.

As a further improvement of the solution, a stopper for limiting the wafer cassette is disposed on the assembly frame outside the wafer cassette.

A horizontal spin dryer comprises the crystal boat box turnover mechanism.

The beneficial effects of the utility model are that, compare with prior art crystal boat box tilting mechanism has following advantage:

1) in the spin-drying process of the wafer, the wafer boat box is automatically turned over, the wafer boat is convenient to take and place, labor is saved, the spin-drying efficiency is improved, and the wafer cannot be polluted.

2) The whole structure is compact, the volume is small, and the design is ingenious;

3) simple structure and low manufacture cost.

Drawings

Fig. 1 is a side view of a wafer boat cassette turnover mechanism according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view taken along line A-A of FIG. 1;

fig. 3 is a plan view of a wafer boat turnover mechanism according to an embodiment of the present invention;

FIG. 4 is a cross-sectional view taken along line B-B of FIG. 3;

FIG. 5 is a cross-sectional view taken along line C-C of FIG. 2;

fig. 6 is an assembly view schematically illustrating a wafer boat cassette turnover mechanism according to an embodiment of the present invention.

Detailed Description

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 to 6, in the present embodiment, a horizontal spin dryer includes a frame 1, a rotating disc 2 and a turnover mechanism 3, wherein the rotating disc 2 is rotatably mounted in the frame 1, a rotary driving device is connected to the bottom of the rotating disc 2, and the turnover mechanism 3 is fixed to an end surface of the rotating disc 2.

Tilting mechanism 3 includes assembly frame 30, two boat boxes 31, actuating lever 32 and upset drive assembly, boat 4 is placed in boat box 31, assembly frame 30 is radially fixed along carousel 2, and assembly frame 30 is whole to be U type structure, curb plate including bottom plate and two parallel intervals settings, two articulated shafts 33 that outwards extend all are fixed on the outer end upper portion of two boat boxes 31, correspond two boat boxes 31 through articulated shaft 33 and articulate in the both ends in assembly frame 30, correspond between two boat boxes 31 on two curb plates of assembly frame 30 and offer the vertical hole 34 of arranging along the direction of height, the vertical hole 34 setting of two curb plates is passed at the both ends of actuating lever 32.

A connecting rod assembly positioned in the assembly frame 30 is arranged between the driving rod 32 and the hinge shafts 33 of the two wafer boat boxes 31, the connecting rod assembly comprises a first connecting rod 35 and a second connecting rod 36, one end of the first connecting rod 35 is fixed on the hinge shafts 33, the other end of the first connecting rod is hinged with one end of the second connecting rod 36 through a rotating pin shaft 37, and the other end of the second connecting rod 36 is hinged on the driving rod 32.

The turnover driving component is arranged below the turntable 2 and comprises a driving cylinder and a driving ejector rod, the driving ejector rod is matched with the driving cylinder to be provided with a through hole 20 on the turntable 2, and a stop lever 38 used for limiting the wafer boat box 31 is arranged on the assembly frame 30 on the outer side of the wafer boat box 31.

Before and after the wafer is subjected to spin-drying treatment, the turntable 2 is in a static state, the through hole 20 on the turntable is just corresponding to the driving ejector rod, and after the driving air cylinder pushes the driving ejector rod to ascend through the through hole 20, one end of the driving rod 32 is jacked up, so that the driving rod 32 ascends to the top from the bottom of the vertical hole 34. When the driving rod 32 is in the low position state, the opening of the wafer boat box 31 faces inwards, the bottom surface of the wafer boat box 31 and the horizontal direction form an included angle smaller than 90 degrees, and when the driving rod 32 is in the high position state, the opening of the wafer boat box 32 faces upwards, so that the wafer boat can be conveniently taken and placed.

The above embodiments have been merely illustrative of the basic principles and features of the present invention, and the present invention is not limited by the above embodiments, and does not depart from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A turnover mechanism for a wafer carrier is characterized in that it comprises,

2. The wafer boat turnover mechanism of claim 1, wherein the bottom surface of the wafer boat has an angle of less than 90 ° with respect to the horizontal direction when the driving lever is in the lowered position.

3. The wafer boat turnover mechanism of claim 1, wherein the assembly frame is formed in a U-shaped structure, and two hinge shafts extending outward are fixed to an upper portion of an outer end of the wafer boat, and the wafer boat is hinged into the assembly frame through the two hinge shafts.

4. The wafer boat turnover mechanism of claim 3, wherein a wafer boat is rotatably disposed at both ends in the assembly frame, and the driving lever is disposed between two wafer boat.

5. The wafer boat turnover mechanism of claim 3, wherein the two side plates of the mounting frame are correspondingly formed with vertical holes arranged in a height direction, and both ends of the driving rod are disposed through the vertical holes of the two side plates.

6. The wafer boat turnover mechanism of claim 1, wherein the turnover actuator is disposed at the bottom of the turntable and comprises an actuating cylinder and an actuating rod, and a through hole is formed in the turntable in cooperation with the actuating rod.

7. The wafer boat turnover mechanism of claim 3, wherein a link assembly is disposed between both ends of the driving rod and the two hinge shafts, and the link assembly is disposed in the mounting frame.

8. The wafer boat cassette tilting mechanism according to claim 1, wherein the link assembly comprises a first link and a second link, one end of the first link is fixed to the hinge shaft, the other end of the first link is hinged to one end of the second link by a rotating pin, and the other end of the second link is hinged to the driving lever.

9. The wafer boat turnover mechanism of claim 1, wherein a stopper for stopping the wafer boat is provided on the mounting frame at an outer side of the wafer boat.

10. A horizontal spin dryer characterized in that it comprises a pod turning mechanism as claimed in any one of claims 1 to 9.