CN211654793U - Wafer box opening carrier - Google Patents
Wafer box opening carrier Download PDFInfo
- Publication number
- CN211654793U CN211654793U CN202020727687.XU CN202020727687U CN211654793U CN 211654793 U CN211654793 U CN 211654793U CN 202020727687 U CN202020727687 U CN 202020727687U CN 211654793 U CN211654793 U CN 211654793U
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- China
- Prior art keywords
- wafer box
- baffle
- fixed plate
- base
- horizontal
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a wafer box unpacking and carrying machine, which comprises a base, wherein the base is used for placing a wafer box; set up a fixed plate and baffle in the side of base, but baffle relatively fixed plate reciprocates, and the front end housing of wafer box can pass the fixed plate and offset with the baffle, be provided with two module and two horizontal location pins of opening the door on the baffle, every module that opens the door includes a rotatable bolt pole, and the bolt pole front end can stretch into and carry out the unblock to the wafer box in the wafer box, sets up link gear between two bolt poles, realizes synchronous the rotation through link gear between the bolt pole, and horizontal location pin can stretch into and carry out the location of vertical direction to it in the wafer box, still overlaps on horizontal location pin to be equipped with the sucking disc, and the sucking disc can with the laminating of wafer box, is provided with the negative pressure extraction opening on horizontal location pin. The end cover can be opened by utilizing the interlocking mechanism of the latch rod, and the end cover is adsorbed by utilizing the sucker, so that the separation of the end cover and the box body is realized, and the automatic unpacking is realized.
Description
Technical Field
The utility model relates to a semiconductor material transport technical field, concretely relates to wafer box carrier of unpacking.
Background
Front Opening Unified pod ("foup") is a container used in semiconductor manufacturing to protect, transport, and store wafers, and contains 25 wafers of 300mm, and its main components are a front Opening container capable of containing 25 wafers and having a front Opening door frame dedicated container for Opening and closing, which is an important transfer container of an automated transfer system dedicated to a 12-inch (300mm) wafer factory. The structure of the device is shown in figure 1, and the device comprises a box body and an end cover 02, wherein a positioning pin hole 01 and two locking holes 03 are formed in the end cover 02, and the two locking holes can rotate simultaneously to open the end cover. In the prior art, manual unpacking is mostly adopted for unpacking the wafer boxes, and the efficiency is low.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to solve above-mentioned not enough that has now, provide one kind and can carry out the device of automatic unpacking to FOUP.
In order to solve the technical scheme, the utility model discloses a technical scheme be: a wafer box unpacking and carrying machine comprises a base, a loading device and a unloading device, wherein the base is used for placing a wafer box; set up a fixed plate and baffle in the side of base, the fixed plate cooperatees with the shell of wafer box, and the baffle is laminated with the fixed plate, and the baffle can reciprocate relative fixed plate, and the front end housing of wafer box can pass the fixed plate and offset with the baffle, be provided with two module and two horizontal positioning pins of opening the door on the baffle, every module of opening the door includes a rotatable bolt pole, and the bolt pole front end can stretch into and carry out the unblock to the wafer box in the wafer box, sets up link gear between two bolt poles, realizes synchronous rotation through link gear between the bolt pole, and horizontal positioning pin can stretch into and carry out the location of vertical direction to it in the wafer box, still overlaps on horizontal positioning pin and is equipped with the sucking disc, and the sucking disc can with the laminating of wafer box, is provided with the negative pressure extraction opening on horizontal.
Furthermore, still be provided with a plurality of vertical locating pins on the base, its bottom that can stretch into the wafer box carries out the location of horizontal direction to it.
Furthermore, a clamping hook is arranged on the base, the clamping hook is driven by a motor to be horizontal, and the clamping hook can extend into the bottom of the wafer box to fix the wafer box.
Further, link gear includes a horizontal pole and cylinder, and the both ends of horizontal pole respectively articulate a connecting block, and the bolt pole sets up respectively on the connecting block, and the bolt pole passes the baffle, and the connecting block rotates and drives the bolt pole and rotate, and the cylinder is used for promoting the horizontal pole and carries out the translation.
According to the above technical scheme, the utility model has the advantages of it is following: the end cover can be opened by utilizing the interlocking mechanism of the latch rod, and the end cover is adsorbed by utilizing the sucker, so that the separation of the end cover and the box body is realized, and the automatic unpacking is realized.
Drawings
FIG. 1 is a schematic diagram of a prior art FOUP configuration;
FIG. 2 is a schematic structural view of the present invention;
fig. 3 is a schematic view of the back structure of the present invention.
Detailed Description
The following description will specifically explain embodiments of the present invention with reference to the accompanying drawings.
As shown in fig. 2 and 3, the pod opening carrier of the present invention includes a frame 7 and a base 6, wherein the base 6 is used for placing a pod; set up a fixed plate 1 and baffle 2 in the side of base, baffle 2 and the laminating of fixed plate 1, and baffle 2 can reciprocate relative to the fixed plate. The up and down movement of the baffle 2 can be realized by a lead screw module or a cylinder. The front end housing of wafer box can pass fixed plate and 2 offsets of baffle, it opens door module and two horizontal location pins 8 to be provided with two on the baffle, every module of opening the door includes a rotatable bolt pole 3, bolt pole 3 front end can stretch into and carry out the unblock to the wafer box in the wafer box, set up link gear between two bolt poles 3, realize synchronous the rotation through link gear between the bolt pole, horizontal location pin 8 can stretch into and carry out the location of vertical direction to it in the wafer box, still the cover is equipped with sucking disc 9 on horizontal location pin, sucking disc 9 can with the laminating of wafer box, after opening the wafer box, utilize the end cover after the sucking disc will open to adsorb, thereby be provided with negative pressure extraction opening on horizontal location pin and discharge the air.
Still be provided with a plurality of vertical locating pins 5 on the base, its bottom that can stretch into the wafer box carries out the location of horizontal direction to it. The vertical positioning pin not only can play a positioning role, but also can play a recognition role, and only the pin hole at the bottom of the wafer box corresponds to the positioning pin on the base, so that the wafer box can be placed on the base. The base is provided with a clamping hook 4, the clamping hook 4 is driven by a motor to move horizontally, and when the wafer box is placed, the clamping hook moves horizontally to stretch into the bottom of the wafer box to fix the wafer box.
The link gear includes a horizontal pole 10 and cylinder 12, and connecting block 11 is respectively articulated at the both ends of horizontal pole 10, and the bolt pole 3 sets up on the connecting block respectively, and bolt pole 3 passes the baffle, and the connecting block rotates and drives the bolt pole and rotate, and cylinder 12 is used for promoting horizontal pole 10 and carries out the translation. In order to and promote the horizontal pole with the cylinder, set up vertical connecting block in the below of horizontal pole, can promote this connecting block with horizontal cylinder, thereby the connecting block drives horizontal pole translation and drives two connecting blocks and rotate, and then rotates the breech lock pole.
The locating pin then is used for realizing multidirectional location, and its box body of trip is fixed, utilizes the chain mechanism of bolt pole to open the end cover, recycles the sucking disc and adsorbs the end cover, thereby the baffle can move down the separation that realizes end cover and box body afterwards to realize automatic unpacking.
Claims (4)
1. The utility model provides a wafer box carrier of unpacking which characterized in that: comprises a base, a wafer box and a wafer box, wherein the base is used for placing the wafer box; set up a fixed plate and baffle in the side of base, the fixed plate cooperatees with the shell of wafer box, and the baffle is laminated with the fixed plate, and the baffle can reciprocate relative fixed plate, and the front end housing of wafer box can pass the fixed plate and offset with the baffle, be provided with two module and two horizontal positioning pins of opening the door on the baffle, every module of opening the door includes a rotatable bolt pole, and the bolt pole front end can stretch into and carry out the unblock to the wafer box in the wafer box, sets up link gear between two bolt poles, realizes synchronous rotation through link gear between the bolt pole, and horizontal positioning pin can stretch into and carry out the location of vertical direction to it in the wafer box, still overlaps on horizontal positioning pin and is equipped with the sucking disc, and the sucking disc can with the laminating of wafer box, is provided with the negative pressure extraction opening on horizontal.
2. The pod opener carrier of claim 1, wherein: still be provided with a plurality of vertical locating pins on the base, its bottom that can stretch into the wafer box carries out the location of horizontal direction to it.
3. The pod opener carrier of claim 1, wherein: the base is provided with a clamping hook, the clamping hook is driven to be horizontal by a motor, and the clamping hook can extend into the bottom of the wafer box to fix the wafer box.
4. The pod opener carrier of claim 3, wherein: the linkage mechanism comprises a cross rod and an air cylinder, the two ends of the cross rod are respectively hinged with a connecting block, the latch rods are respectively arranged on the connecting blocks and penetrate through the baffle, the connecting blocks rotate to drive the latch rods to rotate, and the air cylinder is used for pushing the cross rod to translate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020727687.XU CN211654793U (en) | 2020-05-06 | 2020-05-06 | Wafer box opening carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020727687.XU CN211654793U (en) | 2020-05-06 | 2020-05-06 | Wafer box opening carrier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211654793U true CN211654793U (en) | 2020-10-09 |
Family
ID=72690011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020727687.XU Active CN211654793U (en) | 2020-05-06 | 2020-05-06 | Wafer box opening carrier |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211654793U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112820660A (en) * | 2020-12-30 | 2021-05-18 | 无锡奇众电子科技有限公司 | Full-automatic wafer appearance inspection system |
| CN115863248A (en) * | 2023-03-01 | 2023-03-28 | 昆山芯物联电子通讯有限公司 | Inflatable clamping device for wafer conveying carrier |
-
2020
- 2020-05-06 CN CN202020727687.XU patent/CN211654793U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112820660A (en) * | 2020-12-30 | 2021-05-18 | 无锡奇众电子科技有限公司 | Full-automatic wafer appearance inspection system |
| CN115863248A (en) * | 2023-03-01 | 2023-03-28 | 昆山芯物联电子通讯有限公司 | Inflatable clamping device for wafer conveying carrier |
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