CN219350185U - Wafer box locking mechanism - Google Patents
Wafer box locking mechanism Download PDFInfo
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- CN219350185U CN219350185U CN202223578269.7U CN202223578269U CN219350185U CN 219350185 U CN219350185 U CN 219350185U CN 202223578269 U CN202223578269 U CN 202223578269U CN 219350185 U CN219350185 U CN 219350185U
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- locking mechanism
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a wafer box locking mechanism, and belongs to the technical field of locking equipment. The locking mechanism aims at solving the problems that an existing wafer box locking mechanism is complex in structure, long in operation period and long in debugging time of different products. The device comprises a mounting plate, a locking device, a power device and a locking induction device; the locking device comprises a connecting rod, a locking head and a connecting plate; the power device is fixedly arranged on the mounting plate, and the power end of the power device is fixedly connected with the connecting rod; one end of the connecting rod is connected with a locking head, and the connecting plate is fixedly arranged on the rod body; the wafer box is arranged on the mounting plate at one side of the locking device; the connecting rod is driven by the power end of the power device to perform rotary motion, so that the locking head and the connecting plate are driven to rotate, and the locking head is driven to abut against the wafer box, so that locking is realized; the locking sensing device is arranged in the movement track of the connecting plate, so that the locking or unlocking of the sensing wafer box is realized. The locking mechanism has the advantages of simple overall structure, short operation period and high working efficiency.
Description
Technical Field
The application relates to a wafer box locking mechanism, belongs to locking equipment technical field.
Background
With the development of the domestic semiconductor industry and the improvement of the automation degree of integrated circuit factories, the automatic wafer box FOUP loading equipment has wider and wider application range on integrated circuit equipment. The requirements on the automation performance, speed, reliability, stability and safety of the automatic wafer box loading equipment are higher and higher, and the requirements on cost reduction are correspondingly improved. A wafer box FOUP is a container used in semiconductor manufacturing process for protecting, transporting and storing wafers, wherein 25 wafers of 300mm can be accommodated in the container, and the main components are a front opening container capable of accommodating 25 wafers and an opening and closing door frame special container which is opened in front, so that the wafer box FOUP is an important transport container which is special for an automatic transport system in a wafer factory.
The wafer box is transferred between the feeding station and the discharging station through an automatic moving robot. And the wafer box is taken away at the discharging station through the material taking mechanism and then returned to the feeding station to continue feeding. In order to ensure that the wafer box is kept stable during transferring and taking, a locking mechanism is arranged on an automatic moving robot in the prior art so as to ensure that the wafer box is kept stable. Common locking mechanisms include two types: (1) The automatic locking is completed through three actions of ascending, forward and descending, and the two driving mechanisms, (2) the automatic unlocking is completed through three actions of ascending, backward and descending, and the two driving structures are completed, so that the whole structure of the automatic mobile robot is complex, the cost is high, and the locking and unlocking time is long. In the prior patent, the patent number is CN211320065U, the patent name is an automatic locking and unlocking device for a wafer box FOUP, although the locking of the wafer box is performed by a driving structure, the essence of the device is that a cylinder drives a locking motion assembly, an assembly cylinder connecting piece of the locking motion assembly moves backwards to drive a needle roller to move in a rectangular long groove of a rotary connecting rod to drive the rotary connecting rod and a locking piece to rotate, so that unlocking or locking is realized, or a plurality of actions are needed to perform locking or unlocking, so that the mechanism has long operation period. Meanwhile, when the locking mechanism works, the automatic mobile robot needs to be in engagement with the operation of the locking mechanism, namely, the free mobile robot can move after the locking mechanism finishes the locking process. In automated production, a program is written to control the operation of the automatic mobile robot. Because different kinds of wafer boxes need different locking time, when handling different kinds of wafer boxes and carrying out automated production, the period that needs to carry out programming and equipment debugging in the early stage is longer, leads to the problem of production efficiency inefficiency. There is therefore a need for a locking mechanism that solves the above-mentioned problems.
Disclosure of Invention
To the problem and the defect that exist among the prior art, this application provides a wafer box locking mechanism, aims at solving the technical problem that exists at present.
In order to achieve the above purpose, the present application provides the following technical solutions: the wafer box locking mechanism comprises a mounting plate, a locking device, a power device and a locking induction device; the locking device comprises a connecting rod, a locking head and a connecting plate; the power device is fixedly arranged on the mounting plate, and the power end of the power device is fixedly connected with the connecting rod; one end of the connecting rod is connected with a locking head, and a connecting plate is fixedly arranged on the rod body; the wafer box is arranged on the mounting plate at one side of the locking device; the connecting rod is driven by the power end of the power device to perform rotary motion, so that the locking head and the connecting plate are driven to rotate, and the locking head is driven to abut against the wafer box, so that locking is realized; the locking sensing device is arranged in the motion track of the connecting plate, so that the locking or unlocking of the sensing wafer box is realized.
Specifically, the middle part of the mounting plate is provided with a mounting through hole, and four corners of the plate body are respectively provided with a mounting hole for being connected with the transfer mechanism; the power device is fixedly arranged on the bottom side surface of the mounting plate, and the power end of the power device penetrates through the mounting through hole and extends to the upper side surface of the mounting plate.
Specifically, the power device is a rotating electromagnetic motor, and the power end of the power device is a rotating shaft.
Specifically, one end of the connecting rod is fixedly connected with the rotating shaft, and the other end of the connecting rod is fixedly connected with the locking head; two ends of the locking head extend along the direction vertical to the connecting rod respectively to form a T-shaped structure with the connecting rod; the two extension ends form two abutment ends.
Specifically, a locking groove is arranged at a position on the wafer box corresponding to the locking head; the connecting rod drives the abutting end to rotate towards the locking groove under the drive of the power end of the power device and abuts against the locking groove.
Specifically, the mounting plate is provided with an arc chute; the connecting plate is sleeved on the outer side of the connecting rod body, one end part of the connecting plate extends into the circular arc-shaped chute along the radial direction to form an induction end, and the other end part of the connecting plate is provided with a hook-shaped limiting part.
Specifically, the mounting plate is provided with a limit rod; the limiting rod is arranged in the motion track of the hook-type limiting part, and the connecting rod rotates under the limiting action of the limiting rod.
Specifically, the connecting rod performs 90-degree reciprocating rotation under the limiting action of the limiting rod.
Specifically, the locking sensing device comprises two micro switch sensors; the two micro switch sensors are respectively and fixedly arranged in the arc-shaped sliding groove, and the spring pieces of the two micro switch sensors face the induction ends of the connecting plates respectively.
Specifically, the two micro switch sensors are respectively and electrically connected with the transfer mechanism.
Compared with the prior art, the beneficial effect of this application lies in:
1. the wafer box locking mechanism drives the connecting rod to rotate through the power end of the rotary electromagnetic motor, the locking head at the end part of the connecting rod is driven to rotate towards the locking groove of the wafer box, and the locking head is propped against the locking groove to lock the wafer box. The wafer box locking and unlocking device is used for locking and unlocking the wafer box through one driving device, so that the whole structure of the mechanism is simple, the operation period is short, and the production cost is low.
2. On the basis of the above, a connecting plate is arranged on the connecting rod, a limiting rod and a micro-switch sensor are arranged on the mounting plate, the connecting rod is driven to rotate through the power end of the rotating electromagnetic motor, and the connecting plate realizes 90-degree reciprocating motion of the connecting rod under the limiting effect of the limiting rod. The sensing end of the connecting plate is abutted against the micro-switch sensor, so that the locking or unlocking position of the locking head of the connecting rod to the wafer box is fed back to the transfer mechanism, namely the free mobile robot, the free mobile robot cannot displace when the locking mechanism locks or unlocks the wafer box, the operation coordination between the locking mechanism and the transfer mechanism is improved, and the degree of automation is high. Meanwhile, when coping with different types of wafer boxes, the installation and debugging period of the mechanism parts is reduced, and the production efficiency is improved.
Drawings
Fig. 1 is a schematic structural view (1) of a wafer cassette locking mechanism according to the present embodiment;
fig. 2 is a schematic structural view (2) of the wafer cassette locking mechanism of the present embodiment.
In the figure: 1. a mounting plate; 2. a connecting rod; 3. a locking head; 4. a connecting plate; 5. a rotating electromagnetic motor; 6. a microswitch sensor.
Detailed Description
The present application will be further elucidated below in connection with the drawings in the embodiments of the present application.
Referring to fig. 1-2, the embodiment discloses a wafer box locking mechanism, which comprises a mounting plate 1, a locking device, a power device and a locking induction device; the locking device comprises a connecting rod 2, a locking head 3 and a connecting plate 4; the power device is fixedly arranged on the mounting plate 1, and the power end of the power device is fixedly connected with the connecting rod 2; one end of the connecting rod 2 is connected with a locking head 3, and a connecting plate 4 is fixedly arranged on the rod body; the wafer box is arranged on the mounting plate 1 at one side of the locking device; the connecting rod 2 is driven by a power end of the power device to perform rotary motion, so as to drive the locking head 3 and the connecting plate 4 to rotate, and drive the locking head 3 to abut against the wafer box, thereby realizing locking; the locking sensing device is arranged in the motion track of the connecting plate 4, so that the locking or unlocking of the sensing wafer box is realized.
Further, the middle part of the mounting plate 1 is provided with mounting through holes, and four corners of the plate body are respectively provided with mounting holes for being connected with the transfer mechanism; the power device is fixedly arranged on the bottom side surface of the mounting plate 1, and the power end of the power device penetrates through the mounting through hole and extends to the upper side surface of the mounting plate 1.
Further, the power device is a rotating electromagnetic motor 5, and the power end is a rotating shaft.
Further, one end of the connecting rod 2 is fixedly connected with the rotating shaft, and the other end of the connecting rod is fixedly connected with the locking head 3; two ends of the locking head 3 extend along the direction vertical to the connecting rod respectively to form a T-shaped structure with the connecting rod 2; the two extension ends form two abutment ends.
Further, a locking groove is arranged at a position on the wafer box corresponding to the locking head; the connecting rod 2 drives the abutting end to rotate towards the locking groove under the drive of the power end of the power device and abuts against the locking groove.
Furthermore, the mounting plate 1 is provided with an arc chute; the connecting plate 4 is sleeved on the outer side of the rod body of the connecting rod 2, one end part of the connecting plate extends into the circular arc-shaped chute along the radial direction to form an induction end, and the other end part of the connecting plate is provided with a hook-shaped limiting part.
Furthermore, the mounting plate 1 is provided with a limit rod; the limiting rod is arranged in the motion track of the hook-type limiting part, and the connecting rod rotates under the limiting action of the limiting rod.
Further, the connecting rod 2 performs 90-degree reciprocating rotation under the limiting action of the limiting rod.
Further, the locking sensing device comprises two micro switch sensors 6; the two micro switch sensors are respectively and fixedly arranged in the arc-shaped sliding groove, and the spring pieces of the two micro switch sensors face the induction ends of the connecting plates respectively.
Further, the two micro switch sensors 6 are respectively electrically connected with the transfer mechanism.
Working principle: 1. when the wafer box locking mechanism is used, an operator connects the wafer box locking mechanism with the free mobile robot. And then adjusting the mounting height of the locking head according to the type of the wafer box so as to enable the mounting height of the locking head to be matched with the height of the locking groove of the wafer box, and then performing component mounting and electric connection of the micro-switch sensor and the free mobile robot to complete mounting and debugging of the wafer box locking mechanism.
2. The wafer box locking mechanism of this implementation is at the during operation, and the wafer box moves to the feed station along with free mobile robot, and the wafer box is pressed from both sides by free robot's getting manipulator and is got and place in the upside of mounting panel, and rotatory electromagnetic motor starts this moment, and the rotation axis rotates, drives the connecting rod and rotates, and the rotation of connecting rod drives the locking head and rotates towards the locking recess direction of wafer box on the one hand, and on the other hand connecting rod rotates and also drives the connecting plate and rotate, and the hook-type spacing portion of connecting plate tip rotates towards the gag lever post to under the spacing effect of gag lever post, the connecting rod carries out 90 degrees rotations. Along with the rotation of the connecting rod, the locking head is propped against the locking groove to clamp the wafer box, so that the wafer box is locked. Meanwhile, the sensing end of the other end of the connecting plate rotates along with the connecting rod, and when the sensing end rotates to the micro switch sensor on one side, the spring piece is pushed to be communicated with the micro switch sensor circuit, and a circuit signal is fed back to the transfer mechanism to indicate that the wafer box is in a locking state. At this time, the free moving robot can move to transfer the wafer box to the discharging station.
3. When the wafer box is subjected to a discharging procedure at the discharging station, the locking mechanism is unlocked firstly, after unlocking is completed, the spring piece of the micro-switch sensor is reset, the sensing circuit signal is cut off, the free mobile robot senses that the wafer box is in an unlocking state, and then the material taking mechanical arm is controlled to clamp and convey the wafer box to the discharging station.
4. After the discharging is completed, the free mobile robot moves from the discharging station to the feeding station, and then the steps are repeated, so that the wafer box is transferred.
While the embodiments of the present application have been described in detail with reference to the examples, the present application is not limited to the above embodiments, and it will be apparent to one skilled in the art that several equivalent changes and substitutions can be made therein without departing from the principles of the present application, and such equivalent changes and substitutions should also be considered to be within the scope of the present application.
Claims (10)
1. The wafer box locking mechanism comprises a mounting plate, a locking device, a power device and a locking induction device; the method is characterized in that: the locking device comprises a connecting rod, a locking head and a connecting plate; the power device is fixedly arranged on the mounting plate, and the power end of the power device is fixedly connected with the connecting rod; one end of the connecting rod is connected with the locking head, and the connecting plate is fixedly arranged on the rod body; the wafer box is arranged on the mounting plate at one side of the locking device; the connecting rod is driven by the power end of the power device to perform rotary motion, so that the locking head and the connecting plate are driven to rotate, and the locking head is driven to abut against the wafer box to realize locking; the locking sensing device is arranged in the motion track of the connecting plate, so that the locking or unlocking of the sensing wafer box is realized.
2. The wafer cassette locking mechanism of claim 1, wherein: the middle part of the mounting plate is provided with a mounting through hole, and four corners of the plate body are respectively provided with a mounting hole for being connected with the transfer mechanism; the power device is fixedly arranged on the bottom side surface of the mounting plate, and the power end of the power device penetrates through the mounting through hole and extends to the upper side surface of the mounting plate.
3. A wafer cassette locking mechanism as defined in claim 2, wherein: the power device is a rotary electromagnetic motor, and the power end of the power device is a rotary shaft.
4. A wafer cassette locking mechanism according to claim 3, wherein: one end of the connecting rod is fixedly connected with the rotating shaft, and the other end of the connecting rod is fixedly connected with the locking head; the two ends of the locking head extend along the direction vertical to the connecting rod respectively and form a T-shaped structure with the connecting rod; the two extension ends form two abutment ends.
5. The wafer cassette locking mechanism of claim 4, wherein: a locking groove is formed in the position, corresponding to the locking head, of the wafer box; the connecting rod drives the abutting end to rotate towards the locking groove under the drive of the power end of the power device, and abuts against the locking groove.
6. A wafer cassette locking mechanism as defined in claim 2, wherein: the mounting plate is provided with an arc chute; the connecting plate is sleeved on the outer side of the connecting rod body, one end of the connecting plate extends into the circular arc-shaped chute along the radial direction to form an induction end, and the other end of the connecting plate is provided with a hook-shaped limiting part.
7. The wafer cassette locking mechanism of claim 6, wherein: the mounting plate is provided with a limit rod; the limiting rod is arranged in the motion track of the hook-type limiting part, and the connecting rod rotates under the limiting action of the limiting rod.
8. The wafer cassette locking mechanism of claim 7, wherein: the connecting rod performs 90-degree reciprocating rotation under the limiting action of the limiting rod.
9. The wafer cassette locking mechanism of claim 6, wherein: the locking sensing device comprises two micro switch sensors; the two micro switch sensors are respectively and fixedly arranged in the circular arc-shaped sliding groove, and the spring pieces of the two micro switch sensors face the induction ends of the connecting plates respectively.
10. The wafer cassette locking mechanism of claim 9, wherein: the two micro switch sensors are respectively and electrically connected with the transfer mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223578269.7U CN219350185U (en) | 2022-12-30 | 2022-12-30 | Wafer box locking mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223578269.7U CN219350185U (en) | 2022-12-30 | 2022-12-30 | Wafer box locking mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219350185U true CN219350185U (en) | 2023-07-14 |
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ID=87113020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223578269.7U Active CN219350185U (en) | 2022-12-30 | 2022-12-30 | Wafer box locking mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219350185U (en) |
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2022
- 2022-12-30 CN CN202223578269.7U patent/CN219350185U/en active Active
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