CN115424968A - SMIF box loading equipment - Google Patents
SMIF box loading equipment Download PDFInfo
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- CN115424968A CN115424968A CN202211238661.9A CN202211238661A CN115424968A CN 115424968 A CN115424968 A CN 115424968A CN 202211238661 A CN202211238661 A CN 202211238661A CN 115424968 A CN115424968 A CN 115424968A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- Condensed Matter Physics & Semiconductors (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses SMIF box loading equipment, and belongs to the technical field of semiconductors. Aiming at the problem of poor transfer stability, the SMIF box loading equipment comprises an equipment frame, wherein an opening and closing device is arranged in front of the equipment frame and used for bearing and opening and closing the SMIF box, a robot arm is arranged in the equipment frame, an end effector is arranged at the tail end of the robot arm, and the robot arm is used for driving the end effector to vertically and horizontally move so as to enter and exit the SMIF box and take and place a wafer basket. The invention realizes the loading of the SMIF box and can realize the multilayer wafer basket taking and placing in a limited space.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to SMIF box loading equipment.
Background
In 8-inch (200 mm) or 12-inch (300 mm) SMIF wafer factories (SMIF: standard Mechanical Interface) of semiconductor industry Standard, the front end of a process equipment host machine is provided with a Standard SMIF opener which is used as a loading port of a SMIF Pod (SMIF Pod) of the host machine and is used for loading and unloading a wafer Pod and realizing the opening and closing function of the wafer Pod. However, the handling of the wafers in the cassette or the wafer basket (cassette) still needs to be done by a robot arm. Conventional applications have a separate robot arm mounted at the rear of the SMIF pod for handling wafers, which is known in the art as the EFEM architecture.
Although the process tool mainframe, the SMIF pod, and the robot are all located in the clean room, the wafers are typically located in a higher level clean space, and when the SMIF pod is opened for the robot to pick and place, the robot communicates with the clean room, which exposes the wafers to the clean room environment.
In addition, because some special semiconductor processing equipment, such as high Wen Luguan equipment and RPT equipment, have occupied an excessive amount of clean room space, the space available for SMIF openers and robotic arms is very limited to enhance commercial competitiveness, and the conventional EFEM architecture is not desirable. Meanwhile, in order to maximize space utilization, the device has multilayer height for the placement of the nest, namely the stacking requirement, and the conventional EFEM design cannot meet the requirement.
There has been a corresponding improvement in the prior art to address the above problems, as disclosed in U.S. patent application publication 2000-7-11, publication No. US6086323A, which discloses a method for unloading silicon wafers contained in a cassette from a sealed cassette and supplying the wafers to an IC manufacturing process. The method includes receiving a base of the pod onto a loading platform of the pod loader interface and then unlocking the pod cover from the base. The method lifts the pod cover from the base while maintaining the wafer in a clean micro-environment, contacts the now exposed cassette through the end effector of the articulated arm, secures the cassette to the end effector, and activates the arm to transport the wafer out of the micro-environment for presentation of the wafer to the IC manufacturing process, the end effector secured at one end of the arm allowing the machine to grasp and secure the boat, i.e., the gripper is extended and retracted by air cylinders. Preferably, the method further comprises raising the articulated arm to lift the cassette prior to transferring the wafer to the process. The disadvantages of the scheme are that: when the pumping chamber is not lifted to the top after the pod cover is lifted from the base, external air may enter the pumping chamber to contact the wafer due to the fact that the window on the support partition is not completely covered by the pumping chamber and a gap is formed between the pumping chamber and the support partition, meanwhile, the hinged arm is installed in a suspended mode and is poor in stability, the end effector extends and retracts through the air cylinder, control accuracy is poor, linear extension causes poor bearing capacity, and instability of transfer operation is further increased.
Also, as disclosed in korean patent application publication No. KR100594371B1, published as 2006-7-3, a loader device with a cassette output function is disclosed, which is lifted and lowered stably by means of a lifting arm, but has a complicated structure, and the arm is moved horizontally to adjust a distance for holding a cassette, and thus has a poor load-bearing capacity, resulting in instability of a transfer operation, and requires a large space.
Therefore, in view of the above problems, it is necessary to propose a further solution to solve at least one of the problems.
Disclosure of Invention
In order to solve the problem of poor transfer stability, the invention provides SMIF box loading equipment. The technical scheme is as follows:
the utility model provides a box-packed equipment of SMIF, includes the equipment frame, the place ahead of equipment frame is provided with the device that opens and shuts, the device that opens and shuts is used for bearing and opens and shuts the SMIF box, the inside of equipment frame is provided with robot arm, robot arm's end is provided with end effector, robot arm is used for driving end effector is perpendicular and horizontal migration, in order to pass in and out the SMIF box and get and put the wafer basket of flowers.
Preferably, the robot arm is a SCARA-type robot arm.
Preferably, the end effector is provided with two clamping jaws and a rotation driving mechanism II for rotating the two clamping jaws, and the distance between the two clamping jaws is matched with the distance between the two handles on the wafer basket so as to insert or extract the handles.
Preferably, the rotary driving mechanism II is connected with the clamping jaw through a connecting rod transmission structure.
Preferably, the clamping jaw comprises a rotating shaft II, a hook claw is connected to the rotating shaft II, the rotating shaft II drives the hook claw to rotate under the driving of a rotary driving mechanism II, and the handle is inserted into or pulled out of the rotating shaft II.
Preferably, the end effector is provided with a fixed seat, one end of the rotating shaft II is connected with the rotary driving mechanism II, and the other end of the rotating shaft II is rotatably connected with the fixed seat.
Preferably, the opening and closing device includes a loading platform for bearing a substrate and a wafer basket of the SMIF pod, and the opening and closing device further includes a box cover support frame for supporting a box cover of the SMIF pod, the loading platform is disposed in the box cover support frame and connected to the equipment frame, the box cover support frame drives the box cover to move up and down under the driving of a lifting driving mechanism i, a bearing box is connected below the box cover support frame, one side of the box cover support frame, which is close to the equipment frame, is connected with a sealing door, the bearing box moves up and down to surround or keep away from the loading platform along with the lifting of the box cover support frame, and the sealing door moves up and down to keep away from or cover a window of the equipment frame.
Preferably, the equipment frame is provided with a limiting groove, and the sealing door is lifted in the limiting groove.
Preferably, the bearing box is connected with a gas filtering device I, and the gas filtering device I conveys horizontal laminar gas into the bearing box; and/or a gas filtering device II is arranged at the top end of the equipment frame, and the gas filtering device II conveys laminar gas vertically downward into the equipment frame.
Preferably, be provided with on the lid support frame and be used for the locking the latch mechanism of lid, latch mechanism package latch board, the below of latch board is connected with pivot I, be provided with in the circumference of pivot I and hold the piece, the one end of holding the piece articulates there is link assembly, link assembly pass through the driving piece drive with hold the piece and connect pivot I rotates, pivot I drives the latch board is rotatory to support and lean on or keep away from the evagination edge of lid is with locking or unblock the lid.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the invention, the opening and closing device is arranged in front of the equipment frame and is used for bearing and opening and closing the SMIF box, so that the SMIF box is loaded preliminarily; the robot arm is arranged in the equipment frame, the tail end of the robot arm is provided with the end effector, and the robot arm is used for driving the end effector to vertically and horizontally move so as to enter and exit the SMIF box and take and place the wafer basket, so that the SMIF box is loaded, and the wafer basket can be taken and placed in multiple layers in a limited space.
(2) According to the invention, the two clamping jaws and the rotary driving mechanism II for rotating the two clamping jaws are arranged on the end effector of the robot arm, so that the end effector can grab the wafer flower basket in comparison with the conventional linear motion, the bearing capacity is improved, the transfer operation stability is improved, and no space is required to be provided for the linear motion in the left and right directions, thereby reducing the space required by equipment.
(3) According to the invention, the sealing door is arranged on the box cover supporting frame, and is driven by the lifting driving mechanism I to lift along the height direction of the equipment frame along with the box cover supporting frame, so that the bearing box and the equipment frame are kept sealed, the sealing door covers or is far away from the window of the equipment frame, the space in the equipment frame is always kept sealed, external pollution is prevented from entering, meanwhile, the sealing door and the box cover supporting frame share one driving mechanism, the size of the equipment is favorably reduced, the opening and closing of the window and the opening and closing of the SMIF box are synchronized, and the loading efficiency is further improved.
(4) According to the invention, the latch mechanism is arranged on the box cover supporting frame, and the latch mechanism adopts the holding block and the connecting rod assembly to cooperate with the rotating latch, so that the rotating precision of the latch mechanism is improved, and the structure is simple.
Drawings
Fig. 1 is a schematic view showing a state of use of the SMIF pod loading apparatus of the present invention, in which the SMIF pod lid is opened;
FIG. 2 is a schematic view of another angular use of the SMIF pod loading apparatus of the present invention in which the robot arm has grasped the wafer basket into the apparatus frame;
FIG. 3 is a schematic cross-sectional view of a SMIF pod;
FIG. 4 is a schematic diagram of a wafer basket in the SMIF pod;
FIG. 5 is a schematic view of the structure of the jaws of the SMIF pod loading apparatus of the present invention;
fig. 6 is a schematic view of a portion of an end effector of the SMIF pod loading apparatus of the present invention;
FIG. 7 is a schematic view of a portion of a robot arm of the SMIF pod loading apparatus of the present invention;
fig. 8 is a partial structural view of a body of the SMIF pod loader of the present invention;
fig. 9 is a schematic view of a portion of the SMIF pod loading apparatus of the present invention;
fig. 10 is a partial schematic view of another angle of the SMIF pod loader of the present invention;
fig. 11 is a schematic view showing a part of the structure of the opening and closing device of the SMIF pod loading apparatus according to the present invention;
fig. 12 is a schematic view of the latch mechanism of the SMIF pod loading apparatus of the present invention.
Specifically, 1, loading equipment in an SMIF (small input/output interface) box; 2. a SMIF pod; 21. a substrate; 22. a wafer basket of flowers; 22-1, a handle; 23. a box cover; 23-1, an outer convex edge;
100. an equipment frame; 101. a front side plate; 102. an operation panel; 103. a dust cover;
200. an opening and closing device; 201. a device case; 210. a loading table; 220. a box cover support frame; 221. a sealing door; 222. protecting the frame; 223. a latch mechanism; 2231. a latch board; 2232. a rotating shaft I; 2233. a holding block; 2234. a connecting rod I; 2235. a connecting rod II; 224. a wafer protrusion sensor 224; 225. a wafer flower basket in-place sensor I; 230. a carrying case; 231. a base plate; 232. a side plate; 233. a front plate; 234. a connecting plate; 240. driving a motor I; 241. a screw rod; 242. a sliding block I; 243. a guide rail I;
300. a robot arm; 310. a body; 311. a housing; 312. driving a motor II; 313. a synchronous pulley drive assembly; 314. a lead screw I; 315. a stage; 316. a barrel; 320. an arm; 321. a lower arm; 322. an upper arm; 330. an end effector; 331. a base; 332. a back plate; 3321. driving a motor III; 3322. a lead screw II; 3323. a sliding block II; 3324. a guide rail II; 3325. a swing rod I; 3326. a swing rod II; 3327. a swing rod III; 3328. a swing rod IV; 3329. a wafer basket in-place sensor II; 333. a clamping jaw; 3331. a rotating shaft II; 3332. hooking claws; 3333. a fixed seat; 3334. a collision avoidance sensor;
410. a fan I; 411. a filter box I; 420. a fan II; 421. and a filter box II.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be taken as limiting the scope of the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
As shown in fig. 1-2, a SMIF pod loading tool 1 is disposed at the front end of a process tool host for loading (loading) and unloading (unloading) a SMIF pod 2. As shown in fig. 3 to 4, the SMIF Pod 2 (SMIF Pod) includes a base plate 21 (base), a wafer basket 22 (cassette) placed on the base plate 21, and a lid 23, so as to hold wafers in the wafer basket 22 in a closed environment composed of the base plate 21 and the lid 23. The equipment comprises an equipment frame 100, an opening and closing device 200 is arranged in front of the equipment frame 100, a robot arm 300 is arranged in the equipment frame 100, the SMIF box 2 is opened through the opening and closing device 200, namely, a box cover 23 is separated from a base plate 21 and is far away from a wafer basket 22, the robot arm 300 penetrates through a window formed in the equipment frame 100 and takes and places the wafer basket 22 or a wafer positioned on the opening and closing device 200, and then the wafer basket or the wafer is transmitted into a process equipment main machine or is in butt joint with the robot arm of the process equipment main machine, so that loading operation is completed, and unloading operation is basically opposite to loading operation.
The edges of the tool frame 100 abut the process tool and cover the ports of the process tool. To improve the sealing, a dust cover 103 is provided between the apparatus frame 100 and the process apparatus. The equipment frame 100 is further provided with a docking equipment door state detection sensor so as to determine whether the port door of the process equipment is opened or closed, thereby preventing the robot arm 300 from being operated by mistake.
The equipment frame 100 comprises a front side plate 101, the opening and closing device 200 is connected with the front side plate 101, the front side plate 101 is further connected with an operation panel 102, and an indicator light and an operation button are arranged on the operation panel 102.
The opening and closing device 200 is provided in a device case 201, and as shown in fig. 9 and 10, the device case 201 is connected to the front side plate 101. The opening and closing device 200 includes a loading platform 210 and a box cover support frame 220. The loading table 210 is used for carrying the SMIF pod 2, and the loading table 210 is provided with a positioning pin and a shifting fork mechanism adapted to the SMIF pod 2, the shifting fork mechanism is used for unlocking or locking the SMIF pod 2, that is, for unlocking or locking the connection between the base plate 21 and the box cover 23, and the shifting fork mechanism can adopt the prior art. The lid support frame 220 has a U-shaped or rectangular frame shape, the loading platform 210 is located inside the lid support frame 220, when the SMIF box 2 is placed on the loading platform 210, the substrate 21 of the SMIF is located on the loading platform 210, and the lid 23 is located on the lid support frame 220. One side of the loading table 210 is connected to the front side plate 101 so that the loading table 210 is kept at a constant distance from the window of the equipment frame 100, and the SMIF pod 2 is placed on the loading table 210 to face the window. The lid support frame 220 is connected to a lifting driving mechanism i, and the lid support frame 220 is driven by the lifting driving mechanism i to lift, i.e. to be away from or close to the loading platform 210, so that the lid 23 on the lid support frame 220 is away from or close to the wafer basket 22 on the substrate 21, thereby providing a foundation for the robot arm 300 to pick and place the wafer basket 22 or a wafer in the lid. As shown in fig. 11, a carrying box 230 is connected to the lower portion of the box cover supporting frame 220, the carrying box 230 includes a bottom plate 231, two side plates 232 and a front plate 233, the front plate 233 is located in front of the window of the equipment frame 100, the two side plates 232 are respectively located at two opposite sides of the bottom plate 231, the top ends of the two side plates 232 and the front plate 233 are connected to the box cover supporting frame 220, and the bottom plate 231 is provided with a connecting plate 234 for connecting to the lifting driving mechanism i. As the lid support 220 is lifted, the carrying box 230 is lifted to surround or be away from the loading platform 210, that is, when the lid support 220 is lifted to the lid 23 and is completely separated from the wafer basket 22, the carrying box 230 is lifted to the loading platform 210 and is located in the carrying box 230, and the wafer basket 22 is also located in the carrying box 230, at this time, the opening of the carrying box 230 is communicated with the window of the equipment frame 100, and the robot arm 300 extends into the carrying box 230 and takes and places the wafer basket 22 or the wafer; when the lid support frame 220 descends until the lid 23 completely covers the wafer basket 22, the carrying box 230 descends away from the loading platform 210.
In order to enable the wafer basket 22 to be in a clean environment, the carrying box 230 is connected with a gas filtering device I, the gas filtering device I conveys horizontal laminar flow gas into the carrying box 230, the wafer basket 22 is ensured to be in a positive pressure environment, the air flow of micro particles possibly existing outside is prevented from entering, secondary pollution is prevented, and meanwhile, gas parallel to the surface of the wafer in the wafer basket 22 is blown to the surface of the wafer in the wafer basket 22, so that the micro particles cannot fall on the wafer even if being generated. Specifically, the gas filtering device I comprises a fan I410, and a filtering box I411 is arranged between the fan I410 and the bearing box 230 to filter external gas. The air filtering device i may be disposed below the carrying case 230, and an air flow passage is provided in the carrying case 230 so that the filtered air flow is delivered toward the opposite side by the front plate 233.
When the wafer basket 22 is separated from the lid 23, although it is located in the vertical space formed by the lid 23, the lid support frame 220 and the carrying box 230, there is still a gap with the window of the equipment frame in the horizontal direction, in order to improve the sealing degree, one side of the lid support frame 220 close to the equipment frame 100 is connected with a sealing door 221, that is, the side opposite to the front plate 233 is connected with a sealing door 221, the sealing door 221 is arranged above the lid support frame 220, so as to be lifted synchronously with the lid support frame 220 to be away from or cover the window of the equipment frame 100, that is, when the lid support frame 220 is located at the initial position, the sealing door 221 covers the window of the equipment frame 100; when the box cover supporting frame 220 rises, the sealing door 221 rises synchronously, so that the window of the equipment frame 100 is opened synchronously, the space in the equipment frame 100 is ensured to be sealed all the time, external pollution is prevented from entering, meanwhile, the sealing door and the driving mechanism share one driving mechanism, the reduction of the volume of the equipment is facilitated, the opening and closing of the window and the opening and closing of the SMIF box 2 are ensured to be synchronous, and the loading efficiency is further improved. The equipment frame 100 may be provided with a limiting groove, and the sealing door 221 is lifted in the limiting groove, so that the sealing door 221 is kept attached to the window of the equipment frame 100, and the inclination of the sealing door is avoided.
In order to ensure that the box cover 23 is not mistakenly taken away in the process of lifting along with the box cover support frame 220, the box cover support frame 220 is further provided with a protective frame 222 and a latch mechanism 223, the protective frame 222 is used for positioning the box cover 23 and limiting the horizontal movement of the box cover 23, and the latch mechanism 223 is used for locking the box cover 23 on the box cover support frame 220 so as to limit the upward movement of the box cover 23 relative to the box cover support frame 220. Specifically, as shown in fig. 9, in the present embodiment, two protection frames 222 are oppositely disposed on the front and rear sides of the box cover support frame 220, the protection frames 222 are U-shaped, and the latch mechanism 223 is disposed in the protection frames 222. As shown in fig. 12, the latch mechanism 223 includes a latch plate 2231, a rotating shaft i 2232 is connected below the latch plate 2231, a holding block 2233 is arranged on the circumferential direction of the rotating shaft i 2232, one end of the holding block 2233 is hinged to a connecting rod assembly, the connecting rod assembly drives the rotating shaft i 2232 connected with the holding block 2233 to rotate through a driving part, the rotating shaft i 2232 drives the latch plate 2231 to rotate and abut against or be away from the outer convex edge 23-1 of the box cover 23, so as to lock or unlock the box cover 23, and the precision is high and the structure is simple. The driving piece can adopt a linear motor or a cylinder. The connecting rod assembly comprises a connecting rod I2234 and a connecting rod II 2235 which are hinged in sequence, one end of the holding block 2233 is hinged with the connecting rod I2234, the other end of the connecting rod I2234 is hinged with the connecting rod II 2235, and the other end of the connecting rod II 2235 is connected with a driving part.
A wafer protrusion sensor 224 and a wafer basket position sensor i 225 may be provided at appropriate locations on the carrier 230 to detect the condition of the wafer within the SMIF pod 2 and the condition of the wafer basket 22 as the carrier 230 is raised and lowered. The side of the cassette cover support frame 220 may also be provided with a Mapping sensor, so as to detect the state of the wafer along with the rise of the cassette cover support frame 220.
Disposed within the apparatus frame 100 is a robot 300, wherein the robot 300 is configured to move an end effector 330 at its end vertically and horizontally to enter and exit the SMIF pod 2 and to pick and place wafers 22. In this embodiment, adopt SCARA type robot arm, reduced the required space of equipment for traditional articulated robot arm. Specifically, as shown in fig. 7 and 8, the robot arm 300 includes a body 310, an arm 320, and an end effector 330. The body 310 is arranged in the shell 311, a stage 315 is arranged in the body 310, the stage 315 is connected with a lifting driving mechanism II, so that the robot arm 300 can be lifted, a cylinder 316 is arranged above the stage 315, the cylinder 316 is connected with a rotary driving mechanism I, so that the robot arm 300 can rotate, an arm 320 is arranged on the cylinder 316, the arm 320 comprises a lower arm 321 and an upper arm 322 which are hinged end to end, horizontal movement is achieved, and an end effector 330 is arranged on the upper arm 322.
The lifting driving mechanism II comprises a driving motor II 312, the driving end of the driving motor II 312 is connected with a lead screw I314 through a synchronous pulley transmission assembly 313, a guide rail is arranged in the shell 311 along the height direction of the shell, a sliding block connected with a nut of the lead screw I314 is connected onto the guide rail in a sliding mode, and the sliding block is connected with a carrier 315, so that the carrier 315 is lifted.
In the embodiment, the end effector 330 is configured to pick and place the wafer basket 22, but other end effectors 330 may be used to pick and place the wafer. As shown in fig. 7, in the present embodiment, the end effector 330 is connected to the upper arm 322 through a base 331, and a back plate 332 is vertically disposed on the substrate 21. As shown in fig. 5, the back plate 332 is provided with two holding jaws 333 and a rotation driving mechanism ii for rotating the two holding jaws 333. The distance between the two clamping jaws 333 is matched with the distance between the two handles 22-1 on the wafer basket 22, so that the handles 22-1 on the wafer basket 22 can be grabbed by adopting a direct rotating mode, the wafer basket 22 can be lifted, the horizontal telescopic clamping jaws 333 are not needed, the stability of the transfer operation after grabbing is improved, and the telescopic space in the horizontal direction is not needed. Specifically, the clamping jaw 333 and the rotary driving mechanism ii are respectively disposed on both sides of the back plate 332. The clamping jaw 333 includes a rotating shaft ii 3331, one end of the rotating shaft ii 3331 penetrates through the back plate 332 to connect with the rotation driving mechanism ii, the rotating shaft ii 3331 is connected with a hook 3332, the rotating shaft ii 3331 drives the hook 3332 to rotate under the driving of the rotation driving mechanism ii, and inserts or extracts the handle 22-1, so as to lift the wafer basket 22 along with the rising of the body 310. As shown in fig. 6, the rotation driving mechanism ii includes a linear driving assembly, two connecting rod transmission structures are symmetrically disposed on two sides of a driving end of the linear driving assembly, in this embodiment, the driving end of the linear driving assembly is hinged to the head end of the four connecting rod assembly, and the tail end of the linear driving assembly is connected to the rotating shaft ii 3331, so as to drive the rotating shaft ii 3331 to rotate under the driving of the linear driving assembly. The linear driving assembly comprises a driving motor III 3321, a driving shaft of the driving motor III 3321 is connected with a lead screw II 3322, a guide rail II 3324 is arranged on the back plate 332 along the height direction of the back plate, a sliding block II 3323 is arranged on the guide rail II 3324 in a sliding mode, the sliding block II 3323 is connected with a nut on the lead screw II 3322, the sliding block II 3323 is the driving end of the linear driving assembly, two four-link transmission assemblies are symmetrically arranged on the two sides of the sliding block II 3323, and therefore the two four-link transmission assemblies move up and down along with the sliding block II 3323 and move symmetrically synchronously. The four-connecting-rod transmission assembly comprises a swing rod I3325, a swing rod II 3326, a swing rod III 3327 and a swing rod IV 3328, two ends of the swing rod I3325 are hinged to the driving end of the linear driving assembly and the middle section of the swing rod II 3326 respectively, the head end of the swing rod II 3326 is hinged to the back plate 332, the tail end of the swing rod II 3326 is hinged to the head end of the swing rod III 3327, the tail end of the swing rod III 3327 is hinged to the head end of the swing rod IV 3328, the tail end of the swing rod IV 3328 is connected with a rotating shaft II 3331, generally speaking, the tail end of the swing rod IV 3328 is fixed to the end of the rotating shaft II 3331, so that the sliding block II 3323 is driven to move up and down through the driving motor III 3321, the sliding block II 3323 drives the rotating shaft II 3331 to rotate through the four-connecting-rod transmission assembly, and the rotation of the hook claw 3332 is further realized.
The end effector 330 is provided with a fixing seat 3333, that is, a fixing seat 3333 is provided on the back plate 332, the fixing seat 3333 and the rotating shaft ii 3331 are located on the same side of the back plate 332, and are arranged in parallel, one end of the rotating shaft ii 3331 is connected with the rotary driving mechanism ii, and the other end of the rotating shaft ii 3331 is connected with the rotation of the fixing seat 3333, so that the levelness of the rotating shaft ii 3331 is improved through the fixing seat 3333, and the inclination deviation of one end of the rotating shaft ii 3331 away from the rotary driving mechanism ii is avoided.
In order to improve the stability of grabbing the wafer basket 22, the end effector 330 is provided with a wafer basket in-place sensor ii 3329, the wafer basket in-place sensor ii 3329 is fixed on the back plate 332, and the wafer basket in-place sensor ii 3329 is provided with two clamping jaws 333 and is located below the two clamping jaws 333 respectively, so that the clamping jaws 333 are further rotated after the wafer basket 22 is detected.
The anti-collision sensor 3334 may be further disposed above the clamping jaw 333, and in this embodiment, the fixing seat 3333 and the clamping jaw 333 are disposed side by side and located on the same horizontal plane, so that the anti-collision sensor 3334 is disposed at the top end of the fixing seat 3333, thereby preventing the robot arm 300 from ascending to cause the top end of the end effector 330 to collide with other devices.
In order to ensure the air solution in the equipment frame 100, the top end of the equipment frame 100 is provided with an air filtering device II, and the air filtering device II conveys the laminar air vertically downwards into the equipment frame 100. Specifically, the air filtering device II comprises a fan II 420, a filtering box II 421 is arranged between the fan II 420 and the equipment frame 100 to filter external air, and the fan II 420 conveys air flow from top to bottom into the equipment frame 100.
In summary, the sealing door is arranged on the box cover supporting frame, the sealing door is driven by the lifting driving mechanism I along with the box cover supporting frame to lift along the height direction of the equipment frame so as to cover or be far away from the window of the equipment frame, so that the space in the equipment frame is always sealed, external pollution is avoided, meanwhile, the sealing door and the box cover supporting frame share one driving mechanism, the size of the equipment is favorably reduced, the opening and closing of the window and the opening and closing of the SMIF box are ensured to be synchronous, and the loading efficiency is improved.
Furthermore, it is to be understood that the described embodiments are merely illustrative of some, and not restrictive, of the current invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Claims (10)
1. The utility model provides a box equipment that loads of SMIF, its characterized in that includes the equipment frame, the place ahead of equipment frame is provided with the device that opens and shuts, the device that opens and shuts is used for bearing and switching SMIF box, the inside of equipment frame is provided with robot arm, robot arm's end is provided with end effector, robot arm is used for driving end effector is perpendicular and horizontal migration, in order to pass in and out SMIF box and get and put the wafer basket of flowers.
2. The SMIF pod loading apparatus of claim 1 wherein the robotic arm is a SCARA-type robotic arm.
3. The SMIF pod loader of claim 1 wherein the end effector is provided with two jaws and a rotary drive mechanism ii for rotating the two jaws, the spacing of the two jaws being adapted to the spacing of the two handles on the wafer basket for insertion or removal of the handles.
4. The SMIF pod loading apparatus of claim 3 wherein the rotary drive ii is connected to the clamping jaws via a linkage drive arrangement.
5. The SMIF box loading device according to claim 3, wherein the clamping jaw comprises a rotating shaft II, a hook claw is connected to the rotating shaft II, and the rotating shaft II drives the hook claw to rotate under the driving of a rotating driving mechanism II and inserts or extracts the handle.
6. The SMIF pod loading apparatus according to claim 5, wherein the end effector is provided with a mounting base, and wherein the second shaft is rotatably connected at one end to the second rotary drive mechanism and at the other end to the mounting base.
7. A SMIF pod loading apparatus according to any one of claims 1 to 6, wherein the opening and closing device comprises a loading station for carrying a substrate and a wafer basket of a SMIF pod, and the opening and closing device further comprises a lid support for supporting a lid of the SMIF pod, the loading station being disposed within the lid support and connected to the apparatus frame, the lid support being driven by the lift drive mechanism I to move the lid up and down, a load carrying box being connected to the underside of the lid support, a sealing door being connected to the side of the lid support adjacent to the apparatus frame and being adapted to move up and down with the lid support to surround or cover the loading station, and the sealing door being adapted to move up and down to cover a window of the apparatus frame.
8. The SMIF pod loading apparatus of claim 7 wherein the apparatus frame is provided with a limit groove in which the sealing door is raised and lowered.
9. The SMIF pod loading apparatus of claim 7, wherein the carrier box is connected to a gas filter i, the gas filter i delivering horizontally laminar flow gas into the carrier box; and/or a gas filtering device II is arranged at the top end of the equipment frame, and the gas filtering device II conveys laminar gas vertically downward into the equipment frame.
10. The SMIF box loading device according to claim 7, wherein a latch mechanism for locking the box cover is arranged on the box cover support frame, the latch mechanism comprises a latch plate, a rotating shaft I is connected to the lower portion of the latch plate, a holding block is arranged on the periphery of the rotating shaft I, one end of the holding block is hinged to a connecting rod assembly, the connecting rod assembly drives the rotating shaft I connected with the holding block to rotate through a driving piece, and the rotating shaft I drives the latch plate to rotate and abut against or keep away from an outer convex edge of the box cover so as to lock or unlock the box cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211238661.9A CN115424968A (en) | 2022-10-11 | 2022-10-11 | SMIF box loading equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211238661.9A CN115424968A (en) | 2022-10-11 | 2022-10-11 | SMIF box loading equipment |
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| Publication Number | Publication Date |
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| CN115424968A true CN115424968A (en) | 2022-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211238661.9A Pending CN115424968A (en) | 2022-10-11 | 2022-10-11 | SMIF box loading equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117174629A (en) * | 2023-11-02 | 2023-12-05 | 南昌中微半导体设备有限公司 | Tray carrier and SMIF pod loading apparatus |
-
2022
- 2022-10-11 CN CN202211238661.9A patent/CN115424968A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117174629A (en) * | 2023-11-02 | 2023-12-05 | 南昌中微半导体设备有限公司 | Tray carrier and SMIF pod loading apparatus |
| CN117174629B (en) * | 2023-11-02 | 2024-04-19 | 南昌中微半导体设备有限公司 | Tray carrier and SMIF pod loading apparatus |
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