CN209029348U - A kind of gaily decorated basket and wafer for wet process equipment automatically transports transmission mechanism - Google Patents
A kind of gaily decorated basket and wafer for wet process equipment automatically transports transmission mechanism Download PDFInfo
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- CN209029348U CN209029348U CN201821917749.2U CN201821917749U CN209029348U CN 209029348 U CN209029348 U CN 209029348U CN 201821917749 U CN201821917749 U CN 201821917749U CN 209029348 U CN209029348 U CN 209029348U
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Abstract
The utility model relates to a kind of gailys decorated basket for wet process equipment and wafer automatically to transport transmission mechanism, including single flower basket vertical type spinner, anticorrosion framework, electric cylinders load carrier, turn to positioning mechanism, gaily decorated basket clamping device, gaily decorated basket load carrier, single flower basket vertical type spinner adjusts foot by spinner angle and is mounted on anticorrosion framework, electric cylinders load carrier is provided on front side of single flower basket vertical type spinner, electric cylinders load carrier is mounted on anticorrosion framework by electric cylinders hold-down support and electric cylinders adjustable seats, steering positioning mechanism is installed on the electric cylinders slide unit of electric cylinders load carrier, gaily decorated basket clamping device, electric cylinders slide unit, which drives, turns to positioning mechanism, gaily decorated basket clamping device makees front and back transmission, gaily decorated basket load carrier Liftable type is mounted on anticorrosion framework；The utility model compared with the existing technology, solves full-automatic transhipment and transmission of the single flower basket between wet process processing procedure slot and spinner, ensure that the process requirement of gaily decorated basket dry-in dry-out, and then ensure that the yield of wafer.
Description
[technical field]
The utility model relates to wet process equipment technical field, specifically a kind of gaily decorated basket for wet process equipment and
Wafer automatically transports transmission mechanism.
[background technique]
In LED and semicon industry, equipment of the wet process equipment as a kind of batch type processing wafer, be widely used and at
It is ripe.The common size of wafer generally has 2 "/4 "/6 "/8 "/12 " or even 16 ", and wafer thickness is generally between 650~850 μm.?
Wafer fabrication, wafer need the process flow of two to three months, complete 450 or more processing steps, integrate
Tens arrive a certain chips up to ten thousand, in manufacturing process end, one single chip are separated from wafer, is then packaged as finally producing
Product.Estimate it can be seen that the cost of single-wafer is far super, especially in back segment packaging technology, if entirety can not influenced
Under the premise of production capacity, more raising device intelligence degree reduces the number of artificial contact wafer, avoid it is uncontrollable because
Element is further ensured that product cleanliness and rate of putting on record, this will generate huge economic benefit to wafer production manufacturer.Based on this,
How wet process equipment more intelligent, inexpensive, that stability is high is provided, strives for the core competitiveness of wet process equipment, is
The direction that each device manufacturer makes great efforts.
Wet process equipment is divided into hand/semi and three kinds full-automatic according to the difference of degree of intelligence；According to shipment shape
State is divided into dry-in dry-out and does into wet two kinds out.As human cost is higher and higher, intelligent demand is more and more big, efficiency and
Purity requirements are higher and higher, and full-automatic dry-in dry-out equipment gradually occupies the staple market of wet process equipment.It is conventional it is complete from
Dynamic dry-in dry-out wet process equipment, is carried by full-automatic mechanical arm, is realized the manufacturing process switching of the gaily decorated basket in a device, is matched
It closes spinner or the modes such as IPA drying or kalimeris lattice Buddhist nun are dry, realizes the gaily decorated basket and wafer dry-in dry-out processing procedure.In this process
In, usually perhaps honeysuckle basket is run simultaneously in such a way that mechanical arm directly clamps the gaily decorated basket or special carrier single flower basket,
It is carried；And drying mode is cooperated to realize dry-in dry-out.
Currently used three kinds of drying modes: 1. spinner utilizes high-speed rotating mechanical centrifugal according to bernoulli principle
Power cooperates clean gas flow, the water droplet of crystal column surface is spin-dried for.Spinner technical maturity, it is low in cost, drying time it is short (about 6~
8 minutes), it is high-efficient.2. IPA is dry to be based on Marangoni effect, using the environment of high temperature and pressure, volatilize IPA vapor, passes through
IPA and DI surface differential take away the water droplet of crystal column surface, reheat evaporation surface IPA.This drying mode requires high pressure
The environment of high temperature not only increases chemical cost, but also flash-point is low, and harm is big, gradually by market.3. kalimeris lattice Buddhist nun is dry
It is dry to be equally based on Marangoni effect, IPA film is formed on the surface DI, takes away crystal column surface during Slow Drain
Water droplet, then finally dried by high-cleanness hot nitrogen.This drying mode cleanliness is high, and chemicals usage is few, but at
This is high, and drying time is long (10~30 minutes), and wafer and gaily decorated basket contact portion are difficult drying thoroughly.
In summary, automatically the wet process equipment of collocation spinner is increasingly becoming mainstream applications.For the system of honeysuckle basket
Journey equipment, directly carrying horizontal spinner, are embedded in wet process equipment, pass through the mechanical arm shared with wet process
Realize the full-automatic carrying of the gaily decorated basket and wafer.But it is directed to the process apparatus of single flower basket, because spinner for centrifugal force and moves flat
The particular/special requirement of weighing apparatus, the most of single flower basket spinner being applied at present is vertical type spinner, is spin-dried for rotor and horizontal plane
The angle for forming about 5~10 °, guarantees during being spin-dried at a high speed, single flower basket and wafer will not be thrown away by centrifugation, also can guarantee
Preferable balance, reduces fragmentation risk.But single flower basket vertical type spinner is embedded in wet process equipment, can not just set with wet process
It is standby to share a set of mechanical arm, realize the full-automatic carrying of the gaily decorated basket and wafer.
For cooperating the wet process equipment of single flower basket vertical type spinner at present, after wet process equipment processing procedure
By being manually placed into single flower basket vertical type spinner, after wet process equipment processing procedure the gaily decorated basket and wafer can only be do into it is wet go out
State, can not effectively accomplish dry-in dry-out, while there is also artificial uncontrollable factors, may cause Particle increase, shadow
Ring production capacity and product yield.
Therefore, how the gaily decorated basket and the chip seamless delivery in equipment after the completion of wet process to be spin-dried for single flower basket vertical type
Inside machine rotor, and after completing to be spin-dried for processing procedure, the gaily decorated basket and wafer are smoothly smoothly fetched into the region of unloading goods of wet process equipment,
Guarantee that the gaily decorated basket that processing procedure terminates and wafer keep dry state, and guarantee intelligence and the cleanliness of entire processing procedure process, then
It is to need further to solve the problems, such as.
[utility model content]
The purpose of this utility model seek to solve above-mentioned deficiency and provide a kind of gaily decorated basket for wet process equipment and
Wafer automatically transports transmission mechanism, solves full-automatic transhipment and biography of the single flower basket between wet process processing procedure slot and spinner
It send, ensure that the process requirement of gaily decorated basket dry-in dry-out, and then ensure that the yield of wafer, saved manpower.
A kind of gaily decorated basket for wet process equipment is designed to achieve the above object and wafer automatically transports transmission mechanism, is wrapped
It includes single flower basket vertical type spinner 1, anticorrosion framework 2, electric cylinders load carrier 3, turn to positioning mechanism 4, gaily decorated basket clamping device 5, flower
Basket load carrier 6, the single flower basket vertical type spinner 1 adjust foot 18 by spinner angle and are mounted on anticorrosion framework 2, institute
State the tilt angle that spinner angle adjustment foot 18 is used to adjust single flower basket vertical type spinner 1, the single flower basket vertical type rotation
Electric cylinders load carrier 3 is provided on front side of dry machine 1, the electric cylinders load carrier 3 is adjustable by electric cylinders hold-down support 31 and electric cylinders
Support 32 is mounted on anticorrosion framework 2, and the electric cylinders adjustable seats 32 are used to adjust the tilt angle of electric cylinders load carrier 3, institute
It states to be equipped on the electric cylinders slide unit of electric cylinders load carrier 3 and turns to positioning mechanism 4, gaily decorated basket clamping device 5, the steering positioning mechanism
4 drive gaily decorated basket clamping device 5 to make 90 ° of rotations, and the gaily decorated basket clamping device 5 is for clamping the gaily decorated basket and wafer 7, the electric cylinders slide unit
It drives and turns to positioning mechanism 4, the front and back transmission of the work of gaily decorated basket clamping device 5, be provided with flower on the left of the single flower basket vertical type spinner 1
Basket load carrier 6,6 Liftable type of gaily decorated basket load carrier are mounted on anticorrosion framework 2.
Further, the anticorrosion framework 2 is leveled using the welding of SUS stainless steel tube, 2 surface of the anticorrosion framework packet
It is covered with anti-corrosion PP plate, 2 top surface of anticorrosion framework is equipped with pad pasting aluminium sheet 23, and 2 bottom end of anticorrosion framework is equipped with lower margin 21
And universal wheel 22.
Further, the single flower basket vertical type spinner 1 includes being spin-dried for machine base 11, spinner automatically-controlled door 12, being spin-dried for
Machine switch door cylinder 13, spinner motor 14 are spin-dried for machine rotor 15, machinery positioning hole 16, spinner shell 17, spinner angle
Foot 18 is adjusted, the machine base 11 that is spin-dried for is connected with the pad pasting aluminium sheet of anticorrosion framework 2, and the spinner shell 17 passes through spinner
Angle adjustment foot 18, which is mounted on, to be spin-dried on machine base 11, and 17 side of spinner shell is equipped with spinner motor 14, described
It is equipped in spinner shell 17 and is spin-dried for machine rotor 15, the machine rotor 15 that is spin-dried for is connected with the output end of spinner motor 14, institute
It states and is spin-dried for being provided with machinery positioning hole 16 on machine rotor 15, the opening of the spinner shell 17 is installed with spinner automatically-controlled door
12, the spinner automatically-controlled door 12 is connected with the piston end of spinner switch door cylinder 13, and the spinner automatically-controlled door 12 passes through
Spinner switchs 13 automatic shutter of door cylinder.
Further, the mounting hole being spin-dried on machine base 11 is set as waist-shaped hole, and the single flower basket vertical type is spin-dried for
Machine 1 adjusts front-rear position by waist-shaped hole.
Further, it the spinner shell 17, spinner motor 14 and is spin-dried for being provided between machine base 11 and is spin-dried for
Machine cushion 19, discharge outlet is offered on the spinner shell 17, and the discharge outlet connects spinner drainpipe 20.
Further, the electric cylinders load carrier 3 includes electric cylinders ontology 33, electric cylinders slide unit 34, electric cylinders motor 36, the electricity
Cylinder ontology 33 is mounted on the pad pasting aluminium sheet 23 of anticorrosion framework 2 by electric cylinders hold-down support 31 and electric cylinders adjustable seats 32, institute
It states electric cylinders adjustable seats 32 to be used to guarantee that the inclined angle of electric cylinders ontology 33 is consistent with 15 tilt angle of machine rotor is spin-dried for, the electricity
Cylinder slide unit 34 is set on electric cylinders ontology 33, and 34 side of electric cylinders slide unit is installed with alignment sensor 35, the electric cylinders ontology 33
Bottom end is equipped with electric cylinders motor 36, is provided with cable-pulling chain 37 at the electric cylinders motor 36.
Further, the gaily decorated basket load carrier 6 includes lifting cylinder 61, gaily decorated basket carrier 62, cylinder saddle 63, described
The lift side of lifting cylinder 61 is equipped with gaily decorated basket carrier 62, and the lifting cylinder 61 is mounted on anti-corrosion bone by cylinder saddle 63
On frame 2,63 back side of cylinder saddle is equipped with air duct mechanism 64, and the air duct mechanism 64 is for doing gaily decorated basket gripper
Dry, the gaily decorated basket carrier 62 uses Openworks shape.
Further, the steering positioning mechanism 4 includes bearing erection support 41, motor 42, speed reducer 43, the motor
42, speed reducer 43 is locked on bearing erection support 41, and the motor 42 changes gaily decorated basket direction, the bearing installation by rotation
It is installed with above support 41 and turns to positioning inductor 44, the bearing erection support 41 is mounted on electric cylinders slide unit by hold-down support
On 34.
Further, the gaily decorated basket clamping device 5 includes duplex bearing mechanism 51, locking nut 52, turns to sensing chip 53, turns
The synchronous gripper cylinder 56 of axis 54, gaily decorated basket gripper 55, sliding rail type, the duplex bearing mechanism 51 are mounted on steering by locking nut 52
In the bearing erection support 41 of positioning mechanism 4, the duplex bearing mechanism 51 is connected by shaft 54 with 43 output shaft of speed reducer, institute
It states 54 side of shaft and is provided with steering sensing chip 53, the gaily decorated basket gripper 55 is mounted on the flexible of the synchronous gripper cylinder 56 of sliding rail type
End, the gaily decorated basket gripper 55 is for gripping or releasing the gaily decorated basket.
Further, the gaily decorated basket clamping device 5 passes through guide-localization axis 57 and the machinery positioning hole for being spin-dried for machine rotor 15
16 cooperations, 57 rear of guide-localization axis are equipped with one-way cylinder 58, and the one-way cylinder 58 is mounted on cylinder saddle 59,
The one-way cylinder 58 turns to sensing chip 53 by connection.
The utility model compared with the existing technology, provides a kind of based between wet process equipment and embedded spinner
Cassette automatically transports transmission mechanism, which is applied in full-automatic wet process equipment, realizes cassette in processing procedure
Full-automatic transmission between slot and embedded spinner realizes that client's function is integrated, demand of dry-in dry-out, ensure that wafer
Yield has saved manpower, solves full-automatic transhipment and transmission of the single flower basket between wet process processing procedure slot and spinner, ensure that
The process requirement of gaily decorated basket dry-in dry-out；Meanwhile mechanism intelligence degree described in the utility model is higher, functional integration is stronger,
Artificial equal uncontrollable factors are avoided, Particle is avoided and introduces risk, be effectively guaranteed product yield and product production capacity,
Product cost and manpower consumption are reduced, is worthy of popularization.
[Detailed description of the invention]
Fig. 1 is the schematic perspective view of the utility model；
Fig. 2 is the structural schematic diagram of single flower basket vertical type spinner and anticorrosion framework in the utility model；
Fig. 3 is the side structure schematic diagram of Fig. 2；
Fig. 4 is the structural schematic diagram of electric cylinders load carrier and anticorrosion framework in the utility model；
Fig. 5 is the overlooking structure diagram of Fig. 4；
Fig. 6 is the structural schematic diagram of gaily decorated basket load carrier and anticorrosion framework in the utility model；
Fig. 7 is the overlooking structure diagram of Fig. 6；
Fig. 8 is the structural schematic diagram of gaily decorated basket load carrier in Fig. 6；
Fig. 9 is the overlooking structure diagram of Fig. 8；
Figure 10 is the structural schematic diagram that positioning mechanism is turned in the utility model；
Figure 11 is the overlooking structure diagram of Figure 10；
Figure 12 is the structural schematic diagram of gaily decorated basket clamping device in the utility model；
Figure 13 is the overlooking structure diagram of Figure 12；
In figure: 1, single flower basket vertical type spinner 2, anticorrosion framework 3, electric cylinders load carrier 4, turn to positioning mechanism 5,
Gaily decorated basket clamping device 6, gaily decorated basket load carrier 7, the gaily decorated basket and wafer 11 are spin-dried for machine base 12, spinner automatically-controlled door 13, rotation
Dry machine switch door cylinder 14, spinner motor 15 are spin-dried for machine rotor 16, machinery positioning hole 17, spinner shell 18, rotation
Dry machine angle adjusts foot 19, spinner cushion 20, spinner drainpipe 21, lower margin 22, universal wheel 23, pad pasting aluminium sheet
31, electric cylinders hold-down support 32, electric cylinders adjustable seats 33, electric cylinders ontology 34, electric cylinders slide unit 35, alignment sensor 36, electric cylinders
Motor 37, bearing erection support 42, motor 43, speed reducer 44, turns to positioning inductor 45, is lateral cable-pulling chain 41
Support base 51, locking nut 53, turns to sensing chip 54, shaft 55, gaily decorated basket gripper 56, sliding rail type at duplex bearing mechanism 52
Synchronous gripper cylinder 57, guide-localization axis 58, one-way cylinder 59, cylinder saddle 61, lifting cylinder 62, gaily decorated basket carrier
63, cylinder saddle 64, air duct mechanism.
[specific embodiment]
The utility model is made with reference to the accompanying drawing further explained below:
As shown in the picture, the utility model provides a kind of gaily decorated basket for wet process equipment and wafer automatically transports biography
Transfer mechanism, including single flower basket vertical type spinner 1, anticorrosion framework 2, electric cylinders load carrier 3, steering positioning mechanism 4, gaily decorated basket clamping
Mechanism 5, gaily decorated basket load carrier 6, single flower basket vertical type spinner 1 adjust foot 18 by spinner angle and are mounted on anticorrosion framework 2
On, spinner angle adjustment foot 18 is used to adjust the tilt angle of single flower basket vertical type spinner 1, single flower basket vertical type spinner
1 front side is provided with electric cylinders load carrier 3, and electric cylinders load carrier 3 is pacified by electric cylinders hold-down support 31 and electric cylinders adjustable seats 32
On anticorrosion framework 2, electric cylinders adjustable seats 32 are used to adjust the tilt angle of electric cylinders load carrier 3, electric cylinders load carrier 3
It is equipped on electric cylinders slide unit and turns to positioning mechanism 4, gaily decorated basket clamping device 5, turned to positioning mechanism 4 and gaily decorated basket clamping device 5 is driven to make
90 ° of rotations, for gaily decorated basket clamping device 5 for clamping the gaily decorated basket and wafer 7, electric cylinders slide unit, which drives, turns to positioning mechanism 4, gaily decorated basket clamping machine
Structure 5 makees front and back transmission, is provided with gaily decorated basket load carrier 6,6 liftable of gaily decorated basket load carrier on the left of single flower basket vertical type spinner 1
Formula is mounted on anticorrosion framework 2, which is leveled using the welding of SUS stainless steel tube, 2 surface of anticorrosion framework cladding
There is anti-corrosion PP plate, 2 top surface of anticorrosion framework is equipped with pad pasting aluminium sheet 23, and 2 bottom end of anticorrosion framework is equipped with lower margin 21 and universal wheel 22.
Wherein, single flower basket vertical type spinner 1 includes being spin-dried for machine base 11, spinner automatically-controlled door 12, spinner switch gate
Cylinder 13, spinner motor 14 are spin-dried for machine rotor 15, machinery positioning hole 16, spinner shell 17, spinner angle adjustment foot
18, it is spin-dried for machine base 11 and is connected with the pad pasting aluminium sheet of anticorrosion framework 2, spinner shell 17, which adjusts foot 18 by spinner angle, pacifies
Mounted in being spin-dried on machine base 11,17 side of spinner shell is equipped with spinner motor 14, is equipped with and is spin-dried in spinner shell 17
Machine rotor 15 is spin-dried for machine rotor 15 and is connected with the output end of spinner motor 14, is spin-dried for being provided with machinery positioning hole on machine rotor 15
16, the opening of spinner shell 17 is installed with spinner automatically-controlled door 12, and spinner automatically-controlled door 12 and spinner switch door cylinder
13 piston end is connected, and spinner automatically-controlled door 12 switchs 13 automatic shutter of door cylinder by spinner；It is spin-dried on machine base 11
Mounting hole is set as waist-shaped hole, and single flower basket vertical type spinner 1 adjusts front-rear position by waist-shaped hole；Spinner shell 17, rotation
It does electromechanics machine 14 and is spin-dried for being provided with spinner cushion 19 between machine base 11, draining is offered on spinner shell 17
Mouthful, discharge outlet connects spinner drainpipe 20.
In the utility model, electric cylinders load carrier 3 includes electric cylinders ontology 33, electric cylinders slide unit 34, electric cylinders motor 36, electric cylinders sheet
Body 33 is mounted on the pad pasting aluminium sheet 23 of anticorrosion framework 2 by electric cylinders hold-down support 31 and electric cylinders adjustable seats 32, and electric cylinders can
Adjust support 32 for guaranteeing that the inclined angle of electric cylinders ontology 33 is consistent with 15 tilt angle of machine rotor is spin-dried for, electric cylinders slide unit 34 is set to
On electric cylinders ontology 33,34 side of electric cylinders slide unit is installed with alignment sensor 35, and 33 bottom end of electric cylinders ontology is equipped with electric cylinders motor 36,
Cable-pulling chain 37 is provided at electric cylinders motor 36.Gaily decorated basket load carrier 6 includes lifting cylinder 61, gaily decorated basket carrier 62, cylinder branch
Seat 63, the lift side of lifting cylinder 61 are equipped with gaily decorated basket carrier 62, and lifting cylinder 61 is mounted on anti-corrosion by cylinder saddle 63
On skeleton 2,63 back side of cylinder saddle is equipped with air duct mechanism 64, and air duct mechanism 64 is for being dried gaily decorated basket gripper, the gaily decorated basket
Carrier 62 uses Openworks shape.
In the utility model, turn to positioning mechanism 4 include bearing erection support 41, motor 42, speed reducer 43, motor 42,
Speed reducer 43 is locked on bearing erection support 41, and motor 42 changes gaily decorated basket direction, 41 top of bearing erection support by rotation
It is installed with and turns to positioning inductor 44, bearing erection support 41 is mounted on electric cylinders slide unit 34 by hold-down support.Gaily decorated basket clamping
Mechanism 5 includes duplex bearing mechanism 51, locking nut 52, turns to the synchronous folder of sensing chip 53, shaft 54, gaily decorated basket gripper 55, sliding rail type
Cylinder 56 is held, duplex bearing mechanism 51 is mounted in the bearing erection support 41 for turning to positioning mechanism 4 by locking nut 52, twin shaft
It holds mechanism 51 to be connected by shaft 54 with 43 output shaft of speed reducer, 54 side of shaft, which is provided with, turns to sensing chip 53, gaily decorated basket gripper
55 are mounted on the telescopic end of the synchronous gripper cylinder 56 of sliding rail type, and gaily decorated basket gripper 55 is for gripping or releasing the gaily decorated basket, the gaily decorated basket
Clamping device 5 is cooperated by guide-localization axis 57 with the machinery positioning hole 16 for being spin-dried for machine rotor 15,57 rear of guide-localization axis peace
Equipped with one-way cylinder 58, one-way cylinder 58 is mounted on cylinder saddle 59, and one-way cylinder 58 turns to sensing chip by connection
53。
The utility model is automatically to transport transmission mechanism based on Cassette between wet process equipment and embedded spinner,
Applied to the full-automatic mechanical arm and single flower basket vertical type spinner in full-automatic wet process equipment, cooperating wet process equipment,
It realizes that gaily decorated basket Cassette and wafer wafer is transported in the position of processing procedure slot and spinner to transmit.The mechanism includes that single flower basket is straight
Vertical spinner, anticorrosion framework, electric cylinders load carrier, steering positioning mechanism, gaily decorated basket clamping device, gaily decorated basket load carrier etc., lead to
The mutual cooperation of each mechanism is crossed, realizes transhipment transmitting function.
Wherein, anticorrosion framework is coated corrosion-resistant PP plate, is cooperated lower margin and ten thousand using the welding leveling of SUS stainless steel tube, surface
To wheel, easy to carry and positioning；The pad pasting aluminium sheet of high-precision planarization is installed in skeleton upper surface, is installation and the tune of other mechanisms
School provides high-precision platform；Other component and spinner are mounted in the platform, it is ensured that relative positional accuracy and resetting essence
Degree.Single flower basket vertical type spinner is mounted on the pad pasting aluminium sheet of anticorrosion framework, direct-connected with aluminium sheet by being spin-dried for machine base, is spin-dried for
Its adjustable front-rear position of waist-shaped hole on machine base；Spinner automatically-controlled door is full-automatic processing procedure by cylinder automatic shutter
Provide guarantee；The drive of spinner motor is spin-dried for machine rotor and is placed on the gaily decorated basket and wafer high speed rotation of internal rotor, passes through
Physics centrifugal force carries out dry tack free processing to the gaily decorated basket and wafer；It is spin-dried for being provided with machinery positioning hole on machine rotor, in order to guarantee
Rotor is always kept in a fixed state position during the gaily decorated basket picks and places, and location error bring is avoided to influence.
Electric cylinders load carrier by hold-down support can adjustable seats be mounted on the high accuracy platform of anticorrosion framework, electric cylinders can
It adjusts bracket to guarantee that the inclined angle of electric cylinders is consistent with rotor tilt angle always, avoids causing to transmit because of angular deviation not in place
Risk；Electric cylinders load carrier is furnished with cable-pulling chain, and the motor cable and inductor cable in guarantee transmit process are regular orderly, no
Transmit process can be formed and be interfered；Electric cylinders slide unit drives transmission before and after steering positioning mechanism and gaily decorated basket clamping device thereon.Flower
Basket load carrier lifts gaily decorated basket carrier using lifting cylinder, to realize the timely carrying of the gaily decorated basket；Cylinder passes through cylinder saddle
Be mounted on the high accuracy platform of anticorrosion framework, cradle back is equipped with air duct mechanism, air duct mechanism can to gaily decorated basket gripper into
Row is dry in time, avoids causing it secondary adhesional wetting when taking out the gaily decorated basket after drying；Gaily decorated basket carrier uses Openworks shape, together
Sample avoids carrying the gaily decorated basket after flat adhesional wetting drying；Gaily decorated basket carrier needs lifting to handle, and is to guarantee to transmit in the gaily decorated basket and turn to
During will not interfere with carrier, while guaranteeing not interfere during spinner automatic door switch.
It turns to positioning mechanism to be mounted on electric cylinders slide unit by hold-down support, motor/speed reducer is locked at bearing installation branch
It on seat, is rotated using motor, realizes the change in gaily decorated basket direction, guarantee that the gaily decorated basket turns in the front direction and spinner for being transmitted to spinner
The inclination angle of son is consistent, and is restored to horizontal position before taking out the gaily decorated basket after drying and being placed into gaily decorated basket carrier；Turn to positioning
Inductor realizes High-precision angle control；And it during the gaily decorated basket enters spinner drying, turns to positioning mechanism and drives flower
90 ° of basket clamping device rotations, make gaily decorated basket gripper be located just at air duct mechanism air outlet, and then gaily decorated basket gripper is dried.
Gaily decorated basket clamping device is synchronous by duplex bearing mechanism, locking nut, steering sensing chip, shaft, gaily decorated basket gripper, sliding rail type
Gripper cylinder and associated adjustment mounting fixing parts composition；Duplex bearing mechanism is mounted on the bearing erection support for turning to positioning mechanism
It is interior, it is connected by shaft with speed reducer output shaft, guarantees the steering in gaily decorated basket clamping process；Gaily decorated basket clamping device utilizes sliding rail type
Synchronous gripper cylinder drives gaily decorated basket gripper, realizes clamping and release to the gaily decorated basket；Gaily decorated basket clamping device is early by guide-localization axis
Cooperate in the gaily decorated basket and wafer with the machinery positioning hole for being spin-dried for machine rotor, positive mechanical is carried out to rotor before the gaily decorated basket enters rotor
Positioning correcting, it is ensured that the gaily decorated basket and wafer in rotor-position not clock synchronization, transmission will not be forced and by hard squeeze and destruction；When fixed
When position axis cannot be fully mated with machinery positioning hole, the one-way cylinder loaded on guide-localization axis rear is squeezed generation displacement,
Inductor senses that displacement signals to PLC, to interrupt the transmission of electric cylinders, protects to the gaily decorated basket and wafer；Gaily decorated basket gripper
It is upper that small range inductor is housed, whether examining gaily decorated basket clamping, double guarantee is carried out to stability and safety.
The workflow of the utility model is as follows:
(1) transhipment transmission mechanism initial position gaily decorated basket carrier is in low level automatically, and spinner automatically-controlled door is closed, and electric cylinders are sliding
Platform is in nearly mechanical arm and is far spin-dried for generator terminal, and gaily decorated basket gripper is in open position, and steering mechanism is in horizontal position；
(2) after the gaily decorated basket completes processing procedure slot processing procedure, the full-automatic mechanical arm clamping gaily decorated basket of wet process equipment is displaced to correspondence
The position of gaily decorated basket carrier, spinner automatically-controlled door is opened at this time, and gaily decorated basket carrier rises to a high position, and mechanical arm moves downward, will
The gaily decorated basket and wafer are placed on gaily decorated basket carrier；
(3) electric cylinders slide unit drives steering positioning mechanism and gaily decorated basket clamping device is moved to the position being suitable for holding, gaily decorated basket folder
It grabs and steps up the gaily decorated basket, gaily decorated basket carrier is down to low level, and it is consistent as machine rotor inclination angle is spin-dried for by horizontal position rotation to turn to positioning mechanism
Position, while electric cylinders slide unit drives and turns to positioning mechanism and gaily decorated basket clamping device together with the gaily decorated basket and wafer to spinner direction
It is mobile；
(4) the guide-localization axis of gaily decorated basket clamping device cooperates into the machinery positioning hole for being spin-dried for machine rotor, and electric cylinders speed reduces,
The gaily decorated basket and wafer are placed into and are spin-dried in machine rotor；
(5) gaily decorated basket gripper unclamps the gaily decorated basket, and electric cylinders slide unit counter motion drives steering positioning mechanism and gaily decorated basket clamping device to return
It returns to close to mechanical arm direction, turns to positioning mechanism and gaily decorated basket clamping device is driven to rotate 90 °, gaily decorated basket gripper is made to be in air duct mechanism
Air outlet position is dried；
(6) spinner automatically-controlled door is closed, and starts to be spin-dried for processing procedure.After processing procedure, automatically-controlled door is opened.Gaily decorated basket gripper go to
The consistent angle in rotor inclination angle, electric cylinders slide unit is mobile toward spinner direction, and gaily decorated basket gripper clamps, and takes out the gaily decorated basket.Turn to localization machine
Structure restores horizontal position, and electric cylinders slide unit drives steering positioning mechanism and gaily decorated basket clamping device and the gaily decorated basket etc. to return to gaily decorated basket carrier and hold
Position is carried, gaily decorated basket carrier rises, and jacks up the gaily decorated basket, and gaily decorated basket gripper is opened, and mechanical arm takes the gaily decorated basket away to lower goods area, which terminates.
The utility model is simultaneously not limited to the embodiments described above, and other any spirit without departing from the utility model are real
Made changes, modifications, substitutions, combinations, simplifications under matter and principle, should be equivalent substitute mode, be included in practical
Within novel protection scope.
Claims (10)
1. a kind of gaily decorated basket and wafer for wet process equipment automatically transports transmission mechanism, it is characterised in that: including single flower basket
Vertical type spinner (1), anticorrosion framework (2), electric cylinders load carrier (3), turn to positioning mechanism (4), gaily decorated basket clamping device (5),
Gaily decorated basket load carrier (6), the single flower basket vertical type spinner (1) are mounted on anti-corrosion bone by spinner angle adjustment foot (18)
On frame (2), spinner angle adjustment foot (18) is used to adjust the tilt angle of single flower basket vertical type spinner (1), described
It is provided with electric cylinders load carrier (3) on front side of single flower basket vertical type spinner (1), the electric cylinders load carrier (3) is solid by electric cylinders
Determine support (31) and electric cylinders adjustable seats (32) are mounted on anticorrosion framework (2), the electric cylinders adjustable seats (32) are for adjusting
The tilt angle of whole electric cylinders load carrier (3) is equipped with steering positioning mechanism on the electric cylinders slide unit of the electric cylinders load carrier (3)
(4), gaily decorated basket clamping device (5), the steering positioning mechanism (4) drive gaily decorated basket clamping device (5) to make 90 ° of rotations, the gaily decorated basket
For clamping device (5) for clamping the gaily decorated basket and wafer (7), the electric cylinders slide unit, which drives, turns to positioning mechanism (4), gaily decorated basket clamping device
(5) make front and back transmission, be provided with gaily decorated basket load carrier (6) on the left of the single flower basket vertical type spinner (1), the gaily decorated basket carrying
Mechanism (6) Liftable type is mounted on anticorrosion framework (2).
2. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as described in claim 1, feature exists
In: the anticorrosion framework (2) is leveled using the welding of SUS stainless steel tube, and anticorrosion framework (2) surface is coated with anti-corrosion PP
Plate, anticorrosion framework (2) top surface are equipped with pad pasting aluminium sheet (23), anticorrosion framework (2) bottom end be equipped with lower margin (21) and
Universal wheel (22).
3. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 2, feature exists
In: the single flower basket vertical type spinner (1) includes being spin-dried for machine base (11), spinner automatically-controlled door (12), spinner switch gate
Cylinder (13), spinner motor (14) are spin-dried for machine rotor (15), machinery positioning hole (16), spinner shell (17), spinner angle
Degree adjustment foot (18), the machine base (11) that is spin-dried for are connected with the pad pasting aluminium sheet of anticorrosion framework (2), the spinner shell (17)
It is mounted on and is spin-dried on machine base (11) by spinner angle adjustment foot (18), spinner shell (17) side is equipped with rotation
Dry electromechanics machine (14), interior be equipped with of the spinner shell (17) is spin-dried for machine rotor (15), described to be spin-dried for machine rotor (15) and be spin-dried for
The output end of electromechanical machine (14) is connected, described to be spin-dried for being provided with machinery positioning hole (16) on machine rotor (15), the spinner shell
(17) opening is installed with spinner automatically-controlled door (12), the spinner automatically-controlled door (12) and spinner switch door cylinder (13)
Piston end be connected, the spinner automatically-controlled door (12) by spinner switch door cylinder (13) automatic shutter.
4. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 3, feature exists
In: the mounting hole being spin-dried on machine base (11) is set as waist-shaped hole, and the single flower basket vertical type spinner (1) passes through waist type
Hole adjusts front-rear position.
5. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 3, feature exists
In: it the spinner shell (17), spinner motor (14) and is spin-dried for being provided with spinner cushion between machine base (11)
(19), discharge outlet is offered on the spinner shell (17), the discharge outlet connects spinner drainpipe (20).
6. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 3, feature exists
In: the electric cylinders load carrier (3) includes electric cylinders ontology (33), electric cylinders slide unit (34), electric cylinders motor (36), the electric cylinders ontology
(33) the pad pasting aluminium sheet (23) of anticorrosion framework (2) is mounted on by electric cylinders hold-down support (31) and electric cylinders adjustable seats (32)
On, the electric cylinders adjustable seats (32) are for guaranteeing electric cylinders ontology (33) inclined angle and being spin-dried for machine rotor (15) tilt angle
Unanimously, the electric cylinders slide unit (34) is set on electric cylinders ontology (33), and electric cylinders slide unit (34) side is installed with alignment sensor
(35), electric cylinders ontology (33) bottom end is equipped with electric cylinders motor (36), is provided with cable-pulling chain at the electric cylinders motor (36)
(37)。
7. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 6, feature exists
In: the gaily decorated basket load carrier (6) includes lifting cylinder (61), gaily decorated basket carrier (62), cylinder saddle (63), the lifting air
The lift side of cylinder (61) is equipped with gaily decorated basket carrier (62), and the lifting cylinder (61) is mounted on anti-corrosion by cylinder saddle (63)
On skeleton (2), cylinder saddle (63) back side is equipped with air duct mechanism (64), and the air duct mechanism (64) is used to press from both sides the gaily decorated basket
It grabs and is dried, the gaily decorated basket carrier (62) uses Openworks shape.
8. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 7, feature exists
In: the steering positioning mechanism (4) include bearing erection support (41), motor (42), speed reducer (43), the motor (42),
Speed reducer (43) is locked on bearing erection support (41), and the motor (42) changes gaily decorated basket direction, the bearing by rotation
It is installed with above erection support (41) and turns to positioning inductor (44), the bearing erection support (41) is installed by hold-down support
On electric cylinders slide unit (34).
9. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 8, feature exists
In: the gaily decorated basket clamping device (5) includes duplex bearing mechanism (51), locking nut (52), turns to sensing chip (53), shaft
(54), gaily decorated basket gripper (55), sliding rail type are synchronous gripper cylinder (56), and the duplex bearing mechanism (51) is pacified by locking nut (52)
In the bearing erection support (41) for turning to positioning mechanism (4), the duplex bearing mechanism (51) is by shaft (54) and slows down
Machine (43) output shaft is connected, and shaft (54) side, which is provided with, turns to sensing chip (53), and the gaily decorated basket gripper (55) is mounted on
The telescopic end of sliding rail type synchronous gripper cylinder (56), the gaily decorated basket gripper (55) is for gripping or releasing the gaily decorated basket.
10. automatically transporting transmission mechanism for the gaily decorated basket of wet process equipment and wafer as claimed in claim 9, feature exists
In: the gaily decorated basket clamping device (5) is cooperated by guide-localization axis (57) with the machinery positioning hole (16) for being spin-dried for machine rotor (15),
Guide-localization axis (57) rear is equipped with one-way cylinder (58), and the one-way cylinder (58) is mounted on cylinder saddle (59)
On, the one-way cylinder (58) turns to sensing chip (53) by connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821917749.2U CN209029348U (en) | 2018-11-20 | 2018-11-20 | A kind of gaily decorated basket and wafer for wet process equipment automatically transports transmission mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821917749.2U CN209029348U (en) | 2018-11-20 | 2018-11-20 | A kind of gaily decorated basket and wafer for wet process equipment automatically transports transmission mechanism |
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|---|---|
| CN209029348U true CN209029348U (en) | 2019-06-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821917749.2U Active CN209029348U (en) | 2018-11-20 | 2018-11-20 | A kind of gaily decorated basket and wafer for wet process equipment automatically transports transmission mechanism |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110900182A (en) * | 2019-11-20 | 2020-03-24 | 上海至纯洁净系统科技股份有限公司 | Modularized guide sheet device capable of being freely installed in wet process equipment |
| CN111312614A (en) * | 2019-11-29 | 2020-06-19 | 福建省福联集成电路有限公司 | Etching and spin-drying integrated machine table and spin-drying mechanism |
-
2018
- 2018-11-20 CN CN201821917749.2U patent/CN209029348U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110900182A (en) * | 2019-11-20 | 2020-03-24 | 上海至纯洁净系统科技股份有限公司 | Modularized guide sheet device capable of being freely installed in wet process equipment |
| CN110900182B (en) * | 2019-11-20 | 2021-07-06 | 上海至纯洁净系统科技股份有限公司 | Modularized guide sheet device capable of being freely installed in wet process equipment |
| CN111312614A (en) * | 2019-11-29 | 2020-06-19 | 福建省福联集成电路有限公司 | Etching and spin-drying integrated machine table and spin-drying mechanism |
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