CN207359068U - A kind of three axis full-automatic mechanical arm mechanisms - Google Patents
A kind of three axis full-automatic mechanical arm mechanisms Download PDFInfo
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- CN207359068U CN207359068U CN201721263405.XU CN201721263405U CN207359068U CN 207359068 U CN207359068 U CN 207359068U CN 201721263405 U CN201721263405 U CN 201721263405U CN 207359068 U CN207359068 U CN 207359068U
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Abstract
It the utility model is related to a kind of three axis full-automatic mechanical arm mechanisms, including side-to-side movement mechanism, up-down mechanism, clamping device, the gaily decorated basket and carrier, Cassette detection components, the gaily decorated basket and carrier are connected on clamping device, clamping device is connected in up-down mechanism, up-down mechanism is connected in side-to-side movement mechanism, Cassette detection components are installed at the top of side-to-side movement mechanism, Cassette detection components are used to be detected the gripping situation and placement location of the gaily decorated basket and carrier, the gaily decorated basket and carrier are in side-to-side movement mechanism, up-down mechanism, along left and right X-axis under the action of clamping device, upper and lower Y-axis, the three direction movements of rotation gripping Z axis；The utility model compared with the existing technology, can avoid because sky folder or grip it is not in place caused by cassette overturn/cross processing procedure/fold goods or fragmentation situation, effectively improve the cleanliness factor of mechanical arm, security, stability and reliability in wet process equipment.
Description
[technical field]
Mechanical arm technical field is the utility model is related to, specifically a kind of three axis full-automatic mechanical arm mechanisms.
[background technology]
In LED and semicon industry, wet process equipment has carried out the carrying of wafer or cassette using full-automatic mechanical arm
Through as the more and more common technology of an application.The full-automatic mechanical arm transport class attached machine most basic as process apparatus
Structure, its ride comfort run, stability, security are the major embodiment modes of its performance.
The common size of wafer generally has 2 "/4 "/6 "/8 "/12 " or even 16 ", wafer thickness generally 650~850 μm it
Between.In wafer fabrication, wafer needs the technological process of two to three months, completes 450 or more processing steps,
Integrated tens arrive a certain chips up to ten thousand, in manufacturing process end, one single chip are separated from wafer, is then packaged as final
Product.Estimate it can be seen from the above that the cost of single-wafer is far super, especially walked in back segment packaging technology, wafer at each
Rapid any damage or fragmentation risk must be all controlled in bottom line.Based on this, the stability of full-automatic mechanical arm operation
New height has also been mentioned with security.
The operation of full-automatic mechanical arm is generally divided into X-axis, Y-axis and Z axis movement, and X-direction passes through servomotor, deceleration
Machine drives rack-and-pinion movement, realizes carrying of the mechanical arm in different fabrication steps；Y direction passes through servomotor, gear reducer
And belt transmission mechanism drives ball-screw to move up and down, realize that mechanical arm is acted in the extraction and placement of same step；Z axis side
To by cylinder moving, drive shaft and fixture to rotate within the specific limits, realize the gripping to wafer or cassette and decontrol dynamic
Make.By long-term live actual verification and summary of experience, it is found that full-automatic mechanical arm can in the operation of X-axis and Y direction
To meet present process requirements, but the gripping of Z-direction and relieving action there may be sky folder or place wind not in place
Danger, the risk may cause fragmentation/mistake processing procedure/folded goods or cassette upset.If can provide one kind can ensure that Z-direction is stable
The mechanism of property is imperative.
In addition, in full-automatic wet process equipment, carrying and transmission that various mechanical arms carry out cassette are commonly used.It is common
Mechanical arm will generally realize that X/Y/Z axis three-dimensional is moved.At present, industry often uses arm hanging type mechanical arm, by pacifying at the top of equipment
Slide, left and right transmission are filled, above-below direction uses straight line reducing gear, and gripping body is controlled using double cylinders, this technology exists
Problems with：(1) left and right transmission is easy to cause the partical such as dust and falls directly into processing procedure groove, seriously affect at the top of equipment
Processing procedure cleanliness factor；(2) move up and down and use straight line reducing gear, be one of source of dust, movement smooth degree and repetition are fixed
Position precision is also more difficult to be controlled in stringent scope；(3) gripping body is controlled using double cylinders, it is understood that there may be and source of the gas is unstable, and two
The nonsynchronous problem of branch cylinder moving, cassette grippings will be caused not in place for this or even the displacement of cassette carriers；(4) it is existing
Mechanical arm can not judge that whether normal the action of gripping is errorless generally without detection device, cause to exist because sky folder or grip less than
Cassette caused by position overturns/crosses the risk of processing procedure/folded goods or fragmentation.
To sum up, if a set of cassette gripping detecting mechanism can be provided, to solve the problems, such as that the gripping of Z-direction fixture judges, and
Whether Z axis is gripped in place or empty folder is judged and fed back, so as to avoid because sky presss from both sides or grip not in place or places not in place
Caused cassette overturns/crosses the risk of processing procedure/folded goods or even fragmentation, will have very important significance.
[utility model content]
The purpose of this utility model seeks to solve above-mentioned deficiency and provide a kind of three axis full-automatic mechanical arm mechanisms,
Can avoid because sky folder or grip it is not in place caused by cassette overturn/cross processing procedure/fold goods or fragmentation situation, solve Z-direction
The problem of fixture gripping judges.
A kind of three axis full-automatic mechanical arm mechanisms, including side-to-side movement mechanism 1, upper and lower fortune are designed to achieve the above object
Motivation structure 2, clamping device 3, the gaily decorated basket and carrier 4, Cassette detection components 5, the gaily decorated basket and carrier 4 are connected to clamping device
On 3, the clamping device 3 is connected in up-down mechanism 2, and the up-down mechanism 2 is connected to side-to-side movement mechanism 1
On, the top of side-to-side movement mechanism 1 is provided with Cassette detection components 5, and the Cassette detection components 5 are used for flower
The gripping situation and placement location of basket and carrier 4 are detected, and the gaily decorated basket and carrier 4 are in side-to-side movement mechanism 1, up and down motion
Moved under the action of mechanism 2, clamping device 3 along three left and right X-axis, upper and lower Y-axis, rotation gripping Z axis directions.
Further, the Cassette detection components 5 by PLC connection side-to-side movements mechanism 1, up-down mechanism 2,
Clamping device 3.
Further, the side-to-side movement mechanism 1 includes side-to-side movement motor and gear reducer 11, side-to-side movement rack-and-pinion
Mechanism 12, side-to-side movement guide rail guiding mechanism 13, fixed seat mechanism 14, the output terminal of the side-to-side movement motor and gear reducer 11
Side-to-side movement rack and pinion mechanism 12 is connected, the side-to-side movement rack and pinion mechanism 12 connects side-to-side movement guide rail guiding mechanism
13, the fixed seat mechanism 14 makees the side-to-side movement of X-direction under the carry of side-to-side movement guide rail guiding mechanism 13 and guiding.
Further, the up-down mechanism 2 includes up and down motion motor and gear reducer 21, up and down motion synchronous belt pass
Transfer mechanism 22, up and down motion lead screw guide rails mechanism 23, up and down motion anti-corrosion shaft 24, ARM fixing bearings mechanism 25, the fortune up and down
Dynamic anti-corrosion shaft 24 is fastenedly connected with fixed seat mechanism 14, and the output terminal connection of the up and down motion motor and gear reducer 21 is transported up and down
Dynamic synchronous belt transmission mechanism 22, the up and down motion synchronous belt transmission mechanism 22 connects up and down motion lead screw guide rails mechanism 23, institute
State the up and down motion that ARM fixing bearings mechanism 25 makees Y direction under the guiding of up and down motion lead screw guide rails mechanism 23.
Further, the clamping device 3 includes clamping device arm 31, the symmetrical U-shaped folder 32 of clamping device, clip position sense
Answer device 33, clamping device slider cylinder mechanism 34, the clamping device slider cylinder mechanism 34 and ARM fixing bearings mechanism 25
It is connected, the piston end of the clamping device slider cylinder mechanism 34 is connected with clamping device arm 31, the clamping device arm 31
Connect the symmetrical U-shaped folder 32 of clamping device, the symmetrical U-shaped folder 32 of clamping device clamped under the drive of clamping device arm 31 or
The Z-direction rotary motion of relieving, is provided with clip position sensing device 33 in the clamping device slider cylinder mechanism 34.
Further, the clamping device slider cylinder mechanism 34 includes slider cylinder, is fastened with the slider cylinder
Bootstrap block and mirror image flake bearing, the slider cylinder drive clamping device arm 31 to make mirror by bootstrap block and mirror image flake bearing
As rotary motion.
Further, the Cassette detection components 5 include infrared induction sensor 51, sensor mounting-fixing base
52nd, adjustable sensor support 53, transparent PVC protective cover 54, the sensor mounting-fixing base 52 are installed on side-to-side movement mechanism 1
On top plate, the adjustable sensor support 53 is connected on sensor mounting-fixing base 52, and the infrared induction sensor 51 is pacified
Detecting angle, the infrared induction sensor are adjusted on adjustable sensor support 53, and by adjustable sensor support 53
51 peripheries are equipped with transparent PVC protective cover 54.
Further, the infrared induction sensor 51 is apart from controllable reflective photoelectric sensor.
The utility model compared with the existing technology, by the basis of original full-automatic mechanical arm, installs additional
Cassette detection components, are transferred to PLC, and the signal transmitted by Cassette detection components is judged, if Z axis has sky
Situation not in place is pressed from both sides or gripped, operation of the mechanical arm in X-axis and Y-axis can be interrupted, after gripping successfully again, then is carried out next
The action of step, finally avoid because sky folder or grip it is not in place caused by cassette overturn/cross processing procedure/fold goods or fragmentation situation, finally
Solve the problems, such as that the gripping of Z-direction fixture judges；Moreover, the full-automatic mechanical arm passes through to installation site, power mode
Stronger etc. the increase of the technological improvement and lifting of various aspects, and safety device, applicability, cost is low, assembly
Simply, it is easy to maintain, the cleanliness factor of mechanical arm, security, stability and reliability in wet process equipment are effectively improved, is worth
It must promote and apply.
[brief description of the drawings]
Fig. 1 is the positive structure schematic of the utility model；
Fig. 2 is the right side structure schematic diagram of the utility model；
Fig. 3 is the top view of Fig. 2；
Fig. 4 is the structure diagram of Cassette detection components in the utility model；
In figure：1st, side-to-side movement mechanism 11, side-to-side movement motor and gear reducer 12, side-to-side movement rack and pinion mechanism
13rd, side-to-side movement guide rail guiding mechanism 14, fixed seat mechanism 2, up-down mechanism 21, up and down motion motor and gear reducer
22nd, up and down motion synchronous belt transmission mechanism 23, up and down motion lead screw guide rails mechanism 24, up and down motion anti-corrosion shaft 25, ARM are solid
Determine the symmetrical U-shaped folder 33 of Bearning mechanism 3, clamping device 31, clamping device arm 32, clamping device, clip position sensing device
34th, clamping device slider cylinder mechanism 4, the gaily decorated basket and carrier 5, Cassette detection components 51, infrared induction sensor 52,
Sensor mounting-fixing base 53, adjustable sensor support 54, transparent PVC protective cover.
[embodiment]
The utility model is made below in conjunction with the accompanying drawings further explained below：
As shown in drawings, the utility model include side-to-side movement mechanism 1, up-down mechanism 2, clamping device 3, the gaily decorated basket and
Carrier 4, Cassette detection components 5, the gaily decorated basket and carrier 4 are connected on clamping device 3, and clamping device 3 is connected to up and down motion
In mechanism 2, up-down mechanism 2 is connected in side-to-side movement mechanism 1, and the top of side-to-side movement mechanism 1 is provided with Cassette and detects
Survey component 5, Cassette detection components 5 are used to be detected the gripping situation and placement location of the gaily decorated basket and carrier 4, the gaily decorated basket and
Carrier 4 is under the action of side-to-side movement mechanism 1, up-down mechanism 2, clamping device 3 along left and right X-axis, upper and lower Y-axis, rotating clamp
Three direction movements of Z axis are taken, Cassette detection components 5 pass through PLC connection side-to-side movements mechanism 1, up-down mechanism 2, folder
Hold mechanism 3.
Wherein, side-to-side movement mechanism 1 include side-to-side movement motor and gear reducer 11, side-to-side movement rack and pinion mechanism 12,
The output terminal connection left and right fortune of side-to-side movement guide rail guiding mechanism 13, fixed seat mechanism 14, side-to-side movement motor and gear reducer 11
Moving gear rackwork 12, side-to-side movement rack and pinion mechanism 12 connect side-to-side movement guide rail guiding mechanism 13, fixed seat mechanism
14 make the side-to-side movement of X-direction under the carry of side-to-side movement guide rail guiding mechanism 13 and guiding.
Up-down mechanism 2 includes up and down motion motor and gear reducer 21, up and down motion synchronous belt transmission mechanism 22, up and down
Lead screw guide rails mechanism 23, up and down motion anti-corrosion shaft 24, ARM fixing bearings mechanism 25 are moved, up and down motion anti-corrosion shaft 24 is with fixing
Seat mechanism 14 is fastenedly connected, the output terminal connection up and down motion synchronous belt transmission mechanism 22 of up and down motion motor and gear reducer 21,
Up and down motion synchronous belt transmission mechanism 22 connects up and down motion lead screw guide rails mechanism 23, and ARM fixing bearings mechanism 25 is transporting up and down
Make the up and down motion of Y direction under the guiding of dynamic lead screw guide rails mechanism 23.
Clamping device 3 includes clamping device arm 31, the symmetrical U-shaped folder 32 of clamping device, clip position sensing device 33, clamping
Slider cylinder mechanism of mechanism 34, clamping device slider cylinder mechanism 34 are connected with ARM fixing bearings mechanism 25, and clamping device is slided
The piston end of platform cylinder mechanism 34 is connected with clamping device arm 31, and clamping device arm 31 connects the symmetrical U-shaped folder 32 of clamping device, folder
Hold the Z-direction rotary motion that the symmetrical U-shaped folder 32 of mechanism is clamped or decontroled under the drive of clamping device arm 31, clamping device
Clip position sensing device 33 is installed in slider cylinder mechanism 34, clamping device slider cylinder mechanism 34 includes slider cylinder,
Bootstrap block and mirror image flake bearing are fastened with slider cylinder, slider cylinder drives clamping by bootstrap block and mirror image flake bearing
Mechanism arm 31 does mirror image rotary motion.
Cassette detection components 5 include infrared induction sensor 51, sensor mounting-fixing base 52, tunable sensors branch
Frame 53, transparent PVC protective cover 54, sensor mounting-fixing base 52 are installed on 1 top plate of side-to-side movement mechanism, tunable sensors branch
Frame 53 is connected on sensor mounting-fixing base 52, and infrared induction sensor 51 is installed on adjustable sensor support 53, and is led to
Cross adjustable sensor support 53 and adjust detecting angle, the periphery of infrared induction sensor 51 is equipped with transparent PVC protective cover 54, infrared sense
Inductive sensing device 51 is apart from controllable reflective photoelectric sensor.
The basic principle of the utility model is：
(1) full-automatic mechanical arm monocrystalline boat gripping detecting mechanism passes through side-to-side movement mechanism, up-down mechanism, clamping
The collective effect of mechanism, Cassette detection components, is realized to the gaily decorated basket and carrier in left and right X-axis/upper and lower Y-axis and rotation gripping Z
The Bit andits control in three directions of axis and precisely detection；
(2) side-to-side movement mechanism is driven rack and pinion mechanism, is led in guide rail by side-to-side movement servomotor and gear reducer
The horizontal left and right transmission of X-axis is realized under carry and guiding to mechanism；
(3) up-down mechanism is fastenedly connected by fixed seat mechanism with up and down motion anti-corrosion shaft, is realized in X-axis and a left side
Right motion is synchronized with the movement；Pass through the power output of up and down motion servomotor and gear reducer, and synchronous belt power at the same time
Transmission mechanism and lead screw guide rails mechanism, change into linear motion up and down by motor power rotation output, realize mechanical arm in Y-axis side
To up and down motion；
(4) clamping device is connected by ARM fixing bearings mechanism with the bearing of clamping device ARM, is realized with whole system
In the left and right of X-axis and Y-axis/be synchronized with the movement up and down；Clamping device slider cylinder mechanism comes as clamping device integral power at the same time
Source, by the bootstrap block and mirror image flake bearing fastened in slider cylinder mechanism, by the tandem conversion of motion of slider cylinder
For the mirror image rotary motion of clamping device ARM, and then the symmetrical U-shaped folder of clamping device is driven to realize the Z-direction stepped up or decontroled
The rotary motion of certain angle, while the movement travel of slider cylinder mechanism is controlled by clip position sensor induction mechanisms,
And then control the symmetrical U-shaped folder gripping of clamping device or the angle opened；
(5) Cassette detection components are installed on side-to-side movement mechanism top plate by sensor mounting-fixing bases, infrared
Sense sensor and adjustable angles are detected at -5~30 ° by the realization of adjustable sensor stents, to match different size
Cassette is applied, while transparent PVC protective cover, as additional shielding component, no matter sensor is in organic or soda acid for protection sensing
Environment adapts to and from corrosion.Infrared induction sensor is a kind of apart from controllable reflective photoelectric sensor, and is aided in
The stent installation stabilizing mechanism of angle adjustable (- 5 to 30 ° adjustable), in the detecting distance of setting, that detects cassette has
Nothing, then by programmed decision, determine it is the situation such as normal gripping/placement or empty folder, and then the next step for influencing mechanical arm is moved
Make, effectively avoid because sky folder or grip it is not in place caused by cassette overturn/cross processing procedure/fold goods or fragmentation situation.
In view of the deficiencies of the prior art, side-to-side movement mechanism and up-down mechanism are used and processing procedure groove for the utility model
Anterior-posterior horizontal arranges that subregion is obvious, and mechanical arm or so and up and down motion space are not overlapped with processing procedure slot space, avoid dust etc.
Pollution；The Serve Motor Control that the mechanical arm moves up and down using strap brake, control is simple, and precision is reliable, while also has certain
Power-off protection left and right；Gripping body uses same slider cylinder, using bootstrap block and flake bearing, by transform linear motion
For the rotational motion of gripper, power source is unified, avoids two U-shaped folders and acts the asynchronous various problems brought；Increase
Cassette arrangement for detecting, judges gripping action, is further ensured that the security reliability of mechanical arm operation；The program is fitted
For all processing procedures and each specification wafer；The organization volume and quality control within the specific limits, acid and alkali-resistance and organic chemistry agent,
Strong applicability；By the sensor of adjustable distance and the center rest system of angle adjustable, more process requirements are applicable to
With processing procedure occasion；It is simple in structure, it is easy to control, processing and assembling difficulty are reduced, it is easy to maintain, for the peace of mechanical arm operation
Complete and stability has preferable lifting.
The utility model is simultaneously not limited to the embodiments described above, and other any spirit without departing from the utility model are real
Matter with made under principle change, modification, replacement, combine, simplification, should be equivalent substitute mode, be included in this practicality
Within new protection domain.
Claims (8)
- A kind of 1. three axis full-automatic mechanical arm mechanisms, it is characterised in that：Including side-to-side movement mechanism (1), up-down mechanism (2), clamping device (3), the gaily decorated basket and carrier (4), Cassette detection components (5), the gaily decorated basket and carrier (4) are connected to clamping In mechanism (3), the clamping device (3) is connected in up-down mechanism (2), and the up-down mechanism (2) is connected to a left side On right motion (1), Cassette detection components (5), the Cassette are installed at the top of the side-to-side movement mechanism (1) Detection component (5) is used to be detected the gripping situation and placement location of the gaily decorated basket and carrier (4), the gaily decorated basket and carrier (4) Along left and right X-axis, upper and lower Y-axis, rotating clamp under the action of side-to-side movement mechanism (1), up-down mechanism (2), clamping device (3) Take three direction movements of Z axis.
- 2. three axis full-automatic mechanical arm mechanism as claimed in claim 1, it is characterised in that：The Cassette detection components (5) PLC connection side-to-side movements mechanism (1), up-down mechanism (2), clamping device (3) are passed through.
- 3. three axis full-automatic mechanical arm mechanism as claimed in claim 2, it is characterised in that：The side-to-side movement mechanism (1) Including side-to-side movement motor and gear reducer (11), side-to-side movement rack and pinion mechanism (12), side-to-side movement guide rail guiding mechanism (13), fixed seat mechanism (14), the output terminal connection side-to-side movement rack-and-pinion of the side-to-side movement motor and gear reducer (11) Mechanism (12), side-to-side movement rack and pinion mechanism (12) the connection side-to-side movement guide rail guiding mechanism (13), the fixed seat Mechanism (14) makees the side-to-side movement of X-direction under the carry of side-to-side movement guide rail guiding mechanism (13) and guiding.
- 4. three axis full-automatic mechanical arm mechanism as claimed in claim 3, it is characterised in that：The up-down mechanism (2) Including up and down motion motor and gear reducer (21), up and down motion synchronous belt transmission mechanism (22), up and down motion lead screw guide rails mechanism (23), up and down motion anti-corrosion shaft (24), ARM fixing bearings mechanism (25), the up and down motion anti-corrosion shaft (24) and fixed base Structure (14) is fastenedly connected, the output terminal connection up and down motion synchronous belt transmission mechanism of the up and down motion motor and gear reducer (21) (22), up and down motion synchronous belt transmission mechanism (22) the connection up and down motion lead screw guide rails mechanism (23), the ARM fixing axles Hold the up and down motion that mechanism (25) makees Y direction under the guiding of up and down motion lead screw guide rails mechanism (23).
- 5. three axis full-automatic mechanical arm mechanism as claimed in claim 4, it is characterised in that：The clamping device (3) includes Clamping device arm (31), the symmetrical U-shaped folder of clamping device (32), clip position sensing device (33), clamping device slider cylinder machine Structure (34), the clamping device slider cylinder mechanism (34) are connected with ARM fixing bearings mechanism (25), and the clamping device is slided The piston end of platform cylinder mechanism (34) is connected with clamping device arm (31), and clamping device arm (31) the connection clamping device is symmetrical U-shaped folder (32), the Z axis that the symmetrical U-shaped folder of clamping device (32) clamps or decontrols under the drive of clamping device arm (31) Azimuthal rotational motion, is provided with clip position sensing device (33) on the clamping device slider cylinder mechanism (34).
- 6. three axis full-automatic mechanical arm mechanism as claimed in claim 5, it is characterised in that：The clamping device slider cylinder Mechanism (34) includes slider cylinder, and bootstrap block is fastened with the slider cylinder and mirror image flake bearing, the slider cylinder are led to Cross bootstrap block and mirror image flake bearing drives clamping device arm (31) to do mirror image rotary motion.
- 7. three axis full-automatic mechanical arm mechanism as claimed in claim 6, it is characterised in that：The Cassette detection components (5) infrared induction sensor (51), sensor mounting-fixing base (52), adjustable sensor support (53), transparent PVC protection are included Cover (54), the sensor mounting-fixing base (52) is installed on side-to-side movement mechanism (1) top plate, the adjustable sensor support (53) it is connected on sensor mounting-fixing base (52), the infrared induction sensor (51) is installed on adjustable sensor support (53) on, and detecting angle is adjusted by adjustable sensor support (53), infrared induction sensor (51) periphery is equipped with saturating Bright PVC protective covers (54).
- 8. three axis full-automatic mechanical arm mechanism as claimed in claim 7, it is characterised in that：The infrared induction sensor (51) it is apart from controllable reflective photoelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721263405.XU CN207359068U (en) | 2017-09-28 | 2017-09-28 | A kind of three axis full-automatic mechanical arm mechanisms |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721263405.XU CN207359068U (en) | 2017-09-28 | 2017-09-28 | A kind of three axis full-automatic mechanical arm mechanisms |
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| Publication Number | Publication Date |
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| CN207359068U true CN207359068U (en) | 2018-05-15 |
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| CN201721263405.XU Active CN207359068U (en) | 2017-09-28 | 2017-09-28 | A kind of three axis full-automatic mechanical arm mechanisms |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108557457A (en) * | 2018-05-18 | 2018-09-21 | 湖北理工学院 | A kind of discarded microprocessor chip quality testing and automatic sorting device and its control method |
| CN112454318A (en) * | 2020-11-03 | 2021-03-09 | 王兴平 | Mechanical carrying structure and pipe stacking equipment |
-
2017
- 2017-09-28 CN CN201721263405.XU patent/CN207359068U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108557457A (en) * | 2018-05-18 | 2018-09-21 | 湖北理工学院 | A kind of discarded microprocessor chip quality testing and automatic sorting device and its control method |
| CN108557457B (en) * | 2018-05-18 | 2024-01-02 | 湖北理工学院 | Abandoned microprocessor chip quality detection and automatic sorting device |
| CN112454318A (en) * | 2020-11-03 | 2021-03-09 | 王兴平 | Mechanical carrying structure and pipe stacking equipment |
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