A kind of full-automatic charging and discharging mechanism
Technical field
The present invention relates to a kind of fully automatic working platform, particularly relate to a kind of raw for semiconductor device high-volume
The full-automatic loading and unloading workbench produced.
Background technology
The speed updated along with semiconductor product is accelerated, and process technology is upgraded the most therewith, so, half
The supporting industry of conductor manufactures the key that equipment, test instrunment and raw material are industrial upgradings, Qi Zhongshe
The key of standby industry especially and throat, the innovation ability having grasped the equipment of manufacture just calculates the system reaching industry
High point.In China, most of producer that semiconductor device produces still uses raw material → fixture → equipment
The purely manual loading and unloading pattern of workbench, production efficiency is low, and production cost is high, it is impossible to automation equipment
Efficiency match, cause the wasting of resources.To this end, need a kind of device badly to solve the problems referred to above.
Summary of the invention
The technical problem to be solved is to provide the full-automatic loading and unloading work that a kind of production efficiency is high
Station.
The technical scheme is that a kind of full-automatic charging and discharging mechanism includes
Base, is fixed with the left mechanical hand of horizontal movement, vertically movable on described base the most successively
Upper left magazine lowering or hoisting gear, jig platform, vertically movable bottom right magazine lowering or hoisting gear, horizontal movement
Right mechanical hand.
Described left mechanical hand include left arm, for fix the left arm of described left arm one end fix seat,
The left slider being fixed on described left arm lower end coordinates the left rail slided, for propping up with described left slider
Support the left rail of described left rail to fix seat and fix the first from left Timing Belt and the left side that seat is connected with described left arm
One motor, described the first from left motor drives described left arm to fix seat by described the first from left Timing Belt
With described left arm horizontal movement, described left arm is provided with and refers to for the left hand gripping workpiece and control institute
State the left minitype cylinder of left finger motion.
Described right mechanical hand include right arm, for fix the right arm of described right arm one end fix seat,
The right slide block being fixed on described right arm lower end coordinates the right guide rail slided, for propping up with described right slide block
Support the right guide rail of described right guide rail to fix seat and fix the right side one Timing Belt and the right side that seat is connected with described right arm
One motor, a described right motor drives described right arm to fix seat by a described right Timing Belt
With described right arm horizontal movement, described right arm is provided with and refers to for the right hand gripping workpiece and control institute
State the right minitype cylinder of right finger motion.
Described upper left magazine lowering or hoisting gear includes left magazine, for fixing the left magazine placement of described left magazine
Platform, the ballscrew that rolls left, the second from left Timing Belt and the second from left motor, described the second from left motor is by described
The second from left Timing Belt drive described in the ballscrew that rolls left rotate, described in roll left ballscrew by feed screw nut's seat and institute
State left magazine mounting table to connect, described in roll left when ballscrew rotates and drive described left magazine mounting table and described
Left magazine moves up and down.
Described bottom right magazine lowering or hoisting gear includes right magazine, for fixing the right magazine placement of described right magazine
Platform, right ball screw, right two Timing Belts and right two stepping motor, described right two stepping motor is by described
Right two Timing Belts drive described right ball screw to rotate, and described right ball screw passes through feed screw nut's seat and institute
Stating right magazine mounting table to connect, described right ball screw drives described right magazine mounting table and described when rotating
Right magazine moves up and down.
The left and right sides of described jig platform lifts with described upper left magazine lowering or hoisting gear and bottom right magazine respectively
Device connect, described jig platform be provided with for fixture level slide shallow slot, the width of described shallow slot with
The width of fixture matches.
Preferably, described left arm refers to be connected by double-rod with described left hand, the gas of described left minitype cylinder
Before and after cylinder shaft, the described left hand of mobile driving refers to rotate and clamping device;Described right arm refers to the described right hand
Being connected by double-rod, before and after the cylinder axis of described right minitype cylinder, the described right hand of mobile driving refers to rotate also
Clamping or relieving fixture.Its middle left and right minitype cylinder is controlled the inflation of cylinder by computer by electromagnetic valve
And venting, thus realize the action whether left and right finger clamps.
Preferably, described left hand refers to that the face matched with left arm is inclined-plane;The right hand refers to and right arm
The face matched is inclined-plane.Wherein the gradient on inclined-plane is preferably 30 degree, tight with folded fixture energy to ensure
Close fit.
Preferably, described left arm fixes connection on seat left sensor fixation plate, and described left sensor is solid
Determining plate and be provided with multiple left photoswitch sensor along the distribution of left arm motion track, described left arm is solid
The left stainless steel substrates for left photoswitch sensor sensing it is also associated with in reservation;Described right arm is fixed
On seat, connection has right sensor fixation plate, described right sensor fixation plate to be provided with multiple to move along right arm
The right photoswitch sensor of track distribution, described right arm is fixed and is also associated with on seat for right photoswitch
The right stainless steel substrates of sensor sensing.Outside the signal of its middle left and right photoswitch sensor all feeds back to
If computer, and left and right motor is by computer program control.
Preferably, described left sensor fixation plate and multiple described left photoswitch sensors are solid by bolt
Fixed connection, described bolt hole is U-shaped hole, to ensure the horizontal displacement of described left photoswitch sensor
The most adjustable;Described right sensor fixation plate is bolted with multiple described right photoswitch sensors
Connecting, described bolt hole is U-shaped hole, to ensure the horizontal displacement hands of described right photoswitch sensor
Dynamic adjustable.
Preferably, described left arm is fixed seat and is fixed with described the first from left Timing Belt by synchronous clamping, to protect
Demonstrate,prove described the first from left motor and drive described left arm precise motion;Described right arm fixes seat by synchronizing
Band folder is fixed with a described right Timing Belt, to ensure that a described right motor drives described right arm accurate
Motion.
Preferably, described left magazine is provided with the left magazine photoelectric sensor for detecting left magazine position,
The most equidistant in described left magazine it is provided with the many groups of laterally steering grooves for stationary fixture, described
Left magazine is provided with opening chamfering near the side of described jig platform, and the opposite side of described left magazine is provided with anti-
The vertically oriented axle that only fixture skids off, described left magazine outer surface is provided with the anti-slip veins being easy to take;Described
Right magazine is provided with the right magazine photoelectric sensor for detecting right magazine position, along hanging down in described right magazine
Nogata is provided with the many groups of laterally steering grooves for stationary fixture to equidistant, and described right magazine is near described folder
The side of tool platform is provided with opening chamfering, and the opposite side of described right magazine is provided with prevent fixture from skidding off vertical
Locating shaft, described right magazine outer surface is provided with the anti-slip veins being easy to take.
Preferably, described left magazine mounting table be provided be easy to that described left magazine accurately puts into oblique angle
Left slide-in type baffle plate, described right magazine mounting table be provided be easy to that described right magazine accurately puts into oblique angle
Right slide-in type baffle plate.
Preferably, between described jig platform and described base, it is provided with the heat insulating strip preventing conduction of heat, described
The material of heat insulating strip is preferably politef.
Preferably, the center of described jig platform is provided with the vacuum absorption device of stationary fixture, prevents from trembling
Dynamic.
Based on technique scheme, the invention has the beneficial effects as follows: the present invention uses motor omnidistance certainly
Dynamic control, control accuracy is high, and a feeding just can complete the processing of several fixture semiconductor-on-insulators, makes half
The efficiency of conductor device processing is greatly improved, and operative is simple, omnidistance computer program
Control, reduce error rate.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of the present invention;
Fig. 2 is the top view of the left mechanical hand of the present invention;
Fig. 3 be the present invention Fig. 2 in along A-A to sectional view;
Fig. 4 is the front view of the upper left magazine lowering or hoisting gear of the present invention;
Fig. 5 is the schematic diagram of the jig platform of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows:
1, left mechanical hand, 2, upper left magazine lowering or hoisting gear, 3, jig platform, 4, the lifting of bottom right magazine
Device, 5, right mechanical hand, 6, base, 101, left arm, 102, left arm fix seat, 103,
Left slider, 104, left rail, 105, left rail fix seat, 106, the first from left Timing Belt, 107, the first from left
Motor, 108, left hand refer to, 109, left minitype cylinder, 110, left photoswitch sensor, 111,
Left sensor fixation plate, 112, left stainless steel substrates, 201, left magazine, 202, left magazine mounting table,
203, roll left ballscrew, and 204, the second from left Timing Belt, 205, the second from left motor, 206, left magazine light
Electric transducer, 301, shallow slot.
Detailed description of the invention
Being described principle and the feature of the present invention below in conjunction with accompanying drawing, example is served only for explaining this
Invention, is not intended to limit the scope of the present invention.
As it is shown in figure 1, a kind of full-automatic charging and discharging mechanism, including base 6, from left on described base
Be fixed with the most successively the left mechanical hand 1 of horizontal movement, vertically movable upper left magazine lowering or hoisting gear 2,
Jig platform 3, vertically movable bottom right magazine lowering or hoisting gear 4, the right mechanical hand 5 of horizontal movement.This
The structure of the loading and unloading part of bright both sides can be identical, it is also possible to differs, present embodiment be preferably on
Blanking device left and right is identical and about the symmetrical situation of middle jig platform.
As shown in Figure 2 and Figure 3, described left mechanical hand 1 includes left arm 101, for fixing a described left side
The left arm of arm 101 one end fix seat 102, the left slider 103 being fixed on described left arm 101 lower end,
Coordinate the left rail 104 slided with described left slider 103, lead for the left side supporting described left rail 104
Rail is fixed seat 105 and is fixed the first from left Timing Belt 106 and the first from left stepping that seat 105 is connected with described left arm
Motor 107, described the first from left motor 107 drives described left arm by described the first from left Timing Belt 106
Fixing seat 102 and described left arm 101 horizontal movement, described left arm 101 is provided with for gripping work
The left hand of part refers to that 108 refer to the left minitype cylinder 109 of 108 motions with the described left hand of control.
Described right mechanical hand 5 is identical with the structure of described left mechanical hand 1 and about middle jig platform 3
Symmetrical.Described right mechanical hand 5 includes right arm, fixes for fixing the right arm of described right arm one end
Seat, it is fixed on the right slide block of described right arm lower end and coordinates the right guide rail of slip, use with described right slide block
Fix seat in the right guide rail supporting described right guide rail and fix the right side one Timing Belt that seat is connected with described right arm
With a right motor, a described right motor drives described right arm solid by a described right Timing Belt
Reservation and described right arm horizontal movement, described right arm is provided with and refers to for the right hand gripping workpiece and control
Make the right minitype cylinder of described right finger motion.
As shown in Figure 4, described upper left magazine lowering or hoisting gear 2 includes left magazine 201, for fixing described
The left magazine mounting table 202 of left magazine 201, the ballscrew 203 that rolls left, the second from left Timing Belt 204 and the second from left
Motor 205, described the second from left motor 205 drives a described left side by described the second from left Timing Belt 204
Ball screw 203 rotates, described in roll left ballscrew 203 placed with described left magazine by feed screw nut's seat
Platform 202 connects, described in roll left and when ballscrew 203 rotates, drive described left magazine mounting table 202 and described
Left magazine 201 moves up and down.
Described bottom right magazine lowering or hoisting gear 4 identical with the structure of described upper left magazine lowering or hoisting gear 2 and about
Middle jig platform 3 is symmetrical.Described bottom right magazine lowering or hoisting gear 4 includes right magazine, for fixing
State the right magazine mounting table of right magazine, right ball screw, right two Timing Belts and right two stepping motor, described
Right two stepping motor drives described right ball screw to rotate by described right two Timing Belts, described right ball wire
Bar is connected with described right magazine mounting table by feed screw nut's seat, drives institute when described right ball screw rotates
State right magazine mounting table and described right magazine moves up and down.
The left and right sides of described jig platform 3 respectively with described upper left magazine lowering or hoisting gear 2 and bottom right magazine
Lowering or hoisting gear 4 connects, as it is shown in figure 5, described jig platform 3 is provided with supplies the shallow of fixture level slip
Groove 301, the described width of shallow slot 301 matches with the width of fixture.
Preferably, with described left hand, described left arm 101 refers to that 108 are connected by double-rod, a described left side is miniature
Before and after the cylinder axis of cylinder 109, the described left hand of mobile driving refers to 108 rotations clamping device;The described right side
Arm refers to be connected by double-rod with the described right hand, mobile driving before and after the cylinder axis of described right minitype cylinder
The described right hand refers to rotate and clamp or decontrol fixture.Its middle left and right minitype cylinder is passed through electromagnetism by computer
Valve controls the inflatable and deflatable of cylinder, thus realizes the action whether left and right finger clamps.
Preferably, described left hand refers to that 108 is inclined-plane with the face matched of left arm 101;The right hand refer to
The face matched of right arm is inclined-plane.Wherein the gradient on inclined-plane is preferably 30 degree, to ensure with folded
Fixture can closely cooperate.
Preferably, described left arm fixes to connect on seat 102 left sensor fixation plate 111, a described left side
Sensor fixation plate 111 is provided with multiple left photoswitch sensing along the distribution of left arm 101 motion track
Device 110, described left arm is fixed and is also associated with on seat 102 sensing for left photoswitch sensor 110
Left stainless steel substrates 112;Described right arm fixes connection on seat right sensor fixation plate, described right biography
Sensor fixed plate is provided with multiple right photoswitch sensor along the distribution of right arm motion track, the described right side
Arm fixes the right stainless steel substrates being also associated with on seat for right photoswitch sensor sensing.Wherein left,
The signal of right photoswitch sensor all feeds back to peripheral hardware computer, and left and right motor is by computer journey
Sequence controls.
Preferably, described left sensor fixation plate 111 leads to multiple described left photoswitch sensors 110
Crossing the fixing connection of bolt, described bolt hole is U-shaped hole, to ensure described left photoswitch sensor 110
Horizontal displacement the most adjustable;Described right sensor fixation plate leads to multiple described right photoswitch sensors
Crossing the fixing connection of bolt, described bolt hole is U-shaped hole, to ensure described right photoswitch sensor
Horizontal displacement is the most adjustable.
Preferably, described left arm fixes seat 102 by synchronous clamping with described the first from left Timing Belt 106 admittedly
Fixed, to ensure that described the first from left motor 107 drives described left arm 101 precise motion;The described right hand
Arm is fixed seat and is fixed with a described right Timing Belt by synchronous clamping, to ensure a described right motor band
Dynamic described right arm precise motion.
Preferably, described left magazine 201 is provided with the left magazine photoelectricity for detecting left magazine 201 position
Sensor 206, the most equidistant in described left magazine 201 is provided with many groups for stationary fixture
Laterally steering groove, described left magazine 201 is provided with opening chamfering, institute near the side of described jig platform 3
The opposite side stating left magazine 201 is provided with the vertically oriented axle preventing fixture from skidding off, outside described left magazine 201
Surface is provided with the anti-slip veins being easy to take;Described right magazine is provided with the right material for detecting right magazine position
Box photoelectric sensor, the most equidistant in described right magazine is provided with the many groups of horizontal strokes for stationary fixture
To gathering sill, described right magazine is provided with opening chamfering, described right magazine near the side of described jig platform
Opposite side be provided with the vertically oriented axle preventing fixture from skidding off, described right magazine outer surface is provided with to be easy to take
Anti-slip veins.
Preferably, described left magazine mounting table 202 is provided with and is easy to the band that described left magazine 201 is accurately put into
There are the left slide-in type baffle plate at oblique angle, described right magazine mounting table 202 to be provided with and are easy to described right magazine 201 standard
The right slide-in type baffle plate with oblique angle really put into.
Preferably, it is provided with, between described jig platform 3 and described base 6, the heat insulating strip preventing conduction of heat,
The material of described heat insulating strip is preferably politef.
Preferably, the center of described jig platform 3 is provided with the vacuum absorption device of stationary fixture, prevents
Shake.
During work, left magazine 201 and right magazine is first made to be in lowermost end, left arm 101 and right arm
Resetting to the initial state of both sides, original position is determined by the photoswitch induction apparatus of opposite position.Give
After a fixed commencing signal, mechanism starts working, by computer program manipulate left magazine 201 and right magazine to
One section of distance specified of upper motion, it is ensured that the lower surface of institute's clamps keeps with the upper surface of jig platform 3
Same level.Then computer program control left arm 101 moves right, in arriving left magazine 201
During chucking position corresponding photoswitch sensor, feedback to the computer signal controls left hand and refers to that 108 clamp folder
Tool is pushed ahead, when arriving the operating position of the jig platform 3 determined by photoswitch sensing station,
Vacuum absorption device starts to process semiconductor workpiece after fixing for fixture absorption.Left hand refers to 108 relievings subsequently
Fixture, left arm 101 returns in situ, send corresponding signal, connecting computer after mechanism completes work pieces process
Controlling right magazine after the collection of letters number and move upward to distance to a declared goal, right arm moves to jig platform to the left simultaneously
After fixture on 3, the right hand refers to that clamping fixture is entrained back in right magazine again, completes the upper of a fixture with this
Blanking process.Repeated several times above-mentioned steps, until completing the full-automatic loading and unloading process of all fixtures.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all in the present invention
Spirit and principle within, any modification, equivalent substitution and improvement etc. made, should be included in this
Within bright protection domain.