CN111489982A - High-speed solar silicon wafer double-side detection machine and double-side detection method thereof - Google Patents
High-speed solar silicon wafer double-side detection machine and double-side detection method thereof Download PDFInfo
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- CN111489982A CN111489982A CN202010280193.6A CN202010280193A CN111489982A CN 111489982 A CN111489982 A CN 111489982A CN 202010280193 A CN202010280193 A CN 202010280193A CN 111489982 A CN111489982 A CN 111489982A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 150
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 150
- 239000010703 silicon Substances 0.000 title claims abstract description 150
- 238000001514 detection method Methods 0.000 title claims abstract description 92
- 230000007246 mechanism Effects 0.000 claims abstract description 29
- 235000012431 wafers Nutrition 0.000 claims description 148
- 239000000523 sample Substances 0.000 claims description 87
- 238000009434 installation Methods 0.000 claims description 21
- 230000000712 assembly Effects 0.000 claims description 13
- 238000000429 assembly Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 9
- 238000010248 power generation Methods 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims 3
- 230000006872 improvement Effects 0.000 description 13
- 230000008569 process Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009365 direct transmission Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Abstract
The invention discloses a high-speed double-side detection machine for a solar silicon wafer and a double-side detection method thereof, and the high-speed double-side detection machine comprises a rack, a P L C controller, an image acquisition device, a conveying belt, a lifting clamp plate positioning mechanism, an adjusting platform, a double-side detection device, a transverse moving grabbing manipulator, an upper solar simulator and a lower solar simulator.
Description
Technical Field
The invention relates to the technical field of detection, in particular to a high-speed solar silicon wafer double-side detection machine and a double-side detection method thereof.
Background
The main component of the solar panel is a solar silicon wafer, and the quality of the solar silicon wafer directly affects the power generation efficiency of the solar panel, so that the solar silicon wafer needs to be detected in the production process of the solar silicon wafer.
Although the current solar silicon wafer detector can achieve the purpose of detecting the solar silicon wafer, only single-side detection can be performed, namely, only one surface of the solar silicon wafer can be detected at a time, when the other surface of the solar silicon wafer needs to be detected, the solar silicon wafer needs to be turned over, then a detection process is performed once, the operation is troublesome, and the detection period is long; and solar energy silicon chip all can have a certain amount of skew or the phenomenon of deflecting when conveyer belt transportation in-process, absorbing downwards at the manipulator and placing on detection device to lead to the error accumulation, finally influence the probe and can not accurate and the grid line of solar energy silicon chip and contact, lead to contact failure, influence and detect accurate nature, be difficult to ensure solar energy silicon chip quality.
Disclosure of Invention
In view of the above disadvantages, the present invention aims to provide a high-speed solar silicon wafer double-side detector with smart and reasonable structural design, fast detection speed and high accuracy.
The invention aims to achieve the aim, and the technical scheme is that the high-speed solar silicon wafer double-side detection machine comprises a rack, a P L C controller, an image acquisition device, a feeding conveyer belt, a lifting clamp plate positioning mechanism, an adjusting platform, a double-side detection device, a transverse moving grabbing manipulator, an upper solar simulator and a lower solar simulator, wherein the double-side detection device is arranged on the rack through the adjusting platform, the feeding conveyer belt and the feeding conveyer belt are correspondingly arranged at the two sides of the adjusting platform, the transverse moving grabbing manipulator is arranged on the rack corresponding to the position of the double-side detection device and can move an article fed onto the conveyer belt onto the double-side detection device and move an article on the double-side detection device onto the feeding conveyer belt, the upper solar simulator and the lower solar simulator are arranged on the rack corresponding to the upper and lower positions of the double-side detection device, the lifting clamp plate positioning mechanism is arranged on the rack corresponding to the position of the feeding conveyer belt and can align the article fed onto the conveyer belt, the image acquisition device is arranged on the rack, the lifting clamp plate positioning mechanism is connected with the upper lifting clamp plate, the lifting clamp plate positioning mechanism, the upper solar simulator, the feeding manipulator, the lifting clamp plate positioning mechanism and the upper solar simulator, the lifting clamp plate, the upper clamp.
As an improvement of the invention, the lifting clamping plate positioning mechanism comprises a clamping plate, a bottom plate, a rotary table, a linkage rod, linear guide rails, a sliding seat, a linear driving device and a rotary driving device, wherein the bottom plate is arranged on a driving part of the linear driving device, the rotary table is arranged at the geometric center of the bottom plate through a rotary shaft, the rotary driving device is arranged on the lower surface of the bottom plate and can drive the rotary table to rotate, a plurality of linear guide rails are distributed on the upper surface of the bottom plate in a radial shape by taking the rotary table as the center, the sliding seat is arranged on the linear guide rails, one end of the linkage rod is hinged on the sliding seat, the other end of the linkage rod is hinged on the rotary table, the sliding seat can be driven to reciprocate on the linear guide rails when the rotary table rotates, and the clamping plate is vertically.
As an improvement of the invention, the middle part of the clamping plate is provided with a notch, so that two sides of the clamping plate are symmetrically formed into a clamping jaw respectively, and the upper end surface of the clamping jaw is provided with a rubber rotating wheel; the rubber rotating wheel is more favorable for being matched with the solar silicon wafer, and the solar silicon wafer is not easy to be damaged.
As an improvement of the invention, the number of the linear guide rails is four, the outline of the bottom plate is in a cross shape, the self weight is effectively reduced, and meanwhile, the linear guide rails are convenient to install.
As an improvement of the invention, the bottom plate is provided with a bearing matched with the rotating shaft, the upper end of the rotating shaft is fixed on the bottom surface of the turntable, and the middle part of the rotating shaft is fixed on the inner ring of the bearing, so that the structure design is reasonable, and the rotation is smooth.
As an improvement of the invention, the rotary driving device comprises a motor, a driving wheel, a driven wheel and a belt, wherein the driving wheel is arranged on a driving shaft of the motor, the driven wheel is arranged at the lower end of the rotating shaft and is connected with the driving wheel through the belt, and the rotary driving device is simple in structure, easy to realize and high in running stability.
As an improvement of the invention, the linear driving device is an electric cylinder, and can control the accurate rotating speed and improve the working accuracy.
As an improvement of the invention, the upper surface of the sliding seat is provided with a positioning groove matched with the clamping plate, so that the clamping plate is convenient to quickly position and assemble, and the sliding seat is tightly matched and has good structural stability.
As an improvement of the invention, the transverse moving grabbing manipulator comprises a linkage plate, a transverse moving linear motor, lifting linear motors, a bracket and a vacuum suction nozzle, wherein the linkage plate is arranged on a rotor seat of the transverse moving linear motor, the two lifting linear motors are vertically arranged on the linkage plate side by side, the bracket is arranged on the rotor seat of the lifting linear motor, the vacuum suction nozzle is arranged on the upper surface of the bracket, and the suction nozzle of the vacuum suction nozzle is arranged upwards. The vacuum suction nozzle ascends to be attached and adsorbed with the solar silicon wafer, and the traditional vacuum suction nozzle is attached and adsorbed with the solar silicon wafer in a descending mode, so that the phenomenon that the solar silicon wafer is deformed or damaged due to the fact that the vacuum suction nozzle descends excessively easily occurs.
The bracket comprises a supporting arm and transverse supporting rods, one end of the supporting arm is bent upwards to form an installation part, the other end of the supporting arm is bent upwards to extend a certain distance to form a supporting part, the tail end of the supporting part is bent towards the installation part to form a front supporting part, the height position of the installation part corresponding to the front supporting part is provided with a rear supporting part, one end of each transverse supporting rod is arranged on the front supporting part or the rear supporting part corresponding to the transverse supporting rod respectively, the other end of each transverse supporting rod is arranged on the moving direction of the transverse linear motor, and the structural design is ingenious and reasonable.
Two supporting rods are symmetrically arranged on the opposite inner walls of the two transverse supporting rods, and mounting positions for mounting the vacuum suction nozzle are arranged on the supporting rods; the bracket arm is internally provided with a main vacuum pipeline, the transverse bracket rod is internally provided with a branch pipeline communicated with the main vacuum pipeline, the branch pipeline is communicated with the installation position, and a pipeline of a vacuum pumping system is butted with the main vacuum pipeline. The main vacuum pipeline and the branch pipelines adopt built-in structures, the appearance is concise, and meanwhile the phenomenon of interference action caused by the exposure of the air pipes is avoided.
The installation part of the bracket arm is provided with an installation hole, so that convenience is brought to installation. And a rotor base of the lifting linear motor is provided with a threaded hole corresponding to the mounting hole. The screw passes through the mounting hole and is screwed into the threaded hole, and the mounting is realized by locking.
As an improvement of the present invention, the adjusting platform comprises a fixed plate, a platform plate and three groups of linear driving assemblies, wherein two groups of linear driving assemblies are longitudinally arranged on the fixed plate side by side, the other group of linear driving assemblies are transversely arranged on the fixed plate, three axial columns are symmetrically arranged on the platform plate in a circle center manner, and the three axial columns are respectively arranged on the driving parts of the linear driving assemblies corresponding to the three axial columns. The rotation angle and the offset position of the platform plate are correspondingly controlled by controlling the action of each group of linear driving assemblies.
As an improvement of the present invention, the linear driving assembly includes an adjusting servo motor, a ball screw, a first direction slide rail, a second direction slide rail and a second direction slide rail, the first direction slide rail is disposed on a fixed plate, the first direction slide rail is movably disposed on the first direction slide rail, the adjusting servo motor is disposed on the fixed plate and drives the first direction slide rail to reciprocate on the first direction slide rail through the ball screw, the second direction slide rail is disposed on the first direction slide rail, and the second direction slide rail is movably disposed on the second direction slide rail to form a driving component of the linear driving assembly; the platform plate is provided with a bearing seat, the shaft column is arranged on a bearing of the bearing seat, and the lower end of the shaft column is fixed with the sliding seat in the second direction; the platform plate is eccentrically provided with an installation block for installing the double-sided detection device, and the installation block is provided with a positioning column.
As an improvement of the invention, the double-sided detection device comprises a support, a lower probe bent frame, an upper probe bent frame, a lifting servo motor, a ball screw and a lifting plate, wherein the lower probe bent frame is fixed on the front side of the support, the lifting plate is arranged on the support through a linear slide rail assembly corresponding to the upper position of the lower probe bent frame, the upper probe bent frame is arranged on the lifting plate and is aligned with the upper probe bent frame, the lifting servo motor is arranged on the support and drives the upper probe bent frame to move close to or separate from the lower probe bent frame through the ball screw, an upper probe with a downward direction is arranged on the upper probe bent frame, and a lower probe with an upward direction is arranged on the lower probe bent frame. The bottom surface of the support is provided with a positioning hole corresponding to the positioning column, so that the support can be conveniently and quickly positioned and installed.
As an improvement of the invention, a lower tripod is arranged at the joint of the lower probe bent frame and the support; an upper tripod is arranged at the joint of the upper probe bent frame and the lifting plate; and a lower tripod and an upper tripod are additionally arranged, so that the structural stability is effectively enhanced.
A double-sided detection method for a solar silicon wafer comprises the following steps:
(1) conveying the silicon wafer to a conveying belt to convey the solar silicon wafer forwards;
(2) when the solar silicon wafer moves to the position of the lifting clamping plate positioning mechanism, the solar silicon wafer is conveyed to the conveying belt to stop conveying;
(3) the lifting clamping plate positioning mechanism rises to a preset height and then is folded to align the solar silicon wafer;
(4) after the solar silicon wafers are straightened, the lifting clamping plate positioning mechanism descends to an initial position, and the solar silicon wafers are conveyed to a conveying belt to be started to continuously convey the solar silicon wafers forwards;
(5) when the solar silicon wafers move to a preset feeding position, the solar silicon wafers are conveyed to a conveying belt to stop conveying;
(6) the transverse moving grabbing manipulator grabs the solar silicon wafer and rises to a preset height, so that the solar silicon wafer leaves and is conveyed to the conveying belt;
(7) the image acquisition device shoots the solar silicon wafer grabbed by the transverse moving grabbing manipulator, the image acquisition device transmits shot image information to the P L C controller, the P L C controller analyzes the image information to obtain the position coordinate and the deflection angle of the solar silicon wafer grabbed by the transverse moving grabbing manipulator, and the P L C controller controls the adjusting platform to make corresponding position adjustment according to the position coordinate and the deflection angle so as to correspondingly adjust the position of the double-sided detection device and ensure that the upper probe and the lower probe of the double-sided detection device are accurately aligned with the grid line of the solar silicon wafer;
(8) when the transverse moving grabbing manipulator moves the solar silicon wafer to a position above a lower probe of the double-side detection device, an upper probe of the double-side detection device moves downwards to be in contact with the solar silicon wafer, the solar silicon wafer is stably pressed on the transverse moving grabbing manipulator, then the upper probe of the double-side detection device and the transverse moving grabbing manipulator synchronously move downwards to stably place the solar silicon wafer on the lower probe, the solar silicon wafer is clamped through the upper probe and the lower probe, and the upper probe and the lower probe are just in contact with grid lines of the upper surface and the lower surface of the solar silicon wafer;
(9) the transverse moving grabbing manipulator loosens the solar silicon wafer and retreats, the upper solar simulator and the lower solar simulator work simultaneously, generated upper and lower simulated sunlight correspondingly irradiates the upper and lower surfaces of the solar silicon wafer, power generation information generated by the upper and lower surfaces of the solar silicon wafer is transmitted to the P L C controller through the upper and lower probes, and is analyzed and processed by the P L C controller, so that the purpose of double-sided detection of the solar silicon wafer is achieved;
(10) after the detection is finished, the transverse moving grabbing mechanical arm grabs the detected solar silicon wafer, an upper probe of the double-side detection device moves upwards to loosen the solar silicon wafer, and the transverse moving grabbing mechanical arm moves the solar silicon wafer to a conveying belt to finish the detection purpose.
As an improvement of the invention, in the step (10), when the transverse moving grabbing manipulator moves the solar silicon wafer to the sending-out conveyor belt, another solar silicon wafer to be detected is also placed on the double-sided detection device, so that the purpose of feeding while discharging is achieved, and the working efficiency is improved.
The invention has the beneficial effects that: the solar silicon wafer double-side detection device is ingenious in structural design, the upper solar simulator and the lower solar simulator are reasonably arranged, and the upper surface and the lower surface of the solar silicon wafer can be simultaneously detected through the matching of the double-side detection device, so that the aim of double-side detection is fulfilled, and the working efficiency is effectively improved; the solar silicon wafers sent to the conveying belt are initially aligned through the lifting clamping plate positioning mechanism, so that the problem that the solar silicon wafers move due to vibration in the conveying process is solved; the image acquisition device carries out shooting analysis and alignment after the transverse moving grabbing manipulator grabs the solar silicon wafer, so that the problem that the transverse moving grabbing manipulator moves when contacting and adsorbing the solar silicon wafer is solved; in addition, when the solar silicon wafer is placed for detection, the upper probe of the double-side detection device is used for descending to be in contact with the solar silicon wafer, the solar silicon wafer is pressed and stabilized on the transverse moving grabbing mechanical arm, then the upper probe of the double-side detection device and the transverse moving grabbing mechanical arm synchronously descend to stably place the solar silicon wafer on the lower probe, accordingly, the movement generated when the transverse moving grabbing mechanical arm releases the solar silicon wafer is eliminated, the upper probe and the lower probe can be effectively ensured to be accurately in contact with grid lines on the upper surface and the lower surface of the solar silicon wafer, the poor contact phenomenon is avoided, the detection accuracy is improved, and the product quality is ensured.
Drawings
Fig. 1 is a schematic front view of the present invention.
Fig. 2 is a schematic view of the internal structure of the present invention.
Fig. 3 is a schematic front view of the positioning mechanism of the lifting clamp plate of the present invention.
Fig. 4 is a schematic sectional structure view of a-a in fig. 3.
Fig. 5 is a schematic top view of the positioning mechanism for lifting clamp plate of the present invention.
Fig. 6 is a schematic perspective view of the positioning mechanism for lifting splints according to the present invention.
Fig. 7 is a schematic perspective view of the traverse grabbing robot of the present invention.
FIG. 8 is a schematic diagram of a side view of the traverse grasping robot according to the present invention.
Fig. 9 is a schematic structural view of the bracket of the present invention.
FIG. 10 is a schematic structural diagram of an adjusting platform and a double-sided detection device according to the present invention.
FIG. 11 is a schematic top view of the adjustment platform of the present invention.
Fig. 12 is a schematic elevation structure view of the adjustment platform of the present invention.
Fig. 13 is a perspective view of the linear driving assembly of the present invention.
Fig. 14 is a schematic perspective view of a double-sided detection device according to the present invention.
FIG. 15 is a schematic cross-sectional view of a double-sided detection device according to the present invention.
Detailed Description
Embodiment referring to fig. 1 to 15, the high-speed solar silicon wafer double-side detection machine provided by the embodiment of the invention comprises a rack 1, a P L C controller, an image acquisition device 2, a feeding conveyer belt 3, a feeding conveyer belt 4, a lifting clamp plate positioning mechanism 5, an adjusting platform 6, a double-side detection device 7, a traverse grabbing manipulator 8, an upper solar simulator 9 and a lower solar simulator 10.
The double-side detection device 7 is arranged on the rack 1 through the adjusting platform 6, the feeding conveyer belt 3 and the feeding conveyer belt 4 are correspondingly arranged at the two sides of the adjusting platform 6, the transverse moving grabbing manipulator 8 is arranged on the rack 1 at the position corresponding to the double-side detection device 7 and can move an article fed on the conveyer belt 3 to the double-side detection device 7 and move an article on the double-side detection device 7 to the feeding conveyer belt 4, the upper solar simulator 9 and the lower solar simulator 10 are arranged on the rack 1 at the upper and lower positions corresponding to the double-side detection device 7, the lifting splint positioning mechanism 5 is arranged on the rack 1 at the position corresponding to the feeding conveyer belt 3 and can adjust the article fed on the conveyer belt 3, the image acquisition device 2 is arranged on the rack 1 at the upper position corresponding to the feeding conveyer belt 3 and can shoot the article adjusted by the lifting splint positioning mechanism 5, and the image acquisition device 2, the feeding conveyer belt 3, the feeding conveyer belt 4, the lifting splint positioning mechanism 5, the adjusting platform 6, the double-side detection device 7, the upper transverse moving manipulator 9 and the lower solar simulator 8910 are respectively connected with the solar simulator L and controlled by the control unit.
Referring to fig. 3-6, the lifting clamp plate positioning mechanism 5 includes a clamp plate 51, a bottom plate 52, a turntable 53, a linkage rod 54, a linear guide rail 55, a slide 56, a linear driving device 57 and a rotary driving device 58.
The base plate 52 is disposed on a driving part of a linear driving device 57, and the linear driving device 57 is preferably an electric cylinder, and can control a precise rotation speed and rotation number to improve working accuracy. The linear driving device 57 drives the control base plate 52 to move up and down.
The turntable 53 is arranged at the geometric center of the base plate 52 through a rotating shaft 59, specifically, a bearing matched with the rotating shaft 59 is arranged on the base plate 52, the upper end of the rotating shaft 59 is fixed on the bottom surface of the turntable 53, and the middle part of the rotating shaft 59 is fixed on the inner ring of the bearing, so that the structure design is reasonable, and the rotation is smooth.
The rotary driving device 58 is disposed on the lower surface of the bottom plate 52 and can drive the turntable 53 to rotate, specifically, the rotary driving device 58 includes a motor 581, a driving wheel 582, a driven wheel 583 and a belt 584, the driving wheel 582 is disposed on a driving shaft of the motor 581, the driven wheel 583 is disposed at the lower end of the rotating shaft 59 and is connected with the driving wheel 582 through the belt 584, and the rotary driving device is simple in structure, easy to implement and high in running stability.
The plurality of linear guide rails 55 are distributed on the upper surface of the base plate 52 in a radial shape with the turntable 53 as the center, in the embodiment, the number of the linear guide rails 55 is four, the outline of the base plate 52 is in a cross shape, so that the linear guide rails 55 are effectively lightened, and meanwhile, the linear guide rails 55 are convenient to install. Four linear guides 55 are symmetrically disposed at the branched portions of the base plate 52.
One end of the linkage rod 54 is hinged on the sliding seat 56, the other end is hinged on the turntable 53, and the sliding seat 56 can be driven to reciprocate on the linear guide rail 55 when the turntable 53 rotates, so that the four clamping plates 51 are driven to move close to or apart from each other relatively.
When the solar silicon wafer aligning and positioning device works, the linear driving device 57 drives the bottom plate 52 to move upwards to enable the clamping plates 51 to extend to the outer side position of the periphery of the solar silicon wafer conveyed by the conveying belt 3, at this time, the rotary driving device 58 drives the rotary table 53 to rotate, the four clamping plates 51 are driven to relatively move together through the linkage rod 54 to align the solar silicon wafer, after the alignment, the rotary driving device 58 drives the rotary table 53 to reversely rotate to enable the four clamping plates 51 to return to the original position, the linear driving device 57 drives the bottom plate 52 to move downwards to return to the original position, the overall alignment and positioning effect is good, the problem that the solar silicon wafer moves due to vibration in the conveying process is effectively solved, and convenience is brought to subsequent processes.
Referring to fig. 7-9, the traverse grabbing manipulator 8 comprises a linkage plate 81, a traverse linear motor 82, a lifting linear motor 83, a bracket 84 and a vacuum suction nozzle 85, wherein the linkage plate 81 is arranged on a rotor base of the traverse linear motor 82, the two lifting linear motors 83 are vertically arranged on the linkage plate 81 side by side, the bracket 84 is arranged on the rotor base of the lifting linear motor 83, the vacuum suction nozzle 85 is arranged on the upper surface of the bracket 84, and the suction nozzle of the vacuum suction nozzle 85 faces upwards. The vacuum suction nozzle 85 ascends to adhere to and adsorb the solar silicon wafer, while the traditional vacuum suction nozzle 85 descends to adhere to and adsorb the solar silicon wafer, so that the phenomenon that the solar silicon wafer is deformed or damaged due to the fact that the vacuum suction nozzle 85 descends excessively easily occurs.
Two supporting rods 8421 are symmetrically arranged on the opposite inner walls of the two transverse supporting rods 842, and the supporting rods 8421 are provided with mounting positions for mounting the vacuum suction nozzles 85; a main vacuum pipeline is arranged in the supporting arm 841, a branch pipeline communicated with the main vacuum pipeline is arranged in the transverse supporting rod 842, the branch pipeline is communicated with the installation position, and a pipeline of a vacuum pumping system is butted with the main vacuum pipeline. The main vacuum pipeline and the branch pipelines adopt built-in structures, the appearance is concise, and meanwhile the phenomenon of interference action caused by the exposure of the air pipes is avoided.
And the mounting part 8411 of the bracket 841 is provided with a mounting hole, so that convenience is brought to mounting. And a rotor base of the lifting linear motor 83 is provided with a threaded hole corresponding to the mounting hole. The screw passes through the mounting hole and is screwed into the threaded hole, and the mounting is realized by locking.
The transverse movement and the lifting movement of the transverse movement grabbing manipulator 8 are realized by adopting a linear motor, compared with the traditional ball screw structure, an additional device for changing rotary movement into linear movement is not needed, the structure is effectively simplified, the weight and the volume are reduced, and direct transmission can be realized, so that various positioning errors caused by intermediate links can be eliminated, and the positioning precision is high; and the reaction speed is fast, the sensitivity is high, the follow-up property is good, in addition, the whole structure is simple, the work is safe and reliable, and the service life is long.
Referring to fig. 11-13, the adjusting platform 6 includes a fixing plate 61, a platform plate 62 and three sets of linear driving assemblies 63, wherein two sets of linear driving assemblies 63 are longitudinally arranged on the fixing plate 61 side by side, the other set of linear driving assemblies 63 is transversely arranged on the fixing plate 61, three axial columns 64 are symmetrically arranged on the platform plate 62 in a circle center manner, and the three axial columns 64 are respectively arranged on the driving parts of the linear driving assemblies 63 corresponding to the three axial columns 64.
The linear driving assembly 63 includes an adjusting servomotor 631, a ball screw 632, a first direction slide rail 633, a first direction slide carriage 634, a second direction slide rail 635, and a second direction slide carriage 636, wherein the first direction slide rail 633 is disposed on the fixed plate 61, the first direction slide carriage 634 is movably disposed on the first direction slide rail 633, the adjusting servomotor 631 is disposed on the fixed plate 61 and drives the first direction slide carriage 634 to reciprocate on the first direction slide rail 633 via the ball screw 632, the second direction slide rail 635 is disposed on the first direction slide carriage 634, and the second direction slide carriage 636 is movably disposed on the second direction slide rail 635 to form a driving component of the linear driving assembly 63; a bearing seat is arranged on the platform plate 62, the shaft column 64 is arranged on a bearing of the bearing seat, and the lower end of the shaft column 64 is fixed with the second direction sliding seat 636; an installation block 65 for installing the double-sided detection device 7 is eccentrically arranged on the platform plate 62, and a positioning column is arranged on the installation block 65.
Referring to fig. 14 and 15, the double-side detection device 7 includes a support 71, a lower probe bent 72, an upper probe bent 73, a lifting servo motor 74, a ball screw 75, and a lifting plate 76, the lower probe bent 72 is fixed on the front of the support 71, the lifting plate 76 is disposed on the support 71 through a linear slide rail assembly corresponding to the upper position of the lower probe bent 72, the upper probe bent 73 is disposed on the lifting plate 76 and is opposite to the upper probe bent 73, the lifting servo motor 74 is disposed on the support 71 and drives the upper probe bent 73 to move closer to or away from the lower probe bent 72 through the ball screw 75, an upper probe 79 facing downward is disposed on the upper probe bent 73, and a lower probe 70 facing upward is disposed on the lower probe bent 72. The bottom surface of the support 71 is provided with a positioning hole corresponding to the positioning column, so that the support 71 is conveniently and quickly positioned and installed.
A lower tripod 77 is arranged at the joint of the bent frame 72 of the lower probe 70 and the bracket 71; an upper tripod 78 is arranged at the joint of the upper probe 79 bent frame 73 and the lifting plate 76; and a lower tripod 77 and an upper tripod 78 are additionally arranged, so that the structural stability is effectively enhanced.
During operation, the action through controlling each group of linear drive assembly 63 comes corresponding control platform board 62's rotation angle and skew position, and then drives two-sided detection device 7 and moves to corresponding position to accurately accept the sideslip and snatch the solar wafer that manipulator 8 transferred and come, through last probe 79, the accurate grid line with the upper and lower surface of solar wafer of lower probe 70 contacts, can realize detecting the upper and lower surface of solar wafer simultaneously, realize two-sided detection's purpose, effectively promote work efficiency.
When the high-speed solar silicon wafer double-sided detection machine works, the working steps of the high-speed solar silicon wafer double-sided detection machine are as follows:
(1) the P L C controller controls the conveyer belt 3 to convey the solar silicon wafer forwards;
(2) when the solar silicon wafer moves to the position of the lifting clamping plate positioning mechanism 5, the position sensor at the position senses a feedback signal to the P L C controller, and the P L C controller controls the conveying belt 3 to stop conveying;
(3) the P L C controller controls the lifting clamp plate positioning mechanism 5 to rise to a preset height and then fold to align the solar silicon wafer, and the lifting clamp plate positioning mechanism 5 primarily aligns the solar silicon wafer sent to the conveying belt 3 to eliminate the problem that the solar silicon wafer moves due to vibration in the conveying process;
(4) after the solar silicon wafers are straightened, the P L C controller controls the lifting clamp plate positioning mechanism 5 to descend to the initial position, and the P L C controller controls the conveying belt 3 to start to continuously convey the solar silicon wafers forwards;
(5) when the solar silicon wafer moves to a preset loading position, the position sensor at the position senses a feedback signal to the P L C controller, and the P L C controller controls the conveying belt 3 to stop conveying;
(6) the P L C controller controls the transverse moving grabbing manipulator 8 to grab the solar silicon wafer and lift the solar silicon wafer to a preset height, so that the solar silicon wafer leaves and is conveyed to the conveying belt 3;
(7) the P L C controller controls the image acquisition device 2 to shoot the solar silicon wafer grabbed by the transverse grabbing manipulator 8, the image acquisition device 2 transmits shot image information to the P L C controller, and the P L C controller analyzes the image information to obtain the position coordinate and the deflection angle of the solar silicon wafer grabbed by the transverse grabbing manipulator 8, the traditional method is to grab the solar silicon wafer after shooting, and then the problem of movement is generated during grabbing, the image acquisition device 2 of the invention carries out shooting analysis contraposition after the transverse grabbing manipulator 8 grabs the solar silicon wafer, so that the problem of movement generated when the transverse grabbing manipulator 8 contacts and adsorbs the solar silicon wafer is correspondingly eliminated, the P L C controller controls the adjusting platform 6 to carry out corresponding position adjustment according to the obtained position coordinate and the deflection angle to correspondingly adjust the position of the double-sided detection device 7, and the upper probe 79 and the lower probe 70 of the double-sided detection device 7 are accurately aligned with the grid line of the solar silicon wafer;
(8) when the P L C controller controls the traversing grabbing manipulator 8 to move the solar silicon wafer to a position above the lower probe 70 of the double-sided detection device 7, the P L C controller controls the upper probe 79 of the double-sided detection device 7 to move downwards to contact with the solar silicon wafer, the solar silicon wafer is stably pressed on the traversing grabbing manipulator 8, then the P L C controller controls the upper probe 79 and the traversing grabbing manipulator 8 of the double-sided detection device 7 to synchronously move downwards to stably place the solar silicon wafer on the lower probe 70, the solar silicon wafer is clamped through the upper probe 79 and the lower probe 70, and the upper probe 79 and the lower probe 70 are just in contact with grid lines of the upper surface and the lower surface of the solar silicon wafer;
(9) the P L C controller controls the traversing grabbing manipulator 8 to loosen the solar silicon wafer and withdraw, the P L C controller controls the upper solar simulator 9 and the lower solar simulator 10 to work simultaneously, upper and lower simulated sunlight generated by the upper solar simulator 9 and the lower solar simulator 10 correspondingly irradiates the upper and lower surfaces of the solar silicon wafer, power generation information generated by the upper and lower surfaces of the solar silicon wafer is transmitted to the P L C controller through the upper probe 79 and the lower probe 70, the P L C controller analyzes and processes the power generation information, such as current, voltage and power, generated by the solar silicon wafer is correspondingly obtained, and the purpose of double-sided detection of the solar silicon wafer is achieved;
(10) after the detection is finished, the P L C controller controls the transverse moving grabbing manipulator 8 to grab the detected solar silicon wafer, the P L C controller controls the upper probe 79 of the double-sided detection device 7 to move upwards to loosen the solar silicon wafer, and the P L C controller controls the transverse moving grabbing manipulator 8 to move the solar silicon wafer to the delivery conveyor belt 4.
Finally, the P L C controller controls the sending-out conveyer belt 4 to send the solar silicon wafer to a preset position.
Variations and modifications to the above-described embodiments may occur to those skilled in the art, which fall within the scope and spirit of the above description. Therefore, the present invention is not limited to the specific embodiments disclosed and described above, and some modifications and variations of the present invention should fall within the scope of the claims of the present invention. Furthermore, although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation. Other devices and detection methods using the same or similar structures as those described in the above embodiments of the present invention are within the scope of the present invention.
Claims (10)
1. A high-speed solar silicon wafer double-side detection machine comprises a machine frame, and is characterized by further comprising a P L C controller, an image acquisition device, a feeding conveyer belt, a lifting clamp plate positioning mechanism, an adjusting platform, a double-side detection device, a transverse moving grabbing manipulator, an upper solar simulator and a lower solar simulator, wherein the double-side detection device is arranged on the machine frame through the adjusting platform, the feeding conveyer belt and the feeding conveyer belt are correspondingly arranged at the positions on two sides of the adjusting platform, the transverse moving grabbing manipulator is arranged on the machine frame corresponding to the position of the double-side detection device and can move an article fed onto the double-side detection device onto the feeding conveyer belt, the upper solar simulator and the lower solar simulator are arranged on the machine frame corresponding to the upper position and the lower position of the double-side detection device, the lifting clamp plate positioning mechanism is arranged on the machine frame corresponding to the position of the feeding conveyer belt and can adjust the article fed onto the conveying belt, the image acquisition device is arranged on the machine frame corresponding to the transverse moving manipulator, and can shoot the article picked by the transverse moving manipulator, the image acquisition controller L, the image acquisition device, the lifting clamp plate and the upper solar simulator, the upper solar simulator and the upper solar simulator are respectively connected with the adjusting manipulator, the lifting clamp plate and the.
2. The high-speed solar silicon wafer double-sided inspection machine of claim 1, the lifting clamping plate positioning mechanism comprises a clamping plate, a bottom plate, a turntable, a linkage rod, a linear guide rail, a sliding seat, a linear driving device and a rotary driving device, the bottom plate is arranged on a driving part of the linear driving device, the turntable is arranged at the geometric center of the bottom plate through a rotating shaft, the rotary driving device is arranged on the lower surface of the bottom plate, and can drive the turntable to rotate, a plurality of linear guide rails are distributed on the upper surface of the bottom plate in a radial shape by taking the turntable as a center, the sliding seat is arranged on the linear guide rail, one end of the linkage rod is hinged on the sliding seat, the other end is hinged on the turntable, and when the turntable rotates, the sliding seat can be driven to do reciprocating motion on the linear guide rail, and the clamping plate is vertically arranged on the sliding seat.
3. The high-speed solar silicon wafer double-side detection machine as claimed in claim 2, wherein a notch is formed in the middle of the clamping plate to enable two sides to be symmetrical to form a clamping jaw respectively, and a rubber rotating wheel is arranged on the upper end face of each clamping jaw; the outline of the bottom plate is in a cross shape; the number of the linear guide rails is four; the bottom plate is provided with a bearing matched with the rotating shaft, the upper end of the rotating shaft is fixed on the bottom surface of the turntable, and the middle part of the rotating shaft is fixed on the inner ring of the bearing; the rotary driving device comprises a motor, a driving wheel, a driven wheel and a belt, wherein the driving wheel is arranged on a driving shaft of the motor, and the driven wheel is arranged at the lower end of the rotating shaft and is connected with the driving wheel through the belt; the linear driving device is an electric cylinder; the upper surface of the sliding seat is provided with a positioning groove matched with the clamping plate.
4. The high-speed solar silicon wafer double-sided detection machine as claimed in claim 1, wherein the traverse grabbing manipulator comprises a linkage plate, a traverse linear motor, a lifting linear motor, a bracket and a vacuum suction nozzle, the linkage plate is arranged on a rotor base of the traverse linear motor, the two lifting linear motors are vertically arranged on the linkage plate side by side, the bracket is arranged on the rotor base of the lifting linear motor, the vacuum suction nozzle is arranged on the upper surface of the bracket, and the suction nozzle of the vacuum suction nozzle is arranged upwards;
the bracket comprises a supporting arm and transverse supporting rods, one end of the supporting arm is bent upwards to form an installation part, the other end of the supporting arm is bent upwards and extends vertically for a certain distance to form a supporting part, the tail end of the supporting part is bent towards the installation part to form a front supporting part, the installation part is provided with a rear supporting part at a height position corresponding to the front supporting part, one end of each transverse supporting rod is arranged on the front supporting part or the rear supporting part corresponding to the transverse supporting rod, and the other end of each transverse supporting rod extends along the moving direction of the transverse linear motor; two supporting rods are symmetrically arranged on the opposite inner walls of the two transverse supporting rods, and mounting positions for mounting the vacuum suction nozzle are arranged on the supporting rods; a main vacuum pipeline is arranged in the supporting arm, a branch pipeline communicated with the main vacuum pipeline is arranged in the transverse supporting rod, and the branch pipeline is communicated with the installation position; and the rotor base of the lifting linear motor is provided with a threaded hole corresponding to the mounting hole.
5. The double-sided detection machine for the high-speed solar silicon wafer according to claim 1, wherein the adjustment platform comprises a fixed plate, a platform plate and three groups of linear driving assemblies, wherein two groups of linear driving assemblies are longitudinally arranged on the fixed plate side by side, the other group of linear driving assemblies are transversely arranged on the fixed plate, three axial columns are symmetrically arranged on the platform plate in a circle center manner, and the three axial columns are respectively arranged on the driving parts of the linear driving assemblies corresponding to the three axial columns.
6. The high-speed double-sided solar silicon wafer detector according to claim 5, wherein the linear driving assembly comprises an adjusting servo motor, a ball screw, a first direction slide rail, a second direction slide rail and a second direction slide rail, the first direction slide rail is arranged on the fixed plate, the first direction slide rail is movably arranged on the first direction slide rail, the adjusting servo motor is arranged on the fixed plate and drives the first direction slide rail to reciprocate on the first direction slide rail through the ball screw, the second direction slide rail is arranged on the first direction slide rail, and the second direction slide rail is movably arranged on the second direction slide rail to form a driving part of the linear driving assembly; the platform plate is provided with a bearing seat, the shaft column is arranged on a bearing of the bearing seat, and the lower end of the shaft column is fixed with the sliding seat in the second direction; the platform plate is eccentrically provided with an installation block for installing the double-sided detection device, and the installation block is provided with a positioning column.
7. The high-speed double-sided detection machine for the solar silicon wafers as claimed in claim 6, wherein the double-sided detection device comprises a support, a lower probe bent, an upper probe bent, a lifting servo motor, a ball screw and a lifting plate, the lower probe bent is fixed on the front of the support, the lifting plate is arranged on the support through a linear slide rail assembly at a position corresponding to the upper part of the lower probe bent, the upper probe bent is arranged on the lifting plate and aligned with the upper probe bent, the lifting servo motor is arranged on the support and drives the upper probe bent to move close or separate relative to the lower probe bent through the ball screw, an upper probe with a downward direction is arranged on the upper probe bent, and a lower probe with an upward direction is arranged on the lower probe bent.
8. The high-speed solar silicon wafer double-sided detection machine as claimed in claim 7, wherein a lower tripod is arranged at the joint of the lower probe bent and the support; an upper tripod is arranged at the joint of the upper probe bent frame and the lifting plate; and the bottom surface of the support is provided with a positioning hole corresponding to the positioning column.
9. A solar silicon wafer double-sided detection method is characterized by comprising the following steps:
(1) conveying the silicon wafer to a conveying belt to convey the solar silicon wafer forwards;
(2) when the solar silicon wafer moves to the position of the lifting clamping plate positioning mechanism, the solar silicon wafer is conveyed to the conveying belt to stop conveying;
(3) the lifting clamping plate positioning mechanism rises to a preset height and then is folded to align the solar silicon wafer;
(4) after the solar silicon wafers are straightened, the lifting clamping plate positioning mechanism descends to an initial position, and the solar silicon wafers are conveyed to a conveying belt to be started to continuously convey the solar silicon wafers forwards;
(5) when the solar silicon wafers move to a preset feeding position, the solar silicon wafers are conveyed to a conveying belt to stop conveying;
(6) the transverse moving grabbing manipulator grabs the solar silicon wafer and rises to a preset height, so that the solar silicon wafer leaves and is conveyed to the conveying belt;
(7) the image acquisition device shoots the solar silicon wafer grabbed by the transverse moving grabbing manipulator, the image acquisition device transmits shot image information to the P L C controller, the P L C controller analyzes the image information to obtain the position coordinate and the deflection angle of the solar silicon wafer grabbed by the transverse moving grabbing manipulator, and the P L C controller controls the adjusting platform to make corresponding position adjustment according to the position coordinate and the deflection angle so as to correspondingly adjust the position of the double-sided detection device and ensure that the upper probe and the lower probe of the double-sided detection device are accurately aligned with the grid line of the solar silicon wafer;
(8) when the transverse moving grabbing manipulator moves the solar silicon wafer to a position above a lower probe of the double-side detection device, an upper probe of the double-side detection device moves downwards to be in contact with the solar silicon wafer, the solar silicon wafer is stably pressed on the transverse moving grabbing manipulator, then the upper probe of the double-side detection device and the transverse moving grabbing manipulator synchronously move downwards to stably place the solar silicon wafer on the lower probe, the solar silicon wafer is clamped through the upper probe and the lower probe, and the upper probe and the lower probe are just in contact with grid lines of the upper surface and the lower surface of the solar silicon wafer;
(9) the transverse moving grabbing manipulator loosens the solar silicon wafer and retreats, the upper solar simulator and the lower solar simulator work simultaneously, generated upper and lower simulated sunlight correspondingly irradiates the upper and lower surfaces of the solar silicon wafer, power generation information generated by the upper and lower surfaces of the solar silicon wafer is transmitted to the P L C controller through the upper and lower probes, and is analyzed and processed by the P L C controller, so that the purpose of double-sided detection of the solar silicon wafer is achieved;
(10) after the detection is finished, the transverse moving grabbing mechanical arm grabs the detected solar silicon wafer, an upper probe of the double-side detection device moves upwards to loosen the solar silicon wafer, and the transverse moving grabbing mechanical arm moves the solar silicon wafer to a conveying belt to finish the detection purpose.
10. The double-sided inspection method for the solar silicon wafer as claimed in claim 9, wherein in the step (10), while the traverse grabbing robot moves the solar silicon wafer to the delivery conveyor belt, another solar silicon wafer to be inspected is also placed on the double-sided inspection device.
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| CN202010280193.6A CN111489982A (en) | 2020-04-10 | 2020-04-10 | High-speed solar silicon wafer double-side detection machine and double-side detection method thereof |
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| CN202010280193.6A CN111489982A (en) | 2020-04-10 | 2020-04-10 | High-speed solar silicon wafer double-side detection machine and double-side detection method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116809468A (en) * | 2023-08-31 | 2023-09-29 | 山东汉方自动化有限公司 | Automatic test and sorting machine for solar panels |
| CN116880460A (en) * | 2023-08-22 | 2023-10-13 | 武汉汉非科技有限公司 | Automatic detection device and detection method for solar energy controller |
| CN117438501A (en) * | 2023-11-09 | 2024-01-23 | 薛城区质量计量检测中心 | Solar cell detection device and method |
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2020
- 2020-04-10 CN CN202010280193.6A patent/CN111489982A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116880460A (en) * | 2023-08-22 | 2023-10-13 | 武汉汉非科技有限公司 | Automatic detection device and detection method for solar energy controller |
| CN116809468A (en) * | 2023-08-31 | 2023-09-29 | 山东汉方自动化有限公司 | Automatic test and sorting machine for solar panels |
| CN116809468B (en) * | 2023-08-31 | 2023-11-14 | 山东汉方自动化有限公司 | Automatic test and sorting machine for solar panels |
| CN117438501A (en) * | 2023-11-09 | 2024-01-23 | 薛城区质量计量检测中心 | Solar cell detection device and method |
| CN117438501B (en) * | 2023-11-09 | 2024-03-29 | 薛城区质量计量检测中心 | Solar cell detection device and method |
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Address after: 523000 Building 2, 11 Jinfu West Road, Tangchun, Liaobu Town, Dongguan City, Guangdong Province Applicant after: Guangdong kelongwei Intelligent Equipment Co.,Ltd. Address before: Shi Bu Cun Shi Da Lu, Liaobu Town, Dongguan City, Guangdong Province Applicant before: FOLUNGWIN AUTOMATIC EQUIPMENT Co.,Ltd. |