CN218568784U - Rotating shaft mounting structure of horizontal wafer spin dryer and wafer spin dryer - Google Patents

Abstract

The utility model discloses a pivot mounting structure and wafer drier of horizontal wafer drier, this pivot mounting structure is including a spin-drying section of thick bamboo, swivel mount and pivot, the top of pivot is passed a spin-drying section of thick bamboo and can be fixed in on the swivel mount through the connecting piece with dismouting, the connecting piece includes the connection pad, the center department of the terminal surface of connection pad is provided with the location boss, the center department of the bottom surface of connection pad is provided with down the location boss, the center department of the top end face of pivot has seted up the locating hole, the center department of connection pad is provided with the connecting hole, threaded hole has been seted up to the bottom of locating hole, the connection pad is fixed in on the swivel mount, it is located the mounting hole to go up the location boss, it is located the locating hole down to fix a position the boss, connecting bolt passes the connecting hole and locks in the threaded hole and fixes connecting piece and pivot. The rotating shaft mounting structure is ingenious in design and easy to realize; and the concentricity of the connection between the rotating shaft and the bottom plate of the rotating frame is greatly improved, and the high-speed rotating stability of the rotating frame is improved.

Description

Rotating shaft mounting structure of horizontal wafer spin dryer and wafer spin dryer

Technical Field

The utility model relates to a horizontal wafer drier especially relates to a pivot mounting structure and wafer drier of horizontal wafer drier.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be processed and manufactured on the silicon wafer to form electronic component products with specific electrical functions. As the size of the integrated circuit on the semiconductor wafer is developed to the micron level, the requirement for cleaning the semiconductor wafer in the manufacturing process is higher and higher, and especially, the semiconductor wafer is polluted by dust particles and metals in the manufacturing process, which can easily cause the damage of the circuit function in the chip, form short circuit or open circuit, and the like, thereby causing the failure of the integrated circuit and affecting the formation of the geometric characteristics. Therefore, in the manufacturing process, in addition to the removal of external pollution sources, cleaning is also required to effectively remove impurities such as micro-dust, metal ions, and organic matters remaining on the wafer by using chemical solution or gas without damaging the surface characteristics and the electrical characteristics of the wafer.

The wet cleaning process is a commonly used cleaning process for wafers, the wafers need to be dried after the cleaning process is completed, and the wafer drying machine is used for drying the surfaces of the wet wafers through rotation. A horizontal spin dryer is a common spin dryer. As is well known, a horizontal spin dryer includes a rotating shaft connected to a rotating frame, the rotating frame is provided with a wafer cassette rack, a wafer cassette containing wafers is placed in the wafer cassette rack, and a motor drives the rotating shaft to rotate so as to drive the rotating frame to rotate at a high speed. The top end of a rotating shaft of the existing horizontal wafer drying machine is directly connected into a mounting hole in the center of a rotating frame, so that the concentricity of the rotating shaft and the mounting hole is not high due to machining errors of the rotating shaft and the mounting hole and assembly errors of the rotating shaft and the mounting hole, and the stability of high-speed rotation of the rotating frame is further influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a pivot mounting structure and wafer drier of horizontal wafer drier to solve the not high problem of concentricity that the pivot of horizontal wafer drier and swivel mount are connected among the prior art.

To achieve the purpose, the utility model adopts the following technical proposal:

the utility model provides a pivot mounting structure of horizontal wafer drier, its includes main frame, spin-dry barrel, swivel mount and pivot, spin-dry barrel is fixed in on the main frame, the swivel mount can set up with rotating in the spin-dry barrel, the center department of the bottom plate of swivel mount has seted up the mounting hole, the top of pivot is passed spin-dry barrel and can be fixed in through the connecting piece with disassembling and assembling on the bottom plate, wherein, the connecting piece includes the connection pad, the center department of the terminal surface of connection pad is provided with the last location boss that upwards extends, the center department of the bottom surface of connection pad is provided with the lower location boss of downwardly extending, the cooperation down location boss in the center department of the top end surface of pivot has seted up the locating hole, the center department of connection pad is provided with and runs through go up the connecting hole of location boss and lower location boss, correspond the connecting hole in the threaded hole has been seted up to the bottom of locating hole, the connection pad can be fixed in with disassembling and assembling and disassembling on the bottom surface of bottom plate in the mounting hole, the location boss is located in the locating hole, lower location boss is located in the connecting bolt pass the connecting hole with connecting piece with pivot fixed connection.

Furthermore, a sealing plate used for sealing the mounting hole is detachably mounted at the center of the end face of the bottom plate, and a sealing ring is arranged between the sealing plate and the bottom plate to prevent water from entering each assembly position of the connecting piece during spin-drying.

Furthermore, a shaft sleeve is vertically fixed on the main frame, the rotating shaft is arranged in the shaft sleeve, and a bearing is arranged between two ends of the shaft sleeve and the rotating shaft.

Furthermore, the mounting hole is a tapered hole with a small upper part and a large lower part, the upper positioning boss is correspondingly arranged to be a tapered boss with a small upper part and a large lower part, and the concentricity of the upper positioning boss and the bottom plate is ensured through the matching of the tapered structures.

Furthermore, the end face of the upper positioning boss is flush with the end face of the bottom plate, and the connecting disc is fixed on the bottom face of the bottom plate through a fixing screw.

Furthermore, a nitrogen sealing assembly is arranged between the spin drying cylinder and the rotating shaft.

A wafer spin dryer comprises the rotating shaft mounting structure of the horizontal wafer spin dryer.

The beneficial effects of the utility model are that, compare with prior art the bottom plate fixed connection of connecting piece and swivel mount is passed through in the pivot of horizontal wafer drier's pivot mounting structure, and the concentricity that pivot and bottom plate are connected can be guaranteed well to the last location boss of connecting piece and location boss down. The design is ingenious, and the realization is easy; and the concentricity of the connection between the rotating shaft and the bottom plate of the rotating frame is greatly improved, and the high-speed rotating stability of the rotating frame is improved.

Drawings

Fig. 1 is a schematic structural view of a rotating shaft mounting structure of a horizontal wafer spin dryer according to an embodiment of the present invention.

Detailed Description

The technical solution of the present invention is further explained by the following embodiments with reference to the drawings.

In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a single embodiment. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1, fig. 1 is a schematic structural view illustrating a rotating shaft mounting structure of a horizontal wafer spin dryer according to an embodiment of the present invention.

In the embodiment, a pivot mounting structure of horizontal wafer drier includes main frame 1, a section of thick bamboo 2 spin-dries, swivel mount 3, pivot 4 and axle sleeve 5, a section of thick bamboo 2 that spin-dries is fixed in on the main frame 1, swivel mount 3 can set up rotatoryly in a section of thick bamboo 2 that spin-dries, be fixed with the axle sleeve 5 of vertical setting through fixing bolt in the below of a section of thick bamboo 2 on the main frame 1, pivot 4 wears to locate in the axle sleeve 5, all be provided with bearing 6 between the both ends of axle sleeve 5 and the pivot 4, the centre bore has been seted up on the section of thick bamboo 2 that spin-dries, the upper end of pivot 4 stretches out axle sleeve 5 and passes the centre bore setting, the centre bore department of a section of thick bamboo 2 that spin-dries installs and is used for pivot 4 and the sealed nitrogen gas seal assembly 7 of a section of thick bamboo 2 that spin-dries.

The upper end of pivot 4 can be fixed in on the bottom plate 8 of swivel mount 3 through the connecting piece with dismouting, the big end down's toper mounting hole has been seted up to the center department of bottom plate 8, the connecting piece includes circular shape connection pad 9, the center department of the terminal surface of connection pad 9 is provided with the last location boss 10 of upwards extending, go up the toper boss that location boss 10 is big end down for the setting of cooperation toper mounting hole, through mutually supporting of last location boss 10 and toper mounting hole, the concentricity of location boss 10 and bottom plate 8 assembly is gone up in the assurance. The center department of the bottom surface of connection pad 9 is provided with downwardly extending's lower location boss 11, and location boss 11 has seted up locating hole 12 in the center department of the up end of pivot 4 under the cooperation, and locating hole 12 is circular blind hole, and lower location boss 11 is the cylinder platform that the circular blind hole of cooperation set up, through mutually supporting of lower location boss 11 and circular blind hole, guarantees the concentricity of lower location boss 11 and pivot 4 assembly.

The center of the connecting disc 9 is provided with a stepped connecting hole 13 penetrating through the upper positioning boss 10 and the lower positioning boss 11, a threaded hole 14 is formed at the bottom of the positioning hole 12 corresponding to the connecting hole 13, during assembly, the connecting disc 9 can be detachably fixed on the bottom surface of the bottom plate 8 through a connecting screw, the upper positioning boss 10 is located in the conical mounting hole and is flush with the bottom plate 8, the lower positioning boss 11 is located in the positioning hole 12, and a connecting bolt penetrates through the connecting hole 13 and is locked in the threaded hole 14 to fixedly connect the connecting piece with the rotating shaft 4.

In order to prevent water from entering each assembly position of the connecting piece during spin-drying, a sealing plate 15 for sealing the conical mounting hole is detachably mounted at the center of the end face of the bottom plate 8 through a fixing screw, and a sealing ring 16 is arranged between the sealing plate 15 and the bottom plate 8.

The above embodiments have only been illustrated the basic principle and characteristics of the present invention, the present invention is not limited by the above embodiments, without departing from the spirit and scope of the present invention, the present invention also has various changes and modifications, and these changes and modifications all fall into the scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (7)

1. The utility model provides a pivot mounting structure of horizontal wafer drier, its includes main frame, a spin-dry section of thick bamboo, swivel mount and pivot, a spin-dry section of thick bamboo is fixed in on the main frame, the swivel mount can set up with rotating in a spin-dry section of thick bamboo, the center department of the bottom plate of swivel mount has seted up the mounting hole, the top of pivot is passed a spin-dry section of thick bamboo and can be fixed in through the connecting piece with dismantling on the bottom plate, a serial communication port, the connecting piece includes the connection pad, the center department of the terminal surface of connection pad is provided with the last location boss that upwards extends, the center department of the bottom surface of connection pad is provided with the lower location boss of downwardly extending, the cooperation down location boss in the center department of the top terminal surface of pivot has seted up the locating hole, the center department of connection pad is provided with running through go up location boss and lower location boss, correspond the connecting hole in the threaded hole has been seted up to the bottom of locating hole, the connection pad can be fixed in with dismantling on the bottom of bottom plate, go up the location boss be located in the mounting hole, the location boss is located in the locating hole down in the connecting bolt pass the connecting hole with the connecting piece with pivot fixed connection.

2. The rotating shaft mounting structure of a horizontal wafer drying machine according to claim 1, wherein a sealing plate for sealing the mounting hole is detachably mounted at the center of the end surface of the bottom plate, and a sealing ring is disposed between the sealing plate and the bottom plate.

3. The rotating shaft mounting structure of the horizontal wafer drying machine as claimed in claim 1, wherein a shaft sleeve is vertically fixed on the main frame, the rotating shaft is arranged in the shaft sleeve, and bearings are arranged between two ends of the shaft sleeve and the rotating shaft.

4. The spindle mounting structure of a horizontal wafer spin dryer according to claim 1, wherein the mounting hole is a tapered hole with a smaller top and a larger bottom, and the tapered hole is also arranged to correspond to the upper positioning boss.

5. The rotating shaft mounting structure of a horizontal wafer spin dryer according to claim 4, wherein the end surface of the upper positioning boss is flush with the end surface of the bottom plate, and the connecting plate is fixed on the bottom surface of the bottom plate by fixing screws.

6. The rotating shaft mounting structure of a horizontal wafer spin dryer according to claim 1, wherein a nitrogen gas sealing assembly is arranged between the spin dryer tube and the rotating shaft.

7. A spin dryer comprising a shaft mounting structure of the horizontal spin dryer according to any one of claims 1 to 6.

Images