CN219892167U - Wafer clamping and rotating mechanism - Google Patents
Wafer clamping and rotating mechanism Download PDFInfo
- Publication number
- CN219892167U CN219892167U CN202321513885.6U CN202321513885U CN219892167U CN 219892167 U CN219892167 U CN 219892167U CN 202321513885 U CN202321513885 U CN 202321513885U CN 219892167 U CN219892167 U CN 219892167U
- Authority
- CN
- China
- Prior art keywords
- clamping
- turntable
- rotating shaft
- driving
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 22
- 235000012431 wafers Nutrition 0.000 claims description 47
- 230000005540 biological transmission Effects 0.000 claims description 43
- 238000013461 design Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a wafer clamping and rotating mechanism which comprises a clamping assembly, a first driving assembly and a second driving assembly, wherein the clamping assembly comprises a first turntable, a second turntable and a first clamping unit, the first turntable is rotatably arranged on the second turntable, the first clamping unit comprises a plurality of first clamping pieces and a first connecting rod, the first clamping pieces are rotatably arranged on the second turntable, the plurality of first clamping pieces are distributed around the axis of the first turntable, each first clamping piece is connected with the first turntable through one first connecting rod, the first driving assembly is connected with the first turntable and is used for driving the first turntable to rotate so as to drive the plurality of first clamping pieces to rotate so as to clamp a wafer, and the second driving assembly is connected with the second turntable and is used for driving the second turntable to rotate so as to enable the wafer to rotate. According to the utility model, the wafer can be clamped through the first driving assembly, and can be rotated through the second driving assembly, so that the working efficiency is improved, the automation degree is high, the structure is simple, the design is ingenious, and the practicability is good.
Description
Technical Field
The utility model belongs to the technical field of semiconductor processing, and particularly relates to a wafer clamping and rotating mechanism.
Background
With the silicon wafer used for manufacturing a semiconductor chip integrated circuit, various circuit structures are manufactured on the wafer surface, so that the wafer becomes an electronic component having a specific electrical function. In the manufacturing process of semiconductor chips, the wafer is subjected to processes such as grinding, polishing and corrosion, so that some impurities are often attached or remained on the surface of the wafer, and in order to ensure the surface cleanliness of the wafer and prevent the impurities from polluting and damaging electronic elements, the wafer is usually subjected to processes such as cleaning and spin-drying. In the process of cleaning, spin-drying, and the like, the wafer is required to be rotated at a high speed, so that a special clamp is generally used to clamp the wafer, and the clamp is driven to integrally rotate by a motor, so that the wafer is rotated.
However, existing clamps often have difficulty holding the wafer firmly, resulting in the wafer flying out while rotating, causing damage and economic loss. Moreover, most of the existing clamps require manual control of the adjustment clamps by a person to clamp or unclamp the wafer, and the operation process is complex and low in efficiency. Of course, currently, a clamp capable of automatically clamping is also arranged, but the structure is generally complex, the occupied space is large, the equipment cost is increased, and the operation is inconvenient.
Disclosure of Invention
The utility model aims to provide a wafer clamping and rotating mechanism with simple structure and good clamping effect.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a wafer clamping rotation mechanism comprising:
and (3) a clamping assembly: the clamping assembly comprises a first turntable, a second turntable and a first clamping unit, wherein the first turntable is rotatably arranged on the second turntable, the first clamping unit comprises a first clamping piece and a first connecting rod, the first clamping piece is rotatably arranged on the second turntable, one end of the first connecting rod is connected with the first clamping piece, the other end of the first connecting rod is connected with the first turntable, the first clamping piece is provided with a plurality of first clamping pieces, the first clamping pieces are distributed around the axis of the first turntable, each first clamping piece is connected with the first turntable through one first connecting rod, and a first clamping area is formed between the first clamping pieces;
a first drive assembly: the first driving component is connected with the first turntable and is used for driving the first turntable to rotate so as to drive the plurality of first clamping pieces to rotate and clamp wafers in the first clamping area;
a second drive assembly: the second driving assembly is connected with the second turntable and is used for driving the second turntable to rotate so as to enable the wafer in the first clamping area to rotate.
Preferably, the first driving assembly comprises a first driving part and a first rotating shaft, the first driving part is arranged below the second rotating disc, a through hole is formed in the second rotating disc, the first rotating disc is arranged at the through hole, one end of the first rotating shaft is connected with an output shaft of the first driving part, and the other end of the first rotating shaft penetrates through the through hole and is connected with the first rotating disc.
Further preferably, the second driving assembly comprises a second driving member, a transmission assembly and a second rotating shaft, the transmission assembly is connected to an output shaft of the second driving member, the second rotating shaft is hollow and sleeved outside the first rotating shaft, one end of the second rotating shaft is connected with the second rotating disc, and the other end of the second rotating shaft is connected with the transmission assembly.
Still further preferably, the transmission assembly comprises a first transmission wheel, a second transmission wheel and a transmission belt, wherein the first transmission wheel is connected with the output shaft of the second driving piece, the second transmission wheel is sleeved at the other end of the second rotating shaft, and the first transmission wheel and the second transmission wheel are in transmission connection through the transmission belt.
Still further preferably, the second rotating shaft comprises an upper pipe section and a lower pipe section, one end of the upper pipe section is connected with the second turntable, the other end of the upper pipe section is connected with the lower pipe section, the first driving part is contained in the lower pipe section, the first rotating shaft sequentially penetrates through the lower pipe section, the upper pipe section and the first turntable to be connected, and the second driving wheel is sleeved on the lower pipe section.
Still further preferably, a rolling bearing is disposed between the first rotating shaft and the second rotating shaft, an outer ring of the rolling bearing is connected with an inner surface of the second rotating shaft, and an inner ring of the rolling bearing is connected with an outer surface of the first rotating shaft.
Preferably, the first turntable and the second turntable are coaxially arranged.
Preferably, the first clamping piece comprises a main body part and a clamping part, the main body part is rotatably arranged on the second turntable, the clamping part is arranged at the top of the main body part, and the clamping part and the main body part are eccentrically arranged.
Preferably, the clamping assembly further comprises a second clamping unit, the second clamping unit comprises a plurality of second clamping pieces and second connecting rods, the second clamping pieces are rotatably arranged on the second turntable, the second clamping pieces are distributed around the axis of the first turntable, each second clamping piece is connected with the first turntable through one second connecting rod, and a second clamping area is formed among the second clamping pieces.
Further preferably, the distance between the second clamping member and the center of the second turntable is smaller than the distance between the first clamping member and the center of the second turntable, and the height of the second clamping member is lower than that of the first clamping member.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
according to the utility model, the first driving assembly can drive the plurality of first clamping pieces to rotate so as to clamp the wafer, the clamping is stable and firm, the second driving assembly can drive the second turntable to rotate so as to enable the wafer to rotate, two functions of automatic clamping and rotation are realized on one mechanism, the working efficiency is improved, the processing safety is improved, the automation degree is high, the structure is simple, the design is ingenious, and the practicability is good.
Drawings
FIG. 1 is a perspective view of a wafer clamping and rotating mechanism according to the present embodiment;
FIG. 2 is a schematic top view of the wafer clamping and rotating mechanism of the present embodiment;
FIG. 3 is a schematic cross-sectional view of A-A of FIG. 2;
fig. 4 is a schematic perspective view of the clamping assembly, the first driving assembly and the second driving assembly according to the present embodiment;
FIG. 5 is a schematic perspective cutaway view of the clamping assembly, the first driving assembly and the second driving assembly according to the present embodiment;
FIG. 6 is a schematic perspective view of the clamping assembly of the present embodiment;
fig. 7 is a schematic top view of the clamping assembly of the present embodiment.
In the above figures:
1. a frame; 2. a clamping assembly; 21. a first turntable; 22. a second turntable; 220. an extension; 23. a first clamping unit; 230. a first clamping area; 231. a first clamping member; 2311. a main body portion; 2312. a clamping part; 232. a first link; 24. a second clamping unit; 240. a second clamping area; 241. a second clamping member; 242. a second link; 3. a first drive assembly; 31. a first driving member; 32. a first rotating shaft; 33. a rotating bearing; 4. a second drive assembly; 41. a second driving member; 42. a transmission assembly; 421. a first driving wheel; 422. a second driving wheel; 423. a transmission belt; 43. a second rotating shaft; 431. an upper pipe section; 432. a lower pipe section; 5. a connection assembly; 51. a connection housing; 52. and connecting the bearings.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The wafer clamping and rotating mechanism comprises a frame 1, a clamping assembly 2, a first driving assembly 3 and a second driving assembly 4, wherein the clamping assembly 2 is arranged on the frame 1, a clamping area for clamping a wafer is formed at the top of the clamping assembly 2, the first driving assembly 3 and the second driving assembly 4 are respectively connected with the clamping assembly 2, the first driving assembly 3 is used for clamping the wafer positioned in the clamping area, and the second driving assembly 4 is used for rotating the wafer positioned in the clamping area.
The following details of each component and its connection relation are described in detail:
as shown in fig. 6 and 7, the clamping assembly 2 includes a first turntable 21, a second turntable 22, a first clamping unit 23 and a second clamping unit 24, the first turntable 21 is rotatably disposed on the second turntable 22, the first clamping unit 23 and the second clamping unit 24 are both disposed on the second turntable 22 and are connected with the first turntable 21, the first clamping unit 23 forms a first clamping area 230, the second clamping unit 24 forms a second clamping area 240, and rotation of the first turntable 21 can drive the first clamping unit 23 and the second clamping unit 24 to work so as to clamp or unclamp a wafer.
Specifically:
as shown in fig. 6, the first turntable 21 is coaxially disposed at the top of the second turntable 22, an annular boss is disposed at the center of the top of the second turntable 22, an annular groove is disposed at the center of the bottom of the first turntable 21, and the annular boss of the second turntable 22 is matched with the annular groove of the first turntable 21, so that the first turntable 21 can rotate relative to the second turntable 22.
As shown in fig. 6, the first clamping unit 23 includes a first clamping member 231, a first link 232, the first clamping member 231 being rotatably provided on the second turntable 22, one end of the first link 232 being connected to the first clamping member 231, and the other end of the first link 232 being connected to the first turntable 21, specifically: the first clamping member 231 includes a main body 2311 and a clamping portion 2312, the main body 2311 is cylindrical, the bottom of the main body 2311 is rotatably disposed on the second turntable 22, for example, the two parts can be connected by screw, but not limited to this embodiment, the clamping portion 2312 is disposed on the top of the main body 2311, and the clamping portion 2312 is eccentrically disposed with the main body 2311; one end of the first link 232 is connected to the main body 2311, and the other end of the first link 232 is connected to the first turntable 21.
As shown in fig. 7, a plurality of first clamping members 231 are provided, the plurality of first clamping members 231 are uniformly distributed around the axes of the first turntable 21 and the second turntable 22, a first clamping area 230 is formed between the plurality of first clamping members 231, and each first clamping member 231 is connected with the first turntable 21 through a first connecting rod 232, specifically: the periphery of the second turntable 22 is provided with a plurality of protruding extension parts 220, and the plurality of extension parts 220 are uniformly distributed around the axis of the second turntable 22; the end of each extension 220 is rotatably provided with a first clamping member 231; one end of the first link 232 is connected with the first clamping member 231, and the other end of the first link 232 is connected with the first turntable 22 located between two adjacent extension portions 220, that is, the plurality of first links 232 are uniformly distributed around the axes of the first turntable 21 and the second turntable 22, and the plurality of first links 232 are distributed in a scattering shape.
As shown in fig. 6, the second clamping unit 24 includes a second clamping member 241 and a second connecting rod 242, the second clamping member 241 is rotatably disposed on the second turntable 22, one end of the second connecting rod 242 is connected with the second clamping member 241, the other end of the second connecting rod 242 is connected with the first turntable 21, and the specific structure of the second clamping member 241 is identical to that of the first clamping member 231, which is not described herein again.
As shown in fig. 7, a plurality of second clamping pieces 241 are provided, the plurality of second clamping pieces 241 are uniformly distributed around the axes of the first turntable 21 and the second turntable 22, and a second clamping area 240 is formed between the plurality of second clamping pieces 241; the distance between the second clamping piece 241 and the center of the second turntable 22 is smaller than the distance between the first clamping piece 241 and the center of the second turntable 22, i.e. the second clamping piece 241 is closer to the centers of the first turntable 21 and the second turntable 22 than the first clamping piece 231; the height of the second clamping member 241 is lower than that of the first clamping member 231, that is, the second clamping region 240 is located below the first clamping region 230, and the two clamping regions are coaxially disposed, the area of the second clamping region 240 is smaller than that of the first clamping region 230, and wafers with different sizes can be placed in the first clamping region 230 and the second clamping region 240 respectively.
As shown in fig. 7, the second clamping member 241 is rotatably disposed in the middle of the extension portion 220, one end of the second connecting rod 242 is connected to the second clamping member 241, the other end of the second connecting rod 242 is connected to the first rotating disc 22 located between two adjacent extension portions 220, that is, the second connecting rod 242 is parallel to the first connecting rod 232, the plurality of second connecting rods 242 are uniformly distributed around the axes of the first rotating disc 21 and the second rotating disc 22, and the plurality of second connecting rods 242 are distributed in a scattering shape.
As shown in fig. 4 and 5, the first driving assembly 3 is provided on the frame 1, and the first driving assembly 3 includes a first driving member 31, a first rotation shaft 32, specifically: the output shaft of the first driving member 31 may rotate around its own axis, and the first driving member 31 may employ a driving motor, a driving cylinder, a motor, or the like, but is not limited to this embodiment; the first rotating shaft 32 extends along the up-down direction, one end of the first rotating shaft 32 is coaxially connected with the output shaft of the first driving member 31, and when the first driving member 31 works, the first rotating shaft 32 can be driven to rotate around the axis of the first rotating shaft.
As shown in fig. 4 and 5, the first rotating shaft 32 is connected to the first turntable 21 of the clamping assembly 2, specifically: the center of the second turntable 22 is provided with a through hole, and the other end of the first rotating shaft 32 passes through the through hole and is connected with the center of the first turntable 21; when the first driving member 31 drives the first rotating shaft 32 to rotate, the first turntable 21 is driven to rotate, and the plurality of first clamping members 231 are driven to rotate under the action of the plurality of first connecting rods 232, so that the clamping portions 2312 approach or depart from the center of the first turntable 21, and the wafer located in the first clamping area 230 is clamped or undamped; meanwhile, when the first driving member 31 drives the first rotating shaft 32 to rotate, the first turntable 21 is driven to rotate, and the plurality of second clamping members 241 are driven to rotate under the action of the plurality of second connecting rods 242, so that the clamping portions 2312 approach or separate from the center of the first turntable 21, and the wafer located in the second clamping area 240 is clamped or undamped.
As shown in fig. 4 and 5, the second driving assembly 4 is disposed on the frame 1, and the second driving assembly 4 includes a second driving member 41, a transmission assembly 42, and a second rotating shaft 43, where the second driving member 41 is in transmission connection with the second rotating shaft 43 through the transmission assembly 42. Specifically: the output shaft of the second driving member 41 may rotate around its own axis, and the second driving member 41 may employ a driving motor, a driving cylinder, a motor, or the like, but is not limited to this embodiment; the transmission assembly 42 comprises a first transmission wheel 421 and a second transmission wheel 422, and a transmission belt 423, wherein the first transmission wheel 421 and an output shaft of the second driving piece 41 are coaxially arranged, the second transmission wheel 422 is coaxially sleeved outside the second rotating shaft 43, and the first transmission wheel 421 and the second transmission wheel 422 are in transmission connection through the transmission belt 423; the second driving member 41 is operable to drive the second shaft 43 to rotate about its own axis via the transmission assembly 42.
As shown in fig. 4 and 5, the second rotating shaft 43 is connected to the second turntable 22 of the clamping assembly 2, specifically: the second rotating shaft 43 is hollow, the second rotating shaft 43 is coaxially sleeved outside the first rotating shaft 32, and one end of the second rotating shaft 43 is connected with the second rotating disc 22; a rotary bearing 33 is arranged between the first rotating shaft 32 and the second rotating shaft 43, the outer ring of the rotary bearing 33 is connected with the inner surface of the second rotating shaft 43, and the inner ring of the rotary bearing 33 is connected with the outer surface of the first rotating shaft 32 so as to improve the rotation stability; the second rotating shaft 43 includes an upper pipe section 431 and a lower pipe section 432, one end of the upper pipe section 431 is connected with the second turntable 22, the other end of the upper pipe section 431 is connected with the lower pipe section 432, the first driving member 31 is partially accommodated in the lower pipe section 432, the first rotating shaft 32 sequentially passes through the lower pipe section 432, the upper pipe section 431 and is connected with the first turntable 21, and the second driving wheel 422 is sleeved on the lower pipe section 432.
Further, as shown in fig. 3, the second rotating shaft 43 is connected to the frame 1 through a connection assembly 5, and the connection assembly 5 includes a connection housing 51, a connection bearing 52, specifically: the connecting shell 51 is coaxially sleeved outside the second rotating shaft 43, and the bottom of the connecting shell 51 is connected with the frame 1; the connecting bearing 52 is arranged between the second rotating shaft 43 and the connecting shell 51, the outer ring of the connecting bearing 52 is connected with the inner wall of the connecting shell 51, and the inner ring of the connecting bearing 52 is connected with the outer surface of the second rotating shaft 43; the connection bearing 52 may be provided in plurality, and the plurality of connection bearings 52 are distributed along the axial direction of the second rotating shaft 43.
When the second driving member 41 drives the second rotating shaft 43 to rotate through the transmission assembly 42, the second turntable 22 is driven to rotate around its own axis, so as to rotate the wafer located in the first clamping area 230 and/or the second clamping area 240.
The wafer rotary clamping mechanism of the embodiment can drive the clamping assembly 2 to clamp or loosen the wafer through the first driving assembly 3, and can drive the clamping assembly 2 to rotate through the second driving assembly 4 to drive the wafer to rotate, so that two functions of automatic clamping and rotation are realized on one mechanism, the working efficiency is improved, the processing safety is improved, the automation degree is high, the structure is simple, the design is ingenious, and the practicability is good.
The above embodiments are provided to illustrate the technical concept and features of the present utility model and are intended to enable those skilled in the art to understand the content of the present utility model and implement the same, and are not intended to limit the scope of the present utility model. All equivalent changes or modifications made in accordance with the spirit of the present utility model should be construed to be included in the scope of the present utility model.
Claims (10)
1. A wafer clamping and rotating mechanism, characterized in that: comprising the following steps:
and (3) a clamping assembly: the clamping assembly comprises a first turntable, a second turntable and a first clamping unit, wherein the first turntable is rotatably arranged on the second turntable, the first clamping unit comprises a first clamping piece and a first connecting rod, the first clamping piece is rotatably arranged on the second turntable, one end of the first connecting rod is connected with the first clamping piece, the other end of the first connecting rod is connected with the first turntable, the first clamping piece is provided with a plurality of first clamping pieces, the first clamping pieces are distributed around the axis of the first turntable, each first clamping piece is connected with the first turntable through one first connecting rod, and a first clamping area is formed between the first clamping pieces;
a first drive assembly: the first driving component is connected with the first turntable and is used for driving the first turntable to rotate so as to drive the plurality of first clamping pieces to rotate and clamp wafers in the first clamping area;
a second drive assembly: the second driving assembly is connected with the second turntable and is used for driving the second turntable to rotate so as to enable the wafer in the first clamping area to rotate.
2. The wafer clamping rotation mechanism of claim 1 wherein: the first driving assembly comprises a first driving part and a first rotating shaft, the first driving part is arranged below the second rotating disc, a through hole is formed in the second rotating disc, the first rotating disc is arranged at the through hole, one end of the first rotating shaft is connected with an output shaft of the first driving part, and the other end of the first rotating shaft penetrates through the through hole and is connected with the first rotating disc.
3. The wafer clamping rotation mechanism of claim 2 wherein: the second driving assembly comprises a second driving piece, a transmission assembly and a second rotating shaft, the transmission assembly is connected to an output shaft of the second driving piece, the second rotating shaft is hollow and sleeved outside the first rotating shaft, one end of the second rotating shaft is connected with the second rotating disc, and the other end of the second rotating shaft is connected with the transmission assembly.
4. A wafer clamping rotation mechanism as set forth in claim 3 wherein: the transmission assembly comprises a first transmission wheel, a second transmission wheel and a transmission belt, wherein the first transmission wheel is connected with an output shaft of the second driving piece, the second transmission wheel is sleeved at the other end of the second rotating shaft, and the first transmission wheel and the second transmission wheel are in transmission connection through the transmission belt.
5. The wafer clamping rotation mechanism of claim 4 wherein: the second rotating shaft comprises an upper pipe section and a lower pipe section, one end of the upper pipe section is connected with the second rotary table, the other end of the upper pipe section is connected with the lower pipe section, the first driving part is contained in the lower pipe section, the first rotating shaft sequentially penetrates through the lower pipe section, the upper pipe section and the first rotary table and is connected with the first rotary table, and the second driving wheel is sleeved on the lower pipe section.
6. A wafer clamping rotation mechanism as set forth in claim 3 wherein: and a rotating bearing is arranged between the first rotating shaft and the second rotating shaft, the outer ring of the rotating bearing is connected with the inner surface of the second rotating shaft, and the inner ring of the rotating bearing is connected with the outer surface of the first rotating shaft.
7. The wafer clamping rotation mechanism of claim 1 wherein: the first turntable and the second turntable are coaxially arranged.
8. The wafer clamping rotation mechanism of claim 1 wherein: the first clamping piece comprises a main body part and a clamping part, wherein the main body part is rotatably arranged on the second turntable, the clamping part is arranged at the top of the main body part, and the clamping part and the main body part are eccentrically arranged.
9. The wafer clamping rotation mechanism of claim 1 wherein: the clamping assembly further comprises a second clamping unit, the second clamping unit comprises a plurality of second clamping pieces and second connecting rods, the second clamping pieces are rotatably arranged on the second turntable, the second clamping pieces are distributed around the axis of the first turntable, each second clamping piece is connected with the first turntable through one second connecting rod, and a second clamping area is formed among the second clamping pieces.
10. The wafer clamping rotation mechanism of claim 9 wherein: the distance between the second clamping piece and the center of the second turntable is smaller than that between the first clamping piece and the center of the second turntable, and the height of the second clamping piece is lower than that of the first clamping piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321513885.6U CN219892167U (en) | 2023-06-14 | 2023-06-14 | Wafer clamping and rotating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321513885.6U CN219892167U (en) | 2023-06-14 | 2023-06-14 | Wafer clamping and rotating mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219892167U true CN219892167U (en) | 2023-10-24 |
Family
ID=88409094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321513885.6U Active CN219892167U (en) | 2023-06-14 | 2023-06-14 | Wafer clamping and rotating mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219892167U (en) |
-
2023
- 2023-06-14 CN CN202321513885.6U patent/CN219892167U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111941192B (en) | Wafer processing device for chip manufacturing | |
| JP2928218B1 (en) | Surface processing equipment | |
| CN219892167U (en) | Wafer clamping and rotating mechanism | |
| CN110814802B (en) | Five rocking arm slewer of harmonic speed reducer ware are taken to cantilever type | |
| CN112548724A (en) | Large-focal-depth intraocular lens adjusting device based on human vision | |
| CN113618570B (en) | PCB deburring machine | |
| CN219892151U (en) | Wafer spin-drying mechanism | |
| CN214237666U (en) | Polishing tool for inner surface of revolving body | |
| CN215546695U (en) | Rotary table | |
| CN210360801U (en) | Multi-angle polishing device and polishing machine | |
| CN212635739U (en) | SCARA robot | |
| CN213225541U (en) | Automobile parts grinding device convenient to angle regulation | |
| CN213258633U (en) | Processing device for deep groove ball bearing production | |
| CN116276585B (en) | Positioning assembly and silicon wafer polishing machine | |
| CN207971710U (en) | The clamp structure of numerical control machining center | |
| CN111230678A (en) | Precise fine arc grinding mechanism | |
| CN112605881B (en) | Special grinding and polishing equipment for small-size stepped shaft parts and spherical grinding and polishing method | |
| CN216758236U (en) | Copper joint drilling processing frock | |
| CN109065484A (en) | A kind of hollow main shaft structure for decontamination | |
| CN221064692U (en) | Deburring auxiliary device for gear shaping process of large gear part | |
| CN211639415U (en) | Double-shaft chamfering machine | |
| CN215616427U (en) | Five-axis machining device suitable for production of various mechanical parts | |
| CN220839818U (en) | Clamp for machining precise parts | |
| CN218745251U (en) | Band sawing machine capable of improving operation safety | |
| CN221018693U (en) | Multi-shafting mechanical main shaft with rotary indexing mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |