CN209963031U

CN209963031U - Novel chip washs device

Info

Publication number: CN209963031U
Application number: CN201921105654.5U
Authority: CN
Inventors: 樊家明; 叶瑾琳
Original assignee: Zhejiang Guangte Technology Co Ltd; Chongqing College of Electronic Engineering
Current assignee: Zhejiang Guangte Technology Co Ltd; Chongqing College of Electronic Engineering
Priority date: 2019-07-15
Filing date: 2019-07-15
Publication date: 2020-01-17
Anticipated expiration: 2029-07-15

Abstract

The utility model discloses a novel chip washs device, including motor, rotation axis, base, washing container, take up basket of flowers, motor output adopts the shaft coupling to rotate and is connected with the rotation axis, and the lower extreme of rotation axis rotates and connects on the base, and the welding has a plurality of basket of flowers mounting brackets on the rotation axis, installs two-layer take up basket of flowers on the rotation axis, and three take up basket of flowers is installed on every layer, and the chip is equipped with in the take up basket of flowers, the utility model discloses simple structure utilizes the motor to drive the basket of flowers and is wasing the container internal rotation, and under centrifugal force effect, chip surface filth will be got rid of fast and leave, makes the washing of chip more high-efficient, and the two-layer basket of flowers structure of adoption makes the space utilization that washs more abundant, has improved washing work efficiency, and.

Description

Novel chip washs device

Technical Field

The utility model belongs to the technical field of the semiconductor chip washs technique and specifically relates to a novel chip washs device is related to.

Background

With the development of technology, semiconductor process technology has reached nanometer level, the internal components and connections are very fine, and if contaminated by dust particles and metal impurities, the internal circuit function of the die is easily damaged, and defects are generated to cause quality hidden trouble or diameter failure. Therefore, before and after various processes such as photolithography, grinding, dicing, etc., the semiconductor chip needs to be cleaned, and impurities such as fine dust particles, metal ions, organic substances, etc. remaining on the surface are effectively removed by using a chemical solvent or a physical method without damaging the surface characteristics of the chip.

Conventional cleaning processes are known as immersion cleaning, such as wax removal cleaning. The technological process includes setting chip in cleaning container, soaking and cleaning with organic solution, such as ethanol, etc. or adding stirring sheet to stir the solution dynamically to dissolve the impurity in the soaked chip and separate the chip from the surface automatically.

The traditional cleaning process is simple in mode and only needs to be soaked in an organic solution for a preset time. However, this approach has certain limitations: under static soaking, because organic solution can only get into the chip center from the gap at chip edge, required time can increase and be uncontrollable, pending chip quantity also is limited by the basket of flowers quantity of holding dress, and efficiency is not high, has to increase the stirring piece device, and if the stirring piece is close the basket of flowers, there is the stirring piece to beat the basket of flowers and produce the safety risk of piece and destruction chip.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome above-mentioned prior art not enough, provide a novel chip washs device.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a novel chip washs device, includes motor, rotation axis, base, washing container, holds dress basket of flowers, the motor output adopts the shaft coupling to link to each other with the upper end of rotation axis, wash container inner wall bottom and install the base, the lower extreme of rotation axis rotates and connects on the base, the welding has a plurality of basket of flowers mounting bracket on the rotation axis, hold and be equipped with the arc locating surface on the dress basket of flowers, arc locating surface and rotation axis arc surface phase-match, the arc locating surface is near the rotation axis location, the welding has the hangers with basket of flowers mounting bracket assorted on the arc locating surface, hold dress basket of flowers and hang the dress on basket of flowers mounting bracket through the hangers, hold dress basket of flowers side and bottom surface and be equipped with a plurality of holes that leak.

The bearing flower basket is provided with two-layerly along rotation axis length direction, installs threely on every layer the bearing flower basket, two the flower basket mounting bracket is a set of, every group it has a bearing flower basket to hang on the flower basket mounting bracket.

The utility model has the advantages that: the utility model discloses utilizing the motor to drive the basket of flowers at the cleaning vessel internal rotation, under the centrifugal force effect, chip surface filth will be got rid of fast and leave, makes the washing of chip more high-efficient, and the two-layer basket of flowers structure of adoption makes the washing space utilization more abundant, has improved cleaning work efficiency, has practiced thrift manufacturing cost, and the basket of flowers adopts to articulate the structure at rotatory epaxial, and the dismouting is very convenient.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a top view of the flower basket of the present invention;

FIG. 3 is a side view of the flower basket of the present invention;

fig. 4 is a top view of the flower basket of the present invention.

In the figure: the cleaning device comprises a motor 1, a coupler 2, a rotating shaft 3, a flower basket mounting frame 31, a base 4, a cleaning container 5, a flower basket 6, an arc-shaped positioning surface 61, a hanging lug 62, a water leakage hole 63 and a chip 7.

Detailed Description

The present invention will be further described with reference to the accompanying drawings and specific embodiments, wherein the descriptions of "left", "right", etc. in the present invention all refer to fig. 1 as the reference direction:

as shown in figures 1-3, a novel chip cleaning device comprises a motor 1, a rotating shaft 3, a base 4, a cleaning container 5 and a bearing flower basket 6, wherein the output end of the motor 1 is connected with the upper end of the rotating shaft 3 by a coupler 2, the base 4 is installed at the bottom of the inner wall of the cleaning container 5, the lower end of the rotating shaft 3 is rotatably connected on the base 4, a plurality of flower basket installation frames 31 are welded on the rotating shaft 3, an arc-shaped positioning surface 61 is arranged on the bearing flower basket 6, the arc-shaped positioning surface 61 is matched with the arc surface of the rotating shaft 3, the arc-shaped positioning surface 61 is closely positioned against the rotating shaft 3, lugs 62 matched with the flower basket installation frames 31 are welded on the arc-shaped positioning surface 61, the bearing flower basket 6 is hung on the flower basket installation frames 31 through the lugs 62, a plurality of water leakage holes 63 are arranged on the side surface and the bottom surface of the bearing flower basket 6, the chip 7 is, under the effect of centrifugal force, the dirt on the surface of the chip 7 is thrown away quickly, so that the chip 7 is cleaned more efficiently, the bearing flower basket 6 adopts a hanging structure, the fixing is reliable, the installation and the disassembly are convenient, the bearing flower basket 6 only needs to be hooked out by a hook when the bearing flower basket 6 needs to be replaced, and the arc-shaped positioning surface 61 on the bearing flower basket 6 enables the bearing flower basket 6 to be positioned and installed more accurately.

It is two-layer that hold dress basket of flowers 6 is provided with along 3 length direction of rotation axis, installs threely on every layer hold dress basket of flowers 6, two basket of flowers mounting bracket 31 is a set of, every group it has held dress basket of flowers 6 to have hung one on the basket of flowers mounting bracket 31, adopts two-layer basket of flowers structure, makes the utilization of washing space more abundant, has improved cleaning work efficiency, has practiced thrift manufacturing cost.

The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. The utility model provides a novel chip washs device, includes motor (1), rotation axis (3), base (4), washs container (5), holds dress basket of flowers (6), its characterized in that: the upper end of motor (1) output and rotation axis (3) adopts shaft coupling (2) to link to each other, wash container (5) inner wall bottom and install base (4), the lower extreme of rotation axis (3) rotates and connects on base (4), the welding has a plurality of basket of flowers mounting bracket (31) on rotation axis (3), be equipped with arc locating surface (61) on dress basket of flowers (6), arc locating surface (61) and rotation axis (3) arc surface phase-match, arc locating surface (61) are near rotation axis (3) location, the welding has lug (62) with basket of flowers mounting bracket (31) assorted on arc locating surface (61), dress basket of flowers (6) are hung the dress on basket of flowers mounting bracket (31) through lug (62), dress basket of flowers (6) side and bottom surface are equipped with a plurality of holes of leaking (63).

2. The novel chip cleaning device according to claim 1, wherein: hold dress basket of flowers (6) and be provided with two-layerly along rotation axis (3) length direction, install threely on every layer hold dress basket of flowers (6), two basket of flowers mounting bracket (31) are a set of, every group it has one to hold dress basket of flowers (6) to hang on basket of flowers mounting bracket (31).