CN218565932U - Modular assembly type rotating frame of wafer drying machine and wafer drying machine - Google Patents
Modular assembly type rotating frame of wafer drying machine and wafer drying machine Download PDFInfo
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- CN218565932U CN218565932U CN202222360231.6U CN202222360231U CN218565932U CN 218565932 U CN218565932 U CN 218565932U CN 202222360231 U CN202222360231 U CN 202222360231U CN 218565932 U CN218565932 U CN 218565932U
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Abstract
The utility model discloses a modularization pin-connected panel swivel mount and wafer drier of wafer drier, this swivel mount includes circular chassis, even number assembly jig and circular apron, circular chassis is connected with the pivot that spin-dries of wafer drier, even number assembly jig symmetry is fixed in on the circular chassis, the assembly jig all includes riser and two curb plates, the bottom of riser and two curb plates can be fixed in circular chassis with dismouting on, the one end of two curb plates can be fixed in the inboard of riser with dismouting ground vertical separation, all offer the shaft hole that is used for assembly piece box holder on the other end, the top of riser and two curb plates can be fixed in circular apron with dismouting on, the first hole of dodging that is used for getting to put piece box holder is offered in the center department of circular apron. The assembly frame of the rotating frame is designed in a modularized and assembled mode. Not only the structure is simple, but also the design is ingenious; and the universality is good, the processing is convenient, and the later maintenance and the maintenance of the equipment are facilitated.
Description
Technical Field
The utility model belongs to wafer auxiliary processing equipment especially relates to a modularization pin-connected panel swivel mount and wafer drier of wafer drier.
Background
The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be processed and manufactured on the silicon wafer to form electronic component products with specific electrical functions. As the size of the integrated circuit on the semiconductor wafer is developed to the micron level, the requirement for cleaning the semiconductor wafer in the manufacturing process is higher and higher, and especially, the semiconductor wafer is polluted by dust particles and metals in the manufacturing process, which can easily cause the damage of the circuit function in the chip, form short circuit or open circuit, and the like, thereby causing the failure of the integrated circuit and affecting the formation of the geometric characteristics. Therefore, in the manufacturing process, in addition to the removal of external pollution sources, cleaning is also required to effectively remove impurities such as micro-dust, metal ions, and organic matters remaining on the wafer by using chemical solution or gas without damaging the surface characteristics and the electrical characteristics of the wafer.
The wet cleaning process is a commonly used cleaning process for wafers, the wafer needs to be dried after the cleaning process is completed, and the wafer drying machine is used for drying the surfaces of the wet wafers through rotation and drying. Horizontal spin dryers are relatively common spin dryers. As is well known, a rotating frame is an important component of a wafer spin dryer, a plurality of wafer box frames are assembled on the rotating frame, wafer boxes containing wafers are placed in the wafer box frames, a rotary driving motor drives a spin-drying rotating shaft to rotate through a transmission assembly, and the spin-drying rotating shaft drives the rotating frame to rotate at a high speed to spin-dry the wafers in the wafer box frames at a high speed.
At present, current swivel mount all is a body structure basically, bends or weld forming through the steel sheet is integrative, has that the commonality is poor, processing is inconvenient and be not convenient for the shortcoming of later maintenance and maintenance.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a modularization pin-connected panel swivel mount and wafer drier of wafer drier to there is the commonality in the swivel mount of wafer drier among the solution prior art poor, the inconvenient and not convenient for later maintenance and the problem of maintenance.
To achieve the purpose, the utility model adopts the following technical proposal:
a modularized assembling type rotating frame of a wafer spin dryer comprises,
a circular chassis connected with a spin-drying rotating shaft of the wafer spin-drying machine,
an even number of assembling frames symmetrically fixed on the circular chassis, each assembling frame comprises a vertical plate and two side plates, the bottom ends of the vertical plate and the two side plates can be detachably fixed on the circular chassis, one end of each side plate can be detachably fixed on the inner side of the vertical plate at intervals, the other end of each side plate is provided with a shaft hole for assembling the sheet box frame,
the top ends of the vertical plate and the two side plates can be detachably fixed on the circular cover plate, and a first avoiding hole for taking and placing the sheet box frame is formed in the center of the circular cover plate.
Furthermore, the vertical plate and the two side plates can be detachably fixed on the circular chassis through a plurality of connecting screws.
Furthermore, the end parts of the two side plates can be detachably fixed on the vertical plate through a plurality of connecting screws.
Furthermore, the vertical plate and the two side plates can be detachably fixed on the circular cover plate through a plurality of connecting screws.
Furthermore, a plurality of through holes are formed in the vertical plate and the side plate, and the through holes can play a role in water leakage, weight reduction or balance adjustment as required.
Further, the joints of the vertical plates and the two side plates are provided with second avoidance holes for avoiding the limiting rods.
Further, the assembling brackets are provided with two assembling brackets, and the two assembling brackets are the same in size and are symmetrically arranged in the center of the circular chassis.
Further, the four assembly brackets are arranged in a pairwise symmetrical mode with the center of the circular chassis, and two side plates of the same assembly bracket are fixedly connected with one side plate of the adjacent assembly bracket through connecting screws.
Further, the four assembling frames are different in size and specification, wherein the two symmetrically arranged assembling frames are the same in size and specification so as to be suitable for spin-drying wafers of two specifications.
A wafer drying machine comprises the modular split mounting type rotating frame of the wafer drying machine.
The beneficial effects of the utility model are that, compare with prior art the assembly jig of the modularization pin-connected panel swivel mount of wafer drier adopts the structural design of modularization pin-connected panel, and every assembly jig comprises three module boards, and the specification of adjusting module board as required can be applicable to the wafer of different specifications. Not only the structure is simple, but also the design is ingenious; and the universality is good, the processing is convenient, and the later maintenance and the maintenance of the equipment are facilitated.
Drawings
Fig. 1 is a schematic three-dimensional structure of a modular assembly type rotating frame of a wafer spin dryer according to an embodiment of the present invention;
fig. 2 is a front view of a modular assembly type rotating frame of a wafer spin dryer according to an embodiment of the present invention;
fig. 3 is a top view of a modular assembly rotary frame of a wafer spin dryer according to an embodiment of the present invention.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 to 3, in the present embodiment, a modular assembly type spin dryer includes a circular base plate 1, four assembly frames 2 and a circular cover plate 3, the circular base plate 1 is connected to a spin-drying rotating shaft of the wafer spin dryer through a connecting member, the circular base plate 1 is provided with a plurality of connecting holes 4, the four assembly frames 2 are symmetrically arranged in a cross shape, bottom ends of the four assembly frames 2 can be detachably fixed on the circular base plate 1, and the size and the specification of each two symmetrically arranged assembly frames 2 are the same, so that the spin dryer can be suitable for spin-drying wafers of two specifications. The circular cover plate 3 can be detachably mounted on the top ends of the four assembly brackets 2, and a first avoiding hole 5 for taking and placing the sheet box frame is formed in the center of the circular cover plate 3.
Four assembly jig 2 all include a riser 20 and two curb plates 21, riser 20 and two curb plates 21 enclose into the space that is used for fitting the piece box holder, the connecting hole has all been seted up on four terminal surfaces of riser 20, the bottom and the top of riser 20 are fixed in circular chassis 1 and circular apron 3 through set screw ability dismouting respectively, the connecting hole has also all been seted up on four terminal surfaces of curb plate 21, the bottom and the top of curb plate 21 also can be fixed in circular chassis 1 and circular apron 3 through set screw ability dismouting respectively on, the outer end of curb plate 21 can be fixed in one side of riser 20 through set screw ability dismouting, breach 22 of "L" shape is seted up on other end upper portion, the shaft hole 23 that is used for assembling the piece box holder is seted up to the vertical edge of breach 22, two pivot at the both ends of piece box holder can be installed in the shaft hole 23 on two curb plates 21 of same assembly jig 2 with rotating.
The vertical plate 20 and the side plate 21 are both provided with a plurality of through holes 24, and the through holes 24 with different shapes or numbers are configured according to requirements, so that the functions of water leakage, weight reduction or balance adjustment can be achieved. The joints of the vertical plate 20 and the two side plates 21 are provided with second avoidance holes 25 for avoiding the limiting rods.
Two curb plates 21 of same assembly jig 2 pass through connecting screw with one of them curb plate 21 of adjacent assembly jig 2 and fix to connect four assembly jig 2 as a whole, improve its reliable and stable nature.
The modular assembly type design of the assembly jig 2 can replace vertical plates and side plates with different sizes as required to be suitable for different specification sheet box frames in order to assemble, and maintenance and repair of later-period equipment are facilitated.
The above embodiments have been merely illustrative of the basic principles and features of the present invention, and the present invention is not limited by the above embodiments, and does not depart from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A modularized assembling type rotating frame of a wafer spin dryer is characterized by comprising,
a circular chassis connected with a spin-drying rotating shaft of the wafer spin-drying machine,
an even number of assembling frames symmetrically fixed on the circular chassis, each assembling frame comprises a vertical plate and two side plates, the bottom ends of the vertical plate and the two side plates can be detachably fixed on the circular chassis, one end of each side plate can be detachably fixed on the inner side of the vertical plate at intervals, the other end of each side plate is provided with a shaft hole for assembling the sheet box frame,
the top ends of the vertical plate and the two side plates can be detachably fixed on the circular cover plate, and a first avoiding hole for taking and placing the sheet box frame is formed in the center of the circular cover plate.
2. The modular split mount spin frame of claim 1, wherein the vertical plate and two side plates are removably secured to the circular base plate by a plurality of attachment screws.
3. The modular split-mount spin frame of a wafer spin dryer of claim 1, wherein the ends of the two side plates are removably secured to the vertical plate by a plurality of attachment screws.
4. The modular split mount spin frame of claim 1, wherein the vertical plate and two side plates are removably secured to the circular cover plate by a plurality of attachment screws.
5. The modular assembly type rotating frame of the wafer drying machine as claimed in claim 1, wherein a plurality of through holes are formed on the vertical plate and the side plate.
6. The modular assembly type rotating frame of the wafer drying machine as claimed in claim 1, wherein the joints of the vertical plate and the two side plates are provided with second avoidance holes for avoiding the limiting rods.
7. The modular split-mount spin dryer spin frame of claim 1, wherein there are two mounting brackets, both having the same size and being symmetrically arranged about the center of the circular base plate.
8. The modular assembly type rotating frame of the wafer drying machine as claimed in claim 1, wherein four assembly frames are provided, the four assembly frames are symmetrically arranged in pairs at the center of the circular base plate, and two side plates of the same assembly frame are fixedly connected with one side plate of the adjacent assembly frame through connecting screws.
9. The modular segmented spin dryer spin frame of claim 8, wherein the four mounting brackets differ in size, wherein two symmetrically disposed mounting brackets have the same size.
10. A wafer dryer comprising a modular sectional spin stand of a wafer dryer as claimed in any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222360231.6U CN218565932U (en) | 2022-09-05 | 2022-09-05 | Modular assembly type rotating frame of wafer drying machine and wafer drying machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222360231.6U CN218565932U (en) | 2022-09-05 | 2022-09-05 | Modular assembly type rotating frame of wafer drying machine and wafer drying machine |
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| Publication Number | Publication Date |
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| CN218565932U true CN218565932U (en) | 2023-03-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222360231.6U Active CN218565932U (en) | 2022-09-05 | 2022-09-05 | Modular assembly type rotating frame of wafer drying machine and wafer drying machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116974141A (en) * | 2023-09-22 | 2023-10-31 | 贵州华龙电子设备有限公司 | Multi-specification wafer spin-drying device |
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2022
- 2022-09-05 CN CN202222360231.6U patent/CN218565932U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116974141A (en) * | 2023-09-22 | 2023-10-31 | 贵州华龙电子设备有限公司 | Multi-specification wafer spin-drying device |
| CN116974141B (en) * | 2023-09-22 | 2023-12-15 | 贵州华龙电子设备有限公司 | Multi-specification wafer spin-drying device |
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