CN214701486U

CN214701486U - Turnover mechanism and wafer drying machine

Info

Publication number: CN214701486U
Application number: CN202120355024.4U
Authority: CN
Inventors: 欧阳小泉
Original assignee: Quanxin Semiconductor Technology Wuxi Co ltd
Current assignee: Quanxin Semiconductor Technology Wuxi Co ltd
Priority date: 2021-02-09
Filing date: 2021-02-09
Publication date: 2021-11-12
Anticipated expiration: 2031-02-09

Abstract

The utility model discloses a tilting mechanism and wafer drier, this tilting mechanism includes assembly frame, the crystal boat box, actuating lever and upset drive arrangement, assembly frame is fixed in on the carousel terminal surface, and the outer end of crystal boat box can be installed in assembly frame through the articulated shaft with rotating, sets up link assembly between actuating lever and the articulated shaft, and upset drive arrangement sets up in the below of carousel, including driving actuating cylinder and ejector pin, the through-hole has been seted up on the carousel to the cooperation ejector pin, drives actuating cylinder drive ejector pin and goes up and down, and the ejector pin passes the through-hole and moves the actuating lever from low-order state to high-order state, and the actuating lever passes through link assembly and drives crystal boat box upset to opening up. The turnover mechanism and the wafer drying machine are compact in structure and ingenious in design; and realized the automatic upset to the brilliant boat box, be convenient for get and put the brilliant boat, use manpower sparingly, improved the efficiency that spin-dries, can not cause the pollution to the wafer.

Description

Turnover mechanism and wafer drying machine

Technical Field

The utility model belongs to wafer auxiliary processing equipment especially relates to a tilting mechanism and wafer drier.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be processed and manufactured on the silicon wafer to form electronic component products with specific electrical functions. As the size of the integrated circuit on the semiconductor wafer is developed to the micron level, the requirement for cleaning the semiconductor wafer in the manufacturing process is higher and higher, and particularly, the semiconductor wafer is polluted by dust particles and metal in the manufacturing process, which easily causes the damage of the circuit function in the wafer, the short circuit or the open circuit, and the like, thereby causing the failure of the integrated circuit and the formation of the geometric characteristics. Therefore, in the manufacturing process, in addition to the removal of external pollution sources, cleaning is also required to effectively remove impurities such as micro-dust, metal ions, and organic matters remaining on the wafer by using chemical solution or gas without damaging the surface characteristics and the electrical characteristics of the wafer.

The wet cleaning process is a commonly used cleaning process for wafers, the wafer needs to be dried after the cleaning process is completed, and the wafer drying machine is used for drying the surfaces of the wet wafers through rotation and drying. Horizontal dryers are relatively common dryers. At present, the existing horizontal spin dryer generally comprises a wafer boat for accommodating wafers, the wafer boat is placed in the wafer boat box, the wafer boat box needs to be manually turned before and after the wafer spin-drying treatment, so that the wafers are taken and placed, however, more manpower is wasted by manually turning the wafer boat box, the spin-drying efficiency is reduced, and the wafers are easily polluted.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a tilting mechanism to there is extravagant manpower, the inefficiency of spin-drying and easily causes the problem of pollution to the wafer in wafer spin-dryer adopts manual upset crystal boat box among the solution prior art.

An object of the utility model is to provide a wafer drier to there are extravagant manpower, the inefficiency of spin-drying and the problem that easily causes the pollution to the wafer in wafer drier among the solution prior art.

To achieve the purpose, the utility model adopts the following technical proposal:

a turnover mechanism, which comprises a turnover mechanism,

an assembly frame fixed on the end face of the turntable,

a wafer boat box, the outer end of which is rotatably installed in the assembly frame through a hinge shaft,

a connecting rod component is arranged between the driving rod and the articulated shaft,

the turnover driving device is arranged below the turntable and comprises a driving air cylinder and an ejector rod, a through hole is formed in the turntable by matching with the ejector rod, the driving air cylinder drives the ejector rod to lift, the ejector rod penetrates through the through hole to move the driving rod from a low position state to a high position state, the driving rod drives the wafer boat box to turn over for a certain angle through a connecting rod assembly,

when the driving rod is in a low position state, the opening of the wafer boat box faces inwards, and when the driving rod is in a high position state, the opening of the wafer boat box faces upwards.

As a further improvement of the scheme, the assembling frame frames are provided with an even number and symmetrically fixed on the end face of the rotary table by taking the center of the rotary table as a symmetrical point.

As a further improvement of the scheme, all the assembling frames are arranged at equal intervals along the circumferential direction of the turntable, and the specifications of all the assembling frames are the same.

As a further improvement of the scheme, all the assembling frames are arranged at equal intervals along the circumferential direction of the turntable and at least comprise assembling frames with two specifications, and the two mutually symmetrical assembling frames have the same specification.

As a further improvement of the scheme, the assembly frame is of a U-shaped structure as a whole, two hinge shafts extending outwards are fixed on the upper part of the outer end of the wafer boat box, the wafer boat box is hinged in the assembly frame through the two hinge shafts, and the driving rod is fixed on the lower part of the outer end of the wafer boat box.

As a further improvement of the scheme, vertical holes arranged along the height direction are correspondingly formed in the two side plates of the assembling frame, and the two ends of the driving rod penetrate through the vertical holes of the two side plates.

As a further improvement of the present scheme, a link assembly located in the assembly frame is arranged between one end of the driving rod and the hinge shaft located at the same side, the link assembly includes a driving link, one end of the driving link is fixed on the driving rod, the other end of the driving link is hinged on the outer side wall of the wafer boat box through a rotating pin shaft, and the rotating pin shaft is located on the inner side of the driving rod.

As a further improvement of this scheme, the carousel can assemble in a section of thick bamboo that spin-dries rotatoryly through the pivot, sealed top is installed on the top of ejector pin, spin-dry in the section of thick bamboo in the bobbin base with be provided with the round shrouding between the carousel, set up the through-hole that is used for the ejector pin to pass on the shrouding, the sealed top setting of through-hole cooperation on the carousel, it rises to high-order state from low-order state to drive the sealed top of cylinder drive, when being in low-order state the terminal surface that the shrouding is hugged closely to the bottom surface of sealed top will spin-dry a section of thick bamboo sealedly, when being in high-order state sealed top passes through the actuating lever and overturns crystal boat box to the opening up.

As a further improvement of the scheme, a positioning cylinder is arranged at the bottom of the spin-drying cylinder, a positioning roller is mounted at the driving end of the positioning cylinder, a positioning disc is coaxially connected to the rotating shaft, a plurality of positioning grooves are formed in the outer edge of the positioning disc at intervals, and the positioning cylinder drives the positioning roller to be clamped into the positioning grooves so that the sealing top corresponds to the through holes in the rotary disc.

A wafer drying machine comprises the turnover mechanism.

The beneficial effects of the utility model are that, compare with prior art the wafer drier has following advantage:

1) in the spin-drying process of the wafer, the wafer boat box is automatically turned over, the wafer boat is convenient to take and place, labor is saved, the spin-drying efficiency is improved, and the wafer cannot be polluted.

2) The whole structure is compact, the volume is small, and the design is ingenious;

3) simple structure and low manufacture cost.

Drawings

Fig. 1 is a schematic structural view of a wafer spin dryer according to an embodiment of the present invention;

fig. 2 is a schematic perspective view of a turnover mechanism of a wafer spin dryer according to an embodiment of the present invention;

fig. 3 is a side view of a turnover mechanism of a wafer spin dryer according to an embodiment of the present invention;

fig. 4 is a top view of a turnover mechanism of a wafer spin dryer according to an embodiment of the present invention.

Fig. 5 is a partially enlarged view of a portion a in fig. 4.

Detailed Description

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. The preferred embodiments of the present invention are shown in the drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Referring to fig. 1 to 5, in the embodiment, a wafer spin dryer includes a frame 1, a rotating disc 2 and a spin dryer tube 3, the spin dryer tube 3 is assembled in the frame 1, the rotating disc 2 is rotatably assembled in the spin dryer tube 3 through a rotating shaft 4, a rotating motor 5 is disposed below the spin dryer tube 3 and drives the rotating shaft 4 to rotate through a transmission belt pulley and a transmission belt, four assembly frames 6 are fixed on the same circumference of an end surface of the rotating disc 2 at equal intervals, the four assembly frames 6 are integrally U-shaped and include two large-sized frames and two small-sized frames, wherein the two large-sized frames are symmetrically arranged with the center of the rotating disc 2 as a symmetric point, and the two small-sized frames are symmetrically arranged with the center of the rotating disc 2 as a symmetric point, so as to ensure the rotating balance of the rotating disc 2.

Every assembly frame 6 is equipped with the crystal boat box 7 with all can overturning, the outer end upper portion of crystal boat box 7 is fixed with two articulated shafts 8 that extend outward, articulate crystal boat box 7 in assembly frame 6 through two articulated shafts 8, the outer end lower part of crystal boat box 7 is fixed with the actuating lever 9 of arranging along assembly frame 6 width direction, vertical hole 10 of arranging along the direction of height is seted up to correspondence on two curb plates of assembly frame 6, the vertical hole 10 setting that two curb plates were passed at the both ends of actuating lever 9, carry out spacing and direction through vertical hole 10 to the removal of actuating lever 9, the one end of actuating lever 9 is fixed with the drive connecting rod 11 that is located assembly frame 6, the drive connecting rod 11 other end passes through swivel pin 12 and articulates on the lateral wall of crystal boat box 7, swivel pin 12 is located the inboard of actuating lever 11.

The vertical below of a spin-drying cylinder 3 of installing drives actuating cylinder 13, and the piston rod that drives actuating cylinder 13 sets up and its end connection has ejector pin 14, and rubber sealing top 15 is installed on the top of ejector pin 14, is provided with round shrouding 16 in a spin-drying cylinder 3 between bobbin base and carousel 2, corresponds on shrouding 16 and the bobbin base of a spin-drying cylinder 3 and offers the through-hole that is used for the actuating lever to pass through, and the jack-up through-hole 17 has been seted up on carousel 2 to cooperation rubber sealing top 15.

The bottom of the spin-drying barrel 3 is provided with a positioning mechanism used for enabling the rubber sealing top 15 to correspond to the jacking through hole 17 before and after the wafer spin-drying treatment, the positioning mechanism comprises a positioning disc 18, a positioning air cylinder 19 and a positioning roller 20, the positioning disc 18 is coaxially connected with the rotating shaft 4, a plurality of positioning grooves 21 are arranged on the outer edge of the positioning disc 18 at equal intervals, the positioning air cylinder 19 is arranged on one side of the positioning disc 18, and the end part of a piston rod of the positioning air cylinder 19 is provided with the positioning roller 20 which can be clamped into the positioning grooves 21.

Before and after the wafer is dried, the positioning cylinder 19 extends out of the driving positioning roller 20 and is clamped into the positioning groove 21, the positioning disc 18 drives the rotating shaft 4 to rotate for a certain angle, so that the rubber sealing top 15 corresponds to the jacking through hole 17, the driving cylinder 13 drives the rubber sealing top 15 to ascend from a low position state to a high position state, the rubber sealing top 15 drives the driving rod 9 to move upwards along the vertical hole 10, in the process that the driving rod 9 moves upwards, the wafer boat box 7 is overturned outwards through the driving connecting rod 11 until the opening of the wafer boat box is upwards, and it needs to be explained that the bottom surface of the rubber sealing top 15 is tightly attached to the end surface of the sealing plate 16 when the rubber sealing top 15 is in the low position state, so that the inside of the drying cylinder 3 is sealed.

The above embodiments have been merely illustrative of the basic principles and features of the present invention, and the present invention is not limited by the above embodiments, and does not depart from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A turnover mechanism is characterized in that the turnover mechanism comprises,

an assembly frame fixed on the end face of the turntable,

2. The turnover mechanism of claim 1, wherein the assembly frame is provided with an even number and symmetrically fixed on the end face of the turntable with the center of the turntable as a symmetrical point.

3. The turnover mechanism of claim 2, wherein all the assembly frames are arranged at equal intervals in the circumferential direction of the turntable, and the specifications of all the assembly frames are the same.

4. The turnover mechanism of claim 2, wherein all the assembly frames are arranged at equal intervals along the circumferential direction of the turntable, and at least two types of assembly frames are included, and the two types of assembly frames symmetrical to each other have the same specification.

5. The turnover mechanism of claim 1, wherein the assembly frame is formed in a U-shaped structure, two hinge shafts extending outward are fixed to an upper portion of an outer end of the boat box, the boat box is hinged into the assembly frame by the two hinge shafts, and the driving lever is fixed to a lower portion of the outer end of the boat box.

6. The turnover mechanism of claim 5, wherein the two side plates of the assembly frame are correspondingly provided with vertical holes arranged along the height direction, and two ends of the driving rod are arranged through the vertical holes of the two side plates.

7. The turnover mechanism of claim 5, wherein a link assembly is disposed between one end of the driving rod and the hinge shaft on the same side, and the link assembly comprises a driving link, one end of the driving link is fixed on the driving rod, and the other end of the driving link is hinged to the outer sidewall of the pod through a rotating pin shaft, and the rotating pin shaft is located on the inner side of the driving rod.

8. The turnover mechanism of claim 1, wherein the rotary plate is rotatably mounted in a spin-drying cylinder through a rotary shaft, a sealing top is mounted at the top end of the ejector rod, a ring of sealing plate is arranged between the bottom of the spin-drying cylinder and the rotary plate, the sealing plate is provided with a through hole for the ejector rod to pass through, the through hole on the rotary plate is matched with the sealing top, the driving cylinder drives the sealing top to ascend from a low position to a high position, the bottom surface of the sealing top clings to the end surface of the sealing plate to seal the spin-drying cylinder in the low position, and the sealing top overturns the wafer boat box to an upward opening through the driving rod in the high position.

9. The turnover mechanism as claimed in claim 8, wherein the spin dryer tube is provided at a bottom thereof with a positioning cylinder, a positioning roller is mounted at a driving end of the positioning cylinder, a positioning plate is coaxially connected to the rotating shaft, a plurality of positioning grooves are formed at intervals on an outer edge of the positioning plate, and the positioning cylinder drives the positioning roller to be clamped into the positioning grooves so that the sealing top corresponds to the through hole on the rotating plate.

10. A wafer spin dryer comprising a turnover mechanism as claimed in any one of claims 1 to 9.