CN212136404U - 一种整体式硅片承载盘 - Google Patents
一种整体式硅片承载盘 Download PDFInfo
- Publication number
- CN212136404U CN212136404U CN202020985671.9U CN202020985671U CN212136404U CN 212136404 U CN212136404 U CN 212136404U CN 202020985671 U CN202020985671 U CN 202020985671U CN 212136404 U CN212136404 U CN 212136404U
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- silicon wafer
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- body plate
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 100
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 96
- 239000010703 silicon Substances 0.000 title claims abstract description 96
- 235000012431 wafers Nutrition 0.000 claims abstract description 87
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- 239000007770 graphite material Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000007888 film coating Substances 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- 239000003351 stiffener Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202020985671.9U CN212136404U (zh) | 2020-06-02 | 2020-06-02 | 一种整体式硅片承载盘 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202020985671.9U CN212136404U (zh) | 2020-06-02 | 2020-06-02 | 一种整体式硅片承载盘 |
Publications (1)
Publication Number | Publication Date |
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CN212136404U true CN212136404U (zh) | 2020-12-11 |
Family
ID=73670665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202020985671.9U Active CN212136404U (zh) | 2020-06-02 | 2020-06-02 | 一种整体式硅片承载盘 |
Country Status (1)
Country | Link |
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CN (1) | CN212136404U (zh) |
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2020
- 2020-06-02 CN CN202020985671.9U patent/CN212136404U/zh active Active
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211223 Address after: A5, Dongjiu (Nantong) zhizaoyuan, 1199 Bihua Road, Tongzhou District, Nantong City, Jiangsu Province, 226300 Patentee after: Nantong Jiufang New Material Technology Co.,Ltd. Address before: 518102 6C, block 2, building 1, Dayi Plaza, Xixiang, Bao'an District, Shenzhen, Guangdong Province Patentee before: Li Bixiang |
|
TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: A5 Dongjiu (Nantong) Zhizao Park, No. 1199 Bihua Road, Nantong High tech Zone, Nantong City, Jiangsu Province, 226000 Patentee after: Nantong Jiufang New Materials Co.,Ltd. Country or region after: China Address before: A5, Dongjiu (Nantong) zhizaoyuan, 1199 Bihua Road, Tongzhou District, Nantong City, Jiangsu Province, 226300 Patentee before: Nantong Jiufang New Material Technology Co.,Ltd. Country or region before: China |
|
CP03 | Change of name, title or address |