CN209963035U - 一种硅片承载盘及硅片承载装置 - Google Patents
一种硅片承载盘及硅片承载装置 Download PDFInfo
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- CN209963035U CN209963035U CN201921018935.7U CN201921018935U CN209963035U CN 209963035 U CN209963035 U CN 209963035U CN 201921018935 U CN201921018935 U CN 201921018935U CN 209963035 U CN209963035 U CN 209963035U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 157
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 157
- 239000010703 silicon Substances 0.000 title claims abstract description 157
- 235000012431 wafers Nutrition 0.000 claims abstract description 128
- 238000003860 storage Methods 0.000 claims abstract description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 11
- 239000010439 graphite Substances 0.000 claims abstract description 11
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 239000002131 composite material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 239000007888 film coating Substances 0.000 description 4
- 238000009501 film coating Methods 0.000 description 4
- 239000011247 coating layer Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Application Number | Priority Date | Filing Date | Title |
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CN201921018935.7U CN209963035U (zh) | 2019-07-01 | 2019-07-01 | 一种硅片承载盘及硅片承载装置 |
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CN201921018935.7U CN209963035U (zh) | 2019-07-01 | 2019-07-01 | 一种硅片承载盘及硅片承载装置 |
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CN209963035U true CN209963035U (zh) | 2020-01-17 |
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CN201921018935.7U Active CN209963035U (zh) | 2019-07-01 | 2019-07-01 | 一种硅片承载盘及硅片承载装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111477576A (zh) * | 2020-06-02 | 2020-07-31 | 深圳市石金科技股份有限公司 | 一种改进型承载盘及承载装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111477576A (zh) * | 2020-06-02 | 2020-07-31 | 深圳市石金科技股份有限公司 | 一种改进型承载盘及承载装置 |
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Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200907 Address after: Room 6C, block 2, building 1, Dayi Plaza, Xixiang, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Li Bixiang Address before: Baoan District Songgang street, Shenzhen city 518105 Guangdong province with rich industrial zone safety run road No. 2 Patentee before: SHENZHEN GOLD STONE TECHNOLOGY Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211221 Address after: A5, Dongjiu (Nantong) zhizaoyuan, 1199 Bihua Road, Tongzhou District, Nantong City, Jiangsu Province, 226300 Patentee after: Nantong Jiufang New Material Technology Co.,Ltd. Address before: 518102 6C, block 2, building 1, Dayi Plaza, Xixiang, Bao'an District, Shenzhen, Guangdong Province Patentee before: Li Bixiang |
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CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: A5 Dongjiu (Nantong) Zhizao Park, No. 1199 Bihua Road, Nantong High tech Zone, Nantong City, Jiangsu Province, 226000 Patentee after: Nantong Jiufang New Materials Co.,Ltd. Country or region after: China Address before: A5, Dongjiu (Nantong) zhizaoyuan, 1199 Bihua Road, Tongzhou District, Nantong City, Jiangsu Province, 226300 Patentee before: Nantong Jiufang New Material Technology Co.,Ltd. Country or region before: China |