CN207512253U - 蒸镀用掩模板及掩模板组件 - Google Patents
蒸镀用掩模板及掩模板组件 Download PDFInfo
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- CN207512253U CN207512253U CN201721219936.9U CN201721219936U CN207512253U CN 207512253 U CN207512253 U CN 207512253U CN 201721219936 U CN201721219936 U CN 201721219936U CN 207512253 U CN207512253 U CN 207512253U
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- CN
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- Prior art keywords
- mask plate
- vapor deposition
- hole
- aperture
- evaporation
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001704 evaporation Methods 0.000 title claims abstract description 66
- 230000008020 evaporation Effects 0.000 title claims abstract description 66
- 238000007740 vapor deposition Methods 0.000 claims abstract description 63
- 239000000463 material Substances 0.000 claims abstract description 36
- 229910000861 Mg alloy Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 13
- 238000000151 deposition Methods 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 30
- 239000000758 substrate Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 6
- 238000003466 welding Methods 0.000 description 6
- 238000005019 vapor deposition process Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 238000010025 steaming Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201721219936.9U CN207512253U (zh) | 2017-09-21 | 2017-09-21 | 蒸镀用掩模板及掩模板组件 |
Applications Claiming Priority (1)
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CN201721219936.9U CN207512253U (zh) | 2017-09-21 | 2017-09-21 | 蒸镀用掩模板及掩模板组件 |
Publications (1)
Publication Number | Publication Date |
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CN207512253U true CN207512253U (zh) | 2018-06-19 |
Family
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CN201721219936.9U Active CN207512253U (zh) | 2017-09-21 | 2017-09-21 | 蒸镀用掩模板及掩模板组件 |
Country Status (1)
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CN (1) | CN207512253U (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108546913A (zh) * | 2018-05-03 | 2018-09-18 | 京东方科技集团股份有限公司 | 一种掩膜板及其制备方法 |
CN109576648A (zh) * | 2018-12-29 | 2019-04-05 | 福建华佳彩有限公司 | 一种防着板 |
CN110453181A (zh) * | 2019-08-08 | 2019-11-15 | 深圳市华星光电半导体显示技术有限公司 | 蒸镀设备及其防着板 |
CN110729414A (zh) * | 2019-09-29 | 2020-01-24 | 武汉华星光电半导体显示技术有限公司 | 一种显示面板及显示面板制程方法 |
CN112921365A (zh) * | 2020-12-07 | 2021-06-08 | 达运精密工业股份有限公司 | 金属遮罩的制造方法 |
-
2017
- 2017-09-21 CN CN201721219936.9U patent/CN207512253U/zh active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108546913A (zh) * | 2018-05-03 | 2018-09-18 | 京东方科技集团股份有限公司 | 一种掩膜板及其制备方法 |
CN109576648A (zh) * | 2018-12-29 | 2019-04-05 | 福建华佳彩有限公司 | 一种防着板 |
CN110453181A (zh) * | 2019-08-08 | 2019-11-15 | 深圳市华星光电半导体显示技术有限公司 | 蒸镀设备及其防着板 |
CN110729414A (zh) * | 2019-09-29 | 2020-01-24 | 武汉华星光电半导体显示技术有限公司 | 一种显示面板及显示面板制程方法 |
CN110729414B (zh) * | 2019-09-29 | 2022-01-25 | 武汉华星光电半导体显示技术有限公司 | 一种显示面板及显示面板制程方法 |
CN112921365A (zh) * | 2020-12-07 | 2021-06-08 | 达运精密工业股份有限公司 | 金属遮罩的制造方法 |
CN112921365B (zh) * | 2020-12-07 | 2023-09-19 | 达运精密工业股份有限公司 | 金属遮罩的制造方法 |
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Legal Events
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200401 Address after: 518000 Rouyu international flexible display base, No.18 dingshanhe Road, Pingdi street, Longgang District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN ROYOLE DISPLAY TECHNOLOGY Co.,Ltd. Address before: 518115 43 Universiade Software Town, 8288 Longgang Avenue, Henggang Street, Longgang District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN ROYOLE TECHNOLOGIES Co.,Ltd. |
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TR01 | Transfer of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Mask plate and mask assembly for evaporation and plating Effective date of registration: 20201020 Granted publication date: 20180619 Pledgee: CITIC Bank Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN ROYOLE DISPLAY TECHNOLOGY Co.,Ltd. Registration number: Y2020980006952 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PP01 | Preservation of patent right |
Effective date of registration: 20240123 Granted publication date: 20180619 |
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