CN207381369U - 基板处理装置 - Google Patents

基板处理装置 Download PDF

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Publication number
CN207381369U
CN207381369U CN201721008841.2U CN201721008841U CN207381369U CN 207381369 U CN207381369 U CN 207381369U CN 201721008841 U CN201721008841 U CN 201721008841U CN 207381369 U CN207381369 U CN 207381369U
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substrate
mouth
chamber
board treatment
electro
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Chinese (zh)
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富藤幸雄
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
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CN201721008841.2U 2016-08-18 2017-08-11 基板处理装置 Active CN207381369U (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016160441A JP6808395B2 (ja) 2016-08-18 2016-08-18 基板処理装置
JP2016-160441 2016-08-18

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CN207381369U true CN207381369U (zh) 2018-05-18

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CN201721008841.2U Active CN207381369U (zh) 2016-08-18 2017-08-11 基板处理装置

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JP (1) JP6808395B2 (ja)
CN (1) CN207381369U (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6953375B2 (ja) * 2018-09-25 2021-10-27 ミズノ テクニクス株式会社 筒状体の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3442253B2 (ja) * 1997-03-13 2003-09-02 東京エレクトロン株式会社 基板処理装置
JP3854757B2 (ja) * 1999-08-20 2006-12-06 東京エレクトロン株式会社 基板処理装置
JP5810929B2 (ja) * 2012-01-13 2015-11-11 シンフォニアテクノロジー株式会社 ウェーハ搬送装置

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JP2018029130A (ja) 2018-02-22
JP6808395B2 (ja) 2021-01-06

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