CN207199566U - A kind of novel electron back scattering diffraction tests and analyzes sample stage - Google Patents
A kind of novel electron back scattering diffraction tests and analyzes sample stage Download PDFInfo
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- CN207199566U CN207199566U CN201721057995.0U CN201721057995U CN207199566U CN 207199566 U CN207199566 U CN 207199566U CN 201721057995 U CN201721057995 U CN 201721057995U CN 207199566 U CN207199566 U CN 207199566U
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Abstract
A kind of novel electron back scattering diffraction tests and analyzes sample stage, belongs to microstructure detection and analysis field.The utility model solves the problems, such as that a variety of different samples carry out EBSD efficient analysis.The utility model is made up of base, pillar and screw, and its B-C post includes conventional type, neck type, adjustment type three types, can meet that different samples realize installation and detection simultaneously.The utility model advantage is that pillar can be assembled by screw with base, dismantled, base can once dispose multiple pillars, it is more that single is put into the sample size detected in electron microscopic sample room, realize simultaneously and EBSD analyses are carried out to a variety of different samples, it will not be interfered between sample and sample during detection, it is simple to operate, practical, avoid switch scanning electron microscopic sample room repeatedly and pick and place sample, the obvious more efficient, energy-conservation compared with traditional EBSD tests and analyzes sample stage.
Description
Technical field
A kind of microstructure detection and analysis aid is the utility model is related to, particularly belongs to a kind of EBSD detection and analysis sample
Sample platform.
Background technology
EBSD（EBSD）Technology is to be based on electron beam in ESEM to excite simultaneously shape in inclination sample surfaces
Into diffraction Kikuchi band analysis so that it is determined that the method for crystal structure, orientation and relevant information.EBSD analytical technologies are wide at present
It is general to be applied to various crystal material fields, solve during crystallization, film preparation, deformation, recrystallization, phase transformation, corrosion etc.
Problem, our full appreciation material preparation process mechanism and essence can be helped.
Its sightingpiston and horizontal plane need to be ensured by being generally placed in the sample of progress EBSD detection and analysis in scanning electron microscope example room
In 70 ° of overturning angles（Or with SEM electron beams it is in 20 ° of angles）, obtained enough by reducing the path on backscattered electron injection surface
Strong back scattering diffraction signal, reduce absorption signal.For the ease of operation, we directly paste solid generally by sample to be detected
Progress EBSD analyses on sample stage are scheduled on, sample stage structure design is as shown in Figure 11.It can be seen that this biography from accompanying drawing 11
The area size that the sample stage of system pastes fixed sample is very limited, is only limitted to the inclined plane region at top, therefore single is tested
Sample number it is also extremely limited, changing sample needs switch scanning electron microscopic sample room and vavuum pump repeatedly, loses time and consumes
Power.
In addition, this traditional EBSD sample stages are to sample（Or fixture）Size require it is very strict, be not easy too
Greatly, height of specimen general control is in the range of 10mm, if sample size is excessive, is easily touched with electron gun and EBSD probes
Hit, equipment is caused to damage, potential safety hazard be present.Obviously sample can not be put other two kinds of sizes difference simultaneously
Enter, the difference of height of specimen easily interferes, and influences to test and analyze.
Utility model content
The purpose of this utility model is to provide a kind of EBSD detection and analysis sample stage, can realized simultaneously to a variety of not same
Product carry out EBSD efficient analysis, and the sample number that single is put into scanning electron microscope example room is more, and realize according to sample size height
Degree carries out sample stage and highly adjusted.
Realize the technical measures of above-mentioned purpose：
A kind of novel electron back scattering diffraction tests and analyzes sample stage, and sample stage includes base, pillar；Base front surface carries
One or more circular holes；
There is a cylinder projection described pillar bottom, at cylinder projection inserted base circular hole；
Respectively there is an inclined-plane described pillar upper end both sides.
Described pillar inclined-plane is provided with neck, and the screw for fixing sample is provided with neck.
One or more connectors for being used to increase strut height are installed between pillar and the cylinder projection.
Described base side carries the screwed hole communicated with circular hole；Described pillar is assembled by screw with base, torn open
Unload.
Described base end face carries Fixing clamp-seat.
The side inclined-plane of described pillar upper end and the angle of horizontal plane are 70 °；Another skew back of described pillar upper end
The angle of face and horizontal plane is 20 °.
The characteristics of the utility model, is that base, pillar and screw are made by nonmagnetic metal or alloy, as aluminium alloy,
Copper alloy, titanium alloy, magnesium alloy, magnetism-free stainless steel etc., preferred aluminium alloy and copper alloy, easy processing shaping, electric conductivity are well, again
Amount is light.Base approximation patty, front carry circular hole, and side carries the screwed hole communicated therewith.Base end face is carried and closed by copper
The Fixing clamp-seat of metalworking, for being fixed in scanning electron microscope example room.
The characteristics of the utility model, in the circular hole in pillar placement base front surface, spiral shell was tightened from the screwed hole of base side
Pillar is fixed nail, ensures that pillar and sample are stable and firm during detection.
The characteristics of the utility model, is that the base last time can dispose multiple pillars, while realizes to enter a variety of different samples
Row EBSD is tested and analyzed, and the sample size of single detection is more.
The characteristics of the utility model, is the structure design variation of copper alloy pillar, mainly has（a）Conventional type,（b）Card
Groove profile,（c）Adjustment type etc..（a）Conventional t shore is similar to traditional EBSD sample stages, sample similar in Pasting size.
（b）Neck t shore is mainly used in solid shape irregularly or is difficult to the sample by conductive glue, is carried on pillar neck
Screw, available for fixing sample.（c）Regulation t shore can be adjusted according to the height of sample by increasing or decreasing connector
The height of sample stage, operation adjustment sample is more beneficial for, ensures not send out with electron gun and EBSD probes when EBSD tests and analyzes
Raw frictional impact, can play a part of protection to equipment.
The utility model sample stage advantage is that multiple pillars can be put into simultaneously, can be achieved to a variety of different sample detections point
Analysis, the sample number that single is put into scanning electron microscope example room is more, simple to operate, practical, during detection between sample and sample not
It can interfere.Compared with traditional EBSD test specimens sample platform, test analysis efficiency can be greatly improved, the time is saved, reduces loss.
Brief description of the drawings
Fig. 1 is base vertical view；
Fig. 2 is base upward view；7 be Fixing clamp-seat；
Fig. 3 is base side view；
Fig. 4 is conventional t shore front schematic view；
Fig. 5 is conventional t shore side schematic view；
Fig. 6 is neck t shore front schematic view；
Fig. 7 is neck t shore side schematic view；
Fig. 8 is regulation t shore schematic diagram；
Fig. 9 is new sample stage overall structure side schematic view；
Figure 10 is new sample stage overall structure top view；
1st, base, 2, regulation t shore, 3, conventional t shore, 4, neck t shore, 5, screwed hole, 6, circular hole；
Figure 11 is that traditional EBSD tests and analyzes sample stage schematic diagram.
Embodiment
New E BSD detection and analysis sample stages are described further below in conjunction with the accompanying drawings：
Embodiment one：
A kind of novel electron back scattering diffraction tests and analyzes sample stage, and sample stage includes base, pillar；Base front surface carries
3 circular holes；
Have at corresponding 3 circular holes of 3 pillar inserted bases；
Respectively there is an inclined-plane described pillar upper end both sides.The described side inclined-plane of pillar upper end and the angle of horizontal plane
For 70 °；The opposite side inclined-plane of described pillar upper end and the angle of horizontal plane are 20 °.
The pillar that pillar inclined-plane is provided with neck is inserted with one of circular hole, is provided with neck for fixing sample
Screw.
The pillar of the connector for increasing strut height is inserted with other in which circular hole, to improve the height of analysis station
Degree.
Described base side carries the screwed hole communicated with circular hole；Described pillar is assembled by screw with base, torn open
Unload.
Described base end face carries Fixing clamp-seat.
Embodiment two：
A kind of novel electron back scattering diffraction tests and analyzes sample stage, and sample stage includes base, pillar；Base front surface carries
5 circular holes；
There are 2 prop liners wherein at 2 circular holes；
Respectively there is an inclined-plane described pillar upper end both sides.The described side inclined-plane of pillar upper end and the angle of horizontal plane
For 70 °；The opposite side inclined-plane of described pillar upper end and the angle of horizontal plane are 20 °.
The pillar that pillar inclined-plane is provided with neck is inserted with one of circular hole, is provided with neck for fixing sample
Screw.
Described base side carries the screwed hole communicated with circular hole；Described pillar is assembled by screw with base, torn open
Unload.
Embodiment three：
Embodiment one：
A kind of novel electron back scattering diffraction tests and analyzes sample stage, and sample stage includes base, pillar；Base front surface carries
8 circular holes；
Have at corresponding 8 circular holes of 8 pillar inserted bases；
Respectively there is an inclined-plane described pillar upper end both sides.The described side inclined-plane of pillar upper end and the angle of horizontal plane
For 70 °；The opposite side inclined-plane of described pillar upper end and the angle of horizontal plane are 20 °.
Wherein have and the pillar that pillar inclined-plane is provided with neck is inserted with 3 circular holes, be provided with neck for fixing sample
Screw.
The pillar of the connector for increasing strut height is inserted with wherein another 3 circular holes, to improve the height of analysis station.
Described base side carries the screwed hole communicated with circular hole；Described pillar is assembled by screw with base, torn open
Unload.
A kind of novel electron back scattering diffraction（EBSD）Detection and analysis sample stage is made up of base, pillar, screw.According to sample
The size and shape of product select suitable pillar, and the sample being pasted onto on pillar need to ensure that it observes detection faces（Inclined-plane）With
Horizontal plane is in 70 ° of angles（Or with SEM electron beams it is in 20 ° of angles）, then pillar is placed in base front surface circular hole, from side spiral shell
Screw is tightened in pit and fixes pillar.If any the sample that other need to be detected, it can be pasted according to above-mentioned steps and be fixed on pillar,
Dispose in other circular holes of base, until all circular hole whole mounting columns of base.
The base for installing pillar is put into ESEM, is fixed on sample stage base by the neck of base end face
In ESEM, vacuum, on-load voltage, EBSD tests then can be loaded.Can be fixed by rotating when detecting multiple samples
Base comes the direction of swinging strut, adjusts the position of other samples, carries out EBSD detection and analysis.Therefore, the utility model EBSD
Detection and analysis sample stage can be realized simultaneously directly under vacuum, condition of high voltage carries out EBSD tests to multiple samples, simple to operate,
Practicality, reduce and repeat loading vacuum（Unload vacuum）, loading（Unloading）The number of voltage, significantly shorten debugging time, and
Reduce loss.The utility model sample stage is substantially with higher EBSD detections point compared with traditional EBSD tests and analyzes sample stage
The efficiency of analysis.
Claims (6)
1. a kind of novel electron back scattering diffraction tests and analyzes sample stage, it is characterised in that：Sample stage includes base, pillar；Bottom
Seat front carries one or more circular holes；
There is a cylinder projection described pillar bottom, at cylinder projection inserted base circular hole；
Respectively there is an inclined-plane described pillar upper end both sides.
2. analysis sample stage as claimed in claim 1, it is characterised in that：Described pillar inclined-plane is provided with neck, on neck
Screw for fixing sample is installed.
3. analysis sample stage as claimed in claim 1 or 2, it is characterised in that：Installed between pillar and the cylinder projection
There are one or more connectors for being used to increase strut height.
4. analysis sample stage as claimed in claim 1 or 2, it is characterised in that：Described base side is carried and communicated with circular hole
Screwed hole；Described pillar is assembled by screw with base, dismantled.
5. analysis sample stage as claimed in claim 1 or 2, it is characterised in that：Described base end face carries Fixing clamp-seat.
6. analysis sample stage as claimed in claim 1 or 2, it is characterised in that：The side inclined-plane and water of described pillar upper end
The angle of plane is 70 °；The opposite side inclined-plane of described pillar upper end and the angle of horizontal plane are 20 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721057995.0U CN207199566U (en) | 2017-08-23 | 2017-08-23 | A kind of novel electron back scattering diffraction tests and analyzes sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721057995.0U CN207199566U (en) | 2017-08-23 | 2017-08-23 | A kind of novel electron back scattering diffraction tests and analyzes sample stage |
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| Publication Number | Publication Date |
|---|---|
| CN207199566U true CN207199566U (en) | 2018-04-06 |
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ID=61794523
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| Application Number | Title | Priority Date | Filing Date |
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| CN201721057995.0U Expired - Fee Related CN207199566U (en) | 2017-08-23 | 2017-08-23 | A kind of novel electron back scattering diffraction tests and analyzes sample stage |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111812134A (en) * | 2020-07-21 | 2020-10-23 | 山东省分析测试中心 | Detection table for obtaining cladding metal three-dimensional organization information and operation method thereof |
| CN113390907A (en) * | 2021-06-17 | 2021-09-14 | 西北工业大学 | Sample stage for electron back scattering diffraction |
-
2017
- 2017-08-23 CN CN201721057995.0U patent/CN207199566U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111812134A (en) * | 2020-07-21 | 2020-10-23 | 山东省分析测试中心 | Detection table for obtaining cladding metal three-dimensional organization information and operation method thereof |
| CN111812134B (en) * | 2020-07-21 | 2023-07-21 | 山东省分析测试中心 | Detection table for acquiring three-dimensional tissue information of cladding metal and operation method thereof |
| CN113390907A (en) * | 2021-06-17 | 2021-09-14 | 西北工业大学 | Sample stage for electron back scattering diffraction |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180406 Termination date: 20210823 |
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| CF01 | Termination of patent right due to non-payment of annual fee |